{"id":2021,"date":"2026-03-27T01:46:43","date_gmt":"2026-03-27T01:46:43","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2021"},"modified":"2026-03-27T01:46:45","modified_gmt":"2026-03-27T01:46:45","slug":"high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration\/","title":{"rendered":"Si-Si\u3001SiC-SiC\u3001\u30d8\u30c6\u30ed\u30b8\u30cb\u30a2\u30b9\u30fb\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u7528\u9ad8\u7cbe\u5ea6\u30a6\u30a7\u30fc\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u88c5\u7f6e"},"content":{"rendered":"

\u30a6\u30a7\u30fc\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u88c5\u7f6e\u306f\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3001MEMS\u88fd\u9020\u3001\u7b2c3\u4e16\u4ee3\u534a\u5c0e\u4f53\u96c6\u7a4d\u306e\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u6027\u80fd\u30b7\u30b9\u30c6\u30e0\u3067\u3059\u30022\u30a4\u30f3\u30c1\u304b\u308912\u30a4\u30f3\u30c1\u306e\u30a6\u30a7\u30fc\u30cf\u306b\u5bfe\u5fdc\u3057\u3001\u5ba4\u6e29\u3067\u306e\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3068\u89aa\u6c34\u6027\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u304c\u53ef\u80fd\u3067\u3001\u7279\u306bSi-Si\u3001SiC-SiC\u3001\u7570\u7a2e\u6750\u6599\uff08Si-SiC\u3001GaN\u3001\u30b5\u30d5\u30a1\u30a4\u30a2\u306a\u3069\uff09\u306e\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n

\"\"<\/p>\n

\u7814\u7a76\u958b\u767a\u74b0\u5883\u3068\u5927\u91cf\u751f\u7523\u306e\u4e21\u65b9\u306b\u5bfe\u5fdc\u3059\u308b\u3088\u3046\u8a2d\u8a08\u3055\u308c\u305f\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u8d85\u7cbe\u5bc6\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u3001\u9589\u30eb\u30fc\u30d7\u5727\u529b\u30fb\u6e29\u5ea6\u5236\u5fa1\u3001\u8d85\u9ad8\u771f\u7a7a\u63a5\u5408\u6761\u4ef6\u3092\u7d71\u5408\u3057\u3001\u9ad8\u3044\u63a5\u5408\u5f37\u5ea6\u3001\u512a\u308c\u305f\u754c\u9762\u5747\u4e00\u6027\u3001\u4f4e\u6b20\u9665\u5bc6\u5ea6\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n

\u4e3b\u306a\u7279\u5fb4<\/span><\/h1>\n

\"\"1.\u5148\u9032\u306e\u5e38\u6e29\u63a5\u5408\u6280\u8853<\/span><\/h3>\n
    \n
  • \u71b1\u5fdc\u529b\u3068\u30a6\u30a7\u30cf\u53cd\u308a\u3092\u6392\u9664<\/li>\n
  • \u6e29\u5ea6\u306b\u654f\u611f\u306a\u7570\u7a2e\u6750\u6599\u306e\u63a5\u7740\u304c\u53ef\u80fd<\/li>\n
  • \u89aa\u6c34\u6027\u63a5\u7740\u3068\u30d7\u30e9\u30ba\u30de\u6d3b\u6027\u5316\u63a5\u7740\u306b\u5bfe\u5fdc<\/li>\n<\/ul>\n

    2.\u8d85\u9ad8\u7cbe\u5ea6\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8<\/span><\/h3>\n
      \n
    • \u30de\u30fc\u30af\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u7cbe\u5ea6\uff1a\u2266\u00b12\u03bcm<\/li>\n
    • \u30a8\u30c3\u30b8\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u7cbe\u5ea6\uff1a\u2266\u00b150\u03bcm<\/li>\n
    • \u30aa\u30d7\u30b7\u30e7\u30f3\u3067\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u30b7\u30b9\u30c6\u30e0\u306b\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u53ef\u80fd<\/li>\n<\/ul>\n

      3.\u9ad8\u3044\u63a5\u7740\u5f37\u5ea6\u3068\u754c\u9762\u54c1\u8cea<\/span><\/h3>\n
        \n
      • \u2265 2.0 J\/m\u00b2\uff08\u5ba4\u6e29\u3067\u306eSi-Si\u76f4\u63a5\u63a5\u5408\uff09<\/li>\n
      • \u30d7\u30e9\u30ba\u30de\u8868\u9762\u6d3b\u6027\u5316\u3067\u6700\u59275 J\/m\u00b2 \u4ee5\u4e0a<\/li>\n
      • \u8d85\u9ad8\u771f\u7a7a\u6761\u4ef6\u4e0b\u3067\u306e\u512a\u308c\u305f\u754c\u9762\u6e05\u6d44\u6027<\/li>\n<\/ul>\n

