{"id":2440,"date":"2026-04-30T02:35:44","date_gmt":"2026-04-30T02:35:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2440"},"modified":"2026-04-30T02:48:31","modified_gmt":"2026-04-30T02:48:31","slug":"cvd%e7%82%ad%e5%8c%96%e3%82%b1%e3%82%a4%e7%b4%a0%e3%81%8c%e5%85%88%e7%ab%af%e5%b7%a5%e5%ad%a6%e3%81%ae%e9%87%8d%e8%a6%81%e6%9d%90%e6%96%99%e3%81%a7%e3%81%82%e3%82%8b%e7%90%86%e7%94%b1","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ja\/why-cvd-silicon-carbide-is-a-key-material-in-advanced-engineering\/","title":{"rendered":"CVD\u70ad\u5316\u30b1\u30a4\u7d20\u304c\u5148\u7aef\u5de5\u5b66\u306e\u4e3b\u8981\u6750\u6599\u3067\u3042\u308b\u7406\u7531\uff1a\u69cb\u9020\u3001\u7279\u6027\u3001\u6027\u80fd"},"content":{"rendered":"<p>\u70ad\u5316\u30b1\u30a4\u7d20(SiC)\u306f\u3001\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3001\u5149\u5b66\u3001\u304a\u3088\u3073\u904e\u9177\u306a\u7523\u696d\u74b0\u5883\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u9ad8\u6027\u80fd\u30bb\u30e9\u30df\u30c3\u30af\u3067\u3059\u3002\u305d\u306e\u69d8\u3005\u306a\u5f62\u614b\u306e\u4e2d\u3067\u3082\u3001CVD\u70ad\u5316\u30b1\u30a4\u7d20\uff08CVD SiC\uff09\u306f\u3001\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\u306b\u3088\u308a\u88fd\u9020\u3055\u308c\u3001\u305d\u306e\u5353\u8d8a\u3057\u305f\u7d14\u5ea6\u3001\u5bc6\u5ea6\u3001\u69cb\u9020\u306e\u5747\u4e00\u6027\u306b\u3088\u308a\u3001\u3057\u3070\u3057\u3070\u6700\u3082\u5148\u9032\u7684\u306a\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u306e\u4e00\u3064\u3068\u898b\u306a\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u3053\u306e\u8a18\u4e8b\u3067\u306f\u3001CVD SiC\u306e\u6750\u6599\u7279\u6027\u3001\u5fae\u7d30\u69cb\u9020\u3001\u5fdc\u7528\u4e0a\u306e\u5229\u70b9\u3092\u3001\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u4ed6\u306e\u6750\u6599\u3068\u306e\u6bd4\u8f03\u30c7\u30fc\u30bf\u306b\u57fa\u3065\u3044\u3066\u691c\u8a3c\u3059\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"500\" height=\"403\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/low.jpg\" alt=\"\" class=\"wp-image-2441\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/low.jpg 500w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/low-300x242.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/low-15x12.jpg 15w\" sizes=\"(max-width: 500px) 100vw, 500px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u6750\u6599\u7279\u6027\uff1a\u6bd4\u8f03\u306e\u8996\u70b9<\/h2>\n\n\n\n<p>\u5178\u578b\u7684\u306a\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30c7\u30fc\u30bf\u306b\u57fa\u3065\u304f\u3068\u3001CVD SiC\u306f\u8907\u6570\u306e\u4e3b\u8981\u30d1\u30e9\u30e1\u30fc\u30bf\u306b\u308f\u305f\u3063\u3066\u512a\u308c\u305f\u6027\u80fd\u3092\u793a\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u88681.