{"id":2342,"date":"2026-04-22T05:35:46","date_gmt":"2026-04-22T05:35:46","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2342"},"modified":"2026-04-22T07:27:32","modified_gmt":"2026-04-22T07:27:32","slug":"high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/hu\/product\/high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping\/","title":{"rendered":"Nagy hat\u00e9konys\u00e1g\u00fa Ai80HC (High Beam) ionimplant\u00e1ci\u00f3s berendez\u00e9s a fejlett szil\u00edciumszelet d\u00f3zerez\u00e9shez"},"content":{"rendered":"<p data-start=\"153\" data-end=\"528\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2343 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-300x300.png\" alt=\"Nagy hat\u00e9konys\u00e1g\u00fa Ai80HC (High Beam) ionimplant\u00e1ci\u00f3s berendez\u00e9s a fejlett szil\u00edciumszelet d\u00f3zerez\u00e9shez\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Az Ai80HC (High Beam) ionimplant\u00e1ci\u00f3s berendez\u00e9s egy nagy\u00e1ram\u00fa ionimplant\u00e1l\u00f3 berendez\u00e9s, amelyet kifejezetten 12 h\u00fcvelykes szil\u00edciumszelet f\u00e9lvezet\u0151 gy\u00e1rt\u00f3sorokhoz terveztek. A modern integr\u00e1lt \u00e1ramk\u00f6r\u00f6k gy\u00e1rt\u00e1s\u00e1ban alkalmazott fejlett prec\u00edzi\u00f3s adal\u00e9kol\u00e1si elj\u00e1r\u00e1sokhoz tervezt\u00e9k, stabil sug\u00e1r teljes\u00edtm\u00e9nyt, nagyfok\u00fa folyamatism\u00e9tl\u00e9st \u00e9s kiv\u00e1l\u00f3 d\u00f3zisszab\u00e1lyoz\u00e1si pontoss\u00e1got biztos\u00edt.<\/p>\n<p data-start=\"530\" data-end=\"891\">A rendszer 0,5 keV \u00e9s 80 keV k\u00f6z\u00f6tti sz\u00e9les energiatartom\u00e1nyban m\u0171k\u00f6dik, ami rugalmas implant\u00e1ci\u00f3s felt\u00e9teleket tesz lehet\u0151v\u00e9 a sek\u00e9ly \u00e9s k\u00f6zepes m\u00e9lys\u00e9g\u0171 csom\u00f3pontok kialak\u00edt\u00e1s\u00e1hoz. A rendszer t\u00f6bbf\u00e9le implant\u00e1ci\u00f3s fajt t\u00e1mogat, bele\u00e9rtve a \u00b9\u00b9B\u207a, \u2074\u2079BF\u2082\u207a, \u00b3\u00b9P\u207a, \u2077\u2075As\u207a, \u00b9\u2074N\u207a \u00e9s \u00b9H\u207a implant\u00e1ci\u00f3s fajokat, \u00edgy a CMOS \u00e9s a fejlett logikai eszk\u00f6z\u00f6k gy\u00e1rt\u00e1si folyamatainak sz\u00e9les sk\u00e1l\u00e1j\u00e1hoz alkalmas.<\/p>\n<p data-start=\"893\" data-end=\"1243\">A 0\u00b0 \u00e9s 45\u00b0 k\u00f6z\u00f6tti be\u00fcltet\u00e9si sz\u00f6gtartom\u00e1ny \u00e9s a nagy, \u2264 0,1\u00b0-os sz\u00f6gpontoss\u00e1g r\u00e9v\u00e9n a rendszer biztos\u00edtja az adal\u00e9kanyag-eloszl\u00e1s \u00e9s a csom\u00f3pontprofil kialak\u00edt\u00e1s\u00e1nak pontos ellen\u0151rz\u00e9s\u00e9t. A \u2264 0,3\u00b0-os sug\u00e1rp\u00e1rhuzamoss\u00e1ggal \u00e9s a \u2264 1% (1\u03c3) egyenletess\u00e9ggel kombin\u00e1lva az Ai80HC (High Beam) k\u00f6vetkezetes waferenk\u00e9nti \u00e9s waferen bel\u00fcli folyamatstabilit\u00e1st biztos\u00edt.