        4.\u5e45\u5e83\u3044\u7d20\u6750\u9069\u5408\u6027<\/span><\/h3>\n

        \u306e\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\uff1a<\/p>\n

          \n
        • \u534a\u5c0e\u4f53Si\u3001SiC\u3001GaN\u3001GaAs\u3001InP<\/li>\n
        • \u5149\u5b66\u6750\u6599\u30b5\u30d5\u30a1\u30a4\u30a2\u3001\u30ac\u30e9\u30b9<\/li>\n
        • \u6a5f\u80fd\u6027\u6750\u6599LiNbO\u2083\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9<\/li>\n<\/ul>\n

          5.\u67d4\u8edf\u306a\u30d7\u30ed\u30bb\u30b9\u80fd\u529b<\/span><\/h3>\n
            \n
          • \u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba\uff1a2\u2033\uff5e12<\/li>\n
          • \u4e0d\u5b9a\u5f62\u30b5\u30f3\u30d7\u30eb\u306b\u5bfe\u5fdc<\/li>\n
          • \u30aa\u30d7\u30b7\u30e7\u30f3\u30e2\u30b8\u30e5\u30fc\u30eb\uff1a\u4e88\u71b1\/\u30a2\u30cb\u30fc\u30eb\uff08RT-500\uff09<\/li>\n<\/ul>\n

            \u6280\u8853\u4ed5\u69d8<\/span><\/h1>\n
            \n
            \n\n\n\n\n\n\n\n\n\n\n\n\n
            \u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
            \u63a5\u7740\u65b9\u6cd5<\/td>\n\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0 \/ \u30d7\u30e9\u30ba\u30de\u6d3b\u6027\u5316\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/td>\n<\/tr>\n
            \u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/td>\n2\u2033 - 12\u2033<\/td>\n<\/tr>\n
            \u5727\u529b\u7bc4\u56f2<\/td>\n0 - 10 MPa<\/td>\n<\/tr>\n
            \u30de\u30c3\u30af\u30b9\u30fb\u30d5\u30a9\u30fc\u30b9<\/td>\n100 kN<\/td>\n<\/tr>\n
            \u6e29\u5ea6\u7bc4\u56f2<\/td>\n\u5ba4\u6e29\uff5e500\u2103\uff08\u30aa\u30d7\u30b7\u30e7\u30f3\uff09<\/td>\n<\/tr>\n
            \u771f\u7a7a\u30ec\u30d9\u30eb<\/td>\n\u2264 5 \u00d7 10-\u2076 Torr<\/td>\n<\/tr>\n
            \u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u7cbe\u5ea6<\/td>\n\u2264 \u00b12\u03bcm\uff08\u30de\u30fc\u30af\uff09\u3001\u2264 \u00b150\u03bcm\uff08\u30a8\u30c3\u30b8\uff09<\/td>\n<\/tr>\n
            \u63a5\u7740\u5f37\u5ea6<\/td>\n\u2265 2.0 J\/m\u00b2\u4ee5\u4e0a\uff08RT-Si-Si\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

            \"\"\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u30fb\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30fb\u30b7\u30b9\u30c6\u30e0<\/span><\/h1>\n
              \n
            • \u5de5\u696d\u7528\u30bf\u30c3\u30c1\u30b9\u30af\u30ea\u30fc\u30f3HMI<\/li>\n
            • 50\u4ee5\u4e0a\u306e\u30d7\u30ed\u30bb\u30b9\u30ec\u30b7\u30d4\u4fdd\u5b58\u3092\u30b5\u30dd\u30fc\u30c8<\/li>\n
            • \u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u5727\u529b\u6e29\u5ea6\u30af\u30ed\u30fc\u30ba\u30c9\u30eb\u30fc\u30d7\u5236\u5fa1<\/li>\n
            • \u5b89\u5b9a\u3057\u305f\u518d\u73fe\u6027\u306e\u3042\u308b\u30d7\u30ed\u30bb\u30b9\u6027\u80fd<\/li>\n<\/ul>\n

              \u5b89\u5168\u6027\u3068\u4fe1\u983c\u6027<\/span><\/h1>\n
                \n
              • \u30c8\u30ea\u30d7\u30eb\u30a4\u30f3\u30bf\u30fc\u30ed\u30c3\u30af\u4fdd\u8b77\uff08\u5727\u529b\/\u6e29\u5ea6\/\u771f\u7a7a\uff09<\/li>\n
              • \u7dca\u6025\u505c\u6b62\u30b7\u30b9\u30c6\u30e0<\/li>\n
              • \u30af\u30e9\u30b9100\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u5bfe\u5fdc\u8a2d\u8a08<\/li>\n<\/ul>\n

                \u30aa\u30d7\u30b7\u30e7\u30f3\u69cb\u6210<\/span><\/h1>\n
                  \n
                • \u30ed\u30dc\u30c3\u30c8\u30a6\u30a8\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n
                • SECS\/GEM\u901a\u4fe1\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9\uff08\u30d5\u30a1\u30d6\u7d71\u5408\u5bfe\u5fdc\uff09<\/li>\n
                • \u30a4\u30f3\u30e9\u30a4\u30f3\u691c\u67fb\u30e2\u30b8\u30e5\u30fc\u30eb<\/li>\n
                • \u30d7\u30e9\u30ba\u30de\u8868\u9762\u6d3b\u6027\u5316\u30e6\u30cb\u30c3\u30c8<\/li>\n<\/ul>\n