\u4ee3\u8868\u7684\u306a\u6750\u6599\u7279\u6027\u306e\u6bd4\u8f03<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7d20\u6750<\/th><th>\u5bc6\u5ea6 (g\/cm\u00b3)<\/th><th>\u71b1\u4f1d\u5c0e\u7387 (W\/m-K)<\/th><th>\u6bd4\u71b1\uff08J\/kg\u30fbK\uff09<\/th><th>\u5f3e\u6027\u7387 (GPa)<\/th><th>CTE (\u00d710-\u2076 \/K)<\/th><th>\u8868\u9762\u4ed5\u4e0a\u3052<\/th><\/tr><\/thead><tbody><tr><td>\u30d9\u30ea\u30ea\u30a6\u30e0\uff08Be\uff09<\/td><td>~1.85<\/td><td>~216<\/td><td>~1880<\/td><td>~303<\/td><td>~11.4<\/td><td>\u226410 \u00c5 RMS<\/td><\/tr><tr><td>ULE\u30ac\u30e9\u30b9<\/td><td>~2.20<\/td><td>~1.30<\/td><td>~708<\/td><td>~67<\/td><td>~0.03<\/td><td>\u22643 \u00c5 RMS<\/td><\/tr><tr><td>\u591a\u7d50\u6676SiC<\/td><td>~2.30<\/td><td>~150<\/td><td>~920<\/td><td>~110<\/td><td>~3.8<\/td><td>\u22645 \u00c5 RMS<\/td><\/tr><tr><td>\u30af\u30a9\u30fc\u30c4<\/td><td>~2.20<\/td><td>~1.40<\/td><td>~1210<\/td><td>~70<\/td><td>~0.5<\/td><td>\u22643 \u00c5 RMS<\/td><\/tr><tr><td><strong>CVD SiC<\/strong><\/td><td><strong>~3.21<\/strong><\/td><td><strong>~300<\/strong><\/td><td><strong>~640<\/strong><\/td><td><strong>~466<\/strong><\/td><td><strong>~4.0<\/strong><\/td><td><strong>\u22643 \u00c5 RMS<\/strong><\/td><\/tr><tr><td>\u53cd\u5fdc\u7d50\u5408SiC<\/td><td>~3.10<\/td><td>120-170<\/td><td>\u2014<\/td><td>~391<\/td><td>~4.3<\/td><td>\u226520 \u00c5 RMS<\/td><\/tr><tr><td>\u30db\u30c3\u30c8\u30d7\u30ec\u30b9SiC<\/td><td>~3.20<\/td><td>50-120<\/td><td>\u2014<\/td><td>~451<\/td><td>~4.6<\/td><td>\u226550 \u00c5 RMS<\/td><\/tr><tr><td>\u713c\u7d50SiC<\/td><td>~3.10<\/td><td>50-120<\/td><td>\u2014<\/td><td>~408<\/td><td>~4.5<\/td><td>\u2265100 \u00c5 RMS<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">\u4e3b\u306a\u898b\u89e3<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">1.\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/h3>\n\n\n\n<p>CVD SiC\uff08\uff5e300W\/m\u30fbK\uff09\u306f\u3001\u77f3\u82f1\u3084\u30ac\u30e9\u30b9\u6750\u6599\u3092\u5927\u5e45\u306b\u4e0a\u56de\u308b\u3002.<\/p>\n\n\n\n<p><strong>\u305d\u306e\u610f\u5473\u3059\u308b\u3068\u3053\u308d\u306f\u5927\u304d\u3044\uff1a<\/strong><br>\u9ad8\u6e29\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3051\u308b\u52b9\u7387\u7684\u306a\u653e\u71b1\u3068\u71b1\u52fe\u914d\u306e\u4f4e\u6e1b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.\u9ad8\u3044\u5f3e\u6027\u7387<\/h3>\n\n\n\n<p>450GPa\u3092\u8d85\u3048\u308b\u5024\u3092\u793a\u3059CVD SiC\u306f\u3001\u5353\u8d8a\u3057\u305f\u525b\u6027\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n\n\n\n<p><strong>\u305d\u306e\u610f\u5473\u3059\u308b\u3068\u3053\u308d\u306f\u5927\u304d\u3044\uff1a<\/strong><br>\u71b1\u304a\u3088\u3073\u6a5f\u68b0\u7684\u30b9\u30c8\u30ec\u30b9\u4e0b\u3067\u3082\u5bf8\u6cd5\u5b89\u5b9a\u6027\u3092\u7dad\u6301\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.\u4f4e\u71b1\u81a8\u5f35<\/h3>\n\n\n\n<p>\u71b1\u81a8\u5f35\u4fc2\u6570\uff08CTE\uff09\u304c\u6bd4\u8f03\u7684\u4f4e\u3044\u305f\u3081\u3001\u5909\u5f62\u306f\u6700\u5c0f\u9650\u306b\u6291\u3048\u3089\u308c\u308b\u3002.