{"id":2162,"date":"2026-04-13T05:49:11","date_gmt":"2026-04-13T05:49:11","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2162"},"modified":"2026-04-13T05:49:16","modified_gmt":"2026-04-13T05:49:16","slug":"laser-dicing-vs-mechanical-saw-in-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ja\/laser-dicing-vs-mechanical-saw-in-semiconductor-manufacturing\/","title":{"rendered":"\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u3068\u30e1\u30ab\u30cb\u30ab\u30eb\u30bd\u30fc\u306e\u6bd4\u8f03"},"content":{"rendered":"<h2 class=\"wp-block-heading\">1.\u306f\u3058\u3081\u306b<\/h2>\n\n\n\n<p>\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\uff08\u30a6\u30a7\u30fc\u30cf\u30b7\u30f3\u30ae\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3068\u3082\u547c\u3070\u308c\u308b\uff09\u306f\u3001\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u5de5\u7a0b\u3067\u3042\u308a\u3001\u52a0\u5de5\u3055\u308c\u305f\u30b7\u30ea\u30b3\u30f3\u307e\u305f\u306f\u5316\u5408\u7269\u534a\u5c0e\u4f53\u30a6\u30a7\u30fc\u30cf\u3092\u500b\u3005\u306e\u30c0\u30a4\u306b\u5206\u96e2\u3057\u307e\u3059\u3002\u30c7\u30d0\u30a4\u30b9\u306e\u5f62\u72b6\u304c\u5fae\u7d30\u5316\u3057\u3001\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u3001\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u3001\u30b5\u30d5\u30a1\u30a4\u30a2\u306a\u3069\u6750\u6599\u304c\u591a\u69d8\u5316\u3059\u308b\u306b\u3064\u308c\u3066\u3001\u30c0\u30a4\u30b7\u30f3\u30b0\u6280\u8853\u306e\u9078\u629e\u306f\u307e\u3059\u307e\u3059\u91cd\u8981\u306b\u306a\u3063\u3066\u3044\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u73fe\u5728\u30012\u3064\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u304c\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30e1\u30ab\u30cb\u30ab\u30eb\u30c0\u30a4\u30b7\u30f3\u30b0\uff08\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30d6\u30ec\u30fc\u30c9\u30bd\u30fc\u30a4\u30f3\u30b0\uff09<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\uff08\u30ec\u30fc\u30b6\u30fc\u306b\u3088\u308b\u30a2\u30d6\u30ec\u30fc\u30b7\u30e7\u30f3\u307e\u305f\u306f\u30b9\u30c6\u30eb\u30b9\u5206\u96e2\uff09<\/li>\n<\/ul>\n\n\n\n<p>\u305d\u308c\u305e\u308c\u306e\u65b9\u6cd5\u306b\u306f\u3001\u7570\u306a\u308b\u7269\u7406\u7684\u30e1\u30ab\u30cb\u30ba\u30e0\u3001\u30d7\u30ed\u30bb\u30b9\u5236\u7d04\u3001\u5fdc\u7528\u9818\u57df\u304c\u3042\u308b\u3002\u672c\u7a3f\u3067\u306f\u3001\u539f\u7406\u3001\u6027\u80fd\u3001\u7523\u696d\u4e0a\u306e\u9069\u6027\u3068\u3044\u3046\u89b3\u70b9\u304b\u3089\u3001\u4e21\u6280\u8853\u3092\u79d1\u5b66\u7684\u306b\u6bd4\u8f03\u3059\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-1024x683.png\" alt=\"\" class=\"wp-image-2164\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-1024x683.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-300x200.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-768x512.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-18x12.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-600x400.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing.png 1536w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2.