{"id":2253,"date":"2026-04-15T05:46:37","date_gmt":"2026-04-15T05:46:37","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2253"},"modified":"2026-04-20T01:22:42","modified_gmt":"2026-04-20T01:22:42","slug":"2-inch-quartz-wafer-dsp-ssp-polished-substrate-for-mems-semiconductor-optical-use","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/2-inch-quartz-wafer-dsp-ssp-polished-substrate-for-mems-semiconductor-optical-use\/","title":{"rendered":"MEMS\u3001\u534a\u5c0e\u4f53\u3001\u5149\u5b66\u75282\u30a4\u30f3\u30c1\u77f3\u82f1\u30a6\u30a7\u30cf\u30fcDSP\/SSP\u7814\u78e8\u57fa\u677f"},"content":{"rendered":"

\u88fd\u54c1\u6982\u8981<\/strong><\/h2>\n

\"MEMS\u3001\u534a\u5c0e\u4f53\u3001\u5149\u5b66\u75282\u30a4\u30f3\u30c1\u77f3\u82f1\u30a6\u30a7\u30cf\u30fcDSP\/SSP\u7814\u78e8\u57fa\u677f\"\u30a4\u30f3\u30c1\u77f3\u82f1\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u9ad8\u7d14\u5ea6\u306e\u4e8c\u9178\u5316\u30b1\u30a4\u7d20\uff08SiO\u2082\uff09\u304b\u3089\u4f5c\u3089\u308c\u305f\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u57fa\u677f\u3067\u3042\u308b\u3002CNC\u5207\u65ad\u3084\u30ec\u30fc\u30b6\u30fc\u7814\u78e8\u306a\u3069\u306e\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u306b\u3088\u308a\u3001\u30df\u30af\u30ed\u30f3\u30ec\u30d9\u30eb\u306e\u5e73\u5766\u6027\u3092\u5b9f\u73fe\u3057\u3066\u3044\u308b\u3002SEMI\u898f\u683c\u306b\u6e96\u62e0\u3057\u3001\u5bf8\u6cd5\u3084\u539a\u307f\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\uff08\u516c\u5dee\u00b10.02mm\uff09\u306b\u5bfe\u5fdc\u3057\u3066\u304a\u308a\u3001\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001MEMS\uff08Micro-Electro-Mechanical Systems\uff09\u3001\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

Fuyao\u306f\u3001\u81ea\u7531\u5f62\u72b6\u3001\u6bb5\u968e\u7684\u306a\u539a\u307f\u3001\u53cd\u5c04\u9632\u6b62\uff08AR\uff09\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3084\u758e\u6c34\u6027\u30d5\u30a3\u30eb\u30e0\u306a\u3069\u306e\u9ad8\u5ea6\u306a\u8868\u9762\u51e6\u7406\u306a\u3069\u3001\u975e\u6a19\u6e96\u5f62\u72b6\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u751f\u7523\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u5168\u5de5\u7a0b\u306e\u54c1\u8cea\u7ba1\u7406\u306b\u3088\u308a\u3001\u7dcf\u539a\u307f\u3070\u3089\u3064\u304d\uff08TTV\uff09<0.005 mm\u3001\u8868\u9762\u7c97\u3055Ra<1.5 nm\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002\u5c11\u91cf\u8a66\u4f5c\uff08\u6700\u5c0f10\u30e6\u30cb\u30c3\u30c8\uff09\u304a\u3088\u3073\u77ed\u7d0d\u671f\u30aa\u30d7\u30b7\u30e7\u30f3\u306f\u3001\u4e00\u523b\u3092\u4e89\u3046\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u306b\u3054\u5229\u7528\u3044\u305f\u3060\u3051\u307e\u3059\u3002.<\/p>\n

