{"id":2377,"date":"2026-04-22T07:53:59","date_gmt":"2026-04-22T07:53:59","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2377"},"modified":"2026-04-22T07:56:29","modified_gmt":"2026-04-22T07:56:29","slug":"global-ion-implantation-equipment","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ja\/global-ion-implantation-equipment\/","title":{"rendered":"\u4e16\u754c\u306e\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\uff1a\u6280\u8853\u3001\u5206\u985e\u3001\u5e02\u5834\u5c55\u671b"},"content":{"rendered":"<p>\u30a4\u30aa\u30f3\u6ce8\u5165\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u6700\u3082\u91cd\u8981\u306a\u30d7\u30ed\u30bb\u30b9\u306e\u3072\u3068\u3064\u3067\u3042\u308b\u3002\u30db\u30a6\u7d20\uff08B\uff09\u3001\u30ea\u30f3\uff08P\uff09\u3001\u30d2\u7d20\uff08As\uff09\u306a\u3069\u306e\u30c9\u30fc\u30d1\u30f3\u30c8\u30a4\u30aa\u30f3\u3092\u534a\u5c0e\u4f53\u6750\u6599\u306b\u5c0e\u5165\u3059\u308b\u3053\u3068\u3067\u3001\u96fb\u6c17\u7279\u6027\u3092\u7cbe\u5bc6\u306b\u5236\u5fa1\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n\n\n\n<p>\u30a4\u30aa\u30f3\u6ce8\u5165\u306f\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u30a4\u30aa\u30f3\u3092\u52a0\u901f\u3057\u3066\u7d50\u6676\u683c\u5b50\u306b\u6ce8\u5165\u3059\u308b\u3053\u3068\u3067\u3001\u63a5\u5408\u6df1\u3055\u3001\u5c0e\u96fb\u7387\u3001\u3057\u304d\u3044\u5024\u96fb\u5727\u306a\u3069\u306e\u4e3b\u8981\u306a\u30c7\u30d0\u30a4\u30b9\u7279\u6027\u3092\u6c7a\u5b9a\u3057\u307e\u3059\u3002\u30a4\u30aa\u30f3\u6ce8\u5165\u306f\u3001PN\u63a5\u5408\u3092\u5f62\u6210\u3059\u308b\u57fa\u672c\u7684\u306a\u30b9\u30c6\u30c3\u30d7\u3067\u3042\u308a\u3001\u30ed\u30b8\u30c3\u30af\u3001\u30e1\u30e2\u30ea\u3001\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306b\u5e83\u304f\u7528\u3044\u3089\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t.png\" alt=\"\" class=\"wp-image-2361\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI350t-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">\u30a4\u30aa\u30f3\u6ce8\u5165\u30d7\u30ed\u30bb\u30b9<\/h2>\n\n\n\n<p>\u30a4\u30aa\u30f3\u6ce8\u5165\u30d7\u30ed\u30bb\u30b9\u306b\u306f\u3001\u3044\u304f\u3064\u304b\u306e\u91cd\u8981\u306a\u6bb5\u968e\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\u30a4\u30aa\u30f3\u767a\u751f<br>\u30c9\u30fc\u30d1\u30f3\u30c8\u30ac\u30b9\u307e\u305f\u306f\u56fa\u4f53\u30bd\u30fc\u30b9\u306f\u30a4\u30aa\u30f3\u30bd\u30fc\u30b9\u5185\u3067\u30a4\u30aa\u30f3\u5316\u3055\u308c\u3001\u8377\u96fb\u7c92\u5b50\u3092\u751f\u6210\u3059\u308b\u3002.<\/li>\n\n\n\n<li>\u30a4\u30aa\u30f3\u52a0\u901f<br>\u30a4\u30aa\u30f3\u306f\u6c7a\u3081\u3089\u308c\u305f\u30a8\u30cd\u30eb\u30ae\u30fc\u30ec\u30d9\u30eb\u307e\u3067\u52a0\u901f\u3055\u308c\u3001\u3053\u308c\u304c\u6ce8\u5165\u6df1\u3055\u3092\u6c7a\u5b9a\u3059\u308b\u3002.