{"id":2491,"date":"2026-05-25T05:27:55","date_gmt":"2026-05-25T05:27:55","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2491"},"modified":"2026-05-25T05:36:36","modified_gmt":"2026-05-25T05:36:36","slug":"%e3%82%a2%e3%83%8e%e3%83%bc%e3%83%89%e3%83%9c%e3%83%b3%e3%83%87%e3%82%a3%e3%83%b3%e3%82%b0%e3%81%a8%e3%83%80%e3%82%a4%e3%83%ac%e3%82%af%e3%83%88%e3%83%9c%e3%83%b3%e3%83%87%e3%82%a3%e3%83%b3%e3%82%b0","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ja\/anodic-bonding-vs-direct-bonding\/","title":{"rendered":"\u30a2\u30ce\u30fc\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3068\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff1aMEMS\u304a\u3088\u3073\u30bb\u30f3\u30b5\u30fc\u7528\u30a6\u30a7\u30cf\u306e\u52a0\u5de5\u306b\u306f\u3069\u3061\u3089\u304c\u9069\u3057\u3066\u3044\u308b\u304b\uff1f"},"content":{"rendered":"<p>\u9ad8\u5ea6\u306aMEMS\u88fd\u9020\u304a\u3088\u3073\u30bb\u30f3\u30b5\u30fc\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306b\u304a\u3044\u3066\u3001, <a href=\"https:\/\/www.zmsh-semitech.com\/ja\/product-category\/bonding-machine\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u30a6\u30a7\u30cf\u30fc\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/mark><\/a> \u3053\u308c\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u4fe1\u983c\u6027\u3001\u6c17\u5bc6\u6027\u3001\u304a\u3088\u3073\u9577\u671f\u7684\u306a\u6027\u80fd\u306b\u76f4\u63a5\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u91cd\u8981\u306a\u5de5\u7a0b\u3067\u3059\u3002\u6700\u3082\u5e83\u304f\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u624b\u6cd5\u3068\u3057\u3066\u306f\u3001 <strong>\u967d\u6975\u63a5\u5408<\/strong> \u305d\u3057\u3066 <strong>\u76f4\u63a5\uff08\u30d5\u30e5\u30fc\u30b8\u30e7\u30f3\uff09\u63a5\u5408<\/strong>.<\/p>\n\n\n\n<p>\u3069\u3061\u3089\u306e\u65b9\u6cd5\u3082\u30a6\u30a7\u30cf\u30fc\u3092\u539f\u5b50\u30ec\u30d9\u30eb\u307e\u305f\u306f\u5206\u5b50\u30ec\u30d9\u30eb\u3067\u63a5\u5408\u3059\u308b\u3082\u306e\u3067\u3059\u304c\u3001\u305d\u306e\u7269\u7406\u7684\u30e1\u30ab\u30cb\u30ba\u30e0\u306f\u5168\u304f\u7570\u306a\u308a\u3001\u305d\u308c\u305e\u308c\u7570\u306a\u308b\u6750\u6599\u3084\u30c7\u30d0\u30a4\u30b9\u69cb\u9020\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u672c\u8a18\u4e8b\u3067\u306f\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u3084\u8abf\u9054\u62c5\u5f53\u8005\u304cMEMS\u3001\u30bb\u30f3\u30b5\u30fc\u3001\u304a\u3088\u3073\u9ad8\u5ea6\u306a\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u9069\u3057\u305f\u63a5\u5408\u65b9\u6cd5\u3092\u9078\u629e\u3067\u304d\u308b\u3088\u3046\u3001B2B\u5411\u3051\u306b\u5206\u304b\u308a\u3084\u3059\u304f\u6bd4\u8f03\u89e3\u8aac\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"750\" height=\"750\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/semi_automatic_room_temperature_bonding_machine_2_4_6_8_12inch_compatible_material_sapphire_si_sic_inp_gaas_gan_lt_ln_diamond_glass-03.webp\" alt=\"\" class=\"wp-image-2031\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/semi_automatic_room_temperature_bonding_machine_2_4_6_8_12inch_compatible_material_sapphire_si_sic_inp_gaas_gan_lt_ln_diamond_glass-03.webp 