{"id":2342,"date":"2026-04-22T05:35:46","date_gmt":"2026-04-22T05:35:46","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2342"},"modified":"2026-04-22T07:27:32","modified_gmt":"2026-04-22T07:27:32","slug":"high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping\/","title":{"rendered":"\u5148\u9032\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u7528\u9ad8\u52b9\u7387Ai80HC(\u30cf\u30a4\u30d3\u30fc\u30e0)\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e"},"content":{"rendered":"<p data-start=\"153\" data-end=\"528\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2343 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-300x300.png\" 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data-end=\"1243\">0\u00b0\uff5e45\u00b0\u306e\u6ce8\u5165\u89d2\u5ea6\u7bc4\u56f2\u3068\u22640.1\u00b0\u306e\u9ad8\u3044\u89d2\u5ea6\u7cbe\u5ea6\u306b\u3088\u308a\u3001\u30c9\u30fc\u30d1\u30f3\u30c8\u5206\u5e03\u3068\u63a5\u5408\u30d7\u30ed\u30d5\u30a1\u30a4\u30eb\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u3092\u6b63\u78ba\u306b\u5236\u5fa1\u3057\u307e\u3059\u30020.3\u00b0\u4ee5\u4e0b\u306e\u30d3\u30fc\u30e0\u5e73\u884c\u5ea6\u304a\u3088\u30731%\uff081\u03c3\uff09\u4ee5\u4e0b\u306e\u5747\u4e00\u6027\u3068\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001Ai80HC\uff08\u30cf\u30a4\u30d3\u30fc\u30e0\uff09\u306f\u4e00\u8cab\u3057\u305f\u30a6\u30a7\u30fc\u30cf\u9593\u304a\u3088\u3073\u30a6\u30a7\u30fc\u30cf\u5185\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002.<\/p>\n<p data-start=\"1245\" 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data-section-id=\"1r1hm7c\" data-start=\"1216\" data-end=\"1237\">\u62bd\u51fa\u30b7\u30b9\u30c6\u30e0<\/li>\n<li data-section-id=\"1twz66q\" data-start=\"1238\" data-end=\"1255\">\u8cea\u91cf\u5206\u6790\u8a08<\/li>\n<li data-section-id=\"ywuuxz\" data-start=\"1256\" data-end=\"1280\">\u78c1\u6c17\u30ec\u30f3\u30ba\u30b7\u30b9\u30c6\u30e0<\/li>\n<li data-section-id=\"1s57tik\" data-start=\"1281\" data-end=\"1302\">\u52a0\u901f\u7ba1<\/li>\n<li data-section-id=\"pg1cgy\" data-start=\"1303\" data-end=\"1336\">\u9759\u96fb\u8d70\u67fb\u30b7\u30b9\u30c6\u30e0<\/li>\n<li data-section-id=\"1iwk7km\" data-start=\"1337\" data-end=\"1367\">\u5e73\u884c\u30d3\u30fc\u30e0\u6210\u5f62\u30ec\u30f3\u30ba<\/li>\n<li data-section-id=\"1cur4hx\" data-start=\"1368\" data-end=\"1401\">\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\uff08\u30a8\u30f3\u30c9\u30b9\u30c6\u30fc\u30b7\u30e7\u30f3\uff09<\/li>\n<li data-section-id=\"qtlnqu\" data-start=\"1402\" data-end=\"1436\">\u30a6\u30a7\u30cf\u30fc\u30ab\u30bb\u30c3\u30c8\/\u30ed\u30fc\u30c0\u30fc\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n<p data-start=\"1438\" data-end=\"1458\">\u8a2d\u5099\u306f\u6574\u3063\u3066\u3044\u308b\uff1a<\/p>\n<ul data-start=\"1459\" data-end=\"1572\">\n<li data-section-id=\"1jzaueb\" data-start=\"1459\" data-end=\"1494\">\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u30b9\u30c6\u30fc\u30b8<\/li>\n<li data-section-id=\"1s8wavu\" data-start=\"1495\" data-end=\"1530\">\u9577\u5bff\u547d\u30a4\u30aa\u30f3\u30bd\u30fc\u30b9\u6280\u8853<\/li>\n<li data-section-id=\"6mih95\" data-start=\"1531\" data-end=\"1572\">\u5168\u81ea\u52d5\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n<p