{"id":1930,"date":"2026-03-20T05:44:51","date_gmt":"2026-03-20T05:44:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=1930"},"modified":"2026-03-20T05:44:59","modified_gmt":"2026-03-20T05:44:59","slug":"next-generation-semiconductor-processing-equipment-trends-in-sic-gan-and-composite-materials","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ja\/next-generation-semiconductor-processing-equipment-trends-in-sic-gan-and-composite-materials\/","title":{"rendered":"\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\uff1aSiC\u3001GaN\u3001\u8907\u5408\u6750\u6599\u306e\u52d5\u5411"},"content":{"rendered":"<h3 class=\"wp-block-heading\">1.\u306f\u3058\u3081\u306b<\/h3>\n\n\n\n<p>\u96fb\u6c17\u81ea\u52d5\u8eca\u3001\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc\u30015G\u901a\u4fe1\u3001\u9ad8\u6027\u80fd\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u6025\u901f\u306a\u767a\u5c55\u306b\u4f34\u3044\u3001\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u7cfb\u534a\u5c0e\u4f53\u306f\u3001\u5927\u96fb\u529b\u3001\u9ad8\u5468\u6ce2\u3001\u9ad8\u6e29\u74b0\u5883\u306b\u304a\u3044\u3066\u307e\u3059\u307e\u3059\u9650\u754c\u3092\u8fce\u3048\u3066\u3044\u308b\u3002\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u3068\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u306f\u3001\u30ef\u30a4\u30c9\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\u534a\u5c0e\u4f53\u6750\u6599\u3068\u3057\u3066\u3001\u9ad8\u8010\u5727\u3001\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027\u3001\u512a\u308c\u305f\u9ad8\u5468\u6ce2\u6027\u80fd\u3092\u63d0\u4f9b\u3057\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u4e2d\u6838\u6750\u6599\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<p>\u6750\u6599\u306e\u9032\u6b69\u3068\u3068\u3082\u306b\u3001\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u88c5\u7f6e\u3082\u3053\u308c\u3089\u306e\u65b0\u6750\u6599\u306e\u8ab2\u984c\u306b\u5fdc\u3048\u308b\u3079\u304f\u9032\u5316\u3057\u3066\u3044\u308b\u3002\u672c\u7a3f\u3067\u306f\u3001\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u88c5\u7f6e\u30c8\u30ec\u30f3\u30c9\u3001\u4e3b\u8981\u6a5f\u80fd\u3001\u304a\u3088\u3073\u5c06\u6765\u306e\u65b9\u5411\u6027\u306b\u3064\u3044\u3066\u79d1\u5b66\u7684\u306b\u6982\u8aac\u3059\u308b\u3002.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"500\" height=\"500\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/ceramic_cutting_equipment_single_wire_multi_wire_diamond_wire_cutting.webp\" alt=\"\" class=\"wp-image-1931\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/ceramic_cutting_equipment_single_wire_multi_wire_diamond_wire_cutting.webp 500w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/ceramic_cutting_equipment_single_wire_multi_wire_diamond_wire_cutting-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/ceramic_cutting_equipment_single_wire_multi_wire_diamond_wire_cutting-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/ceramic_cutting_equipment_single_wire_multi_wire_diamond_wire_cutting-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/ceramic_cutting_equipment_single_wire_multi_wire_diamond_wire_cutting-100x100.webp 