{"id":2048,"date":"2026-04-01T05:59:16","date_gmt":"2026-04-01T05:59:16","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2048"},"modified":"2026-04-01T06:04:59","modified_gmt":"2026-04-01T06:04:59","slug":"microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing\/","title":{"rendered":"\u9ad8\u7cbe\u5ea6\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u52a0\u5de5\u7528\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30ec\u30fc\u30b6\u30fc\u88c5\u7f6e"},"content":{"rendered":"<p data-start=\"245\" data-end=\"828\"><img decoding=\"async\" class=\"alignright wp-image-2054 size-thumbnail\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-150x150.png\" alt=\"\" width=\"150\" height=\"150\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-100x100.png 100w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/>\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30ec\u30fc\u30b6\u30fc\u88c5\u7f6e\u306f\u3001\u5148\u9032\u306e\u30de\u30a4\u30af\u30ed\u30b8\u30a7\u30c3\u30c8\u30ec\u30fc\u30b6\u30fc\u6280\u8853\u3092\u6d3b\u7528\u3057\u3001\u534a\u5c0e\u4f53\u30a6\u30a7\u30cf\u30fc\u3084\u305d\u306e\u4ed6\u306e\u786c\u8cea\u3001\u8106\u6027\u3001\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u6750\u6599\u306b\u5bfe\u3057\u3066\u3001\u9ad8\u7cbe\u5ea6\u3001\u4f4e\u71b1\u30c0\u30e1\u30fc\u30b8\u306e\u52a0\u5de5\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u306e\u30a6\u30a9\u30fc\u30bf\u30fc\u30b8\u30a7\u30c3\u30c8\u3068\u30ec\u30fc\u30b6\u30fc\u30d3\u30fc\u30e0\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u30b7\u30b9\u30c6\u30e0\u306f\u30ec\u30fc\u30b6\u30fc\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u52a0\u5de5\u7269\u306e\u8868\u9762\u306b\u6b63\u78ba\u306b\u5c0e\u304f\u3068\u540c\u6642\u306b\u3001\u6c34\u6d41\u306b\u3088\u3063\u3066\u52a0\u5de5\u5c51\u3092\u9023\u7d9a\u7684\u306b\u51b7\u5374\u30fb\u9664\u53bb\u3057\u307e\u3059\u3002\u3053\u306e\u6280\u8853\u306f\u3001\u71b1\u640d\u50b7\u3001\u30de\u30a4\u30af\u30ed\u30af\u30e9\u30c3\u30af\u3001\u6c5a\u67d3\u3001\u30c6\u30fc\u30d1\u30fc\u3001\u5909\u5f62\u306a\u3069\u3001\u5f93\u6765\u306e\u30ec\u30fc\u30b6\u30fc\u52a0\u5de5\u3068\u6a5f\u68b0\u52a0\u5de5\u306b\u5171\u901a\u3059\u308b\u8ab2\u984c\u306b\u52b9\u679c\u7684\u306b\u5bfe\u51e6\u3057\u307e\u3059\u3002.<\/p>\n<h2 data-section-id=\"1bqk1w5\" data-start=\"835\" data-end=\"856\"><span role=\"text\"><strong data-start=\"838\" data-end=\"854\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2055 alignleft\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-300x274.png\" alt=\"\" width=\"300\" height=\"274\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-300x274.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-13x12.png 13w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-600x548.