{"id":1968,"date":"2026-03-23T06:01:20","date_gmt":"2026-03-23T06:01:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=1968"},"modified":"2026-03-23T06:03:52","modified_gmt":"2026-03-23T06:03:52","slug":"lpcvd-%e9%85%b8%e5%8c%96%e7%82%89","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/lpcvd-oxidation-furnace\/","title":{"rendered":"6\/8\/12\u30a4\u30f3\u30c1LPCVD\u9178\u5316\u7089 \u5148\u7aef\u534a\u5c0e\u4f53\u88fd\u9020\u7528\u9ad8\u5747\u4e00\u6027\u8584\u819c\u84b8\u7740\u88c5\u7f6e"},"content":{"rendered":"

6\/8\/12\u30a4\u30f3\u30c1LPCVD\u9178\u5316\u7089\u306f\u3001\u7cbe\u5bc6\u3067\u5747\u4e00\u306a\u8584\u819c\u5806\u7a4d\u306e\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u30c4\u30fc\u30eb\u3067\u3059\u3002\u9ad8\u54c1\u8cea\u306e\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3001\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u3001\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u5c64\u3092\u30a6\u30a7\u30cf\u30fc\u4e0a\u306b\u6210\u9577\u3055\u305b\u308b\u306e\u306b\u5e83\u304f\u9069\u7528\u3055\u308c\u3001\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u3001\u5148\u7aef\u57fa\u677f\u3001\u305d\u306e\u4ed6\u306e\u9ad8\u7cbe\u5ea6\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u5b89\u5b9a\u3057\u305f\u6027\u80fd\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002.<\/p>\n

\u3053\u306e\u88c5\u7f6e\u306f\u3001\u9ad8\u5ea6\u306a\u4f4e\u5727\u84b8\u7740\u6280\u8853\u3001\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u306a\u6e29\u5ea6\u5236\u5fa1\u3001\u8d85\u30af\u30ea\u30fc\u30f3\u306a\u30d7\u30ed\u30bb\u30b9\u8a2d\u8a08\u3092\u7d44\u307f\u5408\u308f\u305b\u3001\u5353\u8d8a\u3057\u305f\u8584\u819c\u5747\u4e00\u6027\u3068\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u7e26\u578b\u30ea\u30a2\u30af\u30bf\u30fc\u69cb\u6210\u306b\u3088\u308a\u52b9\u7387\u7684\u306a\u30d0\u30c3\u30c1\u51e6\u7406\u304c\u53ef\u80fd\u3067\u3001\u71b1\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u30d7\u30e9\u30ba\u30de\u306b\u3088\u308b\u30c0\u30e1\u30fc\u30b8\u3092\u56de\u907f\u3067\u304d\u308b\u305f\u3081\u3001\u30b2\u30fc\u30c8\u7d76\u7e01\u819c\u5f62\u6210\u3001\u5fdc\u529b\u7de9\u885d\u5c64\u3001\u4fdd\u8b77\u9178\u5316\u819c\u306a\u3069\u306e\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u306b\u6700\u9069\u3067\u3059\u3002.<\/p>\n

