{"id":2327,"date":"2026-04-21T06:21:20","date_gmt":"2026-04-21T06:21:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2327"},"modified":"2026-04-21T06:21:21","modified_gmt":"2026-04-21T06:21:21","slug":"wafer-thinning-system-precision-back-grinding-equipment-for-si-sic-and-4-to-12-inch-semiconductor-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/wafer-thinning-system-precision-back-grinding-equipment-for-si-sic-and-4-to-12-inch-semiconductor-wafers\/","title":{"rendered":"\u30a6\u30a7\u30fc\u30cf\u8584\u7247\u5316\u88c5\u7f6e Si SiC\u304a\u3088\u30734\uff5e12\u30a4\u30f3\u30c1\u534a\u5c0e\u4f53\u30a6\u30a7\u30fc\u30cf\u7528\u7cbe\u5bc6\u30d0\u30c3\u30af\u30b0\u30e9\u30a4\u30f3\u30c9\u88c5\u7f6e"},"content":{"rendered":"

\"\u30a6\u30a7\u30fc\u30cf\u8584\u7247\u5316\u88c5\u7f6e\u30a6\u30a7\u30fc\u30cf\u8584\u7247\u5316\u88c5\u7f6e\u7cbe\u5bc6\u30d0\u30c3\u30af\u30b0\u30e9\u30a4\u30f3\u30c9\u88c5\u7f6e\u306f\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u7cbe\u5ea6\u30a6\u30a7\u30fc\u30cf\u52a0\u5de5\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3067\u3059\u3002\u30b7\u30ea\u30b3\u30f3(Si)\u3001\u30b7\u30ea\u30b3\u30f3\u30ab\u30fc\u30d0\u30a4\u30c9(SiC)\u3001\u30ac\u30ea\u30a6\u30e0\u30d2\u7d20(GaAs)\u3001\u30b5\u30d5\u30a1\u30a4\u30a2\u3001\u305d\u306e\u4ed6\u306e\u8106\u6027\u5316\u5408\u7269\u534a\u5c0e\u4f53\u6750\u6599\u3092\u542b\u30804\u30a4\u30f3\u30c1\u304b\u308912\u30a4\u30f3\u30c1\u30a6\u30a7\u30fc\u30cf\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u8d85\u7cbe\u5bc6\u30a6\u30a7\u30fc\u30cf\u88cf\u9762\u8584\u5316\u7528\u306b\u8a2d\u8a08\u3055\u308c\u3066\u304a\u308a\u3001\u512a\u308c\u305f\u8868\u9762\u54c1\u4f4d\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u30df\u30af\u30ed\u30f3\u3001\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u30ec\u30d9\u30eb\u307e\u3067\u8584\u5316\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u5148\u7aef\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3001MEMS\u3001\u5316\u5408\u7269\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002.<\/p>\n

\u9ad8\u525b\u6027\u6a5f\u68b0\u8a2d\u8a08\u3001\u9ad8\u7cbe\u5ea6Z\u8ef8\u5236\u5fa1\u3001\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u539a\u307f\u30e2\u30cb\u30bf\u30fc\u3092\u7d71\u5408\u3059\u308b\u3053\u3068\u3067\u3001\u3053\u306e\u88c5\u7f6e\u306f\u5de5\u696d\u898f\u6a21\u306e\u751f\u7523\u306b\u304a\u3044\u3066\u5b89\u5b9a\u3057\u305f\u518d\u73fe\u6027\u306e\u3042\u308b\u52a0\u5de5\u6027\u80fd\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n

\n

\u4e3b\u306a\u6280\u8853\u7684\u7279\u5fb4<\/span><\/h2>\n

\u9ad8\u7cbe\u5ea6\u539a\u307f\u5236\u5fa1<\/span><\/h3>\n
    \n
  • \u539a\u3055\u7cbe\u5ea6\uff1a\u00b11\u03bcm<\/li>\n
  • \u5168\u539a\u307f\u3070\u3089\u3064\u304d\uff08TTV\uff09\uff1a\u22662\u03bcm<\/li>\n
  • \u30a2\u30c9\u30d0\u30f3\u30b9\u30e2\u30c7\u30eb\u3067\u306f\u00b10.5\u03bcm\u307e\u3067\u306e\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u5236\u5fa1\u3092\u5b9f\u73fe<\/li>\n<\/ul>\n