750w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/semi_automatic_room_temperature_bonding_machine_2_4_6_8_12inch_compatible_material_sapphire_si_sic_inp_gaas_gan_lt_ln_diamond_glass-03-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/semi_automatic_room_temperature_bonding_machine_2_4_6_8_12inch_compatible_material_sapphire_si_sic_inp_gaas_gan_lt_ln_diamond_glass-03-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/semi_automatic_room_temperature_bonding_machine_2_4_6_8_12inch_compatible_material_sapphire_si_sic_inp_gaas_gan_lt_ln_diamond_glass-03-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/semi_automatic_room_temperature_bonding_machine_2_4_6_8_12inch_compatible_material_sapphire_si_sic_inp_gaas_gan_lt_ln_diamond_glass-03-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/semi_automatic_room_temperature_bonding_machine_2_4_6_8_12inch_compatible_material_sapphire_si_sic_inp_gaas_gan_lt_ln_diamond_glass-03-100x100.webp 100w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1. \u967d\u6975\u63a5\u5408\u3068\u306f\u4f55\u304b\uff1f<\/h2>\n\n\n\n<p><strong>\u967d\u6975\u63a5\u5408<\/strong> \uff08\u9759\u96fb\u7d50\u5408\u3068\u3082\u547c\u3070\u308c\u308b\uff09\u306f\u3001\u901a\u5e38\u3001\u4ee5\u4e0b\u306e\u9593\u3067\u7528\u3044\u3089\u308c\u308b\u30a6\u30a7\u30cf\u30fc\u63a5\u5408\u6280\u8853\u3067\u3042\u308b <strong>\u30b7\u30ea\u30b3\u30f3\u304a\u3088\u3073\u30ac\u30e9\u30b9\uff08\u901a\u5e38\u306f\u30db\u30a6\u30b1\u30a4\u9178\u30ac\u30e9\u30b9\uff09<\/strong>.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ed5\u7d44\u307f\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a6\u30a7\u30cf\u30fc\u9593\u306b\u9ad8\u96fb\u5727\uff08\u901a\u5e38200\uff5e1000V\uff09\u304c\u5370\u52a0\u3055\u308c\u308b<\/li>\n\n\n\n<li>\u6e29\u5ea6\u3092\u4e0a\u3052\u308b\uff08\u901a\u5e38300\uff5e450\u2103\uff09<\/li>\n\n\n\n<li>\u96fb\u754c\u4e0b\u3067\u3001\u79fb\u52d5\u6027\u30a4\u30aa\u30f3\uff08\u30ac\u30e9\u30b9\u4e2d\u3067\u306f\u4e3b\u306bNa\u207a\uff09\u304c\u79fb\u52d5\u3059\u308b<\/li>\n\n\n\n<li>\u754c\u9762\u3067\u306f\u3001\u5f37\u3044\u9759\u96fb\u5f15\u529b\u306b\u3088\u3063\u3066\u6052\u4e45\u7684\u306a\u7d50\u5408\u304c\u5f62\u6210\u3055\u308c\u308b<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u306a\u7279\u5fb4<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5c0e\u96fb\u6027\u6750\u6599\u3068\u30a4\u30aa\u30f3\u6027\u6750\u6599\u306e\u7d44\u307f\u5408\u308f\u305b\uff08\u30b7\u30ea\u30b3\u30f3\uff0b\u30ac\u30e9\u30b9\uff09\u304c\u5fc5\u8981<\/li>\n\n\n\n<li>\u4e2d\u6e29\u30d7\u30ed\u30bb\u30b9<\/li>\n\n\n\n<li>\u901f\u4e7e\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u6c17\u5bc6\u6027<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">2. \u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff08\u30d5\u30e5\u30fc\u30b8\u30e7\u30f3\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff09\u3068\u306f\u4f55\u304b\uff1f<\/h2>\n\n\n\n<p><strong>\u76f4\u63a5\u63a5\u7740<\/strong>, \u3001\u5225\u540d <strong>\u30d5\u30e5\u30fc\u30b8\u30e7\u30f3\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0<\/strong>, \u2026\u306f\u3001\u63a5\u7740\u5264\u3084\u96fb\u5834\u3092\u7528\u3044\u305a\u306b\u30012\u3064\u306e\u6975\u3081\u3066\u5e73\u5766\u3067\u6e05\u6d44\u306a\u8868\u9762\u3092\u63a5\u5408\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ed5\u7d44\u307f\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>2\u679a\u306e\u30a6\u30a7\u30cf\u30fc\u3092\u6d17\u6d44\u3057\u3001\u6d3b\u6027\u5316\u51e6\u7406\uff08\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u307e\u305f\u306f\u5316\u5b66\u51e6\u7406\uff09\u3092\u884c\u3046<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u306f\u5ba4\u6e29\u3067\u63a5\u89e6\u3055\u305b\u308b<\/li>\n\n\n\n<li>\u521d\u671f\u306e\u5f31\u3044\u30d5\u30a1\u30f3\u30c7\u30eb\u30ef\u30fc\u30eb\u30b9\u529b\u304c\u7d50\u5408\u524d\u306e\u72b6\u614b\u3092\u5f62\u6210\u3059\u308b<\/li>\n\n\n\n<li>\u9ad8\u6e29\u30a2\u30cb\u30fc\u30eb\uff08800\uff5e1100\u00b0C\uff09\u306f\u3001\u539f\u5b50\u62e1\u6563\u306b\u3088\u3063\u3066\u7d50\u5408\u3092\u5f37\u5316\u3059\u308b<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u306a\u7279\u5fb4<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u4e2d\u9593\u5c64\u306f\u4e0d\u8981\u3067\u3059<\/li>\n\n\n\n<li>\u713c\u920d\u5f8c\u306e\u6975\u3081\u3066\u9ad8\u3044\u63a5\u7740\u5f37\u5ea6<\/li>\n\n\n\n<li>\u6975\u3081\u3066\u6ed1\u3089\u304b\u3067\u5e73\u3089\u306a\u8868\u9762\u304c\u5fc5\u8981\u3067\u3059<\/li>\n\n\n\n<li>\u9ad8\u71b1\u8ca0\u8377\u30d7\u30ed\u30bb\u30b9<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3. \u30a2\u30ce\u30fc\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3068\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff1a\u4e3b\u306a\u9055\u3044<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7279\u5fb4<\/th><th>\u967d\u6975\u63a5\u5408<\/th><th>\u76f4\u63a5\uff08\u30d5\u30e5\u30fc\u30b8\u30e7\u30f3\uff09\u63a5\u5408<\/th><\/tr><\/thead><tbody><tr><td>\u7d50\u5408\u6a5f\u69cb<\/td><td>\u9759\u96fb\u4f5c\u7528\uff0b\u30a4\u30aa\u30f3\u79fb\u52d5<\/td><td>\u539f\u5b50\u62e1\u6563<\/td><\/tr><tr><td>\u6750\u6599<\/td><td>Si\uff0b\u30ac\u30e9\u30b9<\/td><td>Si + Si \u2192 SiO\u2082 + SiO\u2082<\/td><\/tr><tr><td>\u6e29\u5ea6<\/td><td>300\uff5e450\u2103<\/td><td>800\uff5e1100\u2103<\/td><\/tr><tr><td>\u5fc5\u8981\u306a\u96fb\u5727<\/td><td>\u306f\u3044<\/td><td>\u3044\u3044\u3048<\/td><\/tr><tr><td>\u8868\u9762\u306e\u8981\u4ef6<\/td><td>\u4e2d\u7a0b\u5ea6<\/td><td>\u6975\u3081\u3066\u9ad8\u3044\uff08\u8d85\u5e73\u5766\uff09<\/td><\/tr><tr><td>\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9\u5c64<\/td><td>\u30ac\u30e9\u30b9\u30d9\u30fc\u30b9\u306e\u30a4\u30f3\u30bf\u30fc\u30d