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55.png 641w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u4e3b\u306a\u7279\u5fb4<\/strong><\/span><\/h2>\n<ul data-start=\"857\" data-end=\"1548\">\n<li data-section-id=\"1vikzsj\" data-start=\"857\" data-end=\"984\"><strong data-start=\"859\" data-end=\"874\">\u30ec\u30fc\u30b6\u30fc\u30bf\u30a4\u30d7\uff1a<\/strong> \u30c0\u30a4\u30aa\u30fc\u30c9\u52b1\u8d77\u56fa\u4f53Nd:YAG\u30ec\u30fc\u30b6\u30fc\u3001\u6ce2\u9577532\/1064 nm\u3001\u30d1\u30eb\u30b9\u5e45\u03bcs\/ns\u3001\u5e73\u5747\u51fa\u529b10-200 W<\/li>\n<li data-section-id=\"1huhii5\" data-start=\"985\" data-end=\"1128\"><strong data-start=\"987\" data-end=\"1008\">\u30a6\u30a9\u30fc\u30bf\u30fc\u30b8\u30a7\u30c3\u30c8\u30b7\u30b9\u30c6\u30e0\uff1a<\/strong> \u4f4e\u5727\u3001\u8131\u30a4\u30aa\u30f3\u3001\u308d\u904e\u6c34; \u8d85\u5fae\u7d30\u30de\u30a4\u30af\u30ed\u30b8\u30a7\u30c3\u30c8\u306f\u3001300 bar\u3067\u308f\u305a\u304b1 L\/h\u306e\u6d88\u8cbb\u3001\u3054\u304f\u308f\u305a\u304b\u306a\u529b(&lt;0.1 N)<\/li>\n<li data-section-id=\"6bpefa\" data-start=\"1129\" data-end=\"1211\"><strong data-start=\"1131\" data-end=\"1142\">\u30ce\u30ba\u30eb\uff1a<\/strong> \u30b5\u30d5\u30a1\u30a4\u30a2\u307e\u305f\u306f\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3001\u76f4\u5f8430\uff5e150\u03bcm\u3001\u7cbe\u5bc6\u30ec\u30fc\u30b6\u30fc\u30ac\u30a4\u30c9\u7528<\/li>\n<li data-section-id=\"1kl8vyj\" data-start=\"1212\" data-end=\"1313\"><strong data-start=\"1214\" data-end=\"1235\">\u88dc\u52a9\u30b7\u30b9\u30c6\u30e0\uff1a<\/strong> \u9ad8\u5727\u30dd\u30f3\u30d7\u3068\u6c34\u51e6\u7406\u30e6\u30cb\u30c3\u30c8\u3067\u5b89\u5b9a\u3057\u305f\u5674\u5c04\u6027\u80fd\u3092\u78ba\u4fdd<\/li>\n<li data-section-id=\"xrg2jd\" data-start=\"1314\" data-end=\"1396\"><strong data-start=\"1316\" data-end=\"1330\">\u7cbe\u5ea6\u304c\u9ad8\u3044\uff1a<\/strong> \u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6\u00b15\u03bcm\u3001\u7e70\u308a\u8fd4\u3057\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6\u00b12\u03bcm<\/li>\n<li data-section-id=\"17g1bmx\" data-start=\"1397\" data-end=\"1548\"><strong data-start=\"1399\" data-end=\"1425\">\u51e6\u7406\u80fd\u529b\uff1a<\/strong> \u8868\u9762\u7c97\u3055Ra\u22641.2\uff5e1.6\u03bcm\u3001\u76f4\u7dda\u5207\u65ad\u901f\u5ea6\u226550 mm\/s\u3001\u958b\u53e3\u901f\u5ea6\u22651.25 mm\/s\u3001\u5186\u5468\u5207\u65ad\u22656 mm\/s<\/li>\n<\/ul>\n<h2 data-section-id=\"10oaxfc\" data-start=\"1555\" data-end=\"1588\"><span role=\"text\"><strong data-start=\"1558\" data-end=\"1586\">\u6280\u8853\u4ed5\u69d8<\/strong><\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1590\" data-end=\"2259\">\n<thead data-start=\"1590\" data-end=\"1629\">\n<tr data-start=\"1590\" data-end=\"1629\">\n<th class=\"\" data-start=\"1590\" data-end=\"1606\" data-col-size=\"sm\">\u4ed5\u69d8<\/th>\n<th class=\"\" data-start=\"1606\" data-end=\"1617\" data-col-size=\"sm\">\u30aa\u30d7\u30b7\u30e7\u30f31<\/th>\n<th