<\/p>\n<p data-start=\"1245\" data-end=\"1496\">A nagy hat\u00e9konys\u00e1g\u00fa termel\u00e9si k\u00f6rnyezetekhez tervezett rendszer \u2265 200 ostya\/\u00f3ra (WPH) \u00e1tmen\u0151 teljes\u00edtm\u00e9nyt \u00e9r el, mik\u00f6zben szigor\u00fa folyamatstabilit\u00e1st biztos\u00edt, \u00edgy alkalmas az LSI-kompatibilis fejlett f\u00e9lvezet\u0151gy\u00e1rt\u00f3 sorok sz\u00e1m\u00e1ra.<\/p>\n<h2 data-section-id=\"12rj9ab\" data-start=\"1101\" data-end=\"1126\">Rendszerarchitekt\u00fara<\/h2>\n<p data-start=\"1128\" data-end=\"1199\">Az Ai80HC kiforrott \u00e9s megb\u00edzhat\u00f3 sug\u00e1rvonal-konstrukci\u00f3t alkalmaz, amely a k\u00f6vetkez\u0151kb\u0151l \u00e1ll:<\/p>\n<ul data-start=\"1201\" data-end=\"1436\">\n<li data-section-id=\"1kfcth9\" data-start=\"1201\" data-end=\"1215\">Ionforr\u00e1s<\/li>\n<li data-section-id=\"1r1hm7c\" data-start=\"1216\" data-end=\"1237\">Kivon\u00e1si rendszer<\/li>\n<li data-section-id=\"1twz66q\" data-start=\"1238\" data-end=\"1255\">T\u00f6meg analiz\u00e1tor<\/li>\n<li data-section-id=\"ywuuxz\" data-start=\"1256\" data-end=\"1280\">M\u00e1gneses lencse rendszer<\/li>\n<li data-section-id=\"1s57tik\" data-start=\"1281\" data-end=\"1302\">Gyors\u00edt\u00f3cs\u0151<\/li>\n<li data-section-id=\"pg1cgy\" data-start=\"1303\" data-end=\"1336\">Elektrosztatikus p\u00e1szt\u00e1z\u00f3 rendszer<\/li>\n<li data-section-id=\"1iwk7km\" data-start=\"1337\" data-end=\"1367\">P\u00e1rhuzamos sug\u00e1r alak\u00edt\u00f3 lencse<\/li>\n<li data-section-id=\"1cur4hx\" data-start=\"1368\" data-end=\"1401\">Folyamatkamra (v\u00e9g\u00e1llom\u00e1s)<\/li>\n<li data-section-id=\"qtlnqu\" data-start=\"1402\" data-end=\"1436\">Wafer kazetta \/ bet\u00f6lt\u0151 rendszer<\/li>\n<\/ul>\n<p data-start=\"1438\" data-end=\"1458\">Fel van szerelve:<\/p>\n<ul data-start=\"1459\" data-end=\"1572\">\n<li data-section-id=\"1jzaueb\" data-start=\"1459\" data-end=\"1494\">Elektrosztatikus wafer chuck sz\u00ednpad<\/li>\n<li data-section-id=\"1s8wavu\" data-start=\"1495\" data-end=\"1530\">Hossz\u00fa \u00e9lettartam\u00fa ionforr\u00e1s technol\u00f3gia<\/li>\n<li data-section-id=\"6mih95\" data-start=\"1531\" data-end=\"1572\">Teljesen automatiz\u00e1lt ostyakezel\u0151 rendszer<\/li>\n<\/ul>\n<p data-start=\"1574\" data-end=\"1686\">Ez az architekt\u00fara nagyfok\u00fa sug\u00e1rstabilit\u00e1st, cs\u00f6kkentett karbantart\u00e1si \u00e1ll\u00e1sid\u0151t \u00e9s jobb folyamatism\u00e9tl\u00e9st biztos\u00edt.