100w\" sizes=\"(max-width: 500px) 100vw, 500px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">2.SiC\u30a6\u30a7\u30cf\u30fc\u51e6\u7406\u88c5\u7f6e<\/h3>\n\n\n\n<p>SiC\u30a6\u30a7\u30fc\u30cf\u306f\u975e\u5e38\u306b\u786c\u304f\u3001\u71b1\u4f1d\u5c0e\u6027\u304c\u9ad8\u304f\u3001\u8106\u3044\u305f\u3081\u3001\u52a0\u5de5\u88c5\u7f6e\u306b\u5bfe\u3059\u308b\u8981\u6c42\u304c\u9ad8\u3044\u3002SiC\u30a6\u30a7\u30cf\u30fc\u88fd\u9020\u306e\u305f\u3081\u306e\u4ee3\u8868\u7684\u306a\u88c5\u7f6e\u306b\u306f\u3001\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u3082\u306e\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u9ad8\u6e29\u9ad8\u5727 (PVT) \u7089<\/strong> - \u9ad8\u54c1\u8cea\u306eSiC\u5358\u7d50\u6676\u30a4\u30f3\u30b4\u30c3\u30c8\u3092\u6210\u9577\u3055\u305b\u308b\u3002.<\/li>\n\n\n\n<li><strong><a href=\"https:\/\/www.zmsh-semitech.com\/ja\/product-category\/wire-saw-machine\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u7cbe\u5bc6\u30ef\u30a4\u30e4\u30fc\u30bd\u30fc<\/mark><\/a><\/strong> - \u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30ef\u30a4\u30e4\u30fc\u3084\u30ec\u30fc\u30b6\u30fc\u5207\u65ad\u3092\u5229\u7528\u3057\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u539a\u307f\u3068\u5bf8\u6cd5\u7cbe\u5ea6\u3092\u78ba\u4fdd\u3059\u308b\u3002.<\/li>\n\n\n\n<li><strong>\u5316\u5b66\u6a5f\u68b0\u7814\u78e8\uff08CMP\uff09\u88c5\u7f6e<\/strong> - \u30a6\u30a7\u30fc\u30cf\u8868\u9762\u3092\u5e73\u5766\u5316\u3057\u3001\u6b20\u9665\u3084\u8868\u9762\u7c97\u3055\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3002.<\/li>\n\n\n\n<li><strong>\u30ec\u30fc\u30b6\u30fc\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u30de\u30fc\u30ad\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/strong> - \u30d1\u30ef\u30fc\u30c7\u30d0\u30a4\u30b9\u3084\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u5fae\u7d30\u52a0\u5de5\u7528\u3002.<\/li>\n<\/ol>\n\n\n\n<p>SiC\u30c7\u30d0\u30a4\u30b9\u306e\u5927\u53e3\u5f84\u5316\uff08200mm\u3001300mm\u306a\u3069\uff09\u306b\u4f34\u3044\u3001\u9ad8\u7cbe\u5ea6\u5207\u65ad\u3001\u7814\u78e8\u3001\u81ea\u52d5\u30a6\u30a7\u30fc\u30cf\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u304c\u696d\u754c\u306e\u512a\u5148\u8ab2\u984c\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.GaN\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u88c5\u7f6e<\/h3>\n\n\n\n<p>\u7a92\u5316\u30ac\u30ea\u30a6\u30e0\uff08GaN\uff09\u306f\u3001\u4e3b\u306b\u9ad8\u5468\u6ce2RF\u30c7\u30d0\u30a4\u30b9\u3084\u30d1\u30ef\u30fc\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u306b\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u3002GaN\u30a6\u30a7\u30cf\u306f\u30b7\u30ea\u30b3\u30f3\u3084\u30b5\u30d5\u30a1\u30a4\u30a2\u57fa\u677f\u4e0a\u306b\u6210\u9577\u3059\u308b\u3053\u3068\u304c\u591a\u3044\u305f\u3081\u3001\u51e6\u7406\u88c5\u7f6e\u306f\u7570\u7a2e\u57fa\u677f\u306b\u5bfe\u5fdc\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>MOCVD\uff08\u6709\u6a5f\u91d1\u5c5e\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff09\u30b7\u30b9\u30c6\u30e0<\/strong> - \u306f\u3001GaN\u8584\u819c\u6210\u9577\u306e\u4e2d\u6838\u88c5\u7f6e\u3067\u3042\u308a\u3001\u819c\u539a\u3068\u30c9\u30fc\u30d4\u30f3\u30b0\u7cbe\u5ea6\u3092\u5236\u5fa1\u3059\u308b\u3002.