{"id":2349,"date":"2026-04-22T06:17:36","date_gmt":"2026-04-22T06:17:36","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2349"},"modified":"2026-04-22T07:24:00","modified_gmt":"2026-04-22T07:24:00","slug":"ai200hc-d-high-beam-ion-implantation-system-for-6-8-inch-silicon-wafer-processing-and-smart-cut-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/ai200hc-d-high-beam-ion-implantation-system-for-6-8-inch-silicon-wafer-processing-and-smart-cut-applications\/","title":{"rendered":"Ai200HC.D 6\/8\u30a4\u30f3\u30c1\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u52a0\u5de5\u304a\u3088\u3073\u30b9\u30de\u30fc\u30c8\u30ab\u30c3\u30c8\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u7528\u9ad8\u30d3\u30fc\u30e0\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e"},"content":{"rendered":"<p data-start=\"155\" data-end=\"421\"><img decoding=\"async\" class=\"wp-image-2350 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-300x300.png\" alt=\"\" width=\"209\" height=\"209\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ai200HC.D-High-Beam-Ion-Implantation-System.png 1000w\" sizes=\"(max-width: 209px) 100vw, 209px\" \/>Ai200HC.D\uff08\u30cf\u30a4\u30d3\u30fc\u30e0\uff09\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306f\u30016\u30a4\u30f3\u30c1\u304a\u3088\u30738\u30a4\u30f3\u30c1\u306e\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u534a\u5c0e\u4f53\u88fd\u9020\u30e9\u30a4\u30f3\u5411\u3051\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u9ad8\u96fb\u6d41\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u3067\u3001\u96c6\u7a4d\u56de\u8def\u88fd\u9020\u306b\u304a\u3051\u308b\u7cbe\u5bc6\u30c9\u30fc\u30d4\u30f3\u30b0\u304a\u3088\u3073\u5148\u7aef\u30d7\u30ed\u30bb\u30b9\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u7528\u306b\u958b\u767a\u3055\u308c\u307e\u3057\u305f\u3002.<\/p>\n<p data-start=\"423\" data-end=\"698\">5keV\u304b\u3089180keV\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc4\u56f2\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u5b89\u5b9a\u3057\u305f\u30d3\u30fc\u30e0\u6027\u80fd\u3068\u9ad8\u3044\u30d7\u30ed\u30bb\u30b9\u518d\u73fe\u6027\u3092\u63d0\u4f9b\u3059\u308b\u3002\u30b7\u30ea\u30b3\u30f3\u30d9\u30fc\u30b9\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u3084\u3001\u30b9\u30de\u30fc\u30c8\u30ab\u30c3\u30c8\u6280\u8853\u306e\u7d71\u5408\u3092\u542b\u3080\u9ad8\u5ea6\u306a\u30a6\u30a7\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u95a2\u9023\u30d7\u30ed\u30bb\u30b9\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<hr data-start=\"700\" data-end=\"703\" \/>\n<h2 data-section-id=\"1d7mrtu\" data-start=\"705\" data-end=\"716\">\u7279\u5fb4<\/h2>\n<h3 data-section-id=\"11asise\" data-start=\"718\" data-end=\"753\">\u30cf\u30a4\u30d3\u30fc\u30e0\u5b89\u5b9a\u6027\u80fd<\/h3>\n<p data-start=\"754\" data-end=\"897\">\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u5909\u52d5\u304c\u6291\u5236\u3055\u308c\u305f\u5b89\u5b9a\u3057\u305f\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u51fa\u529b\u3092\u7dad\u6301\u3057\u3001\u9023\u7d9a\u751f\u7523\u6642\u306e\u5b89\u5b9a\u3057\u305f\u6ce8\u5165\u54c1\u8cea\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002.<\/p>\n<h3 data-section-id=\"38j0c\" data-start=\"899\" data-end=\"929\">\u5e45\u5e83\u3044\u30d7\u30ed\u30bb\u30b9\u4e92\u63db\u6027<\/h3>\n<p data-start=\"930\" data-end=\"1057\">\u30b7\u30ea\u30b3\u30f3\u30d9\u30fc\u30b9\u306e\u30d7\u30ed\u30bb\u30b9\u3068\u30b9\u30de\u30fc\u30c8\u30ab\u30c3\u30c8\u95a2\u9023\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u5bfe\u5fdc\u3057\u3001\u9ad8\u5ea6\u306a\u30a6\u30a7\u30cf\u30fc\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u8981\u4ef6\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059\u3002.