{"id":2167,"date":"2026-04-14T02:28:42","date_gmt":"2026-04-14T02:28:42","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2167"},"modified":"2026-04-14T02:28:45","modified_gmt":"2026-04-14T02:28:45","slug":"4-inch-4h-n-silicon-carbide-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/4-inch-4h-n-silicon-carbide-wafer\/","title":{"rendered":"4\u30a4\u30f3\u30c1100mm 4H-N \u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u30fc"},"content":{"rendered":"

\"\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u30fc\"4\u30a4\u30f3\u30c14H-N\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30cf\u306f\u3001\u9ad8\u5ea6\u306a\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u5411\u3051\u306b\u8a2d\u8a08\u3055\u308c\u305f\u5c0e\u96fb\u6027SiC\u57fa\u677f\u3067\u3059\u30024H\u7d50\u6676\u30dd\u30ea\u30bf\u30a4\u30d7\u3092\u30d9\u30fc\u30b9\u3068\u3057\u3066\u304a\u308a\u3001\u305d\u306e\u512a\u308c\u305f\u96fb\u6c17\u7684\u30fb\u71b1\u7684\u6027\u80fd\u306f\u696d\u754c\u3067\u5e83\u304f\u8a8d\u3081\u3089\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u7b2c3\u4e16\u4ee3\u306e\u534a\u5c0e\u4f53\u6750\u6599\u306b\u5c5e\u3057\u3001\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u3068\u6bd4\u8f03\u3057\u3066\u5927\u304d\u306a\u5229\u70b9\u3092\u6301\u3064\u3002\u305d\u306e\u5e83\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3001\u9ad8\u3044\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u3001\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027\u306b\u3088\u308a\u3001\u9ad8\u96fb\u5727\u3001\u9ad8\u5468\u6ce2\u3001\u9ad8\u6e29\u6761\u4ef6\u4e0b\u3067\u52d5\u4f5c\u3059\u308b\u30c7\u30d0\u30a4\u30b9\u306b\u975e\u5e38\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\u3053\u306e\u30a6\u30a7\u30cf\u306f\u3001MOSFET\u3001\u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u30fb\u30d0\u30ea\u30a2\u30fb\u30c0\u30a4\u30aa\u30fc\u30c9\u3001JFET\u3001IGBT\u306a\u3069\u306e\u30d1\u30ef\u30fc\u30fb\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306b\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002\u3053\u308c\u3089\u306e\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u52b9\u7387\u3001\u4fe1\u983c\u6027\u3001\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u8a2d\u8a08\u304c\u4e0d\u53ef\u6b20\u306a\u73fe\u4ee3\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3067\u3059\u30024\u30a4\u30f3\u30c1\u30fb\u30d5\u30a9\u30fc\u30de\u30c3\u30c8\u306f\u3001\u30b3\u30b9\u30c8\u52b9\u7387\u3068\u30c7\u30d0\u30a4\u30b9\u6b69\u7559\u307e\u308a\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u63d0\u4f9b\u3057\u3001\u7814\u7a76\u304a\u3088\u3073\u5de5\u696d\u751f\u7523\u74b0\u5883\u306e\u4e21\u65b9\u3067\u5e83\u304f\u63a1\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u4ed5\u69d8<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n\u4fa1\u5024<\/th>\n<\/tr>\n<\/thead>\n
\u76f4\u5f84<\/td>\n100 \u00b1 0.5 mm<\/td>\n<\/tr>\n
\u539a\u3055<\/td>\n350 \u00b1 25 \u03bcm<\/td>\n<\/tr>\n
\u30dd\u30ea\u30bf\u30a4\u30d7<\/td>\n4H<\/td>\n<\/tr>\n
\u5c0e\u96fb\u7387\u30bf\u30a4\u30d7<\/td>\nN\u30bf\u30a4\u30d7<\/td>\n<\/tr>\n
\u8868\u9762\u7c97\u3055<\/td>\nRa \u2264 0.2 nm<\/td>\n<\/tr>\n
TTV<\/td>\n\u2264 10 \u03bcm<\/td>\n<\/tr>\n
\u30ef\u30fc\u30d7<\/td>\n\u2264 30 \u03bcm<\/td>\n<\/tr>\n
\u6b20\u9665\u5bc6\u5ea6<\/td>\nMPD < 1 ea\/cm\u00b2<\/td>\n<\/tr>\n
\u30a8\u30c3\u30b8<\/td>\n45\u00b0\u30d9\u30d9\u30eb\u3001SEMI\u898f\u683c<\/td>\n<\/tr>\n
\u30b0\u30ec\u30fc\u30c9<\/td>\n\u30d7\u30ed\u30c0\u30af\u30b7\u30e7\u30f3\uff0f\u30ea\u30b5\u30fc\u30c1\uff0f\u30c0\u30df\u30fc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u3053\u308c\u3089\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u306f\u3001\u30a8\u30d4\u30bf\u30ad\u30b7\u30e3\u30eb\u6210\u9577\u3084\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u4e0d\u53ef\u6b20\u306a\u9ad8\u3044\u8868\u9762\u54c1\u8cea\u3068\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n