<\/li>\n\n\n\n<li>\u8cea\u91cf\u5206\u6790<br>\u78c1\u6c17\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\u304c\u76ee\u7684\u306e\u30a4\u30aa\u30f3\u7a2e\u3092\u9078\u629e\u3057\u3001\u30d3\u30fc\u30e0\u7d14\u5ea6\u3092\u78ba\u4fdd\u3059\u308b\u3002.<\/li>\n\n\n\n<li>\u30d3\u30fc\u30e0\u30b9\u30ad\u30e3\u30f3\u3068\u79fb\u690d<br>\u30a4\u30aa\u30f3\u30d3\u30fc\u30e0\u306f\u3001\u5747\u4e00\u306a\u6ce8\u5165\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306b\u3001\u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3092\u6a2a\u5207\u3063\u3066\u8d70\u67fb\u3055\u308c\u308b\u3002.<\/li>\n<\/ol>\n\n\n\n<p>\u6ce8\u5165\u5f8c\u3001\u30a6\u30a7\u30fc\u30cf\u306f\u901a\u5e38\u3001\u683c\u5b50\u640d\u50b7\u3092\u4fee\u5fa9\u3057\u3001\u30c9\u30fc\u30d1\u30f3\u30c8\u3092\u6d3b\u6027\u5316\u3059\u308b\u305f\u3081\u306b\u30a2\u30cb\u30fc\u30eb\u3092\u53d7\u3051\u307e\u3059\u3002\u4e00\u822c\u7684\u306a\u30a2\u30cb\u30fc\u30eb\u65b9\u6cd5\u306b\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>1000\uff5e1100\u2103\u3067\u306e\u6025\u901f\u71b1\u51e6\u7406(RTP)<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u30a2\u30cb\u30fc\u30eb\u306b\u3088\u308b\u5c40\u6240\u52a0\u71b1\u3068\u30b5\u30fc\u30de\u30eb\u30d0\u30b8\u30a7\u30c3\u30c8\u306e\u4f4e\u6e1b<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306e\u5206\u985e<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30ec\u30d9\u30eb\u5225<\/h3>\n\n\n\n<p>\u4f4e\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e (&lt;100 keV)<br>\u6975\u6d45\u63a5\u5408\u3001\u30bd\u30fc\u30b9\/\u30c9\u30ec\u30a4\u30f3\u6ce8\u5165\u3001AI\u30c1\u30c3\u30d7\u3001CPU\u3001DRAM\u3001CIS\u306a\u3069\u306e\u5148\u7aef\u30ed\u30b8\u30c3\u30af\u30c7\u30d0\u30a4\u30b9\u306b\u4f7f\u7528\u3002.<\/p>\n\n\n\n<p>\u4e2d\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e (100-300 keV)<br>\u3057\u304d\u3044\u5024\u96fb\u5727\u306e\u8abf\u6574\u3001\u8efd\u30c9\u30fc\u30d7\u30c9\u30ec\u30a4\u30f3\u69cb\u9020\u3001SIMOX\u3084\u30b9\u30de\u30fc\u30c8\u30ab\u30c3\u30c8\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<p>\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e (&gt;300 keV)<br>\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3001RF\u30c1\u30c3\u30d7\u3001\u5149\u901a\u4fe1\u30c7\u30d0\u30a4\u30b9\u306e\u6df1\u5800\u308a\u6ce8\u5165\u306b\u4f7f\u7528\u3055\u308c\u3001\u30de\u30a4\u30af\u30ed\u30e1\u30fc\u30c8\u30eb\u30ec\u30d9\u30eb\u306e\u30c9\u30fc\u30d4\u30f3\u30b0\u6df1\u3055\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u30d3\u30fc\u30e0\u96fb\u6d41<\/h3>\n\n\n\n<p>\u4f4e\u96fb\u6d41\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8 (100 nA - 100 \u03bcA)<br>\u6b63\u78ba\u306a\u6295\u4e0e\u91cf\u5236\u5fa1\u3092\u5fc5\u8981\u3068\u3059\u308b\u7cbe\u5bc6\u7528\u9014\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u4e2d\u96fb\u6d41\u30a4\u30f3\u30d7\u30e9\u30f3\u30bf\u30fc (100 \u03bcA - 2000 \u03bcA)<br>\u6a19\u6e96\u7684\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u5927\u96fb\u6d41\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\uff082 mA - 30 mA\uff09<br>\u30bd\u30fc\u30b9\/\u30c9\u30ec\u30a4\u30f3\u6ce8\u5165\u306e\u3088\u3046\u306a\u9ad8\u7dda\u91cf\u3001\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u7528\u306b\u8a2d\u8a08\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u8d85\u5927\u96fb\u6d41\u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\uff08&gt;30 mA\uff09<br>\u7279\u6b8a\u306a\u5927\u91cf\u751f\u7523\u307e\u305f\u306f\u9ad8\u7dda\u91cf\u751f\u7523\u74b0\u5883\u3067\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u7279\u6b8a\u6a5f\u80fd\u5225<\/h3>\n\n\n\n<p>\u9178\u7d20\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e<br>SOI\uff08\u30b7\u30ea\u30b3\u30f3\u30fb\u30aa\u30f3\u30fb\u30a4\u30f3\u30b7\u30e5\u30ec\u30fc\u30bf\u30fc\uff09\u88fd\u9020\u306b\u4f7f\u7528\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<p>\u6c34\u7d20\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e<br>\u30b9\u30de\u30fc\u30c8\u30ab\u30c3\u30c8\u3084\u6750\u6599\u5de5\u5b66\u30d7\u30ed\u30bb\u30b9\u306b\u5fdc\u7528\u3002.<\/p>\n\n\n\n<p>\u9ad8\u6e29\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e<br>SiC\u306e\u3088\u3046\u306a\u6750\u6599\u3084\u5148\u7aef\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u305f\u3081\u306e\u9ad8\u6e29\u3067\u306e\u6ce8\u5165\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u30b7\u30b9\u30c6\u30e0\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3<\/h2>\n\n\n\n<p>\u30a4\u30aa\u30f3\u6ce8\u5165\u30b7\u30b9\u30c6\u30e0\u306f\u901a\u5e38\u30015\u3064\u306e\u4e3b\u8981\u306a\u30b5\u30d6\u30b7\u30b9\u30c6\u30e0\u3067\u69cb\u6210\u3055\u308c\u308b\uff1a<\/p>\n\n\n\n<p>\u30ac\u30b9\u30b7\u30b9\u30c6\u30e0<br>\u30a2\u30eb\u30b7\u30f3\uff08AsH\u2083\uff09\u3001\u30db\u30b9\u30d5\u30a3\u30f3\uff08PH\u2083\uff09\u3001\u4e09\u30d5\u30c3\u5316\u30db\u30a6\u7d20\uff08BF\u2083\uff09\u306a\u3069\u306e\u7279\u6b8a\u30ac\u30b9\u3092\u4f9b\u7d66\u3057\u3001\u5b89\u5168\u306b\u53d6\u308a\u6271\u3046\u3002.<\/p>\n\n\n\n<p>\u96fb\u529b\u3068\u96fb\u6c17\u30b7\u30b9\u30c6\u30e0<br>\u30a4\u30aa\u30f3\u52a0\u901f\u3068\u78c1\u5834\u767a\u751f\u7528\u306e\u9ad8\u96fb\u5727\u96fb\u529b\u3092\u4f9b\u7d66\u3002.<\/p>\n\n\n\n<p>\u771f\u7a7a\u30b7\u30b9\u30c6\u30e0<br>\u30a4\u30aa\u30f3\u6563\u4e71\u3084\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u3092\u4f4e\u6e1b\u3059\u308b\u305f\u3081\u306b\u9ad8\u771f\u7a7a\u72b6\u614b\u3092\u7dad\u6301\u3057\u3001\u901a\u5e38\u30bf\u30fc\u30dc\u30dd\u30f3\u30d7\u3084\u6975\u4f4e\u6e29\u30dd\u30f3\u30d7\u3092\u4f7f\u7528\u3059\u308b\u3002.<\/p>\n\n\n\n<p>\u5236\u5fa1\u30b7\u30b9\u30c6\u30e0<br>\u30d3\u30fc\u30e0\u30d1\u30e9\u30e1\u30fc\u30bf\u3001\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u3001\u30d7\u30ed\u30bb\u30b9\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u306e\u7ba1\u7406\u3002.