\"\"<\/p>\n

\n

\u4e3b\u306a\u5229\u70b9<\/strong><\/span><\/h2>\n
    \n
  • \u9ad8\u5747\u4e00\u8584\u819c\u84b8\u7740\uff1a<\/strong> \u4f4e\u5727\u74b0\u5883\uff080.1\uff5e10Torr\uff09\u306b\u3088\u308a\u3001\u9ad8\u6027\u80fd\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306b\u4e0d\u53ef\u6b20\u306a\u30a6\u30a7\u30fc\u30cf\u9593\u304a\u3088\u3073\u30a6\u30a7\u30fc\u30cf\u5185\u5747\u4e00\u6027\u00b11.5%\u3092\u5b9f\u73fe\u3002.<\/li>\n
  • \u7e26\u578b\u30ea\u30a2\u30af\u30bf\u30fc\u306e\u8a2d\u8a08\uff1a<\/strong> \u30d0\u30c3\u30c1\u3042\u305f\u308a150\uff5e200\u679a\u306e\u30a6\u30a7\u30fc\u30cf\u3092\u51e6\u7406\u3057\u3001\u5de5\u696d\u898f\u6a21\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3068\u751f\u7523\u52b9\u7387\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002.<\/li>\n
  • \u71b1\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\uff08500-900\u2103\uff09\uff1a<\/strong> \u30c7\u30ea\u30b1\u30fc\u30c8\u306a\u57fa\u677f\u3092\u4fdd\u8b77\u3057\u3001\u9ad8\u3044\u819c\u8cea\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u3001\u30d7\u30e9\u30ba\u30de\u3092\u4f7f\u7528\u3057\u306a\u3044\u7a4f\u3084\u304b\u306a\u6210\u819c\u3092\u5b9f\u73fe\u3002.<\/li>\n
  • \u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u306a\u6e29\u5ea6\u5236\u5fa1\uff1a<\/strong> \u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3068\u00b11\u2103\u7cbe\u5ea6\u306e\u8abf\u6574\u306b\u3088\u308a\u3001\u5b89\u5b9a\u3057\u305f\u518d\u73fe\u6027\u306e\u3042\u308b\u7d50\u679c\u304c\u5f97\u3089\u308c\u307e\u3059\u3002.<\/li>\n
  • \u8d85\u6e05\u6d44\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\uff1a<\/strong> \u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001SiC\u3084\u305d\u306e\u4ed6\u306e\u5148\u7aef\u30a6\u30a7\u30cf\u30fc\u6750\u6599\u3092\u30b5\u30dd\u30fc\u30c8\u3057\u307e\u3059\u3002.<\/li>\n
  • \u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u53ef\u80fd\u306a\u30b3\u30f3\u30d5\u30a3\u30ae\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\uff1a<\/strong> \u30c9\u30e9\u30a4\u307e\u305f\u306f\u30a6\u30a7\u30c3\u30c8\u9178\u5316\u3001\u7570\u306a\u308b\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u306a\u3069\u3001\u69d8\u3005\u306a\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u5bfe\u5fdc\u3059\u308b\u67d4\u8edf\u306a\u8a2d\u8a08\u3002.<\/li>\n<\/ul>\n

