![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_growth_furnace_pvt_method_6inch_8inch_12_inch_low_energy_consumption1-300x300.webp\")
SiC\u6210\u9577\u7089\uff08PVT\u6cd5\uff09\u306f\u30016\u30a4\u30f3\u30c1\u30018\u30a4\u30f3\u30c1\u300112\u30a4\u30f3\u30c1\u306e\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u5358\u7d50\u6676\u3092\u88fd\u9020\u3059\u308b\u305f\u3081\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u6027\u80fd\u30b7\u30b9\u30c6\u30e0\u3067\u3059\u3002.<\/p>\n
\u9ad8\u5ea6\u306a\u8a98\u5c0e\u52a0\u71b1\u6280\u8853\u3092\u7528\u3044\u305f\u3053\u306e\u7089\u306f\u3001\u9ad8\u901f\u52a0\u71b1\u3001\u7cbe\u5bc6\u306a\u6e29\u5ea6\u5236\u5fa1\u3001\u4f4e\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb\u3092\u5b9f\u73fe\u3057\u3001\u5de5\u696d\u898f\u6a21\u306eSiC\u7d50\u6676\u6210\u9577\u306b\u7406\u60f3\u7684\u306a\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n
\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001RF\u30c7\u30d0\u30a4\u30b9\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u7528\u306eSiC\u57fa\u677f\u306e\u88fd\u9020\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n
\u8a98\u5c0e\u52a0\u71b1\u30b7\u30b9\u30c6\u30e0
\u9ed2\u925b\u308b\u3064\u307c\u3092\u76f4\u63a5\u96fb\u78c1\u52a0\u71b1\u3059\u308b\u3053\u3068\u3067\u3001\u9ad8\u52b9\u7387\u3068\u8fc5\u901f\u306a\u71b1\u5fdc\u7b54\u3092\u5b9f\u73fe<\/p>\n<\/li>\n
\u8d85\u7cbe\u5bc6\u6e29\u5ea6\u5236\u5fa1
\u6700\u5927\u00b11\u2103\u306e\u7cbe\u5ea6\u3001\u5b89\u5b9a\u3057\u305f\u7d50\u6676\u6210\u9577\u6761\u4ef6\u3092\u78ba\u4fdd<\/p>\n<\/li>\n
\u4f4e\u30a8\u30cd\u30eb\u30ae\u30fc\u6d88\u8cbb
\u6700\u9069\u5316\u3055\u308c\u305f\u71b1\u8a2d\u8a08\u306b\u3088\u308a\u3001\u904b\u7528\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u524a\u6e1b<\/p>\n<\/li>\n
\u9ad8\u3044\u5b89\u5b9a\u6027\u3068\u4f4e\u6c5a\u67d3\u6027
\u975e\u63a5\u89e6\u52a0\u71b1\uff0b\u4e0d\u6d3b\u6027\u30ac\u30b9\u74b0\u5883\u3067\u4e0d\u7d14\u7269\u3092\u6700\u5c0f\u5316<\/p>\n<\/li>\n
\u5927\u53e3\u5f84\u7d50\u6676\u306b\u5bfe\u5fdc\u3059\u308b\u30b9\u30b1\u30fc\u30e9\u30d6\u30eb\u3055
6\u2033\u30018\u2033\u300112\u2033\u306eSiC\u7d50\u6676\u6210\u9577\u306b\u5bfe\u5fdc<\/p>\n<\/li>\n<\/ul>\n
| \u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n | \u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|
| \u5bf8\u6cd5\uff08\u9577\u3055\u00d7\u5e45\u00d7\u9ad8\u3055\uff09<\/td>\n | 3200 \u00d7 1150 \u00d7 3600 mm\uff08\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u53ef\u80fd\uff09<\/td>\n<\/tr>\n |
| \u7089\u5ba4\u76f4\u5f84<\/td>\n | 400 mm<\/td>\n<\/tr>\n |
| \u6700\u9ad8\u6e29\u5ea6<\/td>\n | 2400\u00b0C<\/td>\n<\/tr>\n |
| \u6e29\u5ea6\u7bc4\u56f2<\/td>\n | 900-3000\u00b0C<\/td>\n<\/tr>\n |
| \u6e29\u5ea6\u7cbe\u5ea6<\/td>\n | \u00b11\u00b0C<\/td>\n<\/tr>\n |
| \u52a0\u71b1\u65b9\u6cd5<\/td>\n | \u8a98\u5c0e\u52a0\u71b1<\/td>\n<\/tr>\n |