<\/p>\n\n\n\n<p>\u30d3\u30fc\u30e0\u30e9\u30a4\u30f3\u30b7\u30b9\u30c6\u30e0<br>\u3092\u542b\u3080\u6a5f\u5668\u306e\u4e2d\u6838\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a4\u30aa\u30f3\u6e90<\/li>\n\n\n\n<li>\u62bd\u51fa\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u8cea\u91cf\u5206\u6790\u8a08<\/li>\n\n\n\n<li>\u52a0\u901f\u7ba1<\/li>\n\n\n\n<li>\u30d3\u30fc\u30e0\u30b9\u30ad\u30e3\u30cb\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u30c1\u30e3\u30f3\u30d0\u30fc<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u690d\u3048\u8fbc\u307f\u7cbe\u5ea6\u3001\u5747\u4e00\u6027\u3001\u7dcf\u5408\u7684\u306a\u6027\u80fd\u3092\u6c7a\u5b9a\u3059\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u5e02\u5834\u6982\u8981<\/h2>\n\n\n\n<p>\u696d\u754c\u30c7\u30fc\u30bf\u306b\u3088\u308b\u3068\u3001\u4e16\u754c\u306e\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u5e02\u5834\u306f2022\u5e74\u306b\u7d04206\u5104\u4eba\u6c11\u5143\u306b\u9054\u3057\u305f\u3002\u4e2d\u56fd\u5e02\u5834\u306f\u7d0466\u5104\u4eba\u6c11\u5143\u3067\u3001\u4e16\u754c\u5e02\u5834\u306e\u7d0432\uff05\u3092\u5360\u3081\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u30bb\u30b0\u30e1\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3\u3068\u3044\u3046\u70b9\u3067\u306f\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u96fb\u6d41\u30a4\u30f3\u30d7\u30e9\u30f3\u30bf\u30fc\u304c\u5e02\u5834\u3092\u652f\u914d\u3057\u3001\u7d0461\uff05\u3092\u5360\u3081\u308b<\/li>\n\n\n\n<li>\u4e2d\u578b\u30a4\u30f3\u30d7\u30e9\u30f3\u30bf\u30fc\u306f\u7d0420\uff05\u3092\u5360\u3081\u308b<\/li>\n\n\n\n<li>\u6b8b\u308a\u306e\u30b7\u30a7\u30a2\u306f\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u3068\u7279\u6b8a\u30b7\u30b9\u30c6\u30e0\u304c\u5360\u3081\u3066\u3044\u308b\u3002<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u4e16\u754c\u306e\u7af6\u4e89\u72b6\u6cc1<\/h2>\n\n\n\n<p>\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u5e02\u5834\u306f\u3001\u56fd\u969b\u7684\u306a\u5927\u624b\u4f01\u696d\u6570\u793e\u306b\u3088\u3063\u3066\u9ad8\u5ea6\u306b\u96c6\u4e2d\u30fb\u652f\u914d\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u30a2\u30d7\u30e9\u30a4\u30c9 \u30de\u30c6\u30ea\u30a2\u30eb\u30ba<br>\u4e16\u754c\u5e02\u5834\u30b7\u30a7\u30a250\uff05\u4ee5\u4e0a\u3002\u540c\u793e\u306e\u30dd\u30fc\u30c8\u30d5\u30a9\u30ea\u30aa\u306b\u306f\u3001\u5927\u96fb\u6d41\u3001\u4e2d\u96fb\u6d41\u3001\u8d85\u9ad8\u7dda\u91cf\u30a4\u30aa\u30f3\u6ce8\u5165\u30b7\u30b9\u30c6\u30e0\u304c\u542b\u307e\u308c\u308b\u3002\u30d0\u30ea\u30a2\u30f3\u30bb\u30df\u30b3\u30f3\u30c0\u30af\u30bf\u30fc\u306e\u8cb7\u53ce\u306b\u3088\u308a\u3001\u305d\u306e\u5730\u4f4d\u3092\u5f37\u5316\u3002.