{"id":2084,"date":"2026-04-03T02:35:11","date_gmt":"2026-04-03T02:35:11","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2084"},"modified":"2026-04-03T02:36:56","modified_gmt":"2026-04-03T02:36:56","slug":"split-type-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/split-type-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"6\u201d\/8 \u201d\u30a8\u30d4\u30a6\u30a8\u30cf\u30fc\u7528\u5206\u5272\u578b\u5782\u76f4\u6c17\u6d41\u5f0fSiC\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u88c5\u7f6e"},"content":{"rendered":"<p data-start=\"207\" data-end=\"731\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2087 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" 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https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" 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data-end=\"2167\">\u30cf\u30a4\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u751f\u7523\u306e\u305f\u3081\u306e\u30c7\u30e5\u30a2\u30eb\u30c1\u30e3\u30f3\u30d0\u30fc\u69cb\u6210<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2168\" data-end=\"2217\">\u4f4e\u6b20\u9665\u5bc6\u5ea6\u3068\u9ad8\u6b69\u7559\u307e\u308a\u6027\u80fd<\/li>\n<li data-section-id=\"1rmzhz1\" data-start=\"2218\" data-end=\"2293\">EFEM\u3068\u5929\u4e95\u30af\u30ec\u30fc\u30f3\u306e\u7d71\u5408\u306b\u3088\u308b\u5b8c\u5168\u81ea\u52d5\u5316\u30a6\u30a7\u30fc\u30cf\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0<\/li>\n<li data-section-id=\"1o0wgtg\" data-start=\"2294\" data-end=\"2334\">6\u30a4\u30f3\u30c1\u304a\u3088\u30738\u30a4\u30f3\u30c1SiC\u30a6\u30a7\u30cf\u30fc\u306b\u5bfe\u5fdc<\/li>\n<li data-section-id=\"1vtm55j\" data-start=\"2335\" data-end=\"2390\">\u539a\u819c\u304a\u3088\u3073\u30c8\u30ec\u30f3\u30c1\u30d5\u30a3\u30ea\u30f3\u30b0\u30fb\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u306b\u6700\u9069\u5316<\/li>\n<li 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data-col-size=\"sm\">\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8<\/td>\n<td data-start=\"2545\" data-end=\"2620\" data-col-size=\"md\">\u22651100\u679a\/\u6708\uff08\u30c7\u30e5\u30a2\u30eb\u30c1\u30e3\u30f3\u30d0\u30fc\uff09\u3001\u6700\u59271200\u679a\/\u6708\uff08\u6700\u9069\u5316\u30c1\u30e3\u30f3\u30d0\u30fc\uff09<\/td>\n<\/tr>\n<tr data-start=\"2621\" data-end=\"2674\">\n<td data-start=\"2621\" data-end=\"2648\" data-col-size=\"sm\">\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u4e92\u63db\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"2648\" data-end=\"2674\">6\u30a4\u30f3\u30c1\/8\u30a4\u30f3\u30c1SiC\u30a8\u30d4\u30a6\u30a8\u30cf\u30fc<\/td>\n<\/tr>\n<tr data-start=\"2675\" data-end=\"2711\">\n<td data-start=\"2675\" data-end=\"2697\" data-col-size=\"sm\">\u6e29\u5ea6\u7ba1\u7406<\/td>\n<td data-col-size=\"md\" data-start=\"2697\" data-end=\"2711\">\u30de\u30eb\u30c1\u30be\u30fc\u30f3<\/td>\n<\/tr>\n<tr data-start=\"2712\" data-end=\"2771\">\n<td data-start=\"2712\" 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