<\/li>\n\n\n\n<li><strong>ICP\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30e3\u30fc<\/strong> - \u9ad8\u3044\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u3068\u6ed1\u3089\u304b\u306a\u30b5\u30a4\u30c9\u30a6\u30a9\u30fc\u30eb\u3092\u6301\u3064\u5fae\u7d30\u69cb\u9020\u306e\u30d1\u30bf\u30fc\u30cb\u30f3\u30b0\u306e\u305f\u3081\u306b\u3002.<\/li>\n\n\n\n<li><strong>\u81ea\u52d5\u30a6\u30a7\u30cf\u30fc\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/strong> - \u58ca\u308c\u3084\u3059\u3044GaN\u30a6\u30a7\u30fc\u30cf\u306e\u7834\u640d\u3092\u6e1b\u3089\u3057\u3001\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u308b\u3002.<\/li>\n<\/ul>\n\n\n\n<p>GaN\u88c5\u7f6e\u306e\u30c8\u30ec\u30f3\u30c9\u306f\u30015G\u57fa\u5730\u5c40\u3084\u6025\u901f\u5145\u96fb\u96fb\u6c17\u81ea\u52d5\u8eca\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u30cb\u30fc\u30ba\u3092\u6e80\u305f\u3059\u305f\u3081\u3001\u5c11\u91cf\u9ad8\u7cbe\u5ea6\u88fd\u9020\u3001\u4f4e\u6b20\u9665\u7387\u3001\u30de\u30eb\u30c1\u57fa\u677f\u4e92\u63db\u6027\u306b\u7126\u70b9\u3092\u5f53\u3066\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.\u8907\u5408\u6750\u6599\u3068\u6b21\u4e16\u4ee3\u6a5f\u5668<\/h3>\n\n\n\n<p>SiC\u3068GaN\u3092\u8d85\u3048\u3066\u3001, <strong>\u8907\u5408\u534a\u5c0e\u4f53\u6750\u6599<\/strong> (SiC\/GaN\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u30fb\u30c7\u30d0\u30a4\u30b9\u3001\u591a\u5c64\u30d8\u30c6\u30ed\u69cb\u9020\u306a\u3069\uff09\u304c\u51fa\u73fe\u3057\u3066\u3044\u308b\u3002\u8907\u5408\u6750\u6599\u306f\u88c5\u7f6e\u306b\u65b0\u305f\u306a\u8ab2\u984c\u3092\u3082\u305f\u3089\u3059\uff1a<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u30de\u30eb\u30c1\u30de\u30c6\u30ea\u30a2\u30eb\u5bfe\u5fdc<\/strong> - \u88c5\u7f6e\u306f\u3001\u786c\u5ea6\u3084\u71b1\u81a8\u5f35\u4fc2\u6570\u306e\u7570\u306a\u308b\u6750\u6599\u3092\u540c\u3058\u30ef\u30fc\u30af\u30d5\u30ed\u30fc\u3067\u51e6\u7406\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002.<\/li>\n\n\n\n<li><strong>\u9ad8\u7cbe\u5ea6\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u3068\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/strong> - \u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u306e\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u306f\u3001\u30d8\u30c6\u30ed\u30b8\u30cb\u30a2\u30b9\u30fb\u30a4\u30f3\u30c6\u30b0\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u4e0d\u53ef\u6b20\u3067\u3042\u308b\u3002.<\/li>\n\n\n\n<li><strong>\u9ad8\u5ea6\u306a\u76e3\u8996\u3068\u5236\u5fa1<\/strong> - \u30aa\u30f3\u30e9\u30a4\u30f3\u691c\u67fb\u3001AI\u8996\u899a\u8a8d\u8b58\u3001\u6e29\u5ea6\u5236\u5fa1\u304c\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3092\u4fdd\u8a3c\u3059\u308b\u3002.