    \u6280\u8853\u4ed5\u69d8<\/strong><\/span><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n
    \u7279\u5fb4<\/th>\n\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n
    \u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/td>\n6\/8\/12 \u30a4\u30f3\u30c1<\/td>\n<\/tr>\n
    \u9069\u5408\u7d20\u6750<\/td>\n\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3001\u7a92\u5316\u30b1\u30a4\u7d20\u3001\u9178\u5316\u30b1\u30a4\u7d20<\/td>\n<\/tr>\n
    \u9178\u5316\u30bf\u30a4\u30d7<\/td>\n\u4e7e\u71e5\u9178\u7d20\uff0f\u6e7f\u6f64\u9178\u7d20\uff08DCE\u3001HCL\uff09<\/td>\n<\/tr>\n
    \u30d7\u30ed\u30bb\u30b9\u6e29\u5ea6\u7bc4\u56f2<\/td>\n500\u00b0C-900\u00b0C<\/td>\n<\/tr>\n
    \u5b9a\u6e29\u30be\u30fc\u30f3<\/td>\n\u2265800 mm<\/td>\n<\/tr>\n
    \u6e29\u5ea6\u5236\u5fa1\u7cbe\u5ea6<\/td>\n\u00b11\u00b0C<\/td>\n<\/tr>\n
    \u7c92\u5b50\u5236\u5fa1<\/td>\n0.32\u03bcm), 0.32\u03bcm), 0.226\u03bcm)<\/td>\n<\/tr>\n
    \u30d5\u30a3\u30eb\u30e0\u539a\u3055<\/td>\nNIT1500 \u00b150 \u00c5<\/td>\n<\/tr>\n
    \u5747\u4e00\u6027<\/td>\n\u30a6\u30a7\u30fc\u30cf\u5185 <2.5%\u3001\u30a6\u30a7\u30fc\u30cf\u9593 <2.5%\u3001\u30d0\u30c3\u30c1\u9593 <2%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    \u88fd\u54c1\u306e\u7279\u5fb4<\/strong><\/span><\/h2>\n
      \n
    • \u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u306e\u81ea\u52d5\u5316\u306b\u3088\u308a\u3001\u9ad8\u3044\u5b89\u5168\u6027\u3068\u4f5c\u696d\u52b9\u7387\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002.<\/li>\n
    • \u8d85\u30af\u30ea\u30fc\u30f3\u306a\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc\u306f\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306e\u30ea\u30b9\u30af\u3092\u4f4e\u6e1b\u3057\u3001\u5b89\u5b9a\u3057\u305f\u30d5\u30a3\u30eb\u30e0\u54c1\u8cea\u3092\u7dad\u6301\u3057\u307e\u3059\u3002.<\/li>\n
    • \u512a\u308c\u305f\u819c\u539a\u5747\u4e00\u6027\u304c\u5148\u7aef\u30ce\u30fc\u30c9\u88fd\u9020\u3092\u652f\u3048\u308b\u3002.<\/li>\n
    • \u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u306a\u6e29\u5ea6\u30fb\u5727\u529b\u5236\u5fa1\u306b\u3088\u308a\u3001\u6b63\u78ba\u306a\u30d7\u30ed\u30bb\u30b9\u8abf\u6574\u304c\u53ef\u80fd\u3002.<\/li>\n
    • SiC\u30a6\u30a7\u30fc\u30cf\u30b5\u30dd\u30fc\u30c8\u306f\u3001\u6469\u64e6\u3068\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3092\u4f4e\u6e1b\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u5bff\u547d\u3092\u5ef6\u3070\u3057\u307e\u3059\u3002.<\/li>\n
    • \u30e2\u30b8\u30e5\u30e9\u30fc\u8a2d\u8a08\u306b\u3088\u308a\u3001\u591a\u69d8\u306a\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3084\u30d7\u30ed\u30bb\u30b9\u306e\u30cb\u30fc\u30ba\u306b\u5408\u308f\u305b\u305f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u304c\u53ef\u80fd\u3002.<\/li>\n<\/ul>\n

      \u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u539f\u7406\"\"<\/strong><\/span><\/h2>\n
        \n
      1. \u30ac\u30b9\u306e\u7d39\u4ecb\uff1a<\/strong> \u53cd\u5fdc\u30ac\u30b9\u306f\u4f4e\u5727\u6761\u4ef6\u4e0b\uff080.25\uff5e1Torr\uff09\u3067\u7ba1\u5185\u306b\u5c0e\u5165\u3055\u308c\u308b\u3002.<\/li>\n
      2. \u8868\u9762\u62e1\u6563\uff1a<\/strong> \u5206\u5b50\u306f\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3092\u81ea\u7531\u306b\u62e1\u6563\u3057\u3001\u5747\u4e00\u306a\u30ab\u30d0\u30ec\u30c3\u30b8\u3092\u78ba\u4fdd\u3059\u308b\u3002.<\/li>\n
      3. \u5438\u7740\uff1a<\/strong> \u53cd\u5fdc\u5264\u306f\u5316\u5b66\u53cd\u5fdc\u524d\u306b\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u306b\u4ed8\u7740\u3059\u308b\u3002.<\/li>\n
      4. \u5316\u5b66\u53cd\u5fdc\uff1a<\/strong> \u71b1\u5206\u89e3\u306b\u3088\u308a\u3001\u57fa\u677f\u4e0a\u306b\u76ee\u7684\u306e\u8584\u819c\u304c\u76f4\u63a5\u5f62\u6210\u3055\u308c\u308b\u3002.<\/li>\n
      5. \u526f\u7523\u7269\u306e\u9664\u53bb\uff1a<\/strong> \u975e\u53cd\u5fdc\u6027\u30ac\u30b9\u306f\u3001\u7d14\u5ea6\u3092\u7dad\u6301\u3057\u3001\u5e72\u6e09\u3092\u9632\u3050\u305f\u3081\u306b\u6392\u6c17\u3055\u308c\u308b\u3002.<\/li>\n
      6. \u30d5\u30a3\u30eb\u30e0\u306e\u5f62\u6210<\/strong> \u53cd\u5fdc\u751f\u6210\u7269\u306f\u5f90\u3005\u306b\u84c4\u7a4d\u3057\u3001\u5747\u4e00\u3067\u5b89\u5b9a\u3057\u305f\u8584\u819c\u5c64\u3092\u5f62\u6210\u3059\u308b\u3002.<\/li>\n<\/ol>\n