    \"\"\u5e45\u5e83\u3044\u7d20\u6750\u9069\u5408\u6027<\/span><\/h3>\n

    \u534a\u5c0e\u4f53\u3084\u8106\u6027\u6750\u6599\u306b\u5e45\u5e83\u304f\u5bfe\u5fdc\uff1a<\/p>\n

      \n
    • \u30b1\u30a4\u7d20 (Si)<\/li>\n
    • \u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09<\/li>\n
    • \u30ac\u30ea\u30a6\u30e0\u30d2\u7d20\uff08GaAs\uff09<\/li>\n
    • \u30b5\u30d5\u30a1\u30a4\u30a2\uff08Al\u2082O\u2083\uff09<\/li>\n
    • \u305d\u306e\u4ed6\u5316\u5408\u7269\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc<\/li>\n<\/ul>\n

      \u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u4e92\u63db\u6027<\/span><\/h3>\n
        \n
      • 4\u30a4\u30f3\u30c1\uff0f6\u30a4\u30f3\u30c1\uff0f8\u30a4\u30f3\u30c1\uff0f10\u30a4\u30f3\u30c1\uff0f12\u30a4\u30f3\u30c1\u30fb\u30a6\u30a7\u30cf\u30fc<\/li>\n
      • \u6a19\u6e96\u57fa\u6750\u3068\u30ab\u30b9\u30bf\u30e0\u57fa\u6750\u306e\u4e21\u65b9\u306b\u5bfe\u5fdc\u3059\u308b\u67d4\u8edf\u306a\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0<\/li>\n<\/ul>\n

        \u9ad8\u5b89\u5b9a\u30e1\u30ab\u30cb\u30ab\u30eb\u30b7\u30b9\u30c6\u30e0<\/span><\/h3>\n
          \n
        • \u9ad8\u525b\u6027\u30a8\u30a2\u30d9\u30a2\u30ea\u30f3\u30b0\u30b9\u30d4\u30f3\u30c9\u30eb<\/li>\n
        • \u4f4e\u632f\u52d5\u7cbe\u5bc6\u7814\u524a\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n
        • \u8f38\u5165\u30dc\u30fc\u30eb\u306d\u3058\uff0b\u30ea\u30cb\u30a2\u30ac\u30a4\u30c9\u30b7\u30b9\u30c6\u30e0<\/li>\n
        • \u9ad8\u7cbe\u5ea6\u30b5\u30fc\u30dc\u30e2\u30fc\u30bf\u30fc\u5236\u5fa1\uff08\u5206\u89e3\u80fd0.1\u03bcm\uff09<\/li>\n<\/ul>\n

          \u5148\u9032\u51b7\u5374\u30b7\u30b9\u30c6\u30e0<\/span><\/h3>\n
            \n
          • \u6c34\u51b7\u30b9\u30d4\u30f3\u30c9\u30eb\u30b7\u30b9\u30c6\u30e0\u304c\u71b1\u5b89\u5b9a\u6027\u3092\u78ba\u4fdd<\/li>\n
          • \u9ad8\u901f\u7814\u524a\u6642\u306e\u5909\u5f62\u3092\u9632\u6b62<\/li>\n<\/ul>\n
            \n

            \u30b7\u30b9\u30c6\u30e0\u69cb\u6210<\/span><\/h2>\n

            \u30a6\u30a7\u30fc\u30cf\u8584\u7247\u5316\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u8907\u6570\u306e\u6a5f\u80fd\u30e2\u30b8\u30e5\u30fc\u30eb\u3092\u7d71\u5408\u3057\u3066\u3044\u308b\uff1a<\/p>\n

            1.\u7cbe\u5bc6\u7814\u524a\u30e2\u30b8\u30e5\u30fc\u30eb<\/span><\/h3>\n

            \u9ad8\u3044\u8868\u9762\u5747\u4e00\u6027\u3067\u5236\u5fa1\u3055\u308c\u305f\u6750\u6599\u9664\u53bb\u3092\u884c\u3044\u307e\u3059\u3002.<\/p>\n

            2.Z\u8ef8\u7cbe\u5bc6\u5236\u5fa1\u30b7\u30b9\u30c6\u30e0<\/span><\/h3>\n

            \u30a6\u30a7\u30fc\u30cf\u306e\u539a\u307f\u3092\u4e00\u5b9a\u306b\u4fdd\u3064\u305f\u3081\u306e\u8d85\u5fae\u7d30\u306a\u5782\u76f4\u8abf\u6574\u304c\u53ef\u80fd\u3067\u3059\u3002.<\/p>\n