5\u30a7\u30fc\u30b9<\/td><td>\u4e2d\u9593\u5c64\u306a\u3057<\/td><\/tr><tr><td>\u30dc\u30f3\u30c9\u5f37\u5ea6<\/td><td>\u9ad8\u3044<\/td><td>\u6975\u3081\u3066\u9ad8\u3044\uff08\u713c\u920d\u5f8c\uff09<\/td><\/tr><tr><td>\u30d7\u30ed\u30bb\u30b9\u306e\u8907\u96d1\u3055<\/td><td>\u4e0b\u3078<\/td><td>\u3088\u308a\u9ad8\u3044<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u30d7\u30ed\u30bb\u30b9\u4e92\u63db\u6027\u3068\u6750\u6599\u4e0a\u306e\u5236\u7d04<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u967d\u6975\u63a5\u5408\uff1a<\/h3>\n\n\n\n<p>\u7279\u306b\u9069\u3057\u3066\u3044\u308b\u306e\u306f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b7\u30ea\u30b3\u30f3\u30fb\u30ac\u30e9\u30b9\u63a5\u5408\u69cb\u9020<\/li>\n\n\n\n<li>\u5149\u30a2\u30af\u30bb\u30b9\u53ef\u80fd\u306aMEMS\u5171\u632f\u5668<\/li>\n\n\n\n<li>\u30ac\u30e9\u30b9\u30ab\u30d0\u30fc\u4ed8\u304d\u5727\u529b\u30bb\u30f3\u30b5\u30fc<\/li>\n\n\n\n<li>\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c7\u30d0\u30a4\u30b9<\/li>\n<\/ul>\n\n\n\n<p>\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u308b\u30ac\u30e9\u30b9\u6750\u6599\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30db\u30a6\u30b1\u30a4\u9178\u30ac\u30e9\u30b9\uff08\u30d1\u30a4\u30ec\u30c3\u30af\u30b9\u578b\uff09<\/li>\n\n\n\n<li>\u30a2\u30eb\u30df\u30ce\u30b1\u30a4\u9178\u5869\u30ac\u30e9\u30b9<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\uff1a<\/h3>\n\n\n\n<p>\u7279\u306b\u9069\u3057\u3066\u3044\u308b\u306e\u306f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b7\u30ea\u30b3\u30f3\u30fb\u30aa\u30f3\u30fb\u30b7\u30ea\u30b3\u30f3\u69cb\u9020<\/li>\n\n\n\n<li>SOI\u30a6\u30a7\u30cf\u30fc\u306e\u88fd\u9020<\/li>\n\n\n\n<li>\u9ad8\u6027\u80fdMEMS\u30c7\u30d0\u30a4\u30b9<\/li>\n\n\n\n<li>\u5149\u5b66\u7528\u30a6\u30a7\u30cf\u30fc\u30b9\u30bf\u30c3\u30af<\/li>\n\n\n\n<li>\u9ad8\u5ea6\u306a3D\u7d71\u5408<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5. MEMS\u304a\u3088\u3073\u30bb\u30f3\u30b5\u30fc\u3078\u306e\u5fdc\u7528<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u967d\u6975\u63a5\u5408\u306eMEMS\u3078\u306e\u5fdc\u7528<\/h3>\n\n\n\n<p>\u3067 <strong>\u5fae\u5c0f\u96fb\u6c17\u6a5f\u68b0\u30b7\u30b9\u30c6\u30e0<\/strong>, \u307e\u305f\u3001\u30a2\u30ce\u30fc\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306f\u4ee5\u4e0b\u306e\u7528\u9014\u3067\u5e83\u304f\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5727\u529b\u30bb\u30f3\u30b5\u30fc<\/li>\n\n\n\n<li>\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5\u30fc\uff08\u30ad\u30e3\u30c3\u30d7\u4ed8\u304d\u69cb\u9020\uff09<\/li>\n\n\n\n<li>\u30a4\u30f3\u30af\u30b8\u30a7\u30c3\u30c8\u30d7\u30ea\u30f3\u30bf\u306e\u30d8\u30c3\u30c9<\/li>\n\n\n\n<li>\u30de\u30a4\u30af\u30ed\u6d41\u4f53\u30c1\u30c3\u30d7<\/li>\n\n\n\n<li>\u30ac\u30e9\u30b9\u7a93\u3092\u5099\u3048\u305f\u5149\u5b66MEMS<\/li>\n<\/ul>\n\n\n\n<p><strong>\u9078\u3070\u308c\u308b\u7406\u7531\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