        \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/strong><\/span><\/h2>\n
          \n
        • \u906e\u853d\u9178\u5316\u7269\u5c64\uff1a<\/strong> \u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u3092\u6c5a\u67d3\u304b\u3089\u4fdd\u8b77\u3057\u3001\u30c9\u30fc\u30d4\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u4e2d\u306e\u30a4\u30aa\u30f3\u30c1\u30e3\u30cd\u30ea\u30f3\u30b0\u3092\u4f4e\u6e1b\u3059\u308b\u3002.<\/li>\n<\/ul>\n

          \"\"<\/p>\n

            \n
          • \u9178\u5316\u30d1\u30c3\u30c9\u5c64\uff1a<\/strong> \u30b7\u30ea\u30b3\u30f3\u5c64\u3068\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u5c64\u306e\u9593\u306e\u5fdc\u529b\u7de9\u885d\u6750\u3068\u3057\u3066\u6a5f\u80fd\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u30af\u30e9\u30c3\u30af\u3092\u9632\u304e\u3001\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u308b\u3002.<\/li>\n<\/ul>\n

            \"\"<\/p>\n

              \n
            • \u30b2\u30fc\u30c8\u9178\u5316\u819c\uff1a<\/strong> MOS\u69cb\u9020\u306e\u8a98\u96fb\u4f53\u5c64\u3092\u63d0\u4f9b\u3057\u3001\u6b63\u78ba\u306a\u96fb\u6d41\u4f1d\u5c0e\u3068\u96fb\u754c\u52b9\u679c\u5236\u5fa1\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/li>\n<\/ul>\n

              \"\"<\/p>\n

              \u30b7\u30b9\u30c6\u30e0\u69cb\u6210<\/strong><\/span><\/h2>\n
                \n
              • \u5782\u76f4LPCVD\uff1a<\/strong> \u30d7\u30ed\u30bb\u30b9\u30ac\u30b9\u306f\u4e0a\u304b\u3089\u4e0b\u3078\u3068\u6d41\u308c\u3001\u30d0\u30c3\u30c1\u5185\u306e\u3059\u3079\u3066\u306e\u30a6\u30a7\u30cf\u30fc\u306b\u5747\u4e00\u306a\u6210\u819c\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002.<\/li>\n<\/ul>\n

                \"\"<\/p>\n

                  \n
                • \u6c34\u5e73LPCVD\uff1a<\/strong> \u30ac\u30b9\u306f\u57fa\u677f\u306e\u9577\u3055\u306b\u6cbf\u3063\u3066\u6d41\u308c\u308b\u305f\u3081\u3001\u9023\u7d9a\u7684\u306a\u5927\u91cf\u751f\u7523\u306b\u9069\u3057\u3066\u3044\u308b\u304c\u3001\u84b8\u7740\u539a\u306f\u5165\u53e3\u5074\u4ed8\u8fd1\u3067\u308f\u305a\u304b\u306b\u5909\u5316\u3059\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u3002.<\/li>\n<\/ul>\n

                  \"\"<\/p>\n

                  \u3088\u304f\u3042\u308b\u8cea\u554f<\/strong><\/span><\/h2>\n

                  Q1: LPCVD\u306f\u4e3b\u306b\u4f55\u306b\u4f7f\u308f\u308c\u308b\u306e\u3067\u3059\u304b\uff1f<\/strong>
                  A: LPCVD\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3001\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u3001\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u306e\u6210\u819c\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u4f4e\u5727\u8584\u819c\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308a\u3001\u5148\u7aef\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u305f\u3081\u306e\u5747\u4e00\u3067\u9ad8\u54c1\u8cea\u306a\u6210\u819c\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n