\u4ed5\u69d8<\/strong><\/h1>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
\u76f4\u5f84<\/td>\n2\u30a4\u30f3\u30c1\uff0850.8mm\uff09<\/td>\n<\/tr>\n
\u539a\u3055\u7bc4\u56f2<\/td>\n0.1 mm - 1.0 mm<\/td>\n<\/tr>\n
\u7d20\u6750\u306e\u7d14\u5ea6<\/td>\n\u226599.99%\u4ee5\u4e0a<\/td>\n<\/tr>\n
\u8868\u9762\u7c97\u3055\uff08Ra\uff09<\/td>\n\u22645 nm<\/td>\n<\/tr>\n
\u7dcf\u539a\u307f\u5909\u52d5<\/td>\n\u226410 \u03bcm<\/td>\n<\/tr>\n
\u900f\u904e\u7387 (@193 nm)<\/td>\n>90%<\/td>\n<\/tr>\n
\u71b1\u81a8\u5f35\u4fc2\u6570<\/td>\n~0.55\u00d710-\u2076\/\u00b0C<\/td>\n<\/tr>\n
\u8edf\u5316\u70b9<\/td>\n~1665\u00b0C<\/td>\n<\/tr>\n
\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/td>\n100\u30ec\u30d9\u30eb\u30fb\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n
\u4e3b\u306a\u7279\u5fb4<\/strong><\/div>\n<\/div>\n

1 \u30aa\u30d7\u30c6\u30a3\u30ab\u30eb\u30fb\u30a8\u30af\u30bb\u30ec\u30f3\u30b9<\/p>\n

    \n
  • \n

    \u5e45\u5e83\u3044\u900f\u904e\u7387\uff1a\u7d2b\u5916\u57df\uff08185-3500nm\uff09\u3067>90%\u3001\u77ed\u6ce2\u9577\u7d2b\u5916\u7dda\uff08185nm\uff09\u3067\u512a\u308c\u305f\u6027\u80fd\u3092\u767a\u63ee\u3002.\"2\u30a4\u30f3\u30c1\u77f3\u82f1\u30ac\u30e9\u30b9\u30a6\u30a8\u30cf<\/p>\n<\/li>\n

  • \n

    \u4f4e\u71b1\u81a8\u5f35\uff1aCTE ~0.52\u00d710-\u2076\/\u00b0C\uff085-35\u00b0C\uff09\u30011100\u00b0C\u307e\u3067\u306e\u9577\u671f\u8010\u71b1\u6e29\u5ea6\u30011450\u00b0C\u307e\u3067\u306e\u77ed\u671f\u8010\u71b1\u6e29\u5ea6\u3002.<\/p>\n<\/li>\n<\/ul>\n

    2 \u6a5f\u68b0\u7684\u304a\u3088\u3073\u5316\u5b66\u7684\u5b89\u5b9a\u6027<\/p>\n

      \n
    • \n

      \u9ad8\u5f37\u5ea6\uff1a\u66f2\u3052\u5f37\u5ea6\u306f\u6a19\u6e96\u30ac\u30e9\u30b9\u3088\u308a2\uff5e3\u500d\u9ad8\u304f\u3001\u30e2\u30fc\u30b9\u786c\u5ea6\u306f7\u3002.<\/p>\n<\/li>\n

    • \n

      \u8010\u98df\u6027\uff1a\u30bb\u30e9\u30df\u30c3\u30af\u306e30\u500d\u306e\u8010\u9178\u6027\u3067\u3001\u53b3\u3057\u3044\u5316\u5b66\u74b0\u5883\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n<\/li>\n<\/ul>\n

      3 \u96fb\u6c17\u7d76\u7e01<\/p>\n

        \n
      • \n

        \u62b5\u6297\u7387\u304c10\u00b9\u2078\u03a9-cm\u3092\u8d85\u3048\u3001\u9ad8\u5468\u6ce2\u3067\u306e\u8a98\u96fb\u640d\u5931\u304c\u4f4e\u304f\u3001RF\u56de\u8def\u3084\u30bb\u30f3\u30b5\u30fc\u306b\u6700\u9069\u3002.<\/p>\n<\/li>\n<\/ul>\n

