{"id":2275,"date":"2026-04-16T07:18:06","date_gmt":"2026-04-16T07:18:06","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2275"},"modified":"2026-04-16T07:24:32","modified_gmt":"2026-04-16T07:24:32","slug":"wafer-dicing-machine-guide","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ja\/wafer-dicing-machine-guide\/","title":{"rendered":"\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u30ac\u30a4\u30c9\uff1a\u7a2e\u985e\u3001\u69cb\u6210\u3001\u304a\u3088\u3073\u9078\u629e\u57fa\u6e96"},"content":{"rendered":"<p>\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u5f8c\u5de5\u7a0b\u3067\u3042\u308a\u3001\u52a0\u5de5\u3055\u308c\u305f\u30a6\u30a7\u30fc\u30cf\u3092\u500b\u3005\u306e\u30c0\u30a4\u306b\u5206\u96e2\u3057\u307e\u3059\u3002\u30c0\u30a4\u30b7\u30f3\u30b0\u88c5\u7f6e\u306e\u9078\u629e\u306f\u3001\u6b69\u7559\u307e\u308a\u3001\u30a8\u30c3\u30b8\u54c1\u8cea\u3001\u304a\u3088\u3073\u5168\u4f53\u7684\u306a\u751f\u7523\u52b9\u7387\u306b\u5927\u304d\u304f\u5f71\u97ff\u3057\u307e\u3059\u3002\u672c\u7a3f\u3067\u306f<mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\"> <\/mark><a href=\"https:\/\/www.zmsh-semitech.com\/ja\/product-category\/dicing-equipment\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#8ed1fc\" class=\"has-inline-color\">\u30a6\u30a8\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3<\/mark><\/a><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\"> <\/mark>\u306e\u7a2e\u985e\u3001\u4e3b\u8981\u306a\u30b7\u30b9\u30c6\u30e0\u69cb\u6210\u3001\u3055\u307e\u3056\u307e\u306a\u6750\u6599\u3084\u7528\u9014\u306b\u5bfe\u3059\u308b\u5b9f\u969b\u7684\u306a\u9078\u629e\u57fa\u6e96\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"768\" height=\"768\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768-1.png\" alt=\"\" class=\"wp-image-2276\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768-1.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/High-Precision-12-inch-Wafer-Dicing-Solution-for-Advanced-Semiconductor-Processing2-768x768-1-100x100.png 100w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1.\u306f\u3058\u3081\u306b<\/h2>\n\n\n\n<p>\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u3001\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u3001\u30b5\u30d5\u30a1\u30a4\u30a2\u3001\u30ac\u30e9\u30b9\u3067\u3067\u304d\u305f\u30a6\u30a7\u30fc\u30cf\u3092\u3001\u30c0\u30e1\u30fc\u30b8\u3092\u4e0e\u3048\u308b\u3053\u3068\u306a\u304f\u6a5f\u80fd\u7684\u306a\u30c1\u30c3\u30d7\u306b\u6b63\u78ba\u306b\u5206\u96e2\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u30c7\u30d0\u30a4\u30b9\u306e\u5f62\u72b6\u304c\u5fae\u7d30\u5316\u3057\u3001\u6750\u6599\u304c\u3088\u308a\u9ad8\u5ea6\u306b\u306a\u308b\u306b\u3064\u308c\u3066\u3001\u30c0\u30a4\u30b7\u30f3\u30b0\u6280\u8853\u3078\u306e\u8981\u6c42\u306f\u9ad8\u307e\u308a\u7d9a\u3051\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u306f\u3001\u696d\u754c\u6a19\u6e96\u306e200mm\u30a6\u30a7\u30fc\u30cf\u3084300mm\u30a6\u30a7\u30fc\u30cf\u3092\u542b\u3080\u69d8\u3005\u306a\u6750\u6599\u3084\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u3068\u306e\u4e92\u63db\u6027\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u9ad8\u7cbe\u5ea6\u3001\u6700\u5c0f\u9650\u306e\u30c1\u30c3\u30d4\u30f3\u30b0\u3001\u5b89\u5b9a\u3057\u305f\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u9054\u6210\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u9069\u5207\u306a\u30c0\u30a4\u30b7\u30f3\u30b0\u65b9\u6cd5\u3092\u9078\u629e\u3059\u308b\u3053\u3068\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u4fe1\u983c\u6027\u3068\u30b3\u30b9\u30c8\u52b9\u7387\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u306e\u7a2e\u985e<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 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class=\"wp-block-heading\">2.2 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class=\"wp-block-heading\">2.3 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class=\"wp-block-heading\">3.