{"id":2360,"date":"2026-04-22T07:08:49","date_gmt":"2026-04-22T07:08:49","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2360"},"modified":"2026-04-22T07:13:29","modified_gmt":"2026-04-22T07:13:29","slug":"ai350ht-medium-beam-high-temperature-ion-implantation-system-for-6-8-inch-sic-and-silicon-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/ai350ht-medium-beam-high-temperature-ion-implantation-system-for-6-8-inch-sic-and-silicon-wafer-processing\/","title":{"rendered":"Ai350HT 6\/8\u30a4\u30f3\u30c1SiC\u304a\u3088\u3073\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u7528\u4e2d\u30d3\u30fc\u30e0\u9ad8\u6e29\u30a4\u30aa\u30f3\u6ce8\u5165\u30b7\u30b9\u30c6\u30e0"},"content":{"rendered":"

\"Ai350HTAi350HT\uff08\u30df\u30c7\u30a3\u30a2\u30e0\u30d3\u30fc\u30e0\uff09\u9ad8\u6e29\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306f\u30016\u30a4\u30f3\u30c1\u304a\u3088\u30738\u30a4\u30f3\u30c1\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u534a\u5c0e\u4f53\u88fd\u9020\u30e9\u30a4\u30f3\u3001\u304a\u3088\u3073SiC\u30d7\u30ed\u30bb\u30b9\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5411\u3051\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u9ad8\u6e29\u30c9\u30fc\u30d4\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u7528\u306b\u958b\u767a\u3055\u308c\u305f\u4e2d\u96fb\u6d41\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u3067\u3059\u3002.<\/p>\n

5keV\u304b\u3089350keV\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc4\u56f2\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u6d45\u3044\u6ce8\u5165\u3068\u6df1\u3044\u6ce8\u5165\u306e\u4e21\u65b9\u306e\u30d7\u30ed\u30bb\u30b9\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002500\u2103\u307e\u3067\u52d5\u4f5c\u53ef\u80fd\u306a\u9ad8\u6e29\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u3092\u88c5\u5099\u3057\u3066\u304a\u308a\u3001\u30c9\u30fc\u30d1\u30f3\u30c8\u306e\u6d3b\u6027\u5316\u3092\u5411\u4e0a\u3055\u305b\u3001\u6ce8\u5165\u6642\u306e\u683c\u5b50\u640d\u50b7\u3092\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u5b89\u5b9a\u3057\u305f\u30d3\u30fc\u30e0\u6027\u80fd\u3068\u9ad8\u7cbe\u5ea6\u5236\u5fa1\u3092\u517c\u306d\u5099\u3048\u305f\u672c\u88c5\u7f6e\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30d9\u30fc\u30b9\u304a\u3088\u3073\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\n

\u7279\u5fb4<\/h2>\n

\u9ad8\u6e29\u79fb\u690d\u80fd\u529b<\/h3>\n

500\u2103\u307e\u3067\u5bfe\u5fdc\u53ef\u80fd\u306a\u9ad8\u6e29\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u3092\u5099\u3048\u3001\u5148\u7aef\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u6ce8\u5165\u52b9\u7387\u306e\u5411\u4e0a\u3068\u30c9\u30fc\u30d1\u30f3\u30c8\u306e\u6d3b\u6027\u5316\u3092\u5b9f\u73fe\u3002.<\/p>\n

\u5e83\u3044\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc4\u56f2<\/h3>\n

5\uff5e350keV\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc4\u56f2\u306f\u3001\u6d45\u3044\u63a5\u5408\u5f62\u6210\u304b\u3089\u6df1\u3044\u6ce8\u5165\u30d7\u30ed\u30bb\u30b9\u307e\u3067\u3001\u67d4\u8edf\u306a\u6ce8\u5165\u8981\u4ef6\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059\u3002.<\/p>\n

\u9ad8\u7cbe\u5ea6\u30d3\u30fc\u30e0\u5236\u5fa1<\/h3>\n

\u89d2\u5ea6\u7cbe\u5ea6\u22640.2\u00b0\u3001\u30d3\u30fc\u30e0\u5e73\u884c\u5ea6\u22640.2\u00b0\u3001\u5747\u4e00\u6027\u22640.5%\u3001\u518d\u73fe\u6027\u22640.5%\u306e\u6b63\u78ba\u306a\u6ce8\u5165\u6027\u80fd\u3092\u63d0\u4f9b\u3002.<\/p>\n