<\/p>\n<p data-start=\"1574\" data-end=\"1686\"><img decoding=\"async\" class=\"aligncenter wp-image-2371 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png\" alt=\"\" width=\"1024\" height=\"388\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-300x114.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-768x291.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-600x227.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs.png 1216w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"106914\" data-start=\"1693\" data-end=\"1727\">F\u0151bb m\u0171szaki adatok<\/h2>\n<table>\n<thead>\n<tr>\n<th>T\u00e9tel<\/th>\n<th>Specifik\u00e1ci\u00f3<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Wafer m\u00e9ret<\/td>\n<td>12 h\u00fcvelyk<\/td>\n<\/tr>\n<tr>\n<td>Energia tartom\u00e1ny<\/td>\n<td>0,5 - 80 keV<\/td>\n<\/tr>\n<tr>\n<td>Be\u00fcltetett elemek<\/td>\n<td>\u00b9\u00b9\u00b9B\u207a, \u2074\u2079BF\u2082\u207a, \u00b3\u00b9P\u207a, \u2077\u2075As\u207a, \u00b9\u2074N\u207a, \u00b9H\u207a.<\/td>\n<\/tr>\n<tr>\n<td>Implant\u00e1tum sz\u00f6g<\/td>\n<td>0\u00b0 - 45\u00b0<\/td>\n<\/tr>\n<tr>\n<td>Sz\u00f6gpontoss\u00e1g<\/td>\n<td>\u2264 0.1\u00b0<\/td>\n<\/tr>\n<tr>\n<td>D\u00f3zistartom\u00e1ny<\/td>\n<td>5E11 - 1E17 ion\/cm\u00b2<\/td>\n<\/tr>\n<tr>\n<td>Gerendastabilit\u00e1s<\/td>\n<td>\u2264 10% \/ \u00f3ra (60 percen bel\u00fcl; sug\u00e1rmegszak\u00edt\u00e1s \u00e9s \u00edvk\u00e9pz\u0151d\u00e9s \u2264 1 alkalom)<\/td>\n<\/tr>\n<tr>\n<td>Gerendap\u00e1rhuzamoss\u00e1g<\/td>\n<td>\u2264 0.3\u00b0<\/td>\n<\/tr>\n<tr>\n<td>\u00c1tbocs\u00e1t\u00e1si teljes\u00edtm\u00e9ny (WPH)<\/td>\n<td>\u2265 200 ostya\/\u00f3ra<\/td>\n<\/tr>\n<tr>\n<td>Egyenletess\u00e9g (1\u03c3)<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>Ism\u00e9telhet\u0151s\u00e9g (1\u03c3)<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>Folyamat kompatibilit\u00e1s<\/td>\n<td>Kompatibilis az LSI elj\u00e1r\u00e1ssal<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 data-section-id=\"yb78ly\" data-start=\"2475\" data-end=\"2506\">F\u0151bb jellemz\u0151k \u00e9s el\u0151ny\u00f6k<\/h2>\n<h3 data-section-id=\"13hha2k\" data-start=\"2508\" data-end=\"2541\">1. Intelligens vez\u00e9rl\u0151rendszer<\/h3>\n<p data-start=\"2542\" data-end=\"2706\">Vizualiz\u00e1lt \u00e9s intelligens szoftverplatformmal felszerelt, amely lehet\u0151v\u00e9 teszi az egyszer\u0171s\u00edtett m\u0171k\u00f6d\u00e9st, a gyors hibadiagnosztik\u00e1t \u00e9s a magas rendszerstabilit\u00e1st a termel\u00e9s sor\u00e1n.