{"id":2077,"date":"2026-04-03T02:07:51","date_gmt":"2026-04-03T02:07:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2077"},"modified":"2026-04-03T02:09:04","modified_gmt":"2026-04-03T02:09:04","slug":"integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"6\u201d\/8 \u201d\u30a8\u30d4\u30a6\u30a8\u30cf\u30fc\u7528\u96c6\u7a4d\u578b\u5782\u76f4\u6c17\u6d41SiC\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc\u88c5\u7f6e"},"content":{"rendered":"<p data-start=\"187\" data-end=\"641\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2079 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png\" alt=\"\" width=\"300\" height=\"300\" 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data-col-size=\"md\">\u22651100\u679a\/\u6708\uff08\u30c7\u30e5\u30a2\u30eb\u30c1\u30e3\u30f3\u30d0\u30fc\uff09\u3001\u6700\u59271200\u679a\/\u6708\uff08\u6700\u9069\u5316\u30c1\u30e3\u30f3\u30d0\u30fc\uff09<\/td>\n<\/tr>\n<tr data-start=\"2885\" data-end=\"2938\">\n<td data-start=\"2885\" data-end=\"2912\" data-col-size=\"sm\">\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u4e92\u63db\u6027<\/td>\n<td data-col-size=\"md\" data-start=\"2912\" data-end=\"2938\">6\u30a4\u30f3\u30c1\/8\u30a4\u30f3\u30c1SiC\u30a8\u30d4\u30a6\u30a8\u30cf\u30fc<\/td>\n<\/tr>\n<tr data-start=\"2939\" data-end=\"2975\">\n<td data-start=\"2939\" data-end=\"2961\" data-col-size=\"sm\">\u6e29\u5ea6\u7ba1\u7406<\/td>\n<td data-start=\"2961\" data-end=\"2975\" data-col-size=\"md\">\u30de\u30eb\u30c1\u30be\u30fc\u30f3<\/td>\n<\/tr>\n<tr data-start=\"2976\" data-end=\"3035\">\n<td data-start=\"2976\" data-end=\"2993\" data-col-size=\"sm\">\u6c17\u6d41\u30b7\u30b9\u30c6\u30e0<\/td>\n<td data-start=\"2993\" 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