\u4e3b\u8981\u30de\u30b7\u30f3\u69cb\u6210<\/h2>\n\n\n\n<p>\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u88c5\u7f6e\u306e\u6027\u80fd\u306f\u3001\u5207\u65ad\u65b9\u6cd5\u3060\u3051\u3067\u306a\u304f\u3001\u88c5\u7f6e\u5185\u90e8\u306e\u30b7\u30b9\u30c6\u30e0\u69cb\u6210\u306b\u3088\u3063\u3066\u3082\u5de6\u53f3\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.1 \u30b9\u30d4\u30f3\u30c9\u30eb\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<p>\u30b9\u30d4\u30f3\u30c9\u30eb\u306f\u30d6\u30ec\u30fc\u30c9\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u306e\u6838\u3068\u306a\u308b\u90e8\u54c1\u3067\u3059\u300230,000rpm\u3092\u8d85\u3048\u308b\u9ad8\u901f\u30b9\u30d4\u30f3\u30c9\u30eb\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u5b89\u5b9a\u3057\u305f\u5207\u524a\u3068\u9ad8\u7cbe\u5ea6\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u632f\u52d5\u5236\u5fa1\u3068\u71b1\u5b89\u5b9a\u6027\u306f\u3001\u5207\u65ad\u54c1\u8cea\u3092\u5de6\u53f3\u3059\u308b\u91cd\u8981\u306a\u8981\u7d20\u3067\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.2 \u30e2\u30fc\u30b7\u30e7\u30f3\u30fb\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u30fb\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<p>\u9ad8\u5ea6\u306a\u30e2\u30fc\u30b7\u30e7\u30f3\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u30ea\u30cb\u30a2\u30e2\u30fc\u30bf\u30fc\u3068\u30a8\u30a2\u30d9\u30a2\u30ea\u30f3\u30b0\u30b9\u30c6\u30fc\u30b8\u3092\u4f7f\u7528\u3057\u3066\u3001\u30b5\u30d6\u30df\u30af\u30ed\u30f3\u306e\u4f4d\u7f6e\u6c7a\u3081\u7cbe\u5ea6\u3092\u5b9f\u73fe\u3057\u307e\u3059\u3002\u6b63\u78ba\u306a\u30e2\u30fc\u30b7\u30e7\u30f3\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306f\u3001\u7279\u306b\u9ad8\u5bc6\u5ea6\u96c6\u7a4d\u56de\u8def\u306b\u304a\u3044\u3066\u3001\u7d30\u3044\u30b9\u30af\u30e9\u30a4\u30d6\u30e9\u30a4\u30f3\u3068\u306e\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u4e0d\u53ef\u6b20\u3067\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.3 \u30d3\u30b8\u30e7\u30f3\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<p>\u6700\u65b0\u306e\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u306b\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u30d1\u30bf\u30fc\u30f3\u306b\u5408\u308f\u305b\u3066\u30ab\u30c3\u30c6\u30a3\u30f3\u30b0\u30d1\u30b9\u3092\u8abf\u6574\u3059\u308b\u9ad8\u89e3\u50cf\u5ea6\u30d3\u30b8\u30e7\u30f3\u30b7\u30b9\u30c6\u30e0\u304c\u642d\u8f09\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u6b63\u78ba\u306a\u4f4d\u7f6e\u6c7a\u3081\u304c\u4fdd\u8a3c\u3055\u308c\u3001\u6b69\u7559\u307e\u308a\u3092\u6700\u5927\u5316\u3059\u308b\u4e0a\u3067\u6975\u3081\u3066\u91cd\u8981\u306a\u5207\u65ad\u30a8\u30e9\u30fc\u306e\u30ea\u30b9\u30af\u304c\u4f4e\u6e1b\u3055\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.4 \u51b7\u5374\u3068\u74e6\u792b\u306e\u9664\u53bb<\/h3>\n\n\n\n<p>\u30d6\u30ec\u30fc\u30c9\u30c0\u30a4\u30b7\u30f3\u30b0\u6642\u306b\u306f\u3001\u51b7\u5374\u30b7\u30b9\u30c6\u30e0\u3092\u7528\u3044\u3066\u71b1\u3092\u653e\u6563\u3057\u3001\u71b1\u306b\u3088\u308b\u30c0\u30e1\u30fc\u30b8\u3092\u9632\u304e\u307e\u3059\u3002\u540c\u6642\u306b\u3001\u5207\u65ad\u6642\u306b\u767a\u751f\u3059\u308b\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u3084\u5207\u524a\u5c51\u3092\u6d17\u6d44\u88c5\u7f6e\u3067\u9664\u53bb\u3057\u3001\u30af\u30ea\u30fc\u30f3\u306a\u52a0\u5de5\u74b0\u5883\u3092\u7dad\u6301\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.5 \u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u3068\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30fb\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<p>\u81ea\u52d5\u5316\u306f\u5927\u91cf\u751f\u7523\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u81ea\u52d5\u30ed\u30fc\u30c9\u3001\u30a2\u30f3\u30ed\u30fc\u30c9\u3001\u5de5\u7a0b\u9593\u642c\u9001\u3092\u53ef\u80fd\u306b\u3057\u307e\u3059\u3002\u30d5\u30a1\u30af\u30c8\u30ea\u30fc\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u30b7\u30b9\u30c6\u30e0\u3068\u306e\u7d71\u5408\u306b\u3088\u308a\u3001\u52b9\u7387\u304c\u5411\u4e0a\u3057\u3001\u4eba\u7684\u30df\u30b9\u304c\u6e1b\u5c11\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u9078\u5b9a\u57fa\u6e96<\/h2>\n\n\n\n<p>\u9069\u5207\u306a\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u3092\u9078\u629e\u3059\u308b\u306b\u306f\u3001\u3044\u304f\u3064\u304b\u306e\u8981\u7d20\u3092\u7dcf\u5408\u7684\u306b\u8a55\u4fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.1 \u7d20\u6750\u7279\u6027<\/h3>\n\n\n\n<p>\u7d20\u6750\u304c\u7570\u306a\u308c\u3070\u3001\u30c0\u30a4\u30b7\u30f3\u30b0\u306e\u65b9\u6cd5\u3082\u7570\u306a\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b7\u30ea\u30b3\u30f3\uff1a\u4e00\u822c\u7684\u306b\u30d6\u30ec\u30fc\u30c9\u30c0\u30a4\u30b7\u30f3\u30b0\u3067\u5341\u5206<\/li>\n\n\n\n<li>\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\uff1a\u30ec\u30fc\u30b6\u30fc\u307e\u305f\u306f\u30ef\u30a4\u30e4\u30fc\u30d9\u30fc\u30b9\u306e\u65b9\u6cd5\u304c\u671b\u307e\u3057\u3044<\/li>\n\n\n\n<li>\u30b5\u30d5\u30a1\u30a4\u30a2\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u304c\u6700\u826f\u306e\u9078\u629e\u80a2\u3067\u3042\u308b\u3053\u3068\u304c\u591a\u3044<\/li>\n\n\n\n<li>\u30ac\u30e9\u30b9\uff1a\u539a\u3055\u306b\u3088\u3063\u3066\u306f\u30ec\u30fc\u30b6\u30fc\u3068\u30d6\u30ec\u30fc\u30c9\u306e\u4e21\u65b9\u3092\u4f7f\u7528\u3059\u308b\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u6750\u6599\u306e\u786c\u5ea6\u3001\u3082\u308d\u3055\u3001\u71b1\u7279\u6027\u306f\u3059\u3079\u3066\u9078\u629e\u306b\u5f71\u97ff\u3059\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.2 \u30a6\u30a8\u30cf\u30fc\u30b5\u30a4\u30ba<\/h3>\n\n\n\n<p>\u696d\u754c\u304c\u3088\u308a\u5927\u304d\u306a\u30a6\u30a7\u30fc\u30cf\u3001\u7279\u306b300mm\u30a6\u30a7\u30fc\u30cf\u306b\u79fb\u884c\u3059\u308b\u306b\u3064\u308c\u3001\u88c5\u7f6e\u306f\u3088\u308a\u9ad8\u3044\u525b\u6027\u3001\u7cbe\u5ea6\u3001\u81ea\u52d5\u5316\u6a5f\u80fd\u3092\u63d0\u4f9b\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002\u307e\u305f\u3001\u30a6\u30a7\u30cf\u30fc\u306e\u5927\u578b\u5316\u306b\u4f34\u3044\u3001\u8868\u9762\u5168\u4f53\u306e\u5747\u4e00\u6027\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u3001\u3088\u308a\u512a\u308c\u305f\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u3082\u8981\u6c42\u3055\u308c\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.3 \u7cbe\u5ea6\u306e\u8981\u4ef6<\/h3>\n\n\n\n<p>\u4e3b\u306a\u7cbe\u5ea6\u6307\u6a19\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ab\u30fc\u30d5\u5e45\uff08\u5207\u901a\u3057\u306e\u5e45\uff09<\/li>\n\n\n\n<li>\u30a8\u30c3\u30b8\u30fb\u30c1\u30c3\u30d4\u30f3\u30b0\u30fb\u30b5\u30a4\u30ba<\/li>\n\n\n\n<li>\u8868\u9762\u7c97\u3055<\/li>\n<\/ul>\n\n\n\n<p>MEMS\u3084\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306a\u3069\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u306f\u3001\u6975\u3081\u3066\u53b3\u3057\u3044\u516c\u5dee\u304c\u8981\u6c42\u3055\u308c\u308b\u3053\u3068\u304c\u591a\u3044\u305f\u3081\u3001\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u304c\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.4 \u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3068\u30b3\u30b9\u30c8\u306b\u95a2\u3059\u308b\u8003\u5bdf<\/h3>\n\n\n\n<p>\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3068\u30b3\u30b9\u30c8\u306f\u5e38\u306b\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u306e\u95a2\u4fc2\u306b\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d6\u30ec\u30fc\u30c9\u30c0\u30a4\u30b7\u30f3\u30b0\u306b\u3088\u308a\u3001\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3068\u4f4e\u30b3\u30b9\u30c8\u3092\u5b9f\u73fe<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u512a\u308c\u305f\u54c1\u8cea\u3092\u63d0\u4f9b\u3059\u308b\u304c\u3001\u30b3\u30b9\u30c8\u306f\u9ad8\u304f\u306a\u308b<\/li>\n\n\n\n<li>\u30ef\u30a4\u30e4\u30fc\u30bd\u30fc\u306f\u7279\u5b9a\u306e\u7528\u9014\u3067\u30d0\u30e9\u30f3\u30b9\u304c\u53d6\u308c\u3066\u3044\u308b<\/li>\n<\/ul>\n\n\n\n<p>\u30e1\u30fc\u30ab\u30fc\u306f\u3001\u751f\u7523\u91cf\u3068\u4e88\u7b97\u306e\u5236\u7d04\u306b\u5408\u308f\u305b\u3066\u6a5f\u5668\u3092\u9078\u629e\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.5 \u5fdc\u52df\u6761\u4ef6<\/h3>\n\n\n\n<p>\u7528\u9014\u306b\u3088\u3063\u3066\u8981\u6c42\u3055\u308c\u308b\u3082\u306e\u306f\u7570\u306a\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d1\u30ef\u30fc\u30fb\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\uff1aSiC\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u591a\u304f\u3001\u4f4e\u30c0\u30e1\u30fc\u30b8\u51e6\u7406\u304c\u5fc5\u8981<\/li>\n\n\n\n<li>MEMS\u30c7\u30d0\u30a4\u30b9\uff1a\u9ad8\u7cbe\u5ea6\u3068\u6700\u5c0f\u9650\u306e\u6c5a\u67d3\u304c\u5fc5\u8981<\/li>\n\n\n\n<li>\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u30fb\u30c7\u30d0\u30a4\u30b9\uff1a\u512a\u308c\u305f\u8868\u9762\u54c1\u8cea\u3068\u900f\u660e\u6027\u304c\u6c42\u3081\u3089\u308c\u308b<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u696d\u754c\u52d5\u5411\u3068\u4eca\u5f8c\u306e\u5c55\u958b<\/h2>\n\n\n\n<p>\u534a\u5c0e\u4f53\u6750\u6599\u3068\u30c7\u30d0\u30a4\u30b9\u30fb\u30a2\u30fc\u30ad\u30c6\u30af\u30c1\u30e3\u306e\u9032\u5316\u304c\u3001\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u6280\u8853\u306e\u9769\u65b0\u3092\u4fc3\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u3092\u7528\u3044\u305f\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u3001\u5148\u7aef\u6750\u6599\u3092\u6700\u5c0f\u9650\u306e\u30c0\u30e1\u30fc\u30b8\u3067\u52a0\u5de5\u3067\u304d\u308b\u3053\u3068\u304b\u3089\u3001\u305d\u306e\u91cd\u8981\u6027\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u3002\u540c\u6642\u306b\u3001\u52b9\u7387\u3068\u54c1\u8cea\u306e\u4e21\u65b9\u3092\u6700\u9069\u5316\u3059\u308b\u305f\u3081\u306b\u3001\u6a5f\u68b0\u7684\u6280\u8853\u3068\u30ec\u30fc\u30b6\u30fc\u6280\u8853\u3092\u7d44\u307f\u5408\u308f\u305b\u305f\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30b7\u30b9\u30c6\u30e0\u3082\u767b\u5834\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u81ea\u52d5\u5316\u3068\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u306a\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u3082\u6a19\u6e96\u6a5f\u80fd\u306b\u306a\u308a\u3064\u3064\u3042\u308b\u3002\u6a