<\/p>\n<h3 data-section-id=\"2v7p6\" data-start=\"1059\" data-end=\"1093\">\u9ad8\u7cbe\u5ea6\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u5236\u5fa1<\/h3>\n<p data-start=\"1094\" data-end=\"1142\">\u6b63\u78ba\u306a\u79fb\u690d\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n<ul data-start=\"1143\" data-end=\"1231\">\n<li data-section-id=\"1irf1o\" data-start=\"1143\" data-end=\"1166\">\u89d2\u5ea6\u7cbe\u5ea6 \u2264 0.2<\/li>\n<li data-section-id=\"1hml6xy\" data-start=\"1167\" data-end=\"1192\">\u30d3\u30fc\u30e0\u5e73\u884c\u5ea6\u22640.3<\/li>\n<li data-section-id=\"1danezc\" data-start=\"1193\" data-end=\"1210\">\u5747\u4e00\u6027 \u2264 1%<\/li>\n<li data-section-id=\"mbe4el\" data-start=\"1211\" data-end=\"1231\">\u7e70\u308a\u8fd4\u3057\u7cbe\u5ea6 \u2264 1%<\/li>\n<\/ul>\n<h3 data-section-id=\"8aw6q\" data-start=\"1233\" data-end=\"1263\">\u9ad8\u3044\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u80fd\u529b<\/h3>\n<p data-start=\"1264\" data-end=\"1369\">\u6bce\u6642220\u679a\u4ee5\u4e0a\u306e\u30a6\u30a8\u30cf\u30fc\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u4e2d\u91cf\u304b\u3089\u5927\u91cf\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u74b0\u5883\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<h3 data-section-id=\"1e3kdu8\" data-start=\"1371\" data-end=\"1409\">\u30d0\u30c3\u30c1\u30bf\u30fc\u30b2\u30c3\u30c8\u51e6\u7406\u80fd\u529b<\/h3>\n<p data-start=\"1410\" data-end=\"1554\">\u30d0\u30c3\u30c1\u30bf\u30fc\u30b2\u30c3\u30c8\u51e6\u7406\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u67d4\u8edf\u6027\u3092\u5411\u4e0a\u3055\u305b\u3001\u9ad8\u5ea6\u306a\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u88fd\u9020\u6280\u8853\u3068\u306e\u7d71\u5408\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002.<\/p>\n<p data-start=\"1410\" data-end=\"1554\"><img fetchpriority=\"high\" decoding=\"async\" class=\"aligncenter wp-image-2371 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png\" alt=\"\" width=\"1024\" height=\"388\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-300x114.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-768x291.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-600x227.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs.png 1216w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"1556\" data-end=\"1559\" \/>\n<h2 data-section-id=\"rkota4\" data-start=\"1561\" data-end=\"1582\">\u4e3b\u306a\u4ed5\u69d8<\/h2>\n<h3 data-section-id=\"rc5knr\" data-start=\"1584\" data-end=\"1606\">\u30d7\u30ed\u30bb\u30b9\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1608\" data-end=\"1813\">\n<thead data-start=\"1608\" data-end=\"1632\">\n<tr data-start=\"1608\" data-end=\"1632\">\n<th class=\"\" data-start=\"1608\" data-end=\"1615\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"\" data-start=\"1615\" data-end=\"1632\" data-col-size=\"sm\">\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1657\" data-end=\"1813\">\n<tr data-start=\"1657\" data-end=\"1697\">\n<td data-start=\"1657\" data-end=\"1670\" data-col-size=\"sm\">\u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/td>\n<td data-start=\"1670\" data-end=\"1697\" data-col-size=\"sm\">6-8\u30a4\u30f3\u30c1\u30fb\u30b7\u30ea\u30b3\u30f3\u30fb\u30a6\u30a7\u30cf\u30fc<\/td>\n<\/tr>\n<tr data-start=\"1698\" data-end=\"1726\">\n<td data-start=\"1698\" data-end=\"1713\" data-col-size=\"sm\">\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc4\u56f2<\/td>\n<td data-start=\"1713\" data-end=\"1726\" data-col-size=\"sm\">5-180 keV<\/td>\n<\/tr>\n<tr data-start=\"1727\" data-end=\"1777\">\n<td data-start=\"1727\" data-end=\"1748\" data-col-size=\"sm\">\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u30fb\u30a8\u30ec\u30e1\u30f3\u30c8<\/td>\n<td data-start=\"1748\" data-end=\"1777\" data-col-size=\"sm\">B+, BF2+, P+, As+, N+, H+.