u512a\u308c\u305f\u6c17\u5bc6\u6027<\/li>\n\n\n\n<li>\u900f\u660e\u306a\u30ac\u30e9\u30b9\u306b\u3088\u308a\u3001\u5185\u90e8\u3092\u8996\u8a8d\u3067\u304d\u308b<\/li>\n\n\n\n<li>\u5927\u91cf\u751f\u7523\u306b\u9069\u3057\u305f\u30b3\u30b9\u30c8\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306eMEMS\u3078\u306e\u5fdc\u7528<\/h3>\n\n\n\n<p>\u9ad8\u6027\u80fdMEMS\u3084\u534a\u5c0e\u4f53\u96c6\u7a4d\u5316\u306b\u304a\u3044\u3066\u306f\u3001\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u304c\u597d\u307e\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>SOI\u30d9\u30fc\u30b9\u306eMEMS\u30c7\u30d0\u30a4\u30b9<\/li>\n\n\n\n<li>RF MEMS\u30b9\u30a4\u30c3\u30c1<\/li>\n\n\n\n<li>\u9ad8\u5468\u6ce2\u5171\u632f\u5668<\/li>\n\n\n\n<li>\u30a6\u30a7\u30cf\u30fc\u30ec\u30d9\u30eb3D\u96c6\u7a4d<\/li>\n\n\n\n<li>\u9ad8\u7cbe\u5ea6\u6163\u6027\u30bb\u30f3\u30b5\u30fc<\/li>\n<\/ul>\n\n\n\n<p><strong>\u9078\u3070\u308c\u308b\u7406\u7531\uff1a<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u754c\u9762\u6c5a\u67d3\u5c64\u306a\u3057<\/li>\n\n\n\n<li>\u6975\u3081\u3066\u9ad8\u3044\u6a5f\u68b0\u7684\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u512a\u308c\u305f\u71b1\u7684\u30fb\u96fb\u6c17\u7684\u6027\u80fd<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">6. \u4fe1\u983c\u6027\u3068\u6027\u80fd\u306b\u95a2\u3059\u308b\u8003\u616e\u4e8b\u9805<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u967d\u6975\u63a5\u5408\u306e\u5f37\u307f\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9577\u671f\u306b\u308f\u305f\u308a\u5b89\u5b9a\u3057\u305f\u6c17\u5bc6\u6027\u3092\u7dad\u6301<\/li>\n\n\n\n<li>\u4e2d\u7a0b\u5ea6\u306e\u30b9\u30c8\u30ec\u30b9\u74b0\u5883\u306b\u5bfe\u3057\u3066\u512a\u308c\u305f\u8010\u6027\u3092\u793a\u3059<\/li>\n\n\n\n<li>\u78ba\u7acb\u3055\u308c\u305f\u5de5\u696d\u30d7\u30ed\u30bb\u30b9<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u5236\u9650\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ac\u30e9\u30b9\u3068\u30b7\u30ea\u30b3\u30f3\u306e\u71b1\u81a8\u5f35\u7387\u306e\u4e0d\u4e00\u81f4<\/li>\n\n\n\n<li>\u96fb\u5727\u8981\u4ef6\u306b\u3088\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u8907\u96d1\u3055\u304c\u5897\u3059<\/li>\n\n\n\n<li>\u7279\u5b9a\u306e\u7d20\u6750\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u9650\u5b9a\u3055\u308c\u307e\u3059<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306e\u5229\u70b9\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a6\u30a7\u30cf\u30fc\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u6cd5\u306e\u4e2d\u3067\u6700\u3082\u9ad8\u3044\u63a5\u7740\u5f37\u5ea6<\/li>\n\n\n\n<li>\u754c\u9762\u3092\u8de8\u3050\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027<\/li>\n\n\n\n<li>\u4e2d\u9593\u6750\u6599\u306e\u52a3\u5316\u304c\u306a\u3044<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u5236\u9650\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8868\u9762\u7c97\u3055\u306b\u6975\u3081\u3066\u654f\u611f<\/li