class=\"\" data-start=\"1617\" data-end=\"1629\" data-col-size=\"sm\">\u30aa\u30d7\u30b7\u30e7\u30f32<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1670\" data-end=\"2259\">\n<tr data-start=\"1670\" data-end=\"1724\">\n<td data-start=\"1670\" data-end=\"1695\" data-col-size=\"sm\">\u30ab\u30a6\u30f3\u30bf\u30fc\u30c8\u30c3\u30d7\u5bb9\u7a4d\uff08mm\uff09<\/td>\n<td data-col-size=\"sm\" data-start=\"1695\" data-end=\"1709\">300\u00d7300\u00d7150<\/td>\n<td data-col-size=\"sm\" data-start=\"1709\" data-end=\"1724\">400\u00d7400\u00d7200<\/td>\n<\/tr>\n<tr data-start=\"1725\" data-end=\"1773\">\n<td data-start=\"1725\" data-end=\"1742\" data-col-size=\"sm\">\u30ea\u30cb\u30a2\u8ef8XY<\/td>\n<td data-col-size=\"sm\" data-start=\"1742\" data-end=\"1757\">\u30ea\u30cb\u30a2\u30e2\u30fc\u30bf\u30fc<\/td>\n<td data-col-size=\"sm\" data-start=\"1757\" data-end=\"1773\">\u30ea\u30cb\u30a2\u30e2\u30fc\u30bf\u30fc<\/td>\n<\/tr>\n<tr data-start=\"1774\" data-end=\"1803\">\n<td data-start=\"1774\" data-end=\"1790\" data-col-size=\"sm\">\u30ea\u30cb\u30a2\u8ef8Z<\/td>\n<td data-col-size=\"sm\" data-start=\"1790\" data-end=\"1796\">150<\/td>\n<td data-col-size=\"sm\" data-start=\"1796\" data-end=\"1803\">200<\/td>\n<\/tr>\n<tr data-start=\"1804\" data-end=\"1843\">\n<td data-start=\"1804\" data-end=\"1832\" data-col-size=\"sm\">\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6 (\u03bcm)<\/td>\n<td data-col-size=\"sm\" data-start=\"1832\" data-end=\"1837\">\u00b15<\/td>\n<td data-col-size=\"sm\" data-start=\"1837\" data-end=\"1843\">\u00b15<\/td>\n<\/tr>\n<tr data-start=\"1844\" data-end=\"1892\">\n<td data-start=\"1844\" data-end=\"1881\" data-col-size=\"sm\">\u7e70\u308a\u8fd4\u3057\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6 (\u03bcm)<\/td>\n<td data-col-size=\"sm\" data-start=\"1881\" data-end=\"1886\">\u00b12<\/td>\n<td data-col-size=\"sm\" data-start=\"1886\" data-end=\"1892\">\u00b12<\/td>\n<\/tr>\n<tr data-start=\"1893\" data-end=\"1924\">\n<td data-start=\"1893\" data-end=\"1912\" data-col-size=\"sm\">\u52a0\u901f\u5ea6 (G)<\/td>\n<td data-col-size=\"sm\" data-start=\"1912\" data-end=\"1916\">1<\/td>\n<td data-col-size=\"sm\" data-start=\"1916\" data-end=\"1924\">0.29<\/td>\n<\/tr>\n<tr data-start=\"1925\" data-end=\"1998\">\n<td data-start=\"1925\" data-end=\"1945\" data-col-size=\"sm\">\u6570\u5024\u5236\u5fa1<\/td>\n<td data-col-size=\"sm\" data-start=\"1945\" data-end=\"1971\">3\u8ef8\/3+1\u8ef8\/3+2\u8ef8<\/td>\n<td data-col-size=\"sm\" data-start=\"1971\" data-end=\"1998\">3\u8ef8\/3+1\u8ef8\/3+2\u8ef8<\/td>\n<\/tr>\n<tr data-start=\"1999\" data-end=\"2040\">\n<td data-start=\"1999\" data-end=\"2017\" data-col-size=\"sm\">\u6ce2\u9577 (nm)<\/td>\n<td data-col-size=\"sm\" data-start=\"2017\" data-end=\"2028\">532\/1064<\/td>\n<td data-col-size=\"sm\" data-start=\"2028\" data-end=\"2040\">532\/1064<\/td>\n<\/tr>\n<tr data-start=\"2041\" data-end=\"2086\">\n<td data-start=\"2041\" data-end=\"2059\" data-col-size=\"sm\">\u5b9a\u683c\u96fb\u529b (W)<\/td>\n<td data-col-size=\"sm\" data-start=\"2059\" data-end=\"2072\">50\/100\/200<\/td>\n<td data-col-size=\"sm\" data-start=\"2072\" data-end=\"2086\">50\/100\/200<\/td>\n<\/tr>\n<tr data-start=\"2087\" data-end=\"2133\">\n<td data-start=\"2087\" data-end=\"2114\" data-col-size=\"sm\">\u30a6\u30a9\u30fc\u30bf\u30fc\u30b8\u30a7\u30c3\u30c8\u5727\u529b (bar)<\/td>\n<td data-col-size=\"sm\" data-start=\"2114\" data-end=\"2123\">50-100<\/td>\n<td data-col-size=\"sm\" data-start=\"2123\" data-end=\"2133\">50-600<\/td>\n<\/tr>\n<tr data-start=\"2134\" data-end=\"2172\">\n<td data-start=\"2134\" data-end=\"2153\" data-col-size=\"sm\">\u30ce\u30ba\u30eb\u30b5\u30a4\u30ba\uff08\u03bcm\uff09<\/td>\n<td data-col-size=\"sm\" data-start=\"2153\" data-end=\"2162\">30-150<\/td>\n<td data-col-size=\"sm\" data-start=\"2162\" data-end=\"2172\">30-150<\/td>\n<\/tr>\n<tr data-start=\"2173\" data-end=\"2234\">\n<td data-start=\"2173\" data-end=\"2199\" data-col-size=\"sm\">\u6a5f\u68b0\u5bf8\u6cd5\uff08mm\uff09<\/td>\n<td data-col-size=\"sm\" data-start=\"2199\" data-end=\"2216\">1445\u00d71944\u00d72260<\/td>\n<td data-col-size=\"sm\" data-start=\"2216\" data-end=\"2234\">1700\u00d71500\u00d72120<\/td>\n<\/tr>\n<tr data-start=\"2235\" data-end=\"2259\">\n<td data-start=\"2235\" data-end=\"2248\" data-col-size=\"sm\">\u91cd\u91cf (T)<\/td>\n<td data-col-size=\"sm\" data-start=\"2248\" data-end=\"2254\">2.5<\/td>\n<td data-col-size=\"sm\" data-start=\"2254\" data-end=\"2259\">3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"3f2aoc\" data-start=\"2266\" data-end=\"2287\"><span role=\"text\"><strong data-start=\"2269\" data-end=\"2285\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/strong><\/span><\/h2>\n<ol data-start=\"2289\" data-end=\"3456\">\n<li data-section-id=\"uspqzy\" data-start=\"2289\" data-end=\"2611\"><strong data-start=\"2292\" data-end=\"2318\">\u30a6\u30a8\u30cf\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\uff06\u30ab\u30c3\u30c6\u30a3\u30f3\u30b0<\/strong>\n<ul data-start=\"2324\" data-end=\"2611\">\n<li data-section-id=\"15n5kv\" data-start=\"2324\" data-end=\"2427\">\u6750\u6599\u30b7\u30ea\u30b3\u30f3(Si)\u3001\u70ad\u5316\u30b1\u30a4\u7d20(SiC)\u3001\u7a92\u5316\u30ac\u30ea\u30a6\u30e0(GaN)\u3001\u305d\u306e\u4ed6\u786c\u304f\u3066\u8106\u3044\u30a6\u30a7\u30cf\u30fc<\/li>\n<li data-section-id=\"4o8wnm\" data-start=\"2431\" data-end=\"2611\">\u5229\u70b9\u5f93\u6765\u306e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30d6\u30ec\u30fc\u30c9\u304b\u3089\u306e\u7f6e\u304d\u63db\u3048\u3001\u30a8\u30c3\u30b8\u7834\u640d\u306e\u4f4e\u6e1b\uff0820 \u03bcm\uff09\u300130%\u306e\u5207\u65ad\u901f\u5ea6\u5411\u4e0a\u3001\u6975\u8584\u30a6\u30a7\u30fc\u30cf\uff08&lt;50 \u03bcm\uff09\u306e\u30b9\u30c6\u30eb\u30b9\u30c0\u30a4\u30b7\u30f3\u30b0\u304c\u53ef\u80fd<\/li>\n<\/ul>\n<\/li>\n<li data-section-id=\"1yejyyv\" 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