| \u96fb\u6e90<\/td>\n | 40 kW\u30018\uff5e12 kHz<\/td>\n<\/tr>\n |
| \u771f\u7a7a\u30ec\u30d9\u30eb<\/td>\n | 5 \u00d7 10-\u2074 Pa<\/td>\n<\/tr>\n |
| \u5727\u529b\u7bc4\u56f2<\/td>\n | 1-700 mbar<\/td>\n<\/tr>\n |
| \u6e29\u5ea6\u6e2c\u5b9a<\/td>\n | \u30c7\u30e5\u30a2\u30eb\u30ab\u30e9\u30fc\u8d64\u5916\u7dda<\/td>\n<\/tr>\n |
| \u30ed\u30fc\u30c7\u30a3\u30f3\u30b0\u65b9\u6cd5<\/td>\n | \u30dc\u30c8\u30e0\u30ed\u30fc\u30c7\u30a3\u30f3\u30b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n\u30c7\u30b6\u30a4\u30f3\u306e\u5229\u70b9<\/span><\/h2>\n\u534a\u7d76\u7e01\u6027\u304a\u3088\u3073\u5c0e\u96fb\u6027SiC\u7d50\u6676\u6210\u9577\u306b\u5bfe\u5fdc<\/p>\n<\/li>\n \u308b\u3064\u307c\u56de\u8ee2\u30b7\u30b9\u30c6\u30e0\u304c\u6e29\u5ea6\u306e\u5747\u4e00\u6027\u3092\u5411\u4e0a<\/p>\n<\/li>\n \u8abf\u6574\u53ef\u80fd\u306a\u8a98\u5c0e\u30b3\u30a4\u30eb\u306e\u6301\u3061\u4e0a\u3052\u306b\u3088\u308a\u3001\u71b1\u64fe\u4e71\u3092\u4f4e\u6e1b<\/p>\n<\/li>\n \u4e8c\u91cd\u69cb\u9020\u306e\u6c34\u51b7\u5f0f\u77f3\u82f1\u30c1\u30e3\u30f3\u30d0\u30fc\u304c\u6a5f\u5668\u306e\u5bff\u547d\u3092\u5ef6\u3070\u3059<\/p>\n<\/li>\n \u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u30fb\u30c7\u30e5\u30a2\u30eb\u30dd\u30a4\u30f3\u30c8\u6e29\u5ea6\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0<\/p>\n<\/li>\n \u8907\u6570\u306e\u5236\u5fa1\u30e2\u30fc\u30c9\uff1a\u5b9a\u96fb\u529b\uff0f\u5b9a\u96fb\u6d41\uff0f\u5b9a\u6e29\u5ea6<\/p>\n<\/li>\n \u81ea\u52d5\u904b\u8ee2\u306e\u305f\u3081\u306e\u30ef\u30f3\u30af\u30ea\u30c3\u30af\u30fb\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u30fb\u30b9\u30bf\u30fc\u30c8<\/p>\n<\/li>\n \u30b3\u30f3\u30d1\u30af\u30c8\u306a\u69cb\u9020\u3067\u52b9\u7387\u7684\u306a\u5de5\u5834\u30ec\u30a4\u30a2\u30a6\u30c8\u3092\u5b9f\u73fe<\/p>\n<\/li>\n \u9ad8\u7cbe\u5ea6\u5727\u529b\u5236\u5fa1\uff08\u6700\u5927\u00b11 Pa\uff09<\/p>\n<\/li>\n<\/ul>\n \u6027\u80fd\u3068\u7528\u9014<\/span><\/h2>\nSiC MOSFET<\/p>\n<\/li>\n \u30b7\u30e7\u30c3\u30c8\u30ad\u30fc\u30c0\u30a4\u30aa\u30fc\u30c9<\/p>\n<\/li>\n RF\u6a5f\u5668<\/p>\n<\/li>\n \u96fb\u6c17\u81ea\u52d5\u8eca\uff08EV\u30d1\u30ef\u30fc\u30e2\u30b8\u30e5\u30fc\u30eb\uff09<\/p>\n<\/li>\n \u30bd\u30fc\u30e9\u30fc\u30fb\u30a4\u30f3\u30d0\u30fc\u30bf<\/p>\n<\/li>\n 5G\u901a\u4fe1\u30b7\u30b9\u30c6\u30e0<\/p>\n<\/li>\n<\/ul>\n \u5b89\u5b9a\u3057\u305f\u71b1\u5236\u5fa1\u3068\u6700\u9069\u5316\u3055\u308c\u305f\u6210\u9577\u6761\u4ef6\u306b\u3088\u308a\u3001\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u5de5\u696d\u751f\u7523\u306b\u304a\u3044\u3066\u9ad8\u3044\u53ce\u7387\u3001\u4e00\u8cab\u6027\u3001\u30b9\u30b1\u30fc\u30e9\u30d3\u30ea\u30c6\u30a3\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n
\u5f53\u793e\u306e\u80fd\u529b\uff08ZMSH\uff09<\/span><\/h2>\n
|
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/SiC-Growth-Furnace5.png\")
<\/p>\n