{"id":2457,"date":"2026-05-11T05:12:17","date_gmt":"2026-05-11T05:12:17","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2457"},"modified":"2026-05-11T05:12:34","modified_gmt":"2026-05-11T05:12:34","slug":"%e5%8d%8a%e5%b0%8e%e4%bd%93%e8%a3%bd%e9%80%a0%e8%a3%85%e7%bd%ae%e3%81%ae%e3%82%a8%e3%82%b3%e3%82%b7%e3%82%b9%e3%83%86%e3%83%a0%e3%81%a8%e5%85%88%e9%80%b2%e7%9a%84%e3%83%95%e3%82%a1%e3%83%96%e3%83%bb","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ja\/semiconductor-manufacturing-equipment-ecosystem-and-advanced-fab-layout-architecture\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u3068\u5148\u9032\u30d5\u30a1\u30d6\u30fb\u30ec\u30a4\u30a2\u30a6\u30c8\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3"},"content":{"rendered":"<p><a href=\"https:\/\/www.zmsh-semitech.com\/ja\/%e8%a3%bd%e5%93%81\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e<\/mark><\/a> 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<strong>\u591a\u5c64\u3001\u30e2\u30b8\u30e5\u30e9\u30fc\u3001\u30eb\u30fc\u30d7\u6700\u9069\u5316\u30b7\u30b9\u30c6\u30e0<\/strong>, \u3092\u4e2d\u5fc3\u306b\u69cb\u6210\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u99c6\u52d5\u578b\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3<\/li>\n\n\n\n<li>\u6e05\u6f54\u5ea6\u7ba1\u7406\u3055\u308c\u305f\u30be\u30fc\u30cb\u30f3\u30b0<\/li>\n\n\n\n<li>\u81ea\u52d5\u30de\u30c6\u30ea\u30a2\u30eb\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u306e\u30d0\u30c3\u30af\u30dc\u30fc\u30f3<\/li>\n\n\n\n<li>\u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u8a2d\u5099\u4e2d\u5fc3\u306e\u30ec\u30a4\u30a2\u30a6\u30c8<\/li>\n<\/ul>\n\n\n\n<p>\u30d5\u30a1\u30d6\u30fb\u30c7\u30b6\u30a4\u30f3\u306e\u6700\u7d42\u7684\u306a\u76ee\u7684\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u30c4\u30fc\u30eb\u306e\u6700\u5927\u6d3b\u7528<\/li>\n\n\n\n<li>\u30a6\u30a7\u30fc\u30cf\u642c\u9001\u8ddd\u96e2\u3068\u30b5\u30a4\u30af\u30eb\u30bf\u30a4\u30e0\u306e\u6700\u5c0f\u5316<\/li>\n\n\n\n<li>\u53b3\u683c\u306a\u6c5a\u67d3\u7ba1\u7406<\/li>\n\n\n\n<li>\u30b9\u30b1\u30fc\u30e9\u30d3\u30ea\u30c6\u30a3\u3068\u5c06\u6765\u306e\u30ce\u30fc\u30c9\u79fb\u884c\u80fd\u529b\u306e\u78ba\u4fdd<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u7d71\u5408\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u975e\u5e38\u306b\u8907\u96d1\u3067\u3042\u308a\u306a\u304c\u3089\u52b9\u7387\u7684\u306a\u88fd\u9020\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u3092\u5f62\u6210\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"940\" height=\"622\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1.png\" alt=\"\" class=\"wp-image-2458\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1.png 940w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-300x199.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-768x508.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-18x12.