>\n\n\n\n<li>\u9ad8\u6e29\u30a2\u30cb\u30fc\u30eb\u306f\u30c7\u30d0\u30a4\u30b9\u5c64\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b<\/li>\n\n\n\n<li>\u30b3\u30b9\u30c8\u306e\u9ad8\u3055\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u8907\u96d1\u3055<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">7. \u30b3\u30b9\u30c8\u3068\u88fd\u9020\u306e\u89b3\u70b9<\/h2>\n\n\n\n<p>\u5236\u4f5c\u306e\u89b3\u70b9\u304b\u3089\u8a00\u3048\u3070\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u967d\u6975\u63a5\u5408<\/strong> \u2192 \u4f4e\u30b3\u30b9\u30c8\u3001\u9ad8\u53ce\u7387\u3001\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u304c\u5bb9\u6613<\/li>\n\n\n\n<li><strong>\u76f4\u63a5\u63a5\u7740<\/strong> \u2192 \u30b3\u30b9\u30c8\u306e\u4e0a\u6607\u3001\u3088\u308a\u53b3\u683c\u306a\u5de5\u7a0b\u8981\u4ef6\u3001\u3088\u308a\u9ad8\u3044\u6027\u80fd<\/li>\n<\/ul>\n\n\n\n<p>\u6c4e\u7528MEMS\u30bb\u30f3\u30b5\u30fc\u306e\u5834\u5408\u3001\u967d\u6975\u63a5\u5408\u304c\u3057\u3070\u3057\u3070\u597d\u307e\u308c\u308b\u3002.<br>\u9ad8\u5ea6\u306aRF MEMS\u304a\u3088\u3073\u30cf\u30a4\u30a8\u30f3\u30c9\u96c6\u7a4d\u5316\u306b\u304a\u3044\u3066\u306f\u3001\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u304c\u696d\u754c\u6a19\u6e96\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">8. \u9069\u5207\u306a\u63a5\u7740\u65b9\u6cd5\u306e\u9078\u3073\u65b9<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u4ee5\u4e0b\u306e\u8981\u4ef6\u304c\u3042\u308b\u5834\u5408\u306f\u3001\u967d\u6975\u63a5\u5408\u3092\u9078\u629e\u3057\u3066\u304f\u3060\u3055\u3044\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b7\u30ea\u30b3\u30f3\u30fb\u30ac\u30e9\u30b9\u63a5\u5408\u69cb\u9020<\/li>\n\n\n\n<li>\u5305\u88c5\u306b\u304a\u3051\u308b\u5149\u900f\u904e\u6027<\/li>\n\n\n\n<li>\u88fd\u9020\u30b3\u30b9\u30c8\u306e\u524a\u6e1b<\/li>\n\n\n\n<li>MEMS\u30bb\u30f3\u30b5\u30fc\u306e\u5b89\u5b9a\u3057\u305f\u5c01\u6b62<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u6b21\u306e\u3088\u3046\u306a\u5834\u5408\u306f\u3001\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3092\u304a\u9078\u3073\u304f\u3060\u3055\u3044\uff1a<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6700\u9ad8\u306e\u6a5f\u68b0\u7684\u5f37\u5ea6<\/li>\n\n\n\n<li>\u30b7\u30ea\u30b3\u30f3\u9593\u96c6\u7a4d<\/li>\n\n\n\n<li>RF\u307e\u305f\u306f\u9ad8\u5468\u6ce2\u7279\u6027<\/li>\n\n\n\n<li>\u9ad8\u5ea6\u306a3D\u30a6\u30a7\u30cf\u7a4d\u5c64<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">9. \u696d\u754c\u306e\u52d5\u5411\uff1a\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3078\u306e\u79fb\u884c<\/h2>\n\n\n\n<p>\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3067\u306f\u3001\u4ee5\u4e0b\u306e\u4e21\u65b9\u306e\u624b\u6cd5\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u30b1\u30fc\u30b9\u304c\u5897\u3048\u3066\u3044\u307e\u3059\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a6\u30a7\u30cf\u30fc\u30ec\u30d9\u30eb\u5c01\u6b62<\/li