{"id":2196,"date":"2026-04-14T06:34:45","date_gmt":"2026-04-14T06:34:45","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2196"},"modified":"2026-04-14T06:34:48","modified_gmt":"2026-04-14T06:34:48","slug":"2-inch-6h-n-silicon-carbide-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/2-inch-6h-n-silicon-carbide-wafer\/","title":{"rendered":"2\u30a4\u30f3\u30c16H-N\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u30fc"},"content":{"rendered":"

\"2\u30a4\u30f3\u30c16H-N\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u30fc\"2\u30a4\u30f3\u30c16H-N\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u306f\u3001\u7814\u7a76\u304a\u3088\u3073\u30c7\u30d0\u30a4\u30b9\u30ec\u30d9\u30eb\u306e\u4e21\u65b9\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u5358\u7d50\u6676\u57fa\u677f\u3067\u3059\u30026H\u30dd\u30ea\u30bf\u30a4\u30d7\u306f\u516d\u65b9\u6676\u306e\u7d50\u6676\u69cb\u9020\u304c\u7279\u5fb4\u3067\u3001\u53b3\u3057\u3044\u6761\u4ef6\u4e0b\u3067\u3082\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u4f1d\u5c0e\u6027\u3068\u512a\u308c\u305f\u71b1\u6027\u80fd\u3092\u767a\u63ee\u3057\u307e\u3059\u3002.<\/p>\n

\u7d043.02eV\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u6301\u30646H-SiC\u306f\u3001\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u304c\u5931\u6557\u3059\u308b\u74b0\u5883\u3001\u7279\u306b\u9ad8\u96fb\u5727\u3001\u9ad8\u6e29\u3001\u9ad8\u5468\u6ce2\u306e\u6761\u4ef6\u4e0b\u3067\u306e\u52d5\u4f5c\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002\u3053\u306e\u305f\u3081\u3001\u521d\u671f\u6bb5\u968e\u306e\u30c7\u30d0\u30a4\u30b9\u8a66\u4f5c\u3001\u6750\u6599\u8a66\u9a13\u3001\u7279\u6b8a\u306a\u96fb\u5b50\u90e8\u54c1\u88fd\u9020\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n

ZMSH SiC\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u4e00\u8cab\u3057\u305f\u62b5\u6297\u7387\u3001\u4f4e\u6b20\u9665\u5bc6\u5ea6\u3001\u9ad8\u3044\u8868\u9762\u54c1\u8cea\u3092\u4fdd\u8a3c\u3059\u308b\u305f\u3081\u306b\u3001\u5236\u5fa1\u3055\u308c\u305f\u7d50\u6676\u6210\u9577\u6280\u8853\u3092\u7528\u3044\u3066\u88fd\u9020\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u3001\u518d\u73fe\u6027\u306e\u3042\u308b\u5b9f\u9a13\u7d50\u679c\u3068\u5b89\u5b9a\u3057\u305f\u30c7\u30d0\u30a4\u30b9\u6027\u80fd\u3092\u4fdd\u8a3c\u3059\u308b\u305f\u3081\u306b\u91cd\u8981\u3067\u3059\u3002.<\/p>\n

\u4e3b\u306a\u7279\u5fb4<\/h2>\n

N\u578b\u5c0e\u96fb\u69cb\u9020<\/h3>\n

\u30a6\u30a7\u30fc\u30cf\u306fN\u578b\u306b\u30c9\u30fc\u30d7\u3055\u308c\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u3084\u96fb\u6c17\u7279\u6027\u5b9f\u9a13\u306b\u9069\u3057\u305f\u5b89\u5b9a\u3057\u305f\u96fb\u5b50\u4f1d\u5c0e\u7d4c\u8def\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n

\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u6750\u6599<\/h3>\n

3.02eV\u306e\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u6301\u3064SiC\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u3068\u6bd4\u8f03\u3057\u3066\u8457\u3057\u304f\u9ad8\u3044\u96fb\u754c\u5f37\u5ea6\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u3001\u9ad8\u96fb\u5727\u52d5\u4f5c\u3068\u30c7\u30d0\u30a4\u30b9\u52b9\u7387\u306e\u5411\u4e0a\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n

\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/h3>\n

SiC\u306f\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027\u3092\u793a\u3057\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u30a2\u30af\u30c6\u30a3\u30d6\u9818\u57df\u304b\u3089\u306e\u52b9\u7387\u7684\u306a\u653e\u71b1\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u4fe1\u983c\u6027\u304c\u5411\u4e0a\u3057\u3001\u5927\u96fb\u529b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306e\u52d5\u4f5c\u5bff\u547d\u304c\u5ef6\u3073\u307e\u3059\u3002.<\/p>\n