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-600x397.png 600w\" sizes=\"(max-width: 940px) 100vw, 940px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u534a\u5c0e\u4f53\u88c5\u7f6e\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306e\u6982\u8981<\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u696d\u754c\u306f\u5927\u304d\u304f6\u3064\u306e\u30bb\u30b0\u30e1\u30f3\u30c8\u306b\u5206\u3051\u3089\u308c\u308b\uff1a<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.1 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class=\"wp-block-list\">\n<li>\u8d85\u9ad8\u7d14\u5ea6\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/li>\n\n\n\n<li>\u7d50\u6676\u6b20\u9665\u306e\u6700\u5c0f\u5316<\/li>\n\n\n\n<li>\u76f4\u5f84\u3068\u539a\u307f\u306e\u5747\u4e00\u6027<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">1.2 \u8a2d\u8a08\u691c\u8a3c\u88c5\u7f6e<\/h3>\n\n\n\n<p>\u30c1\u30c3\u30d7\u306e\u8a2d\u8a08\u304a\u3088\u3073\u691c\u8a3c\u6bb5\u968e\u3067\u4f7f\u7528\u3055\u308c\u3001\u91cf\u7523\u524d\u306b\u96fb\u6c17\u7684\u304a\u3088\u3073\u6a5f\u80fd\u7684\u306a\u6b63\u3057\u3055\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n\n\n\n<p>\u4ee3\u8868\u7684\u306a\u30b7\u30b9\u30c6\u30e0\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u901f\u30b7\u30b0\u30ca\u30eb\u30a4\u30f3\u30c6\u30b0\u30ea\u30c6\u30a3\u8a66\u9a13\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n\n\n\n<li>\u30c7\u30d0\u30a4\u30b9\u96fb\u6c17\u7279\u6027\u8a55\u4fa1\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u30bf\u30a4\u30df\u30f3\u30b0\u304a\u3088\u3073\u30d1\u30ef\u30fc\u89e3\u6790\u6a5f\u5668<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u30c4\u30fc\u30eb\u306f\u3001\u8a2d\u8a08\u306e\u5b9f\u73fe\u53ef\u80fd\u6027\u3068\u88fd\u9020\u6027\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.3 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class=\"wp-block-list\">\n<li>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u88c5\u7f6e<\/li>\n\n\n\n<li>\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u8584\u819c\u84b8\u7740\u88c5\u7f6e<\/li>\n\n\n\n<li>\u30a4\u30aa\u30f3\u6ce8\u5165\u304a\u3088\u3073\u30a2\u30cb\u30fc\u30eb\u88c5\u7f6e<\/li>\n\n\n\n<li>\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u304a\u3088\u3073\u8a08\u6e2c\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u30bb\u30b0\u30e1\u30f3\u30c8\u306f\u300128nm\u30017nm\u30013nm\u3068\u3044\u3063\u305f\u30ce\u30fc\u30c9\u306e\u88fd\u9020\u80fd\u529b\u3092\u5b9a\u7fa9\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.4 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class=\"wp-block-list\">\n<li>\u5f93\u6765\u306e\u5305\u88c5\u8a2d\u5099\uff08\u30ef\u30a4\u30e4\u30fc\u30dc\u30f3\u30c7\u30a3\u30f3\u30b0\u306a\u3069\uff09<\/li>\n\n\n\n<li>\u9ad8\u5ea6\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u30fb\u30b7\u30b9\u30c6\u30e0\uff08\u30d5\u30ea\u30c3\u30d7\u30c1\u30c3\u30d7\u30012.5D\/3D\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\uff09<\/li>\n<\/ul>\n\n\n\n<p>\u9ad8\u5ea6\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u306f\u3001\u30e0\u30fc\u30a2\u306e\u6cd5\u5247\u306e\u91cd\u8981\u306a\u5ef6\u9577\u306b\u306a\u308a\u3064\u3064\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.5 \u534a\u5c0e\u4f53\u8a66\u9a13\u88c5\u7f6e<\/h3>\n\n\n\n<p>\u6700\u7d42\u7684\u306a\u30c1\u30c3\u30d7\u306e\u691c\u8a3c\u3084\u54c1\u8cea\u4fdd\u8a3c\u306b\u4f7f\u7528\u3055\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u81ea\u52d5\u8a66\u9a13\u88c5\u7f6e\uff08ATE\uff09<\/li>\n\n\n\n<li>\u30d7\u30ed\u30fc\u30d6\u30fb\u30b9\u30c6\u30fc\u30b7\u30e7\u30f3<\/li>\n\n\n\n<li>\u9078\u5225\u30fb\u30d3\u30f3\u8a70\u3081\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u51fa\u8377\u524d\u306e\u6b69\u7559\u307e\u308a\u3068\u4fe1\u983c\u6027\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.6 \u534a\u5c0e\u4f53\u691c\u67fb\u30fb\u5206\u6790\u88c5\u7f6e<\/h3>\n\n\n\n<p>\u30d7\u30ed\u30bb\u30b9\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3084\u6545\u969c\u89e3\u6790\u306b\u4f7f\u7528\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6b20\u9665\u691c\u67fb\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u6750\u6599\u7d44\u6210\u304a\u3088\u3073\u69cb\u9020\u89e3\u6790\u30c4\u30fc\u30eb<\/li>\n\n\n\n<li>\u4fe1\u983c\u6027\u8a66\u9a13\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n<\/ul>\n\n\n\n<p>\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u3068\u6b69\u7559\u307e\u308a\u5411\u4e0a\u306e\u305f\u3081\u306e\u30d5\u30a3\u30fc\u30c9\u30d0\u30c3\u30af\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u8fd1\u4ee3\u7684\u30d5\u30a1\u30d6\u30fb\u30ec\u30a4\u30a2\u30a6\u30c8\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u30fc<\/h2>\n\n\n\n<p>\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u5de5\u5834\u306f\u3001\u53b3\u683c\u306a\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u30fc\u30fb\u30ed\u30b8\u30c3\u30af\u3092\u6301\u3064\u9ad8\u5ea6\u306b\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u3055\u308c\u305f\u74b0\u5883\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 \u30d7\u30ed\u30bb\u30b9\u30d5\u30ed\u30fc\u4e3b\u5c0e\u306e\u30ec\u30a4\u30a2\u30a6\u30c8<\/h3>\n\n\n\n<p>\u30a6\u30a7\u30cf\u30fc\u51e6\u7406\u306f\u53b3\u5bc6\u306a\u9806\u5e8f\u30d5\u30ed\u30fc\u306b\u5f93\u3046\uff1a<\/p>\n\n\n\n<p>\u6750\u6599\u6e96\u5099\u2192\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u2192\u30a8\u30c3\u30c1\u30f3\u30b0\u2192\u84b8\u7740\u2192\u30c9\u30fc\u30d4\u30f3\u30b0\u2192\u71b1\u51e6\u7406\u2192\u6d17\u6d44\u2192\u30e1\u30c8\u30ed\u30ed\u30b8\u30fc<\/p>\n\n\n\n<p>\u5f8c\u623b\u308a\u3084\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u3092\u9632\u3050\u305f\u3081\u3001\u6a5f\u5668\u306e\u914d\u7f6e\u306f\u3053\u306e\u30d5\u30ed\u30fc\u306b\u53b3\u5bc6\u306b\u5f93\u3046\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 \u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u306e\u30be\u30fc\u30cb\u30f3\u30b0\u6226\u7565<\/h3>\n\n\n\n<p>\u5de5\u5834\u306f\u8907\u6570\u306e\u6e05\u6d44\u5ea6\u30ec\u30d9\u30eb\u306b\u5206\u3051\u3089\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a6\u30eb\u30c8\u30e9\u30af\u30ea\u30fc\u30f3\u30be\u30fc\u30f3\uff08\u5148\u7aef\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3068\u30a8\u30c3\u30c1\u30f3\u30b0\uff09<\/li>\n\n\n\n<li>\u9ad8\u6e05\u6d44\u5ea6\u30be\u30fc\u30f3\uff08\u84b8\u7740\u304a\u3088\u3073\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\uff09<\/li>\n\n\n\n<li>\u6a19\u6e96\u30af\u30ea\u30fc\u30f3\u30be\u30fc\u30f3\uff08\u30b5\u30dd\u30fc\u30c8\u30d7\u30ed\u30bb\u30b9\uff09<\/li>\n<\/ul>\n\n\n\n<p>\u6c17\u6d41\u3068\u4eba\u306e\u52d5\u304d\u306f\u4e00\u65b9\u5411\u306b\u53b3\u3057\u304f\u5236\u5fa1\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 \u81ea\u52d5\u30de\u30c6\u30ea\u30a2\u30eb\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\uff08AMHS\uff09<\/h3>\n\n\n\n<p>\u30a6\u30a7\u30cf\u30fc\u642c\u9001\u306f\u5b8c\u5168\u81ea\u52d5\u5316\u3055\u308c\u3066\u304a\u308a\u3001\u4eba\u7684\u63a5\u89e6\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30aa\u30fc\u30d0\u30fc\u30d8\u30c3\u30c9\u30db\u30a4\u30b9\u30c8\u8f38\u9001\u30b7\u30b9\u30c6\u30e0\uff08OHT\uff09<\/li>\n\n\n\n<li>\u7121\u4eba\u642c\u9001\u8eca\uff08AGV\uff09<\/li>\n\n\n\n<li>\u81ea\u52d5\u4fdd\u7ba1\u30fb\u691c\u7d22\u30b7\u30b9\u30c6\u30e0\uff08AS\/RS\uff09<\/li>\n<\/ul>\n\n\n\n<p>\u76ee\u6a19\u306f\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306e\u30ea\u30b9\u30af\u3092\u30bc\u30ed\u306b\u3057\u3001\u9ad8\u3044\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u52b9\u7387\u3092\u78ba\u4fdd\u3059\u308b\u3053\u3068\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.4 \u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u4e2d\u5fc3\u306e\u30ec\u30a4\u30a2\u30a6\u30c8\u8a2d\u8a08<\/h3>\n\n\n\n<p>\u91cd\u8981\u306a\u88c5\u7f6e\uff08\u9ad8\u5ea6\u306a\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fb\u30c4\u30fc\u30eb\u306a\u3069\uff09\u306f\u901a\u5e38\u3001\u5de5\u5834\u306e\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u5b9a\u7fa9\u3059\u308b\u3002.<\/p>\n\n\n\n<p>\u4e3b\u306a\u539f\u5247\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30dc\u30c8\u30eb\u30cd\u30c3\u30af\u30c4\u30fc\u30eb\u3092\u4e2d\u5fc3\u3068\u3057\u305f\u30ec\u30a4\u30a2\u30a6\u30c8<\/li>\n\n\n\n<li>\u4e0a\u6d41\u3068\u4e0b\u6d41\u306e\u5bfe\u79f0\u7684\u306a\u6700\u9069\u5316<\/li>\n\n\n\n<li>\u5de5\u5177\u7a3c\u50cd\u7387\u306e\u6700\u5927\u5316<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.5 \u30e2\u30b8\u30e5\u30e9\u30fc\u3067\u30b9\u30b1\u30fc\u30e9\u30d6\u30eb\u306a\u30d5\u30a1\u30d6\u8a2d\u8a08<\/h3>\n\n\n\n<p>\u5de5\u5834\u306f\u3001\u30e2\u30b8\u30e5\u30fc\u30eb\u5f0f\u306e\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u30fb\u30d6\u30ed\u30c3\u30af\u3067\u69cb\u6210\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5bb9\u91cf\u62e1\u5927<\/li>\n\n\n\n<li>\u6280\u8853\u30ce\u30fc\u30c9\u306e\u30a2\u30c3\u30d7\u30b0\u30ec\u30fc\u30c9<\/li>\n\n\n\n<li>\u30de\u30eb\u30c1\u30ce\u30fc\u30c9\u5171\u5b58<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u306b\u3088\u308a\u3001\u9577\u671f\u7684\u306a\u67d4\u8edf\u6027\u3068\u30b3\u30b9\u30c8\u52b9\u7387\u304c\u78ba\u4fdd\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306e\u30b3\u30a2\u6280\u8853<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">3.1 \u9732\u5149\u88c5\u7f6e<\/h2>\n\n\n\n<p>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc\u306f\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u5de5\u7a0b\u3067\u3042\u308a\u3001\u56de\u8def\u30d1\u30bf\u30fc\u30f3\u3092\u30a6\u30a7\u30cf\u30fc\u306b\u8ee2\u5199\u3059\u308b\u5f79\u5272\u3092\u62c5\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u6280\u8853\u5206\u985e\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>7nm\u4ee5\u4e0b\u306e\u6975\u7aef\u7d2b\u5916\u7dda\uff08EUV\uff09\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3<\/li>\n\n\n\n<li>28nm-7nm\u30ce\u30fc\u30c9\u7528ArF\u6db2\u6d78\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3<\/li>\n\n\n\n<li>\u6210\u719f\u30ce\u30fc\u30c9