<\/td>\n<\/tr>\n<tr data-start=\"1778\" data-end=\"1813\">\n<td data-start=\"1778\" data-end=\"1791\" data-col-size=\"sm\">\u6295\u4e0e\u91cf\u7bc4\u56f2<\/td>\n<td data-start=\"1791\" data-end=\"1813\" data-col-size=\"sm\">5E11-1E17\u30a4\u30aa\u30f3\/cm\u00b2\u3002<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"h0mtjp\" data-start=\"1815\" data-end=\"1835\">\u30d3\u30fc\u30e0\u6027\u80fd<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1837\" data-end=\"1951\">\n<thead data-start=\"1837\" data-end=\"1861\">\n<tr data-start=\"1837\" data-end=\"1861\">\n<th class=\"\" data-start=\"1837\" data-end=\"1844\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"\" data-start=\"1844\" data-end=\"1861\" data-col-size=\"sm\">\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1886\" data-end=\"1951\">\n<tr data-start=\"1886\" data-end=\"1921\">\n<td data-start=\"1886\" data-end=\"1903\" data-col-size=\"sm\">\u30d3\u30fc\u30e0\u5b89\u5b9a\u6027<\/td>\n<td data-start=\"1903\" data-end=\"1921\" data-col-size=\"sm\">\u2264 \u6bce\u664210%<\/td>\n<\/tr>\n<tr data-start=\"1922\" data-end=\"1951\">\n<td data-start=\"1922\" data-end=\"1941\" data-col-size=\"sm\">\u30d3\u30fc\u30e0\u5e73\u884c\u5ea6<\/td>\n<td data-start=\"1941\" data-end=\"1951\" data-col-size=\"sm\">\u2264 0.3\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"ieoahx\" data-start=\"1953\" data-end=\"1978\">\u79fb\u690d\u306e\u7cbe\u5ea6<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1980\" data-end=\"2191\">\n<thead data-start=\"1980\" data-end=\"2004\">\n<tr data-start=\"1980\" data-end=\"2004\">\n<th class=\"\" data-start=\"1980\" data-end=\"1987\" data-col-size=\"sm\">\u9805\u76ee<\/th>\n<th class=\"\" data-start=\"1987\" data-end=\"2004\" data-col-size=\"sm\">\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2029\" data-end=\"2191\">\n<tr data-start=\"2029\" data-end=\"2066\">\n<td data-start=\"2029\" data-end=\"2051\" data-col-size=\"sm\">\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u89d2\u5ea6\u7bc4\u56f2<\/td>\n<td data-start=\"2051\" data-end=\"2066\" data-col-size=\"sm\">-11\u00b0\uff5e11\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2067\" data-end=\"2094\">\n<td data-start=\"2067\" data-end=\"2084\" data-col-size=\"sm\">\u89d2\u5ea6\u7cbe\u5ea6<\/td>\n<td data-start=\"2084\" data-end=\"2094\" data-col-size=\"sm\">\u2264 0.2\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2095\" data-end=\"2141\">\n<td data-start=\"2095\" data-end=\"2113\" data-col-size=\"sm\">\u5747\u4e00\u6027\uff081\u03c3\uff09<\/td>\n<td data-start=\"2113\" data-end=\"2141\" data-col-size=\"sm\">\u2264 1% (B+, 2E14, 150 keV)<\/td>\n<\/tr>\n<tr data-start=\"2142\" data-end=\"2191\">\n<td data-start=\"2142\" data-end=\"2163\" data-col-size=\"sm\">\u7e70\u308a\u8fd4\u3057\u7cbe\u5ea6\uff081\u03c3\uff09<\/td>\n<td data-start=\"2163\" data-end=\"2191\" data-col-size=\"sm\">\u2264 1% (B+, 2E14, 150 keV)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"1i84h7f\" data-start=\"2193\" data-end=\"2215\">\u30b7\u30b9\u30c6\u30e0\u30fb\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse 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