>\n\n\n\n<li>\u7570\u7a2e\u7d71\u5408<\/li>\n\n\n\n<li>3D\u7a4d\u5c64MEMS\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u9ad8\u5ea6\u306aRF\u30e2\u30b8\u30e5\u30fc\u30eb<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u306a\u30a2\u30d7\u30ed\u30fc\u30c1\u306b\u3088\u308a\u3001\u30b3\u30b9\u30c8\u52b9\u7387\u3068\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u306e\u4e21\u65b9\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">10.\u7d50\u8ad6<\/h2>\n\n\n\n<p>\u30a2\u30ce\u30fc\u30c9\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u3068\u30c0\u30a4\u30ec\u30af\u30c8\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306f\u3001\u3044\u305a\u308c\u3082\u73fe\u4ee3\u306eMEMS\u304a\u3088\u3073\u30bb\u30f3\u30b5\u30fc\u7528\u30a6\u30a7\u30cf\u306e\u52a0\u5de5\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u967d\u6975\u63a5\u5408<\/strong> \u2192 \u30b3\u30b9\u30c8\u52b9\u7387\u306b\u512a\u308c\u305f\u30ac\u30e9\u30b9\u57fa\u677f\u3092\u7528\u3044\u305fMEMS\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/li>\n\n\n\n<li><strong>\u76f4\u63a5\u63a5\u7740<\/strong> \u2192 \u9ad8\u6027\u80fd\u306a\u30b7\u30ea\u30b3\u30f3\u96c6\u7a4d\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n\n\n\n<p>\u9069\u5207\u306a\u9078\u629e\u306f\u3001\u6750\u6599\u306e\u9069\u5408\u6027\u3001\u6027\u80fd\u8981\u4ef6\u3001\u304a\u3088\u3073\u751f\u7523\u898f\u6a21\u306b\u3088\u3063\u3066\u6c7a\u307e\u308a\u307e\u3059\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>In advanced MEMS manufacturing and sensor packaging, wafer bonding is a critical step that directly impacts device reliability, hermetic sealing, and long-term performance. Among the most widely used techniques are anodic bonding and direct (fusion) bonding. Although both methods join wafers at the atomic or molecular level, they rely on completely different physical mechanisms and [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2031,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[207,206,208,1395,1393,1396,210,1394,204,215],"class_list":["post-2491","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-anodic-bonding","tag-direct-bonding","tag-fusion-bonding","tag-glass-bonding","tag-mems-packaging","tag-mems-sensors","tag-silicon-wafer-bonding","tag-soi-wafer","tag-wafer-bonding","tag-wafer-level-packaging"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2491","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/comments?post=2491"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2491\/revisions"}],"predecessor-version":[{"id":2494,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2491\/revisions\/2494"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media\/2031"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media?parent=2491"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/categories?post=2491"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/tags?post=2491"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}