                  Q2: LPCVD\u306fPECVD\u3068\u3069\u3046\u9055\u3046\u306e\u3067\u3059\u304b\uff1f<\/strong>
                  A: LPCVD\u306f\u4f4e\u5727\u4e0b\u306e\u71b1\u6d3b\u6027\u5316\u306b\u3088\u3063\u3066\u9ad8\u7d14\u5ea6\u306e\u819c\u3092\u4f5c\u308a\u307e\u3059\u304c\u3001PECVD\u306f\u4f4e\u6e29\u306e\u30d7\u30e9\u30ba\u30de\u3092\u4f7f\u3063\u3066\u3088\u308a\u901f\u304f\u6210\u819c\u3057\u307e\u3059\u3002.<\/p>\n

                  Q3: \u3053\u306eLPCVD\u9178\u5316\u7089\u3067\u4f7f\u7528\u3067\u304d\u308b\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u3068\u6750\u6599\u306f\u4f55\u3067\u3059\u304b\uff1f<\/strong>
                  A: \u3053\u306e\u7089\u306f6\u30a4\u30f3\u30c1\u30018\u30a4\u30f3\u30c1\u300112\u30a4\u30f3\u30c1\u30a6\u30a7\u30fc\u30cf\u306b\u5bfe\u5fdc\u3057\u3001\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3001\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u3001\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u3001SiC\u30a6\u30a7\u30fc\u30cf\u306b\u5bfe\u5fdc\u3059\u308b\u305f\u3081\u3001\u69d8\u3005\u306a\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u67d4\u8edf\u306b\u5bfe\u5fdc\u3067\u304d\u307e\u3059\u3002.<\/p>\n

                  Q4: LPCVD\u9178\u5316\u7089\u306f\u7279\u5b9a\u306e\u30d7\u30ed\u30bb\u30b9\u7528\u306b\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u307e\u3059\u304b\uff1f<\/strong>
                  A: \u306f\u3044\u3001\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u8abf\u7bc0\u53ef\u80fd\u306a\u6e29\u5ea6\u30be\u30fc\u30f3\u3001\u30ac\u30b9\u30d5\u30ed\u30fc\u5236\u5fa1\u3001\u9178\u5316\u30e2\u30fc\u30c9\uff08\u30c9\u30e9\u30a4\u307e\u305f\u306f\u30a6\u30a7\u30c3\u30c8\uff09\u3092\u542b\u3080\u30e2\u30b8\u30e5\u30e9\u30fc\u69cb\u6210\u3092\u63d0\u4f9b\u3057\u3001\u7814\u7a76\u304a\u3088\u3073\u5de5\u696d\u898f\u6a21\u306e\u751f\u7523\u306e\u4e21\u65b9\u3067\u591a\u69d8\u306a\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u3092\u6e80\u305f\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

                  6\/8\/12\u30a4\u30f3\u30c1LPCVD\uff08\u4f4e\u5727\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff09\u9178\u5316\u7089\u306f\u3001\u7cbe\u5bc6\u3067\u5747\u4e00\u306a\u8584\u819c\u5806\u7a4d\u306e\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u30c4\u30fc\u30eb\u3067\u3059\u3002\u30a6\u30a7\u30cf\u30fc\u4e0a\u306b\u9ad8\u54c1\u8cea\u306e\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3\u3001\u7a92\u5316\u30b7\u30ea\u30b3\u30f3\u3001\u9178\u5316\u30b7\u30ea\u30b3\u30f3\u5c64\u3092\u6210\u9577\u3055\u305b\u308b\u306e\u306b\u5e83\u304f\u9069\u7528\u3055\u308c\u3001\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u3001\u5148\u7aef\u57fa\u677f\u3001\u305d\u306e\u4ed6\u306e\u9ad8\u7cbe\u5ea6\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u5b89\u5b9a\u3057\u305f\u6027\u80fd\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002.<\/p>","protected":false},"featured_media":1969,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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