5f\u68b0\u5b66\u7fd2\u30a2\u30eb\u30b4\u30ea\u30ba\u30e0\u306f\u3001\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u5207\u65ad\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u6700\u9069\u5316\u3057\u3001\u6b69\u7559\u307e\u308a\u3068\u4e00\u8cab\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u305f\u3081\u306b\u7814\u7a76\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u3055\u3089\u306b\u3001\u8d85\u8584\u578b\u30a6\u30a7\u30fc\u30cf\u3068\u30d8\u30c6\u30ed\u30b8\u30cb\u30a2\u30b9\u30fb\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u3078\u306e\u63a8\u9032\u306f\u3001\u30c0\u30a4\u30b7\u30f3\u30b0\u30fb\u30d7\u30ed\u30bb\u30b9\u306b\u65b0\u305f\u306a\u8ab2\u984c\u3092\u751f\u307f\u51fa\u3057\u3001\u3088\u308a\u9ad8\u3044\u7cbe\u5ea6\u3068\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u3092\u8981\u6c42\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u7d50\u8ad6<\/h2>\n\n\n\n<p>\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u6027\u80fd\u3068\u6b69\u7559\u307e\u308a\u306b\u76f4\u63a5\u5f71\u97ff\u3059\u308b\u91cd\u8981\u306a\u5de5\u7a0b\u3067\u3059\u3002\u9069\u5207\u306a\u30c0\u30a4\u30b7\u30f3\u30b0\u30de\u30b7\u30f3\u306e\u9078\u629e\u306f\u3001\u6750\u6599\u306e\u7a2e\u985e\u3001\u30a6\u30a7\u30fc\u30cf\u30b5\u30a4\u30ba\u3001\u8981\u6c42\u7cbe\u5ea6\u3001\u751f\u7523\u91cf\u306a\u3069\u3001\u3055\u307e\u3056\u307e\u306a\u8981\u56e0\u306e\u7d44\u307f\u5408\u308f\u305b\u306b\u3088\u3063\u3066\u6c7a\u307e\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u3067\u306f\u30d6\u30ec\u30fc\u30c9\u30c0\u30a4\u30b7\u30f3\u30b0\u304c\u4f9d\u7136\u3068\u3057\u3066\u4e3b\u6d41\u3067\u3042\u308b\u304c\u3001SiC\u3084\u30b5\u30d5\u30a1\u30a4\u30a2\u306a\u3069\u306e\u5148\u7aef\u6750\u6599\u3067\u306f\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306e\u91cd\u8981\u6027\u304c\u9ad8\u307e\u3063\u3066\u3044\u308b\u3002\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30ef\u30a4\u30e4\u30fc\u30bd\u30fc\u30a4\u30f3\u30b0\u306f\u3001\u7279\u5b9a\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u30b5\u30dd\u30fc\u30c8\u7684\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u7d9a\u3051\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u6700\u7d42\u7684\u306b\u6700\u9069\u306a\u7d50\u679c\u3092\u5f97\u308b\u306b\u306f\u3001\u9069\u5207\u306a\u88c5\u7f6e\u3092\u9078\u629e\u3059\u308b\u3060\u3051\u3067\u306a\u304f\u3001\u30d7\u30ed\u30bb\u30b9\u30d1\u30e9\u30e1\u30fc\u30bf\u3084\u30b7\u30b9\u30c6\u30e0\u69cb\u6210\u3092\u614e\u91cd\u306b\u6700\u9069\u5316\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u534a\u5c0e\u4f53\u6280\u8853\u304c\u9032\u5316\u3092\u7d9a\u3051\u308b\u4e2d\u3001\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\u30fb\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306f\u3001\u6b21\u4e16\u4ee3\u30c7\u30d0\u30a4\u30b9\u306e\u5b9f\u73fe\u306b\u307e\u3059\u307e\u3059\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3059\u3053\u3068\u306b\u306a\u308b\u3067\u3057\u3087\u3046\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>Wafer dicing is a critical back-end process in semiconductor manufacturing, where processed wafers are separated into individual dies. The choice of dicing equipment significantly influences yield, edge quality, and overall production efficiency. This article provides a comprehensive overview of wafer dicing machine types, key system configurations, and practical selection criteria for different materials and applications. [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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