\u57fa\u672c\u539f\u5247<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">2.1 \u30e1\u30ab\u30cb\u30ab\u30eb\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0\uff08\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30bd\u30fc\u30a4\u30f3\u30b0\uff09<\/h2>\n\n\n\n<p>\u30e1\u30ab\u30cb\u30ab\u30eb\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u3092\u57cb\u3081\u8fbc\u3093\u3060\u30d6\u30ec\u30fc\u30c9\u3092\u88c5\u5099\u3057\u305f\u9ad8\u901f\u56de\u8ee2\u30b9\u30d4\u30f3\u30c9\u30eb\u3092\u4f7f\u7528\u3057\u307e\u3059\u3002\u30a6\u30a7\u30fc\u30cf\u3092\u30c0\u30a4\u30b7\u30f3\u30b0\u30c6\u30fc\u30d7\u306b\u88c5\u7740\u3057\u3001\u3042\u3089\u304b\u3058\u3081\u8a2d\u5b9a\u3055\u308c\u305f\u30b9\u30c8\u30ea\u30fc\u30c8\u306b\u6cbf\u3063\u3066\u5207\u65ad\u3057\u307e\u3059\u3002.<\/p>\n\n\n\n<p>\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u6469\u8017\u3068\u7834\u58ca\u529b\u5b66\u306b\u3088\u308b\u6750\u6599\u9664\u53bb\u306b\u3088\u3063\u3066\u652f\u914d\u3055\u308c\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7c92\u5b50\u304c\u30a6\u30a7\u30cf\u30fc\u3092\u6a5f\u68b0\u7684\u306b\u50b7\u3064\u3051\u3001\u7834\u58ca\u3059\u308b\u3002<\/li>\n\n\n\n<li>\u6750\u6599\u306f\u5fae\u7d30\u306a\u7834\u7247\u3068\u3057\u3066\u9664\u53bb\u3055\u308c\u308b\uff08\u30b7\u30b9\u30c6\u30e0\u306b\u3088\u3063\u3066\u306f\u30b9\u30e9\u30ea\u30fc\u307e\u305f\u306f\u4e7e\u71e5\u7c92\u5b50\uff09<\/li>\n\n\n\n<li>\u51b7\u5374\u6c34\u306f\u3001\u71b1\u7684\u30fb\u6a5f\u68b0\u7684\u30b9\u30c8\u30ec\u30b9\u3092\u8efd\u6e1b\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u3053\u3068\u304c\u591a\u3044\u3002<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u65b9\u6cd5\u306f\u6210\u719f\u3057\u3066\u304a\u308a\u3001\u534a\u5c0e\u4f53\u5de5\u5834\u3067\u5e83\u304f\u63a1\u7528\u3055\u308c\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.2 \u30ec\u30fc\u30b6\u30fc\u30a6\u30a7\u30fc\u30cf\u30c0\u30a4\u30b7\u30f3\u30b0<\/h2>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u3001\u9ad8\u96c6\u5149\u30ec\u30fc\u30b6\u30fc\u30d3\u30fc\u30e0\uff08\u30ca\u30ce\u79d2\u3001\u30d4\u30b3\u79d2\u3001\u307e\u305f\u306f\u30d5\u30a7\u30e0\u30c8\u79d2\u30d1\u30eb\u30b9\uff09\u3092\u4f7f\u7528\u3057\u3066\u3001\u6750\u6599\u3092\u4fee\u6b63\u307e\u305f\u306f\u9664\u53bb\u3059\u308b\u3002.<\/p>\n\n\n\n<p>\u4e00\u822c\u7684\u306a\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u30ec\u30fc\u30b6\u30fc\u30a2\u30d6\u30ec\u30fc\u30b7\u30e7\u30f3<\/strong>\u6750\u6599\u306e\u76f4\u63a5\u6c17\u5316<\/li>\n\n\n\n<li><strong>\u30b9\u30c6\u30eb\u30b9\u30c0\u30a4\u30b7\u30f3\u30b0<\/strong>\u5236\u5fa1\u3055\u308c\u305f\u7834\u58ca\u306b\u7d9a\u304f\u5730\u4e0b\u306e\u6539\u8cea<\/li>\n\n\n\n<li><strong>\u71b1\u5fdc\u529b\u5206\u96e2<\/strong>\u5c40\u6240\u52a0\u71b1\u306b\u3088\u308b\u4e80\u88c2\u306e\u9032\u5c55<\/li>\n<\/ul>\n\n\n\n<p>\u6a5f\u68b0\u7684\u306a\u63a5\u89e6\u5207\u65ad\u3068\u306f\u7570\u306a\u308a\u3001\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u975e\u63a5\u89e6\u30d7\u30ed\u30bb\u30b9\u3067\u3042\u308b\u305f\u3081\u3001\u30a6\u30a7\u30fc\u30cf\u3078\u306e\u6a5f\u68b0\u7684\u30b9\u30c8\u30ec\u30b9\u304c\u8efd\u6e1b\u3055\u308c\u307e\u3059\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.