            3.\u539a\u3055\u6e2c\u5b9a\u30b7\u30b9\u30c6\u30e0<\/span><\/h3>\n

            \u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u63a5\u89e6\/\u975e\u63a5\u89e6\u6e2c\u5b9a\u306b\u3088\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u78ba\u4fdd\u3057\u307e\u3059\u3002.<\/p>\n

            4.\u771f\u7a7a\u30c1\u30e3\u30c3\u30af<\/span><\/h3>\n

            \u4e0d\u898f\u5247\u306a\u30a6\u30a7\u30cf\u30fc\u306e\u305f\u3081\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u542b\u3080\u3001\u78ba\u5b9f\u306a\u30a6\u30a7\u30cf\u30fc\u56fa\u5b9a\u3002.<\/p>\n

            5.\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u5236\u5fa1\u30b7\u30b9\u30c6\u30e0<\/span><\/h3>\n
              \n
            • \u30d5\u30eb\u30aa\u30fc\u30c8\/\u30bb\u30df\u30aa\u30fc\u30c8\u30e2\u30fc\u30c9<\/li>\n
            • \u64cd\u4f5c\u30ed\u30b0\u306e\u8a18\u9332<\/li>\n
            • \u30ec\u30b7\u30d4\u30d9\u30fc\u30b9\u306e\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1<\/li>\n<\/ul>\n
              \n

              \"\" \u52a0\u5de5\u80fd\u529b<\/span><\/h2>\n

              \u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u9ad8\u6027\u80fd\u306e\u30a6\u30a7\u30fc\u30cf\u88cf\u9762\u52a0\u5de5\u7528\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n

                \n
              • \u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u88cf\u9762\u7814\u524a<\/li>\n
              • \u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u7528SiC\u30a6\u30a7\u30cf\u306e\u8584\u578b\u5316<\/li>\n
              • GaN\u304a\u3088\u3073GaAs\u57fa\u677f\u306e\u8584\u819c\u5316<\/li>\n
              • \u30b5\u30d5\u30a1\u30a4\u30a2\u30a6\u30a7\u30fc\u30cf\u7cbe\u5bc6\u8584\u5316<\/li>\n
              • 3D\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u7528\u6975\u8584\u30a6\u30a8\u30cf\u30fc\u306e\u6e96\u5099<\/li>\n<\/ul>\n
                \n

                \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/span><\/h2>\n

                1.\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9<\/span><\/h3>\n

                SiC MOSFET\u3001IGBT\u3001\u8d85\u8584\u578b\u30a6\u30a7\u30fc\u30cf\u3092\u5fc5\u8981\u3068\u3059\u308b\u9ad8\u96fb\u5727\u30c7\u30d0\u30a4\u30b9\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n

                \"\"2.\u30a2\u30c9\u30d0\u30f3\u30b9\u30c8\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/span><\/h3>\n

                \u30a6\u30a7\u30fc\u30cf\u306e\u8584\u5316\u306b\u5bfe\u5fdc\uff1a<\/p>\n

                  \n
                • \u30d5\u30ea\u30c3\u30d7\u30c1\u30c3\u30d7\u5b9f\u88c5<\/li>\n
                • 2.5D \/ 3D IC\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3<\/li>\n
                • TSV\uff08\u30b7\u30ea\u30b3\u30f3\u8cab\u901a\u96fb\u6975\uff09\u30d7\u30ed\u30bb\u30b9<\/li>\n<\/ul>\n

                  3.\u5316\u5408\u7269\u534a\u5c0e\u4f53<\/span><\/h3>\n

                  GaN\u3001GaAs\u3001InP\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u9069\u7528\u53ef\u80fd\u3002.<\/p>\n

                  4.LED\u3068\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9<\/span><\/h3>\n

                  LED\u30c1\u30c3\u30d7\u304a\u3088\u3073\u5149\u5b66\u30c7\u30d0\u30a4\u30b9\u7528\u306e\u30b5\u30d5\u30a1\u30a4\u30a2\u304a\u3088\u3073\u5316\u5408\u7269\u30a6\u30a7\u30cf\u306e\u8584\u819c\u5316\u3002.<\/p>\n