<\/p>\n\n\n\n<p><strong>\u305d\u306e\u610f\u5473\u3059\u308b\u3068\u3053\u308d\u306f\u5927\u304d\u3044\uff1a<\/strong><br>\u534a\u5c0e\u4f53\u52a0\u5de5\u3084\u5149\u5b66\u306a\u3069\u306e\u7cbe\u5bc6\u306a\u7528\u9014\u306b\u306f\u6b20\u304b\u305b\u306a\u3044\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.\u8d85\u6ed1\u3089\u304b\u306a\u8868\u9762\u4ed5\u4e0a\u3052<\/h3>\n\n\n\n<p>\u8868\u9762\u7c97\u3055\u306f\u30aa\u30f3\u30b0\u30b9\u30c8\u30ed\u30fc\u30e0\u30ec\u30d9\u30eb\uff08\u22643\u00c5 RMS\uff09\u306b\u9054\u3059\u308b\u3053\u3068\u304c\u3042\u308b\u3002.<\/p>\n\n\n\n<p><strong>\u305d\u306e\u610f\u5473\u3059\u308b\u3068\u3053\u308d\u306f\u5927\u304d\u3044\uff1a<\/strong><br>\u8d85\u6e05\u6d44\u74b0\u5883\u3067\u306e\u7c92\u5b50\u6c5a\u67d3\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u5fae\u7d30\u69cb\u9020CVD\u51e6\u7406\u306e\u5229\u70b9<\/h2>\n\n\n\n<p>CVD SiC\u306f\u6c17\u76f8\u53cd\u5fdc\u306b\u3088\u3063\u3066\u5f62\u6210\u3055\u308c\u3001\u5b8c\u5168\u306b\u7dfb\u5bc6\u3067\u6c17\u5b54\u306e\u306a\u3044\u56fa\u4f53\u306b\u306a\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u4e3b\u306a\u69cb\u9020\u4e0a\u306e\u7279\u5fb4<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>99.999%\u307e\u3067\u306e\u7d14\u5ea6<\/li>\n\n\n\n<li>\u7406\u8ad6\u5bc6\u5ea6\u306b\u8fd1\u3044<\/li>\n\n\n\n<li>\u7c92\u754c\u4e8c\u6b21\u76f8\u306a\u3057<\/li>\n\n\n\n<li>\u7acb\u65b9\u6676\u03b2-SiC\u7d50\u6676\u69cb\u9020\uff08\u7b49\u65b9\u7684\u6319\u52d5\uff09<\/li>\n<\/ul>\n\n\n\n<p><strong>\u79d1\u5b66\u7684\u610f\u7fa9\uff1a<\/strong><\/p>\n\n\n\n<p>\u7c89\u672b\u30d9\u30fc\u30b9\u306e\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u306f\u7570\u306a\u308a\u3001CVD SiC\u306b\u306f\u713c\u7d50\u6750\u6599\u306b\u3088\u304f\u898b\u3089\u308c\u308b\u6c17\u5b54\u3084\u6b8b\u7559\u30d0\u30a4\u30f3\u30c0\u30fc\u306e\u3088\u3046\u306a\u5185\u90e8\u6b20\u9665\u304c\u306a\u3044\u3002\u3053\u308c\u306f\u4ee5\u4e0b\u306e\u3053\u3068\u306b\u3064\u306a\u304c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u306e\u5411\u4e0a<\/li>\n\n\n\n<li>\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f\u306e\u4f4e\u6e1b<\/li>\n\n\n\n<li>\u518d\u73fe\u6027\u306e\u5411\u4e0a<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u904e\u9177\u306a\u74b0\u5883\u4e0b\u3067\u306e\u6027\u80fd<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">3.1 \u9ad8\u6e29\u5b89\u5b9a\u6027<\/h2>\n\n\n\n<p>CVD SiC\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306f\u3001\u4ee5\u4e0b\u3092\u8d85\u3048\u308b\u74b0\u5883\u3067\u3082\u52d5\u4f5c\u53ef\u80fd\u3067\u3059\u3002 <strong>1500\u00b0C<\/strong>, \u69cb\u9020\u7684\u306a\u5b8c\u5168\u6027\u3068\u6027\u80fd\u3092\u7dad\u6301\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.2 \u8010\u85ac\u54c1\u6027<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u306a\u5316\u5b66\u85ac\u54c1\u306b\u5f37\u3044<\/li>\n\n\n\n<li>HF\u3084HCl\u306a\u3069\u306e\u5f37\u9178\u3092\u4f7f\u7528\u3057\u3066\u3082\u3001\u52a3\u5316\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3066\u6d17\u6d44\u3067\u304d\u308b\u3002<\/li>\n<\/ul>\n\n\n\n<p><strong>\u305d\u306e\u610f\u5473\u3059\u308b\u3068\u3053\u308d\u306f\u5927\u304d\u3044\uff1a<\/strong><br>\u5316\u5b66\u7684\u306b\u904e\u9177\u306a\u52a0\u5de5\u74b0\u5883\u3067\u306e\u7e70\u308a\u8fd4\u3057\u4f7f\u7528\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.3 \u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f<\/h2>\n\n\n\n<p>\u7c92\u754c\u76f8\u304c\u306a\u3044\u305f\u3081\u3067\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u904b\u8ee2\u4e2d\u306e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u5c11\u306a\u3044<\/li>\n\n\n\n<li>\u30c7\u30ea\u30b1\u30fc\u30c8\u306a\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u6c5a\u67d3\u30ea\u30b9\u30af\u306e\u4f4e\u6e1b<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3078\u306e\u5fdc\u7528<\/h2>\n\n\n\n<p>CVD SiC\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30e9\u30d4\u30c3\u30c9\u30b5\u30fc\u30de\u30eb\u30d7\u30ed\u30bb\u30c3\u30b7\u30f3\u30b0\uff08RTP\uff09\u30ea\u30f3\u30b0\u3068\u30b5\u30bb\u30d7\u30bf\u30fc<\/li>\n\n\n\n<li>\u30a8\u30d4\u30bf\u30ad\u30b7\u30fc(Epi)\u90e8\u54c1<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u90e8\u54c1<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">\u597d\u307e\u308c\u308b\u7406\u7531<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u7d14\u5ea6\u8981\u6c42\uff08&gt;99.999%\uff09<\/li>\n\n\n\n<li>\u9ad8\u6e29\u52d5\u4f5c (&gt;1500\u00b0C)<\/li>\n\n\n\n<li>\u30d7\u30e9\u30ba\u30de\u304a\u3088\u3073\u5316\u5b66\u8150\u98df\u306b\u5bfe\u3059\u308b\u5f37\u529b\u306a\u8010\u6027<\/li>\n<\/ul>\n\n\n\n<p>\u3055\u3089\u306b\u3001\u6b21\u306e\u3088\u3046\u306a\u7d20\u6750\u3082\u3042\u308b\u3002 <strong>\u5236\u5fa1\u62b5\u6297<\/strong> \u306fRF\u7d50\u5408\u30b7\u30b9\u30c6\u30e0\u3067\u4f7f\u7528\u3055\u308c\u3001\u7570\u306a\u308b\u96fb\u6c17\u74b0\u5883\u3068\u306e\u4e92\u63db\u6027\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u713c\u7d50\u70ad\u5316\u30b1\u30a4\u7d20\u3068\u306e\u6bd4\u8f03<\/h2>\n\n\n\n<p>\u591a\u304f\u306eSiC\u90e8\u54c1\u306f\u713c\u7d50\u3084\u30db\u30c3\u30c8\u30d7\u30ec\u30b9\u3067\u88fd\u9020\u3055\u308c\u308b\u304c\u3001\u3053\u308c\u3089\u306e\u65b9\u6cd5\u3067\u306f\u3001\u88fd\u9020\u5de5\u7a0b\u3067\u554f\u984c\u304c\u751f\u3058\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7c92\u754c<\/li>\n\n\n\n<li>\u6b8b\u7559\u30d5\u30a7\u30fc\u30ba<\/li>\n\n\n\n<li>\u591a\u5b54\u6027<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u3088\u3046\u306a\u69cb\u9020\u7684\u7279\u5fb4\u306f\u3001\u6b21\u306e\u3088\u3046\u306a\u3082\u306e\u3060\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u6e29\u3067\u306e\u8010\u9178\u5316\u6027\u3092\u4f4e\u4e0b\u3055\u305b\u308b<\/li>\n\n\n\n<li>\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3092\u5897\u3084\u3059<\/li>\n\n\n\n<li>\u8d85\u30af\u30ea\u30fc\u30f3\u74b0\u5883\u3067\u306e\u9650\u754c\u6027\u80fd<\/li>\n<\/ul>\n\n\n\n<p><strong>\u7d50\u8ad6<\/strong><br>CVD