<\/p>\n<h3 data-section-id=\"1cy4f9q\" data-start=\"2713\" data-end=\"2740\">2. Hossz\u00fa \u00e9lettartam\u00fa ionforr\u00e1s<\/h3>\n<p data-start=\"2741\" data-end=\"2863\">Fejlett ionforr\u00e1s-kialak\u00edt\u00e1s\u00fa, \u2265500 \u00f3ra \u00e9lettartam\u00fa, jelent\u0151sen cs\u00f6kkentve az \u00e1ll\u00e1sid\u0151t \u00e9s a karbantart\u00e1si k\u00f6lts\u00e9geket.<\/p>\n<h3 data-section-id=\"4euk5j\" data-start=\"2870\" data-end=\"2903\">3. Sug\u00e1rdiagnosztikai k\u00e9pess\u00e9g<\/h3>\n<p data-start=\"2904\" data-end=\"2988\">Integr\u00e1lt 2D sug\u00e1rprofil m\u00e9r\u0151rendszer, amely k\u00e9pes a pontos megfigyel\u00e9sre:<\/p>\n<ul data-start=\"2989\" data-end=\"3019\">\n<li data-section-id=\"1ct5xfp\" data-start=\"2989\" data-end=\"3003\">Sug\u00e1rsz\u00e9less\u00e9g<\/li>\n<li data-section-id=\"1vm2uvw\" data-start=\"3004\" data-end=\"3019\">Gerendamagass\u00e1g<\/li>\n<\/ul>\n<p data-start=\"3021\" data-end=\"3092\">Ez jav\u00edtja a be\u00fcltet\u00e9s pontoss\u00e1g\u00e1t \u00e9s n\u00f6veli a folyamat megism\u00e9telhet\u0151s\u00e9g\u00e9t.<\/p>\n<h3 data-section-id=\"qq9ajq\" data-start=\"3099\" data-end=\"3132\">4. Nagy termel\u00e9si hat\u00e9konys\u00e1g<\/h3>\n<p data-start=\"3133\" data-end=\"3310\">Az Ai80HC a hagyom\u00e1nyos rendszerekhez k\u00e9pest t\u00f6bb mint 1,5\u00d7 nagyobb \u00e1tviteli teljes\u00edtm\u00e9nyt ny\u00fajt, \u00edgy alkalmas nagy volumen\u0171 f\u00e9lvezet\u0151gy\u00e1rt\u00e1si k\u00f6rnyezetekbe.<\/p>\n<h3 data-section-id=\"1h2ge5m\" data-start=\"3317\" data-end=\"3357\">5. Fejlett mintaimplant\u00e1tum funkci\u00f3<\/h3>\n<p data-start=\"3358\" data-end=\"3429\">T\u00e1mogatja a mint\u00e1zott ionimplant\u00e1ci\u00f3t, lehet\u0151v\u00e9 t\u00e9ve a d\u00f3zis eloszl\u00e1s\u00e1t:<\/p>\n<ul data-start=\"3430\" data-end=\"3488\">\n<li data-section-id=\"fqh2r6\" data-start=\"3430\" data-end=\"3450\">K\u00f6r alak\u00fa r\u00e9gi\u00f3k<\/li>\n<li data-section-id=\"1aoby05\" data-start=\"3451\" data-end=\"3488\">Kvadr\u00e1ns alap\u00fa ostyaszegment\u00e1l\u00e1s<\/li>\n<\/ul>\n<p data-start=\"3490\" data-end=\"3502\">Ez lehet\u0151v\u00e9 teszi:<\/p>\n<ul data-start=\"3503\" data-end=\"3617\">\n<li data-section-id=\"chxy3y\" data-start=\"3503\" data-end=\"3552\">T\u00f6bbf\u00e9le folyamatfelt\u00e9tel egyetlen osty\u00e1n<\/li>\n<li data-section-id=\"z1xkzj\" data-start=\"3553\" data-end=\"3589\">Cs\u00f6kkentett folyamatfejleszt\u00e9si k\u00f6lts\u00e9gek<\/li>\n<li data-section-id=\"15uh0gh\" data-start=\"3590\" data-end=\"3617\">Jav\u00edtott K+F hat\u00e9konys\u00e1g<\/li>\n<\/ul>\n<p data-start=\"3619\" data-end=\"3780\">P\u00e9lda: Ez jelent\u0151sen felgyors\u00edtja a folyamat optimaliz\u00e1l\u00e1s\u00e1t.<\/p>\n<h2 data-section-id=\"18zz1hm\" data-start=\"3787\" data-end=\"3810\">Alkalmaz\u00e1s<\/h2>\n<ul data-start=\"3812\" data-end=\