        \u4e3b\u306a\u7528\u9014<\/strong><\/h1>\n

        1 \u534a\u5c0e\u4f53\u88fd\u9020<\/p>\n

          \n
        • \n

          CMOS\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc\u304a\u3088\u3073RFID\u30c1\u30c3\u30d7\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u7528\u57fa\u677f\u3067\u3001\u9ad8\u96c6\u7a4d\u5316\u306e\u305f\u3081\u306e\u30a6\u30a8\u30cf\u30ec\u30d9\u30eb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\uff08WLP\uff09\u306b\u5bfe\u5fdc\u3002.<\/p>\n<\/li>\n

        • \n

          \u30de\u30a4\u30af\u30ed\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u69cb\u9020\u5b89\u5b9a\u6027\u3092\u78ba\u4fdd\u3059\u308bMEMS\u30c7\u30d0\u30a4\u30b9\u57fa\u677f\uff08\u5727\u529b\u30bb\u30f3\u30b5\u30fc\u3001\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5\u30fc\u306a\u3069\uff09\u3002.<\/p>\n<\/li>\n<\/ul>\n

          2 \u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u30fb\u30b7\u30b9\u30c6\u30e0<\/p>\n

            \n
          • \n

            UV\u30ec\u30fc\u30b6\u30fc\u30a6\u30a4\u30f3\u30c9\u30a6\u3068\u5149\u30d5\u30a1\u30a4\u30d0\u30fc\u901a\u4fe1\u30ab\u30d7\u30e9\u30fc\u3002.<\/p>\n<\/li>\n

          • \n

            \u653e\u5c04\u7dda\u3084\u71b1\u30b5\u30a4\u30af\u30eb\u306b\u5f37\u3044\u822a\u7a7a\u5b87\u5b99\u7528\u306e\u5149\u5b66\u7a93\u3002.<\/p>\n<\/li>\n<\/ul>\n

            3 \u533b\u7642\u30fb\u7814\u7a76<\/p>\n

              \n
            • \n

              \u5185\u8996\u93e1\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u30fb\u30b7\u30b9\u30c6\u30e0\u7528\u9ad8\u6e29\u5149\u5b66\u90e8\u54c1\u3002.<\/p>\n<\/li>\n

            • \n

              \u5b9f\u9a13\u7528\u539f\u5b50\u7089\u306e\u8010\u71b1\u89b3\u5bdf\u7a93\u3002.<\/p>\n<\/li>\n<\/ul>\n

              4 \u5c02\u7528\u30af\u30a9\u30fc\u30c4\u30fb\u30a6\u30a3\u30f3\u30c9\u30a6\u30fb\u30d7\u30ec\u30fc\u30c8<\/p>\n

                \n
              • \n

                \u81ea\u7531\u66f2\u9762\u3001\u975e\u5bfe\u79f0\u958b\u53e3\u90e8\u3001\u6bb5\u968e\u7684\u306a\u539a\u307f\u3002.<\/p>\n<\/li>\n

              • \n

                \u53cd\u5c04\u30ed\u30b9\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u30a2\u30f3\u30b0\u30eb\u30ab\u30c3\u30c8\u30a6\u30a3\u30f3\u30c9\u30a6\u3002.<\/p>\n<\/li>\n

              • \n

                \u30de\u30eb\u30c1\u30bb\u30f3\u30b5\u30fc\u7d71\u5408\u306e\u305f\u3081\u306e\u30b9\u30eb\u30fc\u30db\u30fc\u30eb\u30a6\u30a3\u30f3\u30c9\u30a6\u3002.<\/p>\n<\/li>\n

              • \n

                \u30e9\u30d4\u30c3\u30c9\u30d7\u30ed\u30c8\u30bf\u30a4\u30d4\u30f3\u30b0\uff1a\u30b5\u30f3\u30d7\u30eb\u306b3-5\u65e5\u3001500\u500b\u672a\u6e80\u306e\u5c0f\u30ed\u30c3\u30c8\u3001\u7814\u7a76\u304a\u3088\u3073\u8ecd\u4e8b\u7528\u9014\u306e\u305f\u3081\u306e\u30aa\u30d7\u30b7\u30e7\u30f3\u306e\u771f\u7a7a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08AR\u307e\u305f\u306f\u53cd\u5c04\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff09\u3002.<\/p>\n<\/li>\n<\/ul>\n