SiC\u306f\u4e00\u822c\u306b\u3001\u9ad8\u7d14\u5ea6\u3001\u9ad8\u6e29\u3001\u6c5a\u67d3\u306b\u654f\u611f\u306a\u7528\u9014\u306b\u9069\u3057\u3066\u3044\u308b\u304c\u3001\u713c\u7d50SiC\u306f\u69cb\u9020\u7684\u3067\u30b3\u30b9\u30c8\u91cd\u8996\u306e\u7528\u9014\u306b\u4f9d\u7136\u3068\u3057\u3066\u6709\u52b9\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u7d50\u8ad6<\/h2>\n\n\n\n<p>CVD\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u3001\u7d14\u5ea6\u3001\u5bc6\u5ea6\u3001\u6027\u80fd\u306e\u4e00\u8cab\u6027\u3068\u3044\u3046\u70b9\u3067\u7406\u60f3\u306b\u8fd1\u3044\u30bb\u30e9\u30df\u30c3\u30af\u6750\u6599\u3067\u3059\u3002\u305d\u306e\u5229\u70b9\u306f\u3001\u5f93\u6765\u306e\u30bb\u30e9\u30df\u30c3\u30af\u306b\u898b\u3089\u308c\u308b\u69cb\u9020\u4e0a\u306e\u5236\u9650\u306e\u591a\u304f\u3092\u6392\u9664\u3059\u308b\u3001\u72ec\u81ea\u306e\u84b8\u7740\u30d9\u30fc\u30b9\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306b\u76f4\u63a5\u8d77\u56e0\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u9ad8\u5ea6\u306a\u6280\u8853\u304c\u8981\u6c42\u3055\u308c\u7d9a\u3051\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u3088\u308a\u9ad8\u3044\u6e05\u6d44\u5ea6<\/li>\n\n\n\n<li>\u3088\u308a\u9ad8\u3044\u71b1\u5b89\u5b9a\u6027<\/li>\n\n\n\n<li>\u6750\u6599\u306e\u4fe1\u983c\u6027\u5411\u4e0a<\/li>\n<\/ul>\n\n\n\n<p>CVD SiC\u306f\u3001\u30cf\u30a4\u30a8\u30f3\u30c9\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u6750\u6599\u3067\u3042\u308a\u7d9a\u3051\u308b\u3068\u4e88\u60f3\u3055\u308c\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>Silicon carbide (SiC) is a high-performance ceramic widely used in semiconductor processing, optics, and harsh industrial environments. Among its various forms, CVD Silicon Carbide (CVD SiC)\u2014produced via Chemical Vapor Deposition\u2014is often regarded as one of the most advanced ceramic materials due to its exceptional purity, density, and structural uniformity. This article examines the material properties, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[25],"tags":[1312],"class_list":["post-2440","post","type-post","status-publish","format-standard","hentry","category-technology-applications","tag-cvd-sic"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2440","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/comments?post=2440"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2440\/revisions"}],"predecessor-version":[{"id":2442,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2440\/revisions\/2442"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media?parent=2440"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/categories?post=2440"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/tags?post=2440"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}