                  \u4ee3\u8868\u7684\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/span><\/h1>\n

                  1.MEMS\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/span><\/h3>\n

                  \u52a0\u901f\u5ea6\u8a08\u3084\u30b8\u30e3\u30a4\u30ed\u30b9\u30b3\u30fc\u30d7\u306a\u3069\u306e\u30bb\u30f3\u30b5\u30fc\u7528\u5bc6\u9589\u30b7\u30fc\u30eb<\/p>\n

                  2.3D IC\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3<\/span><\/h3>\n

                  TSV\u304a\u3088\u3073\u5148\u7aef\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u7528\u30a6\u30a7\u30cf\u7a4d\u5c64<\/p>\n

                  3.\u5316\u5408\u7269\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9<\/span><\/h3>\n

                  GaN \/ SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u306e\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3068\u30ec\u30a4\u30e4\u30fc\u30c8\u30e9\u30f3\u30b9\u30d5\u30a1\u30fc<\/p>\n

                  4.CMOS\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc\uff08CIS\uff09<\/span><\/h3>\n

                  CMOS\u30a6\u30a7\u30cf\u30fc\u3068\u5149\u5b66\u57fa\u677f\u306e\u4f4e\u6e29\u63a5\u5408<\/p>\n

                  5.\u30d0\u30a4\u30aa\u30c1\u30c3\u30d7\u3068\u30de\u30a4\u30af\u30ed\u6d41\u4f53<\/span><\/h3>\n

                  \u30e9\u30dc\u30aa\u30f3\u30c1\u30c3\u30d7\u30fb\u30c7\u30d0\u30a4\u30b9\u306e\u305f\u3081\u306e\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/p>\n

                  \u30d7\u30ed\u30bb\u30b9\u4f8b<\/span><\/h1>\n

                  LiNbO\u2083 - SiC\u30a6\u30a7\u30cf\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff08\u5ba4\u6e29\uff09<\/p>\n

                    \n
                  • \u5f37\u56fa\u3067\u5747\u4e00\u306a\u63a5\u7740\u754c\u9762\u3092\u5b9f\u73fe<\/li>\n
                  • \u65ad\u9762TEM\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u306b\u3088\u308b\u691c\u8a3c<\/li>\n
                  • \u9ad8\u5468\u6ce2\u304a\u3088\u3073\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u7528\u9014\u306b\u6700\u9069<\/li>\n<\/ul>\n

                    Q&A<\/span><\/h1>\n

                    Q1: \u306a\u305c\u71b1\u63a5\u5408\u3067\u306f\u306a\u304f\u5e38\u6e29\u63a5\u5408\u3092\u9078\u3076\u306e\u3067\u3059\u304b\uff1f<\/span><\/h3>\n

                    \u5e38\u6e29\u63a5\u5408\u306f\u71b1\u30df\u30b9\u30de\u30c3\u30c1\u3084\u30b9\u30c8\u30ec\u30b9\u3092\u56de\u907f\u3059\u308b\u305f\u3081\u3001\u7570\u7a2e\u6750\u6599\u306b\u6700\u9069\u3067\u3001\u5148\u7aef\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306e\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u308b\u3002.<\/p>\n

                    Q2: \u63a5\u5408\u304c\u53ef\u80fd\u306a\u7d20\u6750\u306f\u4f55\u3067\u3059\u304b\uff1f<\/span><\/h3>\n

                    \u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u5e45\u5e83\u3044\u7d20\u6750\u306b\u5bfe\u5fdc\u3057\u3066\u3044\u308b\uff1a<\/p>\n

                      \n
                    • \u534a\u5c0e\u4f53Si\u3001SiC\u3001GaN<\/li>\n
                    • \u9178\u5316\u7269SiO\u2082\u3001LiNbO\u2083<\/li>\n
                    • \u91d1\u5c5e\uff1a\u9285\u3001\u91d1<\/li>\n<\/ul>\n

                      \u3053\u306e\u30b7\u30b9\u30c6\u30e0\u3092\u9078\u3076\u7406\u7531<\/span><\/h1>\n
                        \n
                      • SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u304a\u3051\u308b\u5b9f\u7e3e<\/li>\n
                      • \u30e9\u30dc\u8a66\u9a13\u3068TEM\u5206\u6790\u306b\u3088\u308a\u63a5\u5408\u5f37\u5ea6\u3092\u691c\u8a3c<\/li>\n
                      • \u7814\u7a76\u6a5f\u95a2\u304a\u3088\u3073\u7523\u696d\u7528\u30d5\u30a1\u30d6\u306e\u4e21\u65b9\u5411\u3051\u306b\u8a2d\u8a08<\/li>\n
                      • \u30e2\u30b8\u30e5\u30fc\u30eb\u5f0f\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306b\u3088\u308a\u3001\u9577\u671f\u7684\u306a\u30b9\u30b1\u30fc\u30e9\u30d3\u30ea\u30c6\u30a3\u3068\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9\u304c\u53ef\u80fd<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"

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