\u9ad8\u3044\u6a5f\u68b0\u7684\u5f37\u5ea6<\/h3>\n

\u30e2\u30fc\u30b9\u786c\u5ea6\u7d049.2\u306eSiC\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u88fd\u9020\u4e2d\u306e\u6a5f\u68b0\u7684\u640d\u50b7\u3001\u8868\u9762\u6469\u8017\u3001\u52a0\u5de5\u5fdc\u529b\u306b\u5bfe\u3057\u3066\u5f37\u3044\u8010\u6027\u3092\u6301\u3064\u3002.<\/p>\n

\u9ad8\u30d6\u30ec\u30fc\u30af\u30c0\u30a6\u30f3\u96fb\u754c<\/h3>\n

\u9ad8\u3044\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u5f37\u5ea6\u306f\u3001\u9ad8\u3044\u8010\u96fb\u5727\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u3092\u53ef\u80fd\u306b\u3057\u3001SiC\u3092\u9ad8\u5ea6\u306a\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306b\u7406\u60f3\u7684\u306a\u3082\u306e\u306b\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\u6280\u8853\u4ed5\u69d8<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
\u7d20\u6750<\/td>\n\u5358\u7d50\u6676\u70ad\u5316\u30b1\u30a4\u7d20<\/td>\n<\/tr>\n
\u30d6\u30e9\u30f3\u30c9<\/td>\nZMSH<\/td>\n<\/tr>\n
\u30dd\u30ea\u30bf\u30a4\u30d7<\/td>\n6H-N<\/td>\n<\/tr>\n
\u76f4\u5f84<\/td>\n2\u30a4\u30f3\u30c1\uff0850.8mm\uff09<\/td>\n<\/tr>\n
\u539a\u3055<\/td>\n350 \u03bcm \/ 650 \u03bcm<\/td>\n<\/tr>\n
\u5c0e\u96fb\u7387\u30bf\u30a4\u30d7<\/td>\nN\u30bf\u30a4\u30d7<\/td>\n<\/tr>\n
\u8868\u9762\u4ed5\u4e0a\u3052<\/td>\nCMP\u7814\u78e8Si\u30d5\u30a7\u30fc\u30b9<\/td>\n<\/tr>\n
C\u30d5\u30a7\u30a4\u30b9\u30c8\u30ea\u30fc\u30c8\u30e1\u30f3\u30c8<\/td>\n\u30e1\u30ab\u30cb\u30ab\u30eb\u30fb\u30dd\u30ea\u30c3\u30b7\u30e5<\/td>\n<\/tr>\n
\u8868\u9762\u7c97\u3055<\/td>\nRa < 0.2 nm\uff08Si\u9762\uff09<\/td>\n<\/tr>\n
\u62b5\u6297\u7387<\/td>\n0.015 - 0.028 \u03a9-cm<\/td>\n<\/tr>\n
\u30ab\u30e9\u30fc<\/td>\n\u900f\u660e\/\u30e9\u30a4\u30c8\u30b0\u30ea\u30fc\u30f3<\/td>\n<\/tr>\n
\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/td>\n\u679a\u8449\u5bb9\u5668<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

6H-SiC\u306e\u6750\u6599\u7279\u6027<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u30d7\u30ed\u30d1\u30c6\u30a3<\/th>\n\u4fa1\u5024<\/th>\n<\/tr>\n<\/thead>\n
\u683c\u5b50\u30d1\u30e9\u30e1\u30fc\u30bf<\/td>\na = 3.073 \u00c5\u3001c = 15.117 \u00c5<\/td>\n<\/tr>\n
\u30e2\u30fc\u30b9\u786c\u5ea6<\/td>\n\u2248 9.2<\/td>\n<\/tr>\n
\u5bc6\u5ea6<\/td>\n3.21 g\/cm\u00b3<\/td>\n<\/tr>\n
\u71b1\u81a8\u5f35\u4fc2\u6570<\/td>\n4-5 \u00d710-\u2076 \/K<\/td>\n<\/tr>\n
\u5c48\u6298\u7387 (750 nm)<\/td>\nn\u2080 = 2.60, n\u2091 = 2.65<\/td>\n<\/tr>\n
\u8a98\u96fb\u7387<\/td>\n\u2248 9.66<\/td>\n<\/tr>\n
\u71b1\u4f1d\u5c0e\u7387<\/td>\n~3.7-3.9 W\/cm-K<\/td>\n<\/tr>\n
\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7<\/td>\n3.02 eV<\/td>\n<\/tr>\n
\u7d76\u7e01\u7834\u58ca\u96fb\u754c<\/td>\n3-5 \u00d710\u2076 V\/cm<\/td>\n<\/tr>\n
\u98fd\u548c\u30c9\u30ea\u30d5\u30c8\u901f\u5ea6<\/td>\n2.0 \u00d710\u2075 m\/s<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u3053\u308c\u3089\u306e\u672c\u8cea\u7684\u306a\u7269\u7406\u7684\u7279\u6027\u306b\u3088\u308a\u30016H-SiC\u306f\u6975\u7aef\u306a\u96fb\u6c17\u7684\u30fb\u71b1\u7684\u6761\u4ef6\u4e0b\u3067\u5b89\u5b9a\u3057\u305f\u6027\u80fd\u3092\u5fc5\u8981\u3068\u3059\u308b\u7528\u9014\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\"2\u30a4\u30f3\u30c16H-N\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u30fc\"\u88fd\u9020\u5de5\u7a0b<\/h2>\n