\u7d20\u6750\u7279\u6027<\/h2>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u7d043.26eV\u306e\u5e83\u3044\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u3092\u793a\u3057\u3001\u30b7\u30ea\u30b3\u30f3\u3068\u6bd4\u8f03\u3057\u3066\u8457\u3057\u304f\u9ad8\u3044\u96fb\u5727\u3067\u30c7\u30d0\u30a4\u30b9\u3092\u52d5\u4f5c\u3055\u305b\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u305d\u306e\u7d50\u679c\u3001\u96fb\u529b\u51e6\u7406\u80fd\u529b\u304c\u5411\u4e0a\u3057\u3001\u4f1d\u5c0e\u640d\u5931\u304c\u6e1b\u5c11\u3059\u308b\u3002.\"\"<\/p>\n

\u3082\u3046\u3072\u3068\u3064\u306e\u91cd\u8981\u306a\u7279\u6027\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u306e10\u500d\u8fd1\u3044\u9ad8\u3044\u7d76\u7e01\u7834\u58ca\u96fb\u754c\u3067\u3042\u308b\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u306e\u8584\u578b\u5316\u3068\u96fb\u529b\u5909\u63db\u30b7\u30b9\u30c6\u30e0\u306e\u9ad8\u52b9\u7387\u5316\u304c\u53ef\u80fd\u306b\u306a\u308b\u3002.<\/p>\n

\u71b1\u4f1d\u5c0e\u7387\u3082\u91cd\u8981\u306a\u5229\u70b9\u3067\u3042\u308b\u3002SiC\u306f\u30b7\u30ea\u30b3\u30f3\u306e\u7d043\u500d\u52b9\u679c\u7684\u306b\u71b1\u3092\u4f1d\u5c0e\u3059\u308b\u305f\u3081\u3001\u30c7\u30d0\u30a4\u30b9\u306f\u9ad8\u8ca0\u8377\u6761\u4ef6\u4e0b\u3067\u3082\u5b89\u5b9a\u3057\u305f\u6027\u80fd\u3092\u7dad\u6301\u3067\u304d\u308b\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u8907\u96d1\u306a\u51b7\u5374\u30b7\u30b9\u30c6\u30e0\u306e\u5fc5\u8981\u6027\u304c\u6e1b\u308a\u3001\u30b7\u30b9\u30c6\u30e0\u5168\u4f53\u306e\u4fe1\u983c\u6027\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002.<\/p>\n

\u3055\u3089\u306b\u3001\u70ad\u5316\u30b1\u30a4\u7d20\u306f600\u2103\u3092\u8d85\u3048\u308b\u6e29\u5ea6\u3067\u3082\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u7279\u6027\u3092\u7dad\u6301\u3057\u307e\u3059\u3002\u3053\u306e\u305f\u3081\u3001\u81ea\u52d5\u8eca\u7528\u30d1\u30ef\u30fc\u30b7\u30b9\u30c6\u30e0\u3001\u7523\u696d\u7528\u30c9\u30e9\u30a4\u30d6\u3001\u822a\u7a7a\u5b87\u5b99\u7528\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306a\u3069\u306e\u904e\u9177\u306a\u74b0\u5883\u3067\u306e\u7528\u9014\u306b\u7279\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\u307e\u305f\u3001\u3053\u306e\u6750\u6599\u306f\u96fb\u5b50\u79fb\u52d5\u5ea6\u304c\u9ad8\u304f\u3001\u30aa\u30f3\u62b5\u6297\u304c\u4f4e\u3044\u305f\u3081\u3001\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u901f\u5ea6\u306e\u9ad8\u901f\u5316\u3068\u30a8\u30cd\u30eb\u30ae\u30fc\u640d\u5931\u306e\u4f4e\u6e1b\u306b\u8ca2\u732e\u3059\u308b\u3002.<\/p>\n