\u5b89\u5b9a\u3057\u305f\u30d3\u30fc\u30e0\u6027\u80fd<\/h3>\n

\u30d3\u30fc\u30e0\u306e\u5b89\u5b9a\u6027\u306f\u6bce\u664210%\u4ee5\u5185\u306b\u5236\u5fa1\u3055\u308c\u3001\u9577\u3044\u751f\u7523\u30b5\u30a4\u30af\u30eb\u3067\u3082\u5b89\u5b9a\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u54c1\u8cea\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002.<\/p>\n

\u9577\u5bff\u547d\u30a4\u30aa\u30f3\u6e90<\/h3>\n

\u5bff\u547d150\u6642\u9593\u4ee5\u4e0a\u306e\u91d1\u5c5eAl\u30a4\u30aa\u30f3\u30bd\u30fc\u30b9\u3092\u642d\u8f09\u3057\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u983b\u5ea6\u3092\u4f4e\u6e1b\u3057\u3001\u7a3c\u50cd\u7387\u3092\u5411\u4e0a\u3002.<\/p>\n

\u9ad8\u3044\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u80fd\u529b<\/h3>\n

\u534a\u5c0e\u4f53\u88fd\u9020\u74b0\u5883\u306b\u9069\u3057\u305f\u6bce\u6642200\u679a\u4ee5\u4e0a\u306e\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u30b5\u30dd\u30fc\u30c8\u3002.<\/p>\n

\u9ad8\u5ea6\u306a\u30d7\u30ed\u30bb\u30b9\u9069\u5408\u6027<\/h3>\n

SiC\u30d7\u30ed\u30bb\u30b9\u304a\u3088\u3073\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u30d9\u30fc\u30b9\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u5bfe\u5fdc\u3002.<\/p>\n

\"\"\"\"<\/p>\n

\n

\u4e3b\u306a\u4ed5\u69d8<\/h2>\n

\u30d7\u30ed\u30bb\u30b9\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
\u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/td>\n6-8\u30a4\u30f3\u30c1<\/td>\n<\/tr>\n
\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc4\u56f2<\/td>\n5-350 keV<\/td>\n<\/tr>\n
\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u30fb\u30a8\u30ec\u30e1\u30f3\u30c8<\/td>\nC\u3001Al\u3001B\u3001P\u3001N\u3001He\u3001Ar<\/td>\n<\/tr>\n
\u6295\u4e0e\u91cf\u7bc4\u56f2<\/td>\n1E11\uff5e1E17\u30a4\u30aa\u30f3\/cm\u00b2\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u30d3\u30fc\u30e0\u6027\u80fd<\/h3>\n
\n
\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
\u30d3\u30fc\u30e0\u5b89\u5b9a\u6027<\/td>\n\u2264 10% \/ \u6642\u9593 (\u22641 \u30d3\u30fc\u30e0\u906e\u65ad\u307e\u305f\u306f\u30a2\u30fc\u30af\u653e\u96fb \/ \u6642\u9593)<\/td>\n<\/tr>\n
\u30d3\u30fc\u30e0\u5e73\u884c\u5ea6<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u79fb\u690d\u306e\u7cbe\u5ea6<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u89d2\u5ea6\u7bc4\u56f2<\/td>\n0\u00b0-45\u00b0<\/td>\n<\/tr>\n
\u89d2\u5ea6\u7cbe\u5ea6<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n
\u5747\u4e00\u6027\uff081\u03c3\uff09<\/td>\n\u2264 0.5% (P+, 1E14, 100 keV)<\/td>\n<\/tr>\n
\u7e70\u308a\u8fd4\u3057\u7cbe\u5ea6\uff081\u03c3\uff09<\/td>\n\u2264 0.5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u30b7\u30b9\u30c6\u30e0\u30fb\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n\n
\u9805\u76ee<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8<\/td>\n\u2265 \u6bce\u6642200\u679a<\/td>\n<\/tr>\n
\u6700\u9ad8\u30c1\u30e3\u30c3\u30af\u6e29\u5ea6<\/td>\n500\u00b0C<\/td>\n<\/tr>\n
\u6a5f\u6750\u30b5\u30a4\u30ba<\/td>\n6270 \u00d7 3500 \u00d7 3000 mm<\/td>\n<\/tr>\n
\u771f\u7a7a\u30ec\u30d9\u30eb<\/td>\n5E-7 \u30c8\u30fc\u30eb<\/td>\n<\/tr>\n
X\u7dda\u6f0f\u6d29<\/td>\n\u2264 0.3 \u03bcSv\/h<\/td>\n<\/tr>\n
\u30b9\u30ad\u30e3\u30f3\u30fb\u30e2\u30fc\u30c9<\/td>\n\u6c34\u5e73\u9759\u96fb\u8d70\u67fb\uff0b\u5782\u76f4\u6a5f\u68b0\u8d70\u67fb<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\u5fdc\u7528\u5206\u91ce<\/h2>\n