                  \n

                  \u30e1\u30ea\u30c3\u30c8<\/span><\/h2>\n
                    \n
                  • \u6210\u719f\u3057\u5b89\u5b9a\u3057\u305f\u30a6\u30a7\u30fc\u30cf\u8584\u5316\u6280\u8853<\/li>\n
                  • \u9ad8\u7cbe\u5ea6\u30a4\u30f3\u30d5\u30a3\u30fc\u30c9\u7814\u524a\u30b7\u30b9\u30c6\u30e0<\/li>\n
                  • \u512a\u308c\u305f\u8868\u9762\u7c97\u3055\u5236\u5fa1<\/li>\n
                  • \u9ad8\u3044UPH\uff08\u6a19\u6e96\u30d7\u30ed\u30bb\u30b9\u3067\u6700\u592730\u679a\/\u6642\uff09<\/li>\n
                  • \u8106\u304f\u3066\u786c\u3044\u7d20\u6750\u306b\u5f37\u3044\u9069\u5fdc\u6027<\/li>\n
                  • \u5b8c\u5168\u306b\u81ea\u52d5\u5316\u3055\u308c\u305f\u30d7\u30ed\u30bb\u30b9\u7d71\u5408\u6a5f\u80fd<\/li>\n<\/ul>\n
                    \n

                    \u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u30cf\u30a4\u30e9\u30a4\u30c8<\/span><\/h2>\n
                      \n
                    • \u6700\u5c0f\u5206\u89e3\u80fd0.1 \u03bcm\/s Z\u8ef8\u5236\u5fa1<\/li>\n
                    • \u539a\u3055\u306e\u5747\u4e00\u6027\uff1a\u22641-2\u03bcm TTV<\/li>\n
                    • \u8d85\u4f4e\u632f\u52d5\u9ad8\u901f\u30b9\u30d4\u30f3\u30c9\u30eb<\/li>\n
                    • \u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u30d7\u30ed\u30bb\u30b9\u76e3\u8996\u3068\u30ed\u30ae\u30f3\u30b0<\/li>\n
                    • \u7814\u7a76\u958b\u767a\u74b0\u5883\u3068\u91cf\u7523\u74b0\u5883\u306e\u4e21\u65b9\u306b\u5bfe\u5fdc<\/li>\n<\/ul>\n
                      \n

                      \u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u30fb\u30aa\u30d7\u30b7\u30e7\u30f3<\/span><\/h2>\n

                      \u3055\u307e\u3056\u307e\u306a\u7523\u696d\u30cb\u30fc\u30ba\u306b\u67d4\u8edf\u306b\u5bfe\u5fdc\u3057\u307e\u3059\uff1a<\/p>\n

                        \n
                      • \u30ab\u30b9\u30bf\u30e0\u30a6\u30a8\u30cf\u30fc\u30c1\u30e3\u30c3\u30af\uff08\u7570\u5f62\uff09<\/li>\n
                      • \u539a\u3055\u6e2c\u5b9a\u7bc4\u56f2\u306e\u62e1\u5927\uff08\u6700\u592740 mm\uff09<\/li>\n
                      • \u30d7\u30ed\u30bb\u30b9\u30ec\u30b7\u30d4\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba<\/li>\n
                      • \u4e0a\u6d41\/\u4e0b\u6d41\u88c5\u7f6e\u3068\u306e\u81ea\u52d5\u5316\u7d71\u5408<\/li>\n<\/ul>\n
                        \n

                        \u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/span><\/h2>\n

                        Q1: SiC\u30a6\u30a8\u30cf\u30fc\u3092\u52a0\u5de5\u3067\u304d\u307e\u3059\u304b\uff1f<\/span><\/h3>\n

                        \u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u7528\u9014\u306b\u9069\u3057\u305fSiC\u30a6\u30a7\u30fc\u30cf\u306e\u8584\u7247\u5316\u3068\u88cf\u9762\u7814\u524a\u306b\u6700\u9069\u5316\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n

                        Q2: \u9054\u6210\u53ef\u80fd\u306a\u539a\u307f\u7cbe\u5ea6\u306f\u3069\u306e\u304f\u3089\u3044\u3067\u3059\u304b\uff1f<\/span><\/h3>\n

                        \u6a19\u6e96\u30e2\u30c7\u30eb\u306f\u00b11\u03bcm\u3092\u9054\u6210\u3057\u3001\u30cf\u30a4\u30a8\u30f3\u30c9\u69cb\u6210\u3067\u306fTTV\u22661\u03bcm\u3067\u00b10.5\u03bcm\u306b\u9054\u3059\u308b\u3002.<\/p>\n

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