\u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/h2>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30fc\u30cf\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u7528\u9014\u306e\u30cb\u30fc\u30ba\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u8907\u6570\u306e\u76f4\u5f84\u3092\u3054\u7528\u610f\u3057\u3066\u3044\u307e\u3059\uff1a<\/p>\n

\n
\n\n\n\n\n\n\n\n\n\n
\u30b5\u30a4\u30ba<\/th>\n\u76f4\u5f84<\/th>\n\u539a\u3055\u7bc4\u56f2<\/th>\n<\/tr>\n<\/thead>\n
2\u30a4\u30f3\u30c1<\/td>\n50.8 mm<\/td>\n330-350 \u03bcm<\/td>\n<\/tr>\n
3\u30a4\u30f3\u30c1<\/td>\n76.2 mm<\/td>\n350-500 \u03bcm<\/td>\n<\/tr>\n
4\u30a4\u30f3\u30c1<\/td>\n100 mm<\/td>\n350-500 \u03bcm<\/td>\n<\/tr>\n
6\u30a4\u30f3\u30c1<\/td>\n150 mm<\/td>\n350-500 \u03bcm<\/td>\n<\/tr>\n
8\u30a4\u30f3\u30c1<\/td>\n200 mm<\/td>\n350-500 \u03bcm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u4e00\u822c\u7684\u306a\u30bf\u30a4\u30d7\u306b\u306f\u3001\u5c0e\u96fb\u6027\u306e4H-N\u3001\u534a\u7d76\u7e01\u6027\u306eHPSI\u3001\u305d\u306e\u4ed6RF\u3084\u96fb\u529b\u7528\u9014\u5411\u3051\u306e\u7279\u6b8a\u306a\u3082\u306e\u304c\u3042\u308b\u3002.<\/p>\n

\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n

\u96fb\u6c17\u81ea\u52d5\u8eca\u3067\u306f\u3001\u30c8\u30e9\u30af\u30b7\u30e7\u30f3\u30fb\u30a4\u30f3\u30d0\u30fc\u30bf\u30fc\u3001\u8eca\u8f09\u5145\u96fb\u5668\u3001DC-DC\u30b3\u30f3\u30d0\u30fc\u30bf\u30fc\u306bSiC\u30a6\u30a7\u30cf\u30fc\u304c\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002\u30a8\u30cd\u30eb\u30ae\u30fc\u52b9\u7387\u3092\u9ad8\u3081\u3001\u767a\u71b1\u3092\u6291\u3048\u3001\u3088\u308a\u30b3\u30f3\u30d1\u30af\u30c8\u306a\u30b7\u30b9\u30c6\u30e0\u8a2d\u8a08\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.\"\"<\/p>\n

\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001SiC\u30c7\u30d0\u30a4\u30b9\u304c\u30bd\u30fc\u30e9\u30fc\u30fb\u30a4\u30f3\u30d0\u30fc\u30bf\u3084\u98a8\u529b\u767a\u96fb\u30b3\u30f3\u30d0\u30fc\u30bf\u306b\u5fdc\u7528\u3055\u308c\u3066\u3044\u308b\u3002\u305d\u306e\u9ad8\u52b9\u7387\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u640d\u5931\u306e\u4f4e\u6e1b\u3068\u30b7\u30b9\u30c6\u30e0\u6027\u80fd\u306e\u5411\u4e0a\u306b\u8ca2\u732e\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\u7523\u696d\u7528\u30b7\u30b9\u30c6\u30e0\u3082SiC\u6280\u8853\u306e\u6069\u6075\u3092\u53d7\u3051\u3066\u304a\u308a\u3001\u7279\u306b\u4fe1\u983c\u6027\u3068\u8010\u4e45\u6027\u304c\u91cd\u8981\u8996\u3055\u308c\u308b\u9ad8\u51fa\u529b\u30e2\u30fc\u30bf\u30fc\u99c6\u52d5\u88c5\u7f6e\u3084\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u88c5\u7f6e\u3067\u305d\u306e\u5a01\u529b\u3092\u767a\u63ee\u3057\u3066\u3044\u308b\u3002.<\/p>\n