SiC\u534a\u5c0e\u4f53\u88fd\u9020<\/h3>\n

\u9ad8\u6e29\u30a4\u30aa\u30f3\u6ce8\u5165\u30d7\u30ed\u30bb\u30b9\u3092\u5fc5\u8981\u3068\u3059\u308b\u70ad\u5316\u30b1\u30a4\u7d20\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n

\u30b7\u30ea\u30b3\u30f3\u30d9\u30fc\u30b9\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9<\/h3>\n

6\u30a4\u30f3\u30c1\u304a\u3088\u30738\u30a4\u30f3\u30c1\u30a6\u30a7\u30fc\u30cf\u306eCMOS\u304a\u3088\u3073\u96c6\u7a4d\u56de\u8def\u88fd\u9020\u306b\u9069\u7528\u53ef\u80fd\u3002.<\/p>\n

\u9ad8\u6e29\u6ce8\u5165\u30d7\u30ed\u30bb\u30b9<\/h3>\n

\u7d50\u6676\u640d\u50b7\u3092\u4f4e\u6e1b\u3057\u3001\u30c9\u30fc\u30d1\u30f3\u30c8\u306e\u6d3b\u6027\u5316\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u306b\u9ad8\u6e29\u3092\u5fc5\u8981\u3068\u3059\u308b\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u88fd\u9020<\/h3>\n

\u6df1\u5800\u308a\u6ce8\u5165\u3084\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30d7\u30ed\u30bb\u30b9\u3092\u5fc5\u8981\u3068\u3059\u308b\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n

\u5148\u7aef\u6750\u6599\u5de5\u5b66<\/h3>\n

\u5148\u7aef\u534a\u5c0e\u4f53\u6750\u6599\u3084\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u74b0\u5883\u306b\u304a\u3051\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u3092\u30b5\u30dd\u30fc\u30c8\u3002.<\/p>\n

\n

\u3088\u304f\u3042\u308b\u8cea\u554f<\/h2>\n

1.Ai350HT\u306f\u3069\u306e\u3088\u3046\u306a\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u304b\uff1f<\/h3>\n

\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f6\u30a4\u30f3\u30c1\u30688\u30a4\u30f3\u30c1\u306e\u30a6\u30a7\u30fc\u30cf\u306b\u5bfe\u5fdc\u3057\u3001\u30b7\u30ea\u30b3\u30f3\u30d9\u30fc\u30b9\u3068SiC\u534a\u5c0e\u4f53\u306e\u4e21\u65b9\u306e\u88fd\u9020\u30e9\u30a4\u30f3\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n

2.\u79fb\u690d\u4e2d\u306e\u6700\u9ad8\u6e29\u5ea6\u306f\uff1f<\/h3>\n

\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6a5f\u68b0\u5f0f\u30af\u30e9\u30f3\u30d7\u3092\u5099\u3048\u305f\u52a0\u71b1\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u3092\u4f7f\u7528\u3057\u3066\u3001500\u2103\u307e\u3067\u306e\u9ad8\u6e29\u6ce8\u5165\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3002.<\/p>\n

3.SiC\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306e\u4e3b\u306a\u5229\u70b9\u306f\uff1f<\/h3>\n

\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u9ad8\u6e29\u6027\u80fd\u3001\u5b89\u5b9a\u3057\u305f\u30d3\u30fc\u30e0\u6027\u80fd\u3001SiC\u30d7\u30ed\u30bb\u30b9\u3068\u306e\u4e92\u63db\u6027\u3092\u517c\u306d\u5099\u3048\u3066\u304a\u308a\u3001\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

Ai350HT\uff08\u30df\u30c7\u30a3\u30a2\u30e0\u30d3\u30fc\u30e0\uff09\u9ad8\u6e29\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306f\u30016\u30a4\u30f3\u30c1\u304a\u3088\u30738\u30a4\u30f3\u30c1\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u534a\u5c0e\u4f53\u88fd\u9020\u30e9\u30a4\u30f3\u3001\u304a\u3088\u3073SiC\u30d7\u30ed\u30bb\u30b9\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5411\u3051\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u9ad8\u6e29\u30c9\u30fc\u30d4\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u7528\u306b\u958b\u767a\u3055\u308c\u305f\u4e2d\u96fb\u6d41\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u3067\u3059\u3002.<\/p>","protected":false},"featured_media":2361,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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