<\/p>\n\n\n\n<p>\u30a2\u30af\u30bb\u30ea\u30b9\u30fb\u30c6\u30af\u30ce\u30ed\u30b8\u30fc<br>\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306e\u30ea\u30fc\u30c7\u30a3\u30f3\u30b0\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u3067\u3001\u3053\u306e\u5206\u91ce\u3067\u306e\u5e02\u5834\u30b7\u30a7\u30a2\u306f\u7d0455\uff05\u3002\u597d\u8abf\u306a\u696d\u7e3e\u3092\u5831\u544a\u3057\u3001\u30d1\u30ef\u30fc\u534a\u5c0e\u4f53\u7528\u9014\u3067\u62e1\u5927\u3092\u7d9a\u3051\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u65e5\u65b0\u30a4\u30aa\u30f3\u6a5f\u5668<br>\u4e2d\u96fb\u6d41\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306b\u6ce8\u529b\u3057\u3001\u4e2d\u56fd\u306b\u304a\u3051\u308b\u8907\u6570\u306e\u534a\u5c0e\u4f53\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u306b\u53c2\u753b\u3002.<\/p>\n\n\n\n<p>\u4f4f\u53cb\u91cd\u6a5f\u68b0\u5de5\u696d<br>\u4e3b\u306b\u4e2d\u96fb\u6d41\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u3092\u88fd\u9020\u3002.<\/p>\n\n\n\n<p>\u682a\u5f0f\u4f1a\u793eSEN<br>\u5927\u96fb\u6d41\u3001\u4e2d\u96fb\u6d41\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30b7\u30b9\u30c6\u30e0\u306a\u3069\u3001\u3042\u3089\u3086\u308b\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u3092\u63d0\u4f9b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u56fd\u5185\u30e1\u30fc\u30ab\u30fc\u306e\u767a\u5c55<\/h2>\n\n\n\n<p>\u8fd1\u5e74\u3001\u4e2d\u56fd\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc\u306f\u5927\u304d\u306a\u9032\u6b69\u3092\u9042\u3052\u3066\u3044\u308b\u3002\u4f8b\u3048\u3070\u3001\u56fd\u5185\u4f01\u696d\u304c\u958b\u767a\u3057\u305f12\u30a4\u30f3\u30c1\u306e\u4f4e\u6e29\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306f\u3001\u5927\u624b\u30ed\u30b8\u30c3\u30af\u30c1\u30c3\u30d7\u30e1\u30fc\u30ab\u30fc\u3078\u306e\u7d0d\u5165\u306b\u6210\u529f\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u5730\u5143\u4f01\u696d\u306f\u3001\u5927\u96fb\u6d41\u3001\u4e2d\u96fb\u6d41\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u306e\u30a4\u30aa\u30f3\u6ce8\u5165\u30b7\u30b9\u30c6\u30e0\u3092\u7a4d\u6975\u7684\u306b\u958b\u767a\u3057\u3066\u3044\u308b\u3002\u56fd\u5185\u5e02\u5834\u306f\u307e\u3060\u56fd\u969b\u7684\u306a\u30b5\u30d7\u30e9\u30a4\u30e4\u30fc\u304c\u652f\u914d\u7684\u3067\u3042\u308b\u304c\u3001\u4e2d\u56fd\u306e\u30e1\u30fc\u30ab\u30fc\u306f\u5f90\u3005\u306b\u30d7\u30ed\u30bb\u30b9\u691c\u8a3c\u3092\u9054\u6210\u3057\u3001\u9ad8\u5ea6\u306a\u751f\u7523\u30e9\u30a4\u30f3\u306b\u53c2\u5165\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u7d50\u8ad6<\/h2>\n\n\n\n<p>\u30a4\u30aa\u30f3\u6ce8\u5165\u306f\u4f9d\u7136\u3068\u3057\u3066\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u4e2d\u6838\u6280\u8853\u3067\u3042\u308a\u3001\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3068\u6b69\u7559\u307e\u308a\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u3002\u6700\u5148\u7aef\u30ce\u30fc\u30c9\u3001SiC \u306a\u3069\u306e\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u6750\u6599\u3001\u9ad8\u6027\u80fd\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u6025\u901f\u306a\u767a\u5c55\u306b\u4f34\u3044\u3001\u6700\u5148\u7aef\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e\u306b\u5bfe\u3059\u308b\u9700\u8981\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u3002 <a href=\"https:\/\/www.zmsh-semitech.com\/ja\/product-category\/ion-implantation-equipment\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u30a4\u30aa\u30f3\u6ce8\u5165\u88c5\u7f6e<\/mark><\/a> \u306f\u6210\u9577\u3092\u7d9a\u3051\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u4e16\u754c\u5e02\u5834\u306f\u4f9d\u7136\u3068\u3057\u3066\u65e2\u5b58\u306e\u56fd\u969b\u7684\u30d7\u30ec\u30fc\u30e4\u30fc\u304c\u4e3b\u5c0e\u3057\u3066\u3044\u308b\u304c\u3001\u73fe\u5728\u9032\u884c\u4e2d\u306e\u6280\u8853\u7684\u9032\u6b69\u3084\u30ed\u30fc\u30ab\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u306e\u52aa\u529b\u306b\u3088\u3063\u3066\u3001\u7279\u306b\u65b0\u8208\u306e\u534a\u5c0e\u4f53\u5e02\u5834\u3067\u306f\u7af6\u4e89\u74b0\u5883\u304c\u518d\u69cb\u7bc9\u3055\u308c\u3064\u3064\u3042\u308b\u3002.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>Ion implantation is one of the most critical processes in semiconductor manufacturing. It enables precise control of electrical properties by introducing dopant ions such as boron (B), phosphorus (P), and arsenic (As) into semiconductor materials. By accelerating high-energy ions and implanting them into the crystal lattice, ion implantation defines key device characteristics, including junction depth, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2361,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[1210,1204,1206,706,1200,1201,1205,1203,1202,1211,36,1207,916,1208,1209],"class_list":["post-2377","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-cmos-fabrication","tag-high-current-ion-implantation","tag-high-energy-ion-implantation","tag-ion-implantation","tag-ion-implantation-equipment","tag-ion-implanter","tag-medium-current-ion-implanter","tag-pn-junction-formation","tag-semiconductor-doping","tag-semiconductor-equipment-market","tag-semiconductor-manufacturing","tag-sic-semiconductor-processing","tag-silicon-wafer-processing","tag-smart-cut-process","tag-soi-technology"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2377","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/comments?post=2377"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2377\/revisions"}],"predecessor-version":[{"id":2378,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/posts\/2377\/revisions\/2378"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media\/2361"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media?parent=2377"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/categories?post=2377"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/tags?post=2377"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}