![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-1-300x300.png\")
A Ti\/Cu f\u00e9mbevonat\u00fa szil\u00edciumszeletet szabv\u00e1nyos vezet\u0151 \u00e9s folyamat-kompatibilis szubsztr\u00e1tk\u00e9nt tervezt\u00e9k a fejlett kutat\u00e1si \u00e9s ipari alkalmaz\u00e1sokhoz. A szil\u00edcium ostyatechnol\u00f3gia \u00e9s a f\u00e9m v\u00e9konyr\u00e9teg bevonat kombin\u00e1l\u00e1s\u00e1val stabil platformot biztos\u00edt elektromos, k\u00e9miai \u00e9s mikrogy\u00e1rt\u00e1si folyamatokhoz.<\/p>\n
A Ti\/Cu bevonatrendszer szerkezete egyszerre biztos\u00edtja a mechanikai megb\u00edzhat\u00f3s\u00e1got \u00e9s a funkcion\u00e1lis vezet\u0151k\u00e9pess\u00e9get. K\u00fcl\u00f6n\u00f6sen alkalmas olyan alkalmaz\u00e1sokhoz, amelyek megb\u00edzhat\u00f3 f\u00e9mfel\u00fcleteket, egyenletes fel\u00fcleti vezet\u0151k\u00e9pess\u00e9get \u00e9s a szabv\u00e1nyos f\u00e9lvezet\u0151-feldolgoz\u00e1si technik\u00e1kkal val\u00f3 kompatibilit\u00e1st ig\u00e9nyelnek.<\/p>\n
A term\u00e9k t\u00e1mogatja az ostyam\u00e9ret, a hordoz\u00f3 t\u00edpusa \u00e9s a filmvastags\u00e1g testreszab\u00e1s\u00e1t, \u00edgy alkalmas mind a kisl\u00e9pt\u00e9k\u0171 kutat\u00e1si k\u00eds\u00e9rletekhez, mind a k\u00eds\u00e9rleti gy\u00e1rt\u00e1si k\u00f6rnyezetekhez.<\/p>\n
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-4-300x300.png\")
F\u0151 jellemz\u0151k<\/strong><\/span><\/h2>\n![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-3-300x300.png\")
Tipikus strukt\u00fara<\/strong><\/span><\/h2>\nAl\u00e1t\u00e9t + tit\u00e1n tapad\u00f3 r\u00e9teg + r\u00e9z vezet\u0151 r\u00e9teg<\/strong><\/p>\n A Ti r\u00e9teg a hordoz\u00f3 \u00e9s a r\u00e9zfilm k\u00f6z\u00f6tti hat\u00e1rfel\u00fcleti k\u00f6t\u0151r\u00e9tegk\u00e9nt m\u0171k\u00f6dik, biztos\u00edtva a szerkezeti stabilit\u00e1st. A Cu r\u00e9teg biztos\u00edtja a funkcion\u00e1lis vezet\u0151 fel\u00fcletet az elektromos \u00e9s technol\u00f3giai alkalmaz\u00e1sokhoz.<\/p>\n A Ti\/Cu f\u00e9mbevonat\u00fa osty\u00e1t v\u00e1kuum magnetronporlaszt\u00e1sos technol\u00f3gi\u00e1val \u00e1ll\u00edtj\u00e1k el\u0151. El\u0151sz\u00f6r egy tit\u00e1nr\u00e9teget helyeznek el a megtiszt\u00edtott szil\u00edciumfel\u00fcleten a tapad\u00e1s jav\u00edt\u00e1sa \u00e9rdek\u00e9ben. Ezut\u00e1n a tit\u00e1nr\u00e9teg tetej\u00e9re egy r\u00e9zr\u00e9teg ker\u00fcl, hogy egys\u00e9ges vezet\u0151 fel\u00fcletet k\u00e9pezzen.<\/p>\n A vastagabb r\u00e9zr\u00e9tegeket ig\u00e9nyl\u0151 alkalmaz\u00e1sok eset\u00e9ben a porlasztott r\u00e9zr\u00e9teg galvaniz\u00e1l\u00e1shoz magvet\u0151 r\u00e9tegk\u00e9nt haszn\u00e1lhat\u00f3, ami tov\u00e1bbi f\u00e9mn\u00f6veked\u00e9st tesz lehet\u0151v\u00e9 a mikronos vastags\u00e1g el\u00e9r\u00e9se \u00e9rdek\u00e9ben, mik\u00f6zben er\u0151s tapad\u00e1st biztos\u00edt.