\u5411\u3051\u30c9\u30e9\u30a4ArF\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3<\/li>\n\n\n\n<li>\u30ec\u30ac\u30b7\u30fc\u30d7\u30ed\u30bb\u30b9\u7528i\u7dda\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3<\/li>\n<\/ul>\n\n\n\n<p>EUV\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u3053\u308c\u307e\u3067\u306b\u88fd\u9020\u3055\u308c\u305f\u4e2d\u3067\u6700\u3082\u8907\u96d1\u306a\u7523\u696d\u6a5f\u68b0\u306e\u3072\u3068\u3064\u3067\u3042\u308a\u3001\u7d71\u5408\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fcEUV\u5149\u6e90\uff08\u6ce2\u957713.5nm\uff09<\/li>\n\n\n\n<li>\u591a\u5c64\u53cd\u5c04\u5149\u5b66\u7cfb<\/li>\n\n\n\n<li>\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u7cbe\u5ea6\u306e\u30c7\u30e5\u30a2\u30eb\u30b9\u30c6\u30fc\u30b8\u30fb\u30a6\u30a7\u30cf\u4f4d\u7f6e\u6c7a\u3081<\/li>\n\n\n\n<li>\u9ad8\u771f\u7a7a\u74b0\u5883<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.2 \u30a8\u30c3\u30c1\u30f3\u30b0\u30fb\u30b7\u30b9\u30c6\u30e0<\/h2>\n\n\n\n<p>\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u306f\u3001\u6750\u6599\u3092\u9078\u629e\u7684\u306b\u9664\u53bb\u3057\u3066\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u69cb\u9020\u3092\u5f62\u6210\u3059\u308b\u3002.<\/p>\n\n\n\n<p>\u4e3b\u306a\u7a2e\u985e\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5bb9\u91cf\u7d50\u5408\u30d7\u30e9\u30ba\u30de\uff08CCP\uff09\u30a8\u30c3\u30c1\u30f3\u30b0<\/li>\n\n\n\n<li>\u8a98\u5c0e\u7d50\u5408\u30d7\u30e9\u30ba\u30de\uff08ICP\uff09\u30a8\u30c3\u30c1\u30f3\u30b0<\/li>\n\n\n\n<li>\u6df1\u90e8\u53cd\u5fdc\u6027\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\uff08DRIE\uff09<\/li>\n\n\n\n<li>\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0 (ALE)<\/li>\n<\/ul>\n\n\n\n<p>\u4e3b\u306a\u50be\u5411<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u7cbe\u5bc6\u5236\u5fa1<\/li>\n\n\n\n<li>\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u69cb\u9020\u80fd\u529b<\/li>\n\n\n\n<li>\u9078\u629e\u6027\u3068\u5747\u4e00\u6027\u306e\u5411\u4e0a<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.3 \u8584\u819c\u84b8\u7740\u30b7\u30b9\u30c6\u30e0<\/h2>\n\n\n\n<p>\u30a6\u30a7\u30cf\u30fc\u4e0a\u306b\u6a5f\u80fd\u5c64\u3092\u6210\u819c\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30e9\u30ba\u30de\u30a8\u30f3\u30cf\u30f3\u30b9\u30c8\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5(PECVD)<\/li>\n\n\n\n<li>\u4f4e\u5727\u5316\u5b66\u84b8\u7740\uff08LPCVD\uff09<\/li>\n\n\n\n<li>\u9ad8\u5bc6\u5ea6\u30d7\u30e9\u30ba\u30deCVD (HDPCVD)<\/li>\n\n\n\n<li>\u7269\u7406\u84b8\u7740\uff08PVD\uff09<\/li>\n\n\n\n<li>\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5 (ALD)<\/li>\n<\/ul>\n\n\n\n<p>ALD\u306f\u539f\u5b50\u30ec\u30d9\u30eb\u306e\u539a\u307f\u5236\u5fa1\u3092\u53ef\u80fd\u306b\u3057\u3001\u307b\u307c\u5b8c\u74a7\u306a\u9069\u5408\u6027\u3092\u5b9f\u73fe\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.4 \u30a4\u30aa\u30f3\u6ce8\u5165\u3068\u71b1\u51e6\u7406<\/h2>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u534a\u5c0e\u4f53\u306e\u96fb\u6c17\u7684\u7279\u6027\u3092\u5909\u5316\u3055\u305b\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7cbe\u5bc6\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u5236\u5fa1\u3067\u30c9\u30fc\u30d1\u30f3\u30c8\u3092\u5c0e\u5165\u3059\u308b\u30a4\u30aa\u30f3\u6ce8\u5165<\/li>\n\n\n\n<li>\u30e9\u30d4\u30c3\u30c9\u30b5\u30fc\u30de\u30eb\u30a2\u30cb\u30fc\u30eb\uff08RTA\uff09\u306f\u30c9\u30fc\u30d1\u30f3\u30c8\u3092\u6d3b\u6027\u5316\u3057\u3001\u7d50\u6676\u306e\u640d\u50b7\u3092\u4fee\u5fa9\u3059\u308b\u3002<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u30a2\u30cb\u30fc\u30eb\u3067\u5148\u7aef\u30ce\u30fc\u30c9\u306e\u8d85\u9ad8\u901f\u5c40\u6240\u52a0\u71b1\u304c\u53ef\u80fd\u306b<\/li>\n<\/ul>\n\n\n\n<p>\u4e3b\u306a\u8981\u4ef6\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6b63\u78ba\u306a\u6295\u4e0e\u91cf\u3068\u30a8\u30cd\u30eb\u30ae\u30fc\u5236\u5fa1<\/li>\n\n\n\n<li>\u9ad8\u3044\u5747\u4e00\u6027<\/li>\n\n\n\n<li>\u71b1\u4e88\u7b97\u3078\u306e\u5f71\u97ff\u306f\u6700\u5c0f\u9650<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.5 \u6d17\u6d44\u304a\u3088\u3073\u8a08\u6e2c\u30b7\u30b9\u30c6\u30e0<\/h2>\n\n\n\n<p>\u6d17\u6d44\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u3059\u3079\u3066\u306e\u5de5\u7a0b\u3067\u4f7f\u7528\u3055\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7c92\u5b50\u6c5a\u67d3<\/li>\n\n\n\n<li>\u6709\u6a5f\u6b8b\u7559\u7269<\/li>\n\n\n\n<li>\u91d1\u5c5e\u4e0d\u7d14\u7269<\/li>\n<\/ul>\n\n\n\n<p>\u8a08\u6e2c\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6e2c\u5b9a\u306b\u3088\u3063\u3066\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u3092\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30af\u30ea\u30c6\u30a3\u30ab\u30eb\u30fb\u30c7\u30a3\u30e1\u30f3\u30b7\u30e7\u30f3\uff08CD\uff09<\/li>\n\n\n\n<li>\u819c\u539a<\/li>\n\n\n\n<li>\u30aa\u30fc\u30d0\u30fc\u30ec\u30a4\u7cbe\u5ea6<\/li>\n\n\n\n<li>\u6b20\u9665\u5bc6\u5ea6<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u6280\u8853\u958b\u767a\u52d5\u5411<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">4.1 \u539f\u5b50\u30b9\u30b1\u30fc\u30eb\u88fd\u9020\u3078\u306e\u79fb\u884c<\/h3>\n\n\n\n<p>\u534a\u5c0e\u4f53\u306e\u88fd\u9020\u306f\u7269\u7406\u7684\u9650\u754c\u306b\u8fd1\u3065\u3044\u3066\u304a\u308a\u3001\u305d\u308c\u3092\u5fc5\u8981\u3068\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u539f\u5b50\u5c64\u30ec\u30d9\u30eb\u306e\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1<\/li>\n\n\n\n<li>\u8d85\u4f4e\u6b20\u9665\u5bc6\u5ea6<\/li>\n\n\n\n<li>\u30b5\u30d6\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u7cbe\u5ea6<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4.2 \u30de\u30eb\u30c1\u30d5\u30a3\u30b8\u30c3\u30af\u30b9\u30fb\u30d7\u30ed\u30bb\u30b9\u306e\u7d71\u5408<\/h3>\n\n\n\n<p>\u5c06\u6765\u306e\u6a5f\u5668\u306f\u7d71\u5408\u3055\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5149\u5b66\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u7269\u7406\u5b66<\/li>\n\n\n\n<li>\u30b5\u30fc\u30de\u30eb\u30fb\u30c0\u30a4\u30ca\u30df\u30af\u30b9<\/li>\n\n\n\n<li>\u96fb\u78c1\u5236\u5fa1<\/li>\n<\/ul>\n\n\n\n<p>\u9ad8\u5ea6\u306b\u540c\u671f\u5316\u3055\u308c\u305f\u30d7\u30ed\u30bb\u30b9\u5b9f\u884c\u306e\u305f\u3081\u306b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.3 