<\/li>\n<\/ol>\n\n\n\n<p>\u3053\u306e\u3088\u3046\u306a\u8981\u6c42\u304c\u3001\u30e2\u30b8\u30e5\u30fc\u30eb\u5316\u3001\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u5316\u3001\u8907\u5408\u6750\u6599\u9069\u5408\u8a2d\u8a08\u3078\u3068\u6a5f\u5668\u958b\u767a\u3092\u4fc3\u3057\u3066\u3044\u308b\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">5.\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u3068\u30b9\u30de\u30fc\u30c8\u6a5f\u5668<\/h3>\n\n\n\n<p>\u5c06\u6765\u306e\u534a\u5c0e\u4f53\u88c5\u7f6e\u958b\u767a\u306f\u3001\u81ea\u52d5\u5316\u3068\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30b9\u3092\u91cd\u8996\u3059\u308b\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u30a4\u30f3\u30c0\u30b9\u30c8\u30ea\u30a2\u30eb4.0\u306e\u7d71\u5408<\/strong> - \u30a6\u30a7\u30fc\u30cf\u3068\u30d7\u30ed\u30bb\u30b9\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u306e\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u306b\u3088\u308a\u3001\u30c7\u30fc\u30bf\u99c6\u52d5\u578b\u306e\u6700\u9069\u5316\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002.<\/li>\n\n\n\n<li><strong>AI\u30a2\u30b7\u30b9\u30c8\u30b3\u30f3\u30c8\u30ed\u30fc\u30eb<\/strong> - \u6a5f\u68b0\u5b66\u7fd2\u306f\u3001\u5207\u65ad\u7d4c\u8def\u3001\u7814\u78e8\u5727\u529b\u3001\u84b8\u7740\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u3092\u6700\u9069\u5316\u3057\u3001\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a\u3055\u305b\u308b\u3002.<\/li>\n\n\n\n<li><strong>\u30ed\u30dc\u30c3\u30c8\u30cf\u30f3\u30c9\u30ea\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0<\/strong> - \u7279\u306b\u58ca\u308c\u3084\u3059\u3044SiC\u3084GaN\u30a6\u30a7\u30cf\u30fc\u3067\u306f\u3001\u624b\u4f5c\u696d\u3092\u6e1b\u3089\u3057\u3001\u5b89\u5168\u6027\u3092\u9ad8\u3081\u3001\u518d\u73fe\u6027\u3092\u78ba\u4fdd\u3057\u307e\u3059\u3002.<\/li>\n<\/ul>\n\n\n\n<p>\u30b9\u30de\u30fc\u30c8\u6a5f\u5668\u306f\u3001\u751f\u7523\u6027\u3001\u7cbe\u5ea6\u3001\u30b3\u30b9\u30c8\u306e\u30d0\u30e9\u30f3\u30b9\u3092\u3068\u308a\u306a\u304c\u3089\u3001\u30cf\u30a4\u30a8\u30f3\u30c9\u534a\u5c0e\u4f53\u88fd\u9020\u306e\u6a19\u6e96\u3068\u306a\u308b\u3060\u308d\u3046\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u5c55\u671b<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>\u96fb\u6c17\u81ea\u52d5\u8eca\u3068\u518d\u751f\u53ef\u80fd\u30a8\u30cd\u30eb\u30ae\u30fc<\/strong> - SiC\u30d1\u30ef\u30fc\u30fb\u30c7\u30d0\u30a4\u30b9\u306f\u3001\u30a8\u30cd\u30eb\u30ae\u30fc\u640d\u5931\u3092\u5927\u5e45\u306b\u524a\u6e1b\u3057\u3001\u30a4\u30f3\u30d0\u30fc\u30bf\u306e\u52b9\u7387\u3092\u5411\u4e0a\u3055\u305b\u308b\u3002.<\/li>\n\n\n\n<li><strong>5G\u3068RF\u901a\u4fe1<\/strong> - GaN\u30c7\u30d0\u30a4\u30b9\u306f\u9ad8\u5468\u6ce2\u3001\u5927\u96fb\u529b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u512a\u308c\u3066\u3044\u308b\u3002.<\/li>\n\n\n\n<li><strong>\u9ad8\u6027\u80fd\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u30aa\u30d7\u30c8\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9<\/strong> - \u8907\u5408\u6750\u6599\u306f\u3001\u30c1\u30c3\u30d7\u306e\u5c0f\u578b\u5316\u3068\u9ad8\u96c6\u7a4d\u5316\u3092\u53ef\u80fd\u306b\u3059\u308b\u3002.