<\/p>\n Ez a kombin\u00e1lt elj\u00e1r\u00e1s egyszerre biztos\u00edtja a magas filmmin\u0151s\u00e9get \u00e9s a rugalmas funkcion\u00e1lis terjeszked\u00e9st.<\/p>\n A szil\u00edciumra t\u00f6rt\u00e9n\u0151 k\u00f6zvetlen r\u00e9zbevonattal \u00f6sszehasonl\u00edtva a Ti\/Cu szerkezet:<\/p>\n Ez megb\u00edzhat\u00f3bb megold\u00e1st jelent mind a kutat\u00f3laborat\u00f3riumok, mind az ipari K+F k\u00f6rnyezetek sz\u00e1m\u00e1ra.<\/p>\n 1. k\u00e9rd\u00e9s: Mi\u00e9rt haszn\u00e1lnak tit\u00e1niumot r\u00e9zbevonat alatt?<\/strong> 2. k\u00e9rd\u00e9s: Lehet-e n\u00f6velni a r\u00e9z vastags\u00e1g\u00e1t?<\/strong> 3. k\u00e9rd\u00e9s: Az ostya mindk\u00e9t oldala bevonhat\u00f3?<\/strong> 4. k\u00e9rd\u00e9s: Milyen szubsztr\u00e1t lehet\u0151s\u00e9gek \u00e1llnak rendelkez\u00e9sre?<\/strong> A Ti\/Cu f\u00e9mmel bevont szil\u00edciumszelet egy kiv\u00e1l\u00f3 min\u0151s\u00e9g\u0171 funkcion\u00e1lis szelet, amelyet egy tit\u00e1n tapad\u00f3r\u00e9teg \u00e9s egy r\u00e9z vezet\u0151 r\u00e9teg szil\u00edciumszubsztr\u00e1tra t\u00f6rt\u00e9n\u0151, magnetronporlaszt\u00e1sos technol\u00f3gi\u00e1val t\u00f6rt\u00e9n\u0151 lev\u00e1laszt\u00e1s\u00e1val \u00e1ll\u00edtanak el\u0151. A tit\u00e1nr\u00e9teg jav\u00edtja a film tapad\u00e1s\u00e1t \u00e9s stabilit\u00e1s\u00e1t, m\u00edg a r\u00e9zr\u00e9teg kiv\u00e1l\u00f3 elektromos vezet\u0151k\u00e9pess\u00e9get biztos\u00edt. Ezt a term\u00e9ket sz\u00e9les k\u00f6rben haszn\u00e1lj\u00e1k a mikroelektronik\u00e1ban, a MEMS gy\u00e1rt\u00e1sban, a laborat\u00f3riumi kutat\u00e1sban \u00e9s a v\u00e9konyr\u00e9teg-elj\u00e1r\u00e1sok fejleszt\u00e9s\u00e9ben.<\/p>","protected":false},"featured_media":2428,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[729],"product_tag":[1279,1274,1280,1277,1285,1283,1282,1276,1271,1281,1286,1275,1284,1272,1273,1287,1278,1269,1270],"class_list":{"0":"post-2426","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-wafer","7":"product_tag-adhesion-layer-titanium-wafer","8":"product_tag-conductive-silicon-wafer","9":"product_tag-copper-conductive-wafer","10":"product_tag-electroplating-seed-wafer","11":"product_tag-functional-coated-wafer","12":"product_tag-high-conductivity-wafer","13":"product_tag-lab-research-wafer","14":"product_tag-mems-seed-layer-wafer","15":"product_tag-metal-coated-silicon-wafer","16":"product_tag-microelectronics-substrate","17":"product_tag-rd-wafer-substrate","18":"product_tag-semiconductor-test-wafer","19":"product_tag-silicon-wafer-coating","20":"product_tag-sputtered-cu-wafer","21":"product_tag-sputtered-ti-cu-film-wafer","22":"product_tag-surface-engineering-wafer","23":"product_tag-thin-film-coated-wafer","24":"product_tag-ti-cu-wafer","25":"product_tag-titanium-copper-coated-wafer","26":"desktop-align-left","27":"tablet-align-left","28":"mobile-align-left","29":"ast-product-gallery-layout-horizontal-slider","30":"ast-product-tabs-layout-horizontal","32":"first","33":"instock","34":"shipping-taxable","35":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2426","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/comments?post=2426"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2426\/revisions"}],"predecessor-version":[{"id":2432,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2426\/revisions\/2432"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media\/2428"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media?parent=2426"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_brand?post=2426"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_cat?post=2426"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_tag?post=2426"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}\n
\nM\u0171szaki adatok<\/strong><\/span><\/h2>\n
\n\n\n\n
\n \nT\u00e9tel<\/th>\n Le\u00edr\u00e1s<\/th>\n<\/tr>\n<\/thead>\n \n Wafer m\u00e9ret<\/td>\n 2\u2033, 4\u2033, 6\u2033, 8\u2033, egyedi m\u00e9retben<\/td>\n<\/tr>\n \n Al\u00e1t\u00e9t Anyag<\/td>\n Szil\u00edcium, kvarc, BF33 \u00fcveg (opcion\u00e1lis)<\/td>\n<\/tr>\n \n Krist\u00e1ly orient\u00e1ci\u00f3<\/td>\n , stb.<\/td>\n<\/tr>\n \n Ellen\u00e1ll\u00e1s<\/td>\n Alacsony \/ K\u00f6zepes \/ Magas (testreszabhat\u00f3)<\/td>\n<\/tr>\n \n Ti vastags\u00e1g<\/td>\n 10-50 nm (tipikus tartom\u00e1ny)<\/td>\n<\/tr>\n \n Cu vastags\u00e1g<\/td>\n 50 nm - 1 \u00b5m (porlasztva), vastagabb galvaniz\u00e1l\u00e1ssal<\/td>\n<\/tr>\n \n Bevon\u00e1si m\u00f3dszer<\/td>\n Magnetron porlaszt\u00e1s<\/td>\n<\/tr>\n \n Bevonat oldal<\/td>\n Egyoldalas vagy k\u00e9toldalas<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-300x300.png\")
Gy\u00e1rt\u00e1si folyamat<\/strong><\/span><\/h2>\n
\nAlkalmaz\u00e1sok<\/strong><\/span><\/h2>\n
\n
\nEl\u0151ny\u00f6k az egyszer\u0171 f\u00e9mbevonattal szemben<\/strong><\/span><\/h2>\n
\n
\nGYIK<\/strong><\/span><\/h2>\n
A tit\u00e1n adh\u00e9zi\u00f3s r\u00e9tegk\u00e9nt m\u0171k\u00f6dik, amely jav\u00edtja a r\u00e9z \u00e9s a szil\u00edcium szubsztr\u00e1tumok k\u00f6z\u00f6tti k\u00f6t\u00e9st, megakad\u00e1lyozva a lev\u00e1l\u00e1st a feldolgoz\u00e1s \u00e9s a haszn\u00e1lat sor\u00e1n.<\/p>\n
Igen. A porlasztott r\u00e9z felhaszn\u00e1lhat\u00f3 galvaniz\u00e1l\u00f3 r\u00e9tegk\u00e9nt, hogy az alkalmaz\u00e1s k\u00f6vetelm\u00e9nyeit\u0151l f\u00fcgg\u0151en vastagabb f\u00e9mr\u00e9tegeket \u00e9rjen el.<\/p>\n
Igen. K\u00e9r\u00e9sre egy- vagy k\u00e9toldalas bevon\u00e1si lehet\u0151s\u00e9g is rendelkez\u00e9sre \u00e1ll.<\/p>\n
A leggyakoribb a szabv\u00e1nyos szil\u00edcium, de speci\u00e1lis optikai vagy k\u00e9miai alkalmaz\u00e1sokhoz kvarc \u00e9s \u00fcveg szubsztr\u00e1tumok is rendelkez\u00e9sre \u00e1llnak.<\/p>","protected":false},"excerpt":{"rendered":"