\u30d7\u30ed\u30bb\u30b9\u6bd4\u8f03<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">3.1 \u6a5f\u68b0\u7684\u5fdc\u529b\u3068\u640d\u50b7<\/h3>\n\n\n\n<p>\u30e1\u30ab\u30cb\u30ab\u30eb\u30c0\u30a4\u30b7\u30f3\u30b0\u3092\u5c0e\u5165\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30a8\u30c3\u30b8\u30fb\u30c1\u30c3\u30d4\u30f3\u30b0<\/li>\n\n\n\n<li>\u30de\u30a4\u30af\u30ed\u30af\u30e9\u30c3\u30af<\/li>\n\n\n\n<li>\u8106\u6027\u6750\u6599\u306b\u304a\u3051\u308b\u5fdc\u529b\u4f1d\u64ad<\/li>\n<\/ul>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u6a5f\u68b0\u7684\u306a\u529b\u3092\u8efd\u6e1b\u3059\u308b\u304c\u3001\u6a5f\u68b0\u7684\u306a\u529b\u304c\u52a0\u308f\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u71b1\u5f71\u97ff\u30be\u30fc\u30f3\uff08HAZ\uff09<\/li>\n\n\n\n<li>\u6ce2\u9577\u3068\u30d1\u30eb\u30b9\u6642\u9593\u306b\u3088\u308b\u5fae\u7d30\u69cb\u9020\u306e\u5909\u5316<\/li>\n<\/ul>\n\n\n\n<p>\u8106\u304f\u3066\u9ad8\u4fa1\u5024\u306e\u6750\u6599\uff08\u4f8b\u3048\u3070SiC\u30a6\u30a7\u30cf\u30fc\uff09\u306e\u5834\u5408\u3001\u30c0\u30e1\u30fc\u30b8\u30fb\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u306f\u6975\u3081\u3066\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.2 \u7cbe\u5ea6\u3068\u30ab\u30fc\u30d5\u5e45<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30e1\u30ab\u30cb\u30ab\u30eb\u30bd\u30fc\u30ab\u30fc\u30d5: \u901a\u5e3825\uff5e60 \u00b5m\uff08\u30d6\u30ec\u30fc\u30c9\u306e\u539a\u3055\u306b\u3088\u308b\uff09<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u30ab\u30fc\u30d5\uff1a\u6700\u9069\u5316\u3055\u308c\u305f\u30b7\u30b9\u30c6\u30e0\u3067\u306f&lt;20 \u00b5m\u307e\u3067\u4f4e\u6e1b\u53ef\u80fd<\/li>\n<\/ul>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u6280\u8853\u306f\u3001\u7279\u306b\u9ad8\u5ea6\u306a\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0\u3084MEMS\u30c7\u30d0\u30a4\u30b9\u306b\u304a\u3044\u3066\u3001\u8d85\u5fae\u7d30\u5f62\u72b6\u306b\u5bfe\u3059\u308b\u9ad8\u3044\u67d4\u8edf\u6027\u3092\u63d0\u4f9b\u3059\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.3 \u7d20\u6750\u306e\u4e92\u63db\u6027<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u7d20\u6750\u30bf\u30a4\u30d7<\/th><th>\u30e1\u30ab\u30cb\u30ab\u30eb\u30bd\u30fc<\/th><th>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0<\/th><\/tr><\/thead><tbody><tr><td>\u30b1\u30a4\u7d20 (Si)<\/td><td>\u5e83\u304f\u4f7f\u308f\u308c\u3066\u3044\u308b<\/td><td>\u5897\u52a0\u3059\u308b\u5229\u7528<\/td><\/tr><tr><td>SiC<\/td><td>\u96e3\u3057\u3044\uff08\u5de5\u5177\u306e\u6469\u8017\uff09<\/td><td>\u512a\u9047\uff08\u9ad8\u5ea6\u306a\u30b7\u30b9\u30c6\u30e0\uff09<\/td><\/tr><tr><td>\u30b5\u30d5\u30a1\u30a4\u30a2<\/td><td>\u9ad8\u3044\u30c1\u30c3\u30d4\u30f3\u30b0\u30ea\u30b9\u30af<\/td><td>\u3088\u308a\u826f\u3044\u30a8\u30c3\u30b8\u54c1\u8cea<\/td><\/tr><tr><td>\u7a92\u5316\u30ac\u30ea\u30a6\u30e0<\/td><td>\u4e2d\u7a0b\u5ea6\u306e\u30c0\u30e1\u30fc\u30b8<\/td><td>\u512a\u5148<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u3001\u786c\u304f\u3066\u8106\u304f\u3001\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u306e\u6750\u6599\u306b\u307e\u3059\u307e\u3059\u6709\u5229\u306b\u306a\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.4 \u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3068\u30b3\u30b9\u30c8\u52b9\u7387<\/h3>\n\n\n\n<p>\u30e1\u30ab\u30cb\u30ab\u30eb\u30c0\u30a4\u30b7\u30f3\u30b0\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u3044\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8<\/li>\n\n\n\n<li>\u8a2d\u5099\u30b3\u30b9\u30c8\u306e\u4f4e\u6e1b<\/li>\n\n\n\n<li>\u6210\u719f\u3057\u305f\u6d88\u8017\u54c1\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\uff08\u30d6\u30ec\u30fc\u30c9\u3001\u30af\u30fc\u30e9\u30f3\u30c8\uff09<\/li>\n<\/ul>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u8a2d\u5099\u6295\u8cc7\u306e\u5897\u52a0<\/li>\n\n\n\n<li>\u6d88\u8017\u54c1\u30b3\u30b9\u30c8\u306e\u4f4e\u6e1b<\/li>\n\n\n\n<li>\u69cb\u6210\u306b\u3088\u3063\u3066\u306f\u9045\u304f\u306a\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\uff08\u30b9\u30ad\u30e3\u30f3\u6226\u7565\u306b\u3088\u308b\uff09<\/li>\n<\/ul>\n\n\n\n<p>\u30b7\u30ea\u30b3\u30f3\u306e\u5927\u91cf\u751f\u7523\u3067\u306f\u3001\u30b3\u30b9\u30c8\u52b9\u7387\u306e\u70b9\u304b\u3089\u3001\u4f9d\u7136\u3068\u3057\u3066\u6a5f\u68b0\u92f8\u5207\u65ad\u304c\u4e3b\u6d41\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.5 \u5de5\u5177\u306e\u6469\u8017\u3068\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9<\/h3>\n\n\n\n<p>\u6a5f\u68b0\u7684\u306a\u30b7\u30b9\u30c6\u30e0\u306b\u306f\u554f\u984c\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30d6\u30ec\u30fc\u30c9\u6469\u8017<\/li>\n\n\n\n<li>\u983b\u7e41\u306a\u4ea4\u63db<\/li>\n\n\n\n<li>\u30d7\u30ed\u30bb\u30b9\u306e\u7d4c\u6642\u5909\u5316<\/li>\n<\/ul>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u30b7\u30b9\u30c6\u30e0\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u7269\u7406\u7684\u306a\u5de5\u5177\u306e\u6469\u8017\u304c\u306a\u3044<\/li>\n\n\n\n<li>\u5149\u5b66\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u3068\u30ec\u30f3\u30ba\u306e\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u306e\u307f\u5fc5\u8981<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u306e\u305f\u3081\u3001\u30ec\u30fc\u30b6\u30fc\u30b7\u30b9\u30c6\u30e0\u306f\u7cbe\u5bc6\u88fd\u9020\u306b\u304a\u3051\u308b\u9577\u671f\u7684\u306a\u5b89\u5b9a\u6027\u304c\u9b45\u529b\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4.