\u96fb\u529b\u7db2\u306e\u30a4\u30f3\u30d5\u30e9\u3067\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u5909\u63db\u52b9\u7387\u3092\u9ad8\u3081\u3001\u30b7\u30b9\u30c6\u30e0\u640d\u5931\u3092\u4f4e\u6e1b\u3059\u308b\u305f\u3081\u306b\u3001\u30b9\u30de\u30fc\u30c8\u30b0\u30ea\u30c3\u30c9\u30b7\u30b9\u30c6\u30e0\u3084\u9ad8\u5727\u9001\u96fb\u8a2d\u5099\u306b\u70ad\u5316\u30b1\u30a4\u7d20\u304c\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n

\u822a\u7a7a\u5b87\u5b99\u304a\u3088\u3073\u9632\u885b\u7528\u9014\u3067\u306f\u3001\u6975\u7aef\u306a\u6e29\u5ea6\u3084\u74b0\u5883\u6761\u4ef6\u4e0b\u3067\u52d5\u4f5c\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u9ad8\u4fe1\u983c\u6027\u96fb\u5b50\u6a5f\u5668\u306bSiC\u304c\u5229\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n

Si\u3068SiC\u306e\u6bd4\u8f03<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n
\u30d7\u30ed\u30d1\u30c6\u30a3<\/th>\n\u30b7\u30ea\u30b3\u30f3<\/th>\n\u70ad\u5316\u30b1\u30a4\u7d20<\/th>\n<\/tr>\n<\/thead>\n
\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7<\/td>\n1.12 eV<\/td>\n3.26 eV<\/td>\n<\/tr>\n
\u6545\u969c\u8005\u30d5\u30a3\u30fc\u30eb\u30c9<\/td>\n\u4f4e\u3044<\/td>\n\u9ad8\u3044<\/td>\n<\/tr>\n
\u71b1\u4f1d\u5c0e\u7387<\/td>\n\u4e2d\u7a0b\u5ea6<\/td>\n\u9ad8\u3044<\/td>\n<\/tr>\n
\u6700\u9ad8\u6e29\u5ea6<\/td>\n~150\u00b0C<\/td>\n>600\u00b0C<\/td>\n<\/tr>\n
\u52b9\u7387\u6027<\/td>\n\u30b9\u30bf\u30f3\u30c0\u30fc\u30c9<\/td>\n\u9ad8\u3044<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u30b7\u30ea\u30b3\u30f3\u306f\u4f9d\u7136\u3068\u3057\u3066\u4f4e\u96fb\u529b\u3067\u5f93\u6765\u578b\u306e\u96fb\u5b50\u6a5f\u5668\u306b\u9069\u3057\u3066\u3044\u308b\u304c\u3001\u70ad\u5316\u30b7\u30ea\u30b3\u30f3\u306f\u9ad8\u96fb\u529b\u3067\u9ad8\u52b9\u7387\u306e\u30b7\u30b9\u30c6\u30e0\u306b\u307e\u3059\u307e\u3059\u597d\u307e\u308c\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n

\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n

Q: \u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u3068\u70ad\u5316\u30b1\u30a4\u7d20\u30a6\u30a7\u30fc\u30cf\u306e\u9055\u3044\u306f\u4f55\u3067\u3059\u304b\uff1f<\/strong>
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Q: SiC\u3068GaN\u306e\u6bd4\u8f03\u306f\uff1f<\/strong>
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Q: \u70ad\u5316\u30b1\u30a4\u7d20\u306f\u30bb\u30e9\u30df\u30c3\u30af\u3067\u3059\u304b\u3001\u305d\u308c\u3068\u3082\u534a\u5c0e\u4f53\u3067\u3059\u304b\uff1f<\/strong>
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","protected":false},"excerpt":{"rendered":"

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