SiC\u5358\u7d50\u6676\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u901a\u5e38\u3001\u4ee5\u4e0b\u306e\u65b9\u6cd5\u3067\u88fd\u9020\u3055\u308c\u308b\u3002 \u7269\u7406\u7684\u84b8\u6c17\u8f38\u9001\uff08PVT\uff09\u6cd5<\/strong>, \u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u7d50\u6676\u6210\u9577\u306e\u305f\u3081\u306e\u6210\u719f\u3057\u305f\u5de5\u696d\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308b\u3002.<\/p>\n

\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u9ad8\u7d14\u5ea6SiC\u539f\u6599\u30922000\u2103\u4ee5\u4e0a\u306e\u6e29\u5ea6\u3067\u6607\u83ef\u3055\u305b\u308b\u3002\u84b8\u6c17\u7a2e\u306f\u6ce8\u610f\u6df1\u304f\u5236\u5fa1\u3055\u308c\u305f\u71b1\u52fe\u914d\u3092\u901a\u3063\u3066\u8f38\u9001\u3055\u308c\u3001\u7a2e\u7d50\u6676\u4e0a\u3067\u518d\u7d50\u6676\u5316\u3057\u3001\u5358\u7d50\u6676\u30a4\u30f3\u30b4\u30c3\u30c8\uff08\u30d6\u30fc\u30eb\uff09\u3092\u5f62\u6210\u3059\u308b\u3002\u6210\u9577\u5f8c\u3001\u30d6\u30fc\u30eb\u306f\u30b9\u30e9\u30a4\u30b9\u3001\u30e9\u30c3\u30d4\u30f3\u30b0\u3001\u7814\u78e8\u3001\u6d17\u6d44\u5de5\u7a0b\u3092\u7d4c\u3066\u30a6\u30a7\u30cf\u30fc\u306b\u52a0\u5de5\u3055\u308c\u308b\u3002.<\/p>\n

\u30c7\u30d0\u30a4\u30b9\u7528\u9014\u3067\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u306f\u3055\u3089\u306b\u6b21\u306e\u5de5\u7a0b\u3092\u7d4c\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002 \u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577<\/strong>, \u3053\u308c\u306b\u3088\u308a\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u6fc3\u5ea6\u3068\u5c64\u539a\u306e\u7cbe\u5bc6\u306a\u5236\u5fa1\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002\u3053\u306e\u30b9\u30c6\u30c3\u30d7\u306f\u3001MOSFET\u3084\u30c0\u30a4\u30aa\u30fc\u30c9\u306e\u88fd\u9020\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3002.<\/p>\n

\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n

\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9<\/h3>\n

2\u30a4\u30f3\u30c16H-N SiC\u30a6\u30a7\u30cf\u306f\u3001\u30c0\u30a4\u30aa\u30fc\u30c9\u3001MOSFET\u69cb\u9020\u3001\u30d1\u30ef\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\u306a\u3069\u306e\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u958b\u767a\u304a\u3088\u3073\u8a66\u4f5c\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u30b7\u30b9\u30c6\u30e0\u3084\u96fb\u529b\u7ba1\u7406\u56de\u8def\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002.<\/p>\n

\u9ad8\u6e29\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9<\/h3>\n

SiC\u6750\u6599\u306f\u9ad8\u6e29\u3067\u3082\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u7684\u6027\u80fd\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u3001\u822a\u7a7a\u5b87\u5b99\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001\u7523\u696d\u7528\u76e3\u8996\u30b7\u30b9\u30c6\u30e0\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30a4\u30f3\u30d5\u30e9\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\u534a\u5c0e\u4f53\u7814\u7a76\u958b\u767a<\/h3>\n

2\u30a4\u30f3\u30c1\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u305d\u306e\u5165\u624b\u306e\u3057\u3084\u3059\u3055\u3068\u30b3\u30b9\u30c8\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u306e\u9ad8\u3055\u304b\u3089\u3001\u5927\u5b66\u306e\u7814\u7a76\u5ba4\u3084\u7814\u7a76\u6a5f\u95a2\u3001\u30d1\u30a4\u30ed\u30c3\u30c8\u751f\u7523\u74b0\u5883\u306b\u304a\u3044\u3066\u3001\u6750\u6599\u7814\u7a76\u3084\u30c7\u30d0\u30a4\u30b9\u5b9f\u9a13\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n

\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3068\u7279\u6b8a\u7528\u9014<\/h3>\n

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    \n
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