AI\u4e3b\u5c0e\u306e\u88fd\u9020\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30b9<\/h3>\n\n\n\n<p>\u4eba\u5de5\u77e5\u80fd\u306e\u7528\u9014\u306f\u307e\u3059\u307e\u3059\u5e83\u304c\u3063\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316<\/li>\n\n\n\n<li>\u4e88\u77e5\u4fdd\u5168<\/li>\n\n\n\n<li>\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u6b69\u7559\u307e\u308a\u5411\u4e0a<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4.4 \u5148\u9032\u7684\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3068\u30b7\u30b9\u30c6\u30e0\u7d71\u5408<\/h3>\n\n\n\n<p>\u30e0\u30fc\u30a2\u306e\u6cd5\u5247\u304c\u920d\u5316\u3059\u308b\u306b\u3064\u308c\u3066\u3001\u6280\u8853\u9769\u65b0\u306e\u65b9\u5411\u306f\u305d\u3061\u3089\u306b\u30b7\u30d5\u30c8\u3057\u3066\u3044\u304f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>3D\u30d8\u30c6\u30ed\u30b8\u30cb\u30a2\u30b9\u30fb\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3<\/li>\n\n\n\n<li>\u30c1\u30c3\u30d7\u30ec\u30c3\u30c8\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u30fc<\/li>\n\n\n\n<li>\u30b7\u30b9\u30c6\u30e0\u30ec\u30d9\u30eb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\uff08SiP\u30012.5D\/3D\u30b9\u30bf\u30c3\u30ad\u30f3\u30b0\uff09<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d50\u8ad6<\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306f\u3001\u3053\u308c\u307e\u3067\u306b\u958b\u767a\u3055\u308c\u305f\u4e2d\u3067\u6700\u3082\u9ad8\u5ea6\u3067\u8907\u96d1\u306a\u7523\u696d\u30b7\u30b9\u30c6\u30e0\u306e\u3072\u3068\u3064\u3067\u3042\u308b\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306f\u3001\u7cbe\u5bc6\u5de5\u5b66\u3001\u6750\u6599\u79d1\u5b66\u3001\u30d7\u30e9\u30ba\u30de\u7269\u7406\u5b66\u3001\u5149\u5b66\u3001\u81ea\u52d5\u5316\u3001\u30c7\u30fc\u30bf\u30fb\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30b9\u3092\u7d71\u5408\u3057\u305f\u88fd\u9020\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u3067\u3059\u3002.<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u5de5\u5834\u5185\u306e\u5404\u5de5\u5177\u306f\u5b64\u7acb\u3057\u305f\u6a5f\u68b0\u3067\u306f\u306a\u304f\u3001\u9ad8\u5ea6\u306b\u540c\u671f\u5316\u3055\u308c\u305f\u76f8\u4e92\u4f9d\u5b58\u306e\u30d7\u30ed\u30bb\u30b9\u30cd\u30c3\u30c8\u30ef\u30fc\u30af\u306e\u4e00\u90e8\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<p>\u534a\u5c0e\u4f53\u30ce\u30fc\u30c9\u304c\u7269\u7406\u7684\u9650\u754c\u306b\u5411\u304b\u3063\u3066\u62e1\u5927\u3057\u7d9a\u3051\u308b\u306b\u3064\u308c\u3066\u3001\u88c5\u7f6e\u306e\u8907\u96d1\u3055\u3001\u7cbe\u5ea6\u3001\u96c6\u7a4d\u5ea6\u306f\u307e\u3059\u307e\u3059\u9ad8\u307e\u308a\u3001\u3053\u306e\u7523\u696d\u306f\u4e16\u754c\u7684\u306a\u6280\u8853\u7af6\u4e89\u306e\u8981\u3068\u306a\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor manufacturing equipment is widely regarded as the \u201cindustrial mother machine\u201d of the integrated circuit (IC) industry, enabling the entire transformation from raw silicon materials to finished chips. Among all segments of the semiconductor value chain, wafer fabrication equipment accounts for approximately 85% of total equipment investment, representing the highest technological barrier and the most [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2458,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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