                \u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/strong><\/h1>\n

                1 \u306a\u305c2\u30a4\u30f3\u30c1\u77f3\u82f1\u30a6\u30a8\u30cf\u30fc\u3092\u9078\u3076\u306e\u304b\uff1f<\/strong>
                2\u30a4\u30f3\u30c1\u77f3\u82f1\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u9ad8\u7d14\u5ea6\u4e8c\u9178\u5316\u30b1\u30a4\u7d20\uff08SiO\u2082\uff09\u304b\u3089\u4f5c\u3089\u308c\u305f\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u57fa\u677f\u3067\u3042\u308b\u3002\u7cbe\u5bc6CNC\u5207\u65ad\u3068\u30ec\u30fc\u30b6\u30fc\u7814\u78e8\u306b\u3088\u308a\u30df\u30af\u30ed\u30f3\u30ec\u30d9\u30eb\u306e\u5e73\u5766\u5ea6\u3092\u5b9f\u73fe\u3002\u3053\u308c\u3089\u306e\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u5bf8\u6cd5\u3068\u539a\u3055\uff08\u00b10.02mm\uff09\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001SEMI\u898f\u683c\u306b\u6e96\u62e0\u3057\u3066\u3044\u308b\u305f\u3081\u3001\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001MEMS\u3001\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u306b\u6700\u9069\u3067\u3059\u3002.<\/p>\n

                2 2\u30a4\u30f3\u30c1\u77f3\u82f1\u30a6\u30a7\u30fc\u30cf\u306e\u4e3b\u306a\u7528\u9014\u306f\uff1f<\/strong>
                \u4e3b\u306b\u534a\u5c0e\u4f53\u88fd\u9020\uff08CMOS\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc\u3001RFID\u30c1\u30c3\u30d7\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\uff09\u3001UV\u30ec\u30fc\u30b6\u30fc\u30a6\u30a4\u30f3\u30c9\u30a6\u3001\u5149\u30d5\u30a1\u30a4\u30d0\u30fc\u901a\u4fe1\u30ab\u30d7\u30e9\u30fc\u3001\u822a\u7a7a\u5b87\u5b99\u5149\u5b66\u90e8\u54c1\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002\u53cd\u5c04\u9632\u6b62\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306a\u3069\u306e\u30ab\u30b9\u30bf\u30e0\u8868\u9762\u51e6\u7406\u306f\u3001\u9ad8\u7cbe\u5ea6\u30b7\u30b9\u30c6\u30e0\u306e\u6027\u80fd\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                \u30a4\u30f3\u30c1\u77f3\u82f1\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u9ad8\u7d14\u5ea6\u306e\u4e8c\u9178\u5316\u30b1\u30a4\u7d20\uff08SiO\u2082\uff09\u304b\u3089\u4f5c\u3089\u308c\u305f\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u57fa\u677f\u3067\u3042\u308b\u3002CNC\u5207\u65ad\u3084\u30ec\u30fc\u30b6\u30fc\u7814\u78e8\u306a\u3069\u306e\u7cbe\u5bc6\u52a0\u5de5\u6280\u8853\u306b\u3088\u308a\u3001\u30df\u30af\u30ed\u30f3\u30ec\u30d9\u30eb\u306e\u5e73\u5766\u6027\u3092\u5b9f\u73fe\u3057\u3066\u3044\u308b\u3002SEMI\u898f\u683c\u306b\u6e96\u62e0\u3057\u3001\u5bf8\u6cd5\u3084\u539a\u307f\u306e\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\uff08\u516c\u5dee\u00b10.02mm\uff09\u306b\u5bfe\u5fdc\u3057\u3066\u304a\u308a\u3001\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001MEMS\uff08Micro-Electro-Mechanical Systems\uff09\u3001\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>","protected":false},"featured_media":2272,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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