data-start=\"1574\" data-end=\"1686\">\u3053\u306e\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306f\u3001\u9ad8\u3044\u30d3\u30fc\u30e0\u5b89\u5b9a\u6027\u3001\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306e\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u306e\u524a\u6e1b\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u518d\u73fe\u6027\u306e\u5411\u4e0a\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n<p data-start=\"1574\" data-end=\"1686\"><img decoding=\"async\" class=\"aligncenter wp-image-2371 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png\" alt=\"\" width=\"1024\" height=\"388\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-300x114.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-768x291.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-600x227.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs.png 1216w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"106914\" data-start=\"1693\" data-end=\"1727\">\u4e3b\u306a\u6280\u8853\u4ed5\u69d8<\/h2>\n<table>\n<thead>\n<tr>\n<th>\u9805\u76ee<\/th>\n<th>\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/td>\n<td>12\u30a4\u30f3\u30c1<\/td>\n<\/tr>\n<tr>\n<td>\u30a8\u30cd\u30eb\u30ae\u30fc\u7bc4\u56f2<\/td>\n<td>0.5 - 80 keV<\/td>\n<\/tr>\n<tr>\n<td>\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u30fb\u30a8\u30ec\u30e1\u30f3\u30c8<\/td>\n<td>BF\u2082\u207a\u3001\u2074\u2079BF\u2082\u207a\u3001\u00b3\u00b9P\u207a\u3001\u2077\u2077As\u207a\u3001\u00b9H\u207a<\/td>\n<\/tr>\n<tr>\n<td>\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u306e\u89d2\u5ea6<\/td>\n<td>0\u00b0 - 45\u00b0<\/td>\n<\/tr>\n<tr>\n<td>\u89d2\u5ea6\u7cbe\u5ea6<\/td>\n<td>\u2264 0.1\u00b0<\/td>\n<\/tr>\n<tr>\n<td>\u6295\u4e0e\u91cf\u7bc4\u56f2<\/td>\n<td>5E11\uff5e1E17\u30a4\u30aa\u30f3\/cm\u00b2\u3002<\/td>\n<\/tr>\n<tr>\n<td>\u30d3\u30fc\u30e0\u5b89\u5b9a\u6027<\/td>\n<td>\u2264 10%\/\u6642\u9593\uff0860\u5206\u4ee5\u5185\u3001\u30d3\u30fc\u30e0\u906e\u65ad\u304a\u3088\u3073\u30a2\u30fc\u30af\u653e\u96fb\u22641\u56de\uff09<\/td>\n<\/tr>\n<tr>\n<td>\u30d3\u30fc\u30e0\u5e73\u884c\u5ea6<\/td>\n<td>\u2264 0.3\u00b0<\/td>\n<\/tr>\n<tr>\n<td>\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\uff08WPH\uff09<\/td>\n<td>\u2265 200\u679a\/\u6642<\/td>\n<\/tr>\n<tr>\n<td>\u5747\u4e00\u6027\uff081\u03c3\uff09<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>\u7e70\u308a\u8fd4\u3057\u7cbe\u5ea6\uff081\u03c3\uff09<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>\u30d7\u30ed\u30bb\u30b9\u306e\u4e92\u63db\u6027<\/td>\n<td>LSI\u30d7\u30ed\u30bb\u30b9\u306b\u5bfe\u5fdc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 data-section-id=\"yb78ly\" data-start=\"2475\" data-end=\"2506\">\u4e3b\u306a\u7279\u5fb4\u3068\u5229\u70b9<\/h2>\n<h3 data-section-id=\"13hha2k\" data-start=\"2508\" data-end=\"2541\">1.\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u5236\u5fa1\u30b7\u30b9\u30c6\u30e0<\/h3>\n<p data-start=\"2542\" data-end=\"2706\">\u53ef\u8996\u5316\u3055\u308c\u305f\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u306a\u30bd\u30d5\u30c8\u30a6\u30a7\u30a2\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0\u3092\u642d\u8f09\u3057\u3001\u64cd\u4f5c\u306e\u7c21\u7d20\u5316\u3001\u8fc5\u901f\u306a\u6545\u969c\u8a3a\u65ad\u3001\u751f\u7523\u6642\u306e\u9ad8\u3044\u30b7\u30b9\u30c6\u30e0\u5b89\u5b9a\u6027\u3092\u5b9f\u73fe\u3002.<\/p>\n<h3 data-section-id=\"1cy4f9q\" data-start=\"2713\" data-end=\"2740\">2.\u9577\u5bff\u547d\u30a4\u30aa\u30f3\u6e90<\/h3>\n<p data-start=\"2741\" 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