\u7523\u696d\u7528\u9014<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">4.1 \u30e1\u30ab\u30cb\u30ab\u30eb\u30c0\u30a4\u30b7\u30f3\u30b0\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>CMOS\u30a4\u30e1\u30fc\u30b8\u30bb\u30f3\u30b5\u30fc<\/li>\n\n\n\n<li>\u30e1\u30e2\u30ea\u30fc\u30c1\u30c3\u30d7\uff08DRAM\u3001NAND\uff09<\/li>\n\n\n\n<li>\u6a19\u6e96\u30b7\u30ea\u30b3\u30f3IC\u30d1\u30c3\u30b1\u30fc\u30b8<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4.2 <a href=\"https:\/\/www.zmsh-semitech.com\/ja\/product-category\/laser-cutting\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0<\/mark><\/a> \u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>SiC\u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\uff08EV\u3001\u5145\u96fb\u30a4\u30f3\u30d5\u30e9\uff09<\/li>\n\n\n\n<li>LED\u304a\u3088\u3073\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u30fb\u30a6\u30a7\u30fc\u30cf<\/li>\n\n\n\n<li>MEMS\u30c7\u30d0\u30a4\u30b9<\/li>\n\n\n\n<li>\u9ad8\u5ea6\u306a\u30d8\u30c6\u30ed\u30b8\u30cb\u30a2\u30b9\u30fb\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u30fb\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5.\u4e3b\u8981\u30c8\u30ec\u30fc\u30c9\u30aa\u30d5\u306e\u307e\u3068\u3081<\/h2>\n\n\n\n<p>\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u306e\u89b3\u70b9\u304b\u3089\u306f\u3001\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u3068\u30e1\u30ab\u30cb\u30ab\u30eb\u30c0\u30a4\u30b7\u30f3\u30b0\u306e\u3069\u3061\u3089\u3092\u9078\u629e\u3059\u308b\u304b\u306f\u3001\u30d0\u30e9\u30f3\u30b9\u6b21\u7b2c\u3067\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u53ce\u91cf\u5bfe\u30b3\u30b9\u30c8<\/li>\n\n\n\n<li>\u6750\u6599\u306e\u786c\u3055\u3068\u51e6\u7406\u80fd\u529b<\/li>\n\n\n\n<li>\u7cbe\u5ea6 vs \u62e1\u5f35\u6027<\/li>\n<\/ul>\n\n\n\n<p>\u30e1\u30ab\u30cb\u30ab\u30eb\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u4f9d\u7136\u3068\u3057\u3066\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u4e3b\u6d41\u3092\u652f\u3048\u3066\u3044\u308b\u304c\u3001\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u5148\u7aef\u6750\u6599\u3084\u9ad8\u4fa1\u5024\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u3067\u6025\u901f\u306b\u62e1\u5927\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6.\u4eca\u5f8c\u306e\u958b\u767a\u52d5\u5411<\/h2>\n\n\n\n<p>\u3044\u304f\u3064\u304b\u306e\u30c8\u30ec\u30f3\u30c9\u304c\u30a6\u30a8\u30cf\u30fc\u30fb\u30b7\u30f3\u30ae\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306e\u9032\u5316\u3092\u5f62\u6210\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.1 \u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30c0\u30a4\u30b7\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/h3>\n\n\n\n<p>\u3044\u304f\u3064\u304b\u306e\u30e1\u30fc\u30ab\u30fc\u304c\u5408\u4f75\u3057\u3066\u3044\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ec\u30fc\u30b6\u30fc\u30d7\u30ea\u30b9\u30af\u30e9\u30a4\u30d3\u30f3\u30b0\uff0b\u30e1\u30ab\u30cb\u30ab\u30eb\u30d6\u30ec\u30fc\u30ad\u30f3\u30b0<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u6e9d\u52a0\u5de5\uff0b\u30d6\u30ec\u30fc\u30c9\u4ed5\u4e0a\u3052<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u306b\u3088\u308a\u3001\u6b69\u7559\u307e\u308a\u3068\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u306e\u4e21\u65b9\u304c\u5411\u4e0a\u3059\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.2 \u8d85\u77ed\u30d1\u30eb\u30b9\u30ec\u30fc\u30b6\u30fc<\/h3>\n\n\n\n<p>\u30d5\u30a7\u30e0\u30c8\u30bb\u30ab\u30f3\u30c9\u30ec\u30fc\u30b6\u30fc\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u71b1\u5f71\u97ff\u90e8\u3092\u5927\u5e45\u306b\u6e1b\u5c11\u3055\u305b\u3001\u305d\u308c\u3092\u53ef\u80fd\u306b\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u3088\u308a\u30af\u30ea\u30fc\u30f3\u306a\u30a8\u30c3\u30b8<\/li>\n\n\n\n<li>\u30de\u30a4\u30af\u30ed\u30af\u30e9\u30c3\u30af\u306e\u4f4e\u6e1b<\/li>\n\n\n\n<li>SiC\u304a\u3088\u3073\u30b5\u30d5\u30a1\u30a4\u30a2\u30a6\u30a7\u30fc\u30cf\u306e\u4fe1\u983c\u6027\u5411\u4e0a<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">6.3 300mm\u30a6\u30a7\u30cf\u30fc\u306e\u8ab2\u984c<\/h3>\n\n\n\n<p>\u30a6\u30a7\u30cf\u30fc\u30b5\u30a4\u30ba\u304c\u5927\u304d\u304f\u306a\u308b\u306b\u3064\u308c\u3066<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u6a5f\u68b0\u7684\u5fdc\u529b\u5206\u5e03\u304c\u3088\u308a\u8907\u96d1\u306b<\/li>\n\n\n\n<li>\u53cd\u308a\u306e\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb\u304c\u91cd\u8981<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u7cbe\u5ea6\u306e\u4fa1\u5024\u304c\u9ad8\u307e\u308b<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">7.\u7d50\u8ad6<\/h2>\n\n\n\n<p>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u3068\u30e1\u30ab\u30cb\u30ab\u30eb\u30bd\u30fc\u30a4\u30f3\u30b0\u306f\u3001\u30a6\u30a7\u30fc\u30cf\u5206\u5272\u306b\u5bfe\u3059\u308b\u4e8c\u3064\u306e\u6839\u672c\u7684\u306b\u7570\u306a\u308b\u5de5\u5b66\u7684\u30a2\u30d7\u30ed\u30fc\u30c1\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30b3\u30b9\u30c8\u52b9\u7387\u3068\u30b7\u30ea\u30b3\u30f3\u306e\u5927\u91cf\u751f\u7523\u306b\u512a\u308c\u305f\u30e1\u30ab\u30cb\u30ab\u30eb\u30bd\u30fc<\/li>\n\n\n\n<li>\u30ec\u30fc\u30b6\u30fc\u30c0\u30a4\u30b7\u30f3\u30b0\u306f\u7cbe\u5ea6\u3001\u6750\u6599\u306e\u67d4\u8edf\u6027\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u512a\u308c\u3066\u3044\u308b<\/li>\n<\/ul>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u6280\u8853\u306f\u4e92\u3044\u306b\u5b8c\u5168\u306b\u53d6\u3063\u3066\u4ee3\u308f\u308b\u3068\u3044\u3046\u3088\u308a\u306f\u3001\u6750\u6599\u306e\u9769\u65b0\u3068\u30c7\u30d0\u30a4\u30b9\u306e\u5c0f\u578b\u5316\u306b\u3088\u3063\u3066\u3001\u88dc\u5b8c\u7684\u306a\u88fd\u9020\u30a8\u30b3\u30b7\u30b9\u30c6\u30e0\u306e\u4e2d\u3067\u5171\u5b58\u3059\u308b\u3088\u3046\u306b\u306a\u3063\u3066\u304d\u3066\u3044\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction Wafer dicing (also called wafer singulation) is a critical step in semiconductor manufacturing, where processed silicon or compound semiconductor wafers are separated into individual dies. As device geometries shrink and materials diversify\u2014such as silicon carbide (SiC), gallium nitride (GaN), and sapphire\u2014the choice of dicing technology becomes increasingly important. Two dominant approaches are widely [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2164,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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