<\/li>\n<\/ul>\n\n\n\n<p>\u9700\u8981\u304c\u9ad8\u307e\u308b\u306b\u3064\u308c\u3001\u52a0\u5de5\u88c5\u7f6e\u306f\u9032\u5316\u3092\u7d9a\u3051\u3001\u9ad8\u7cbe\u5ea6\u3001\u4f4e\u6b20\u9665\u3001\u30a4\u30f3\u30c6\u30ea\u30b8\u30a7\u30f3\u30c8\u306a\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u30fb\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u63d0\u4f9b\u3059\u308b\u3088\u3046\u306b\u306a\u308b\u3060\u308d\u3046\u3002.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">7.\u7d50\u8ad6<\/h3>\n\n\n\n<p>SiC\u3001GaN\u3001\u8907\u5408\u6750\u6599\u3092\u4e2d\u5fc3\u306b\u9032\u5316\u3059\u308b\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u88c5\u7f6e\u3002\u4e3b\u306a\u958b\u767a\u52d5\u5411\u306f\u4ee5\u4e0b\u306e\u901a\u308a\uff1a<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u9ad8\u7cbe\u5ea6\u306e\u5207\u65ad\u3068\u7814\u78e8<\/li>\n\n\n\n<li>\u7570\u7a2e\u6750\u6599\u304a\u3088\u3073\u8907\u5408\u6750\u6599\u3068\u306e\u9069\u5408\u6027<\/li>\n\n\n\n<li>\u30b9\u30de\u30fc\u30c8\u30aa\u30fc\u30c8\u30e1\u30fc\u30b7\u30e7\u30f3\u3068AI\u652f\u63f4\u5236\u5fa1<\/li>\n<\/ul>\n\n\n\n<p>\u5148\u9032\u7684\u306a\u52a0\u5de5\u88c5\u7f6e\u3078\u306e\u6295\u8cc7\u306b\u3088\u308a\u3001\u534a\u5c0e\u4f53\u30e1\u30fc\u30ab\u30fc\u306f\u65b0\u6750\u6599\u306e\u6027\u80fd\u4e0a\u306e\u5229\u70b9\u3092\u6700\u5927\u9650\u306b\u5f15\u304d\u51fa\u3057\u3001\u3088\u308a\u9ad8\u51fa\u529b\u3001\u9ad8\u5468\u6ce2\u3001\u9ad8\u4fe1\u983c\u6027\u306e\u30c7\u30d0\u30a4\u30b9\u306e\u958b\u767a\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u3053\u306e\u3088\u3046\u306a\u6280\u8853\u30c8\u30ec\u30f3\u30c9\u306b\u5bfe\u5fdc\u3059\u308b\u3053\u3068\u3067\u3001\u696d\u754c\u306f\u96fb\u6c17\u81ea\u52d5\u8eca\u30015G\u901a\u4fe1\u3001\u9ad8\u6027\u80fd\u30b3\u30f3\u30d4\u30e5\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u305d\u306e\u4ed6\u306e\u65b0\u8208\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306e\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u3092\u52a0\u901f\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002ZMSH\u306e\u3088\u3046\u306a\u4f01\u696d\u306f\u3001\u30e1\u30fc\u30ab\u30fc\u304cSiC\u304a\u3088\u3073GaN\u30a6\u30a7\u30fc\u30cf\u751f\u7523\u3092\u52b9\u7387\u7684\u306b\u6700\u9069\u5316\u3067\u304d\u308b\u3088\u3046\u3001\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u51e6\u7406\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u63d0\u4f9b\u3057\u3066\u3044\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction With the rapid development of electric vehicles, renewable energy, 5G communication, and high-performance computing, traditional silicon-based semiconductors are increasingly limited in high-power, high-frequency, and high-temperature environments. Silicon carbide (SiC) and gallium nitride (GaN), as wide-bandgap semiconductor materials, offer high breakdown voltage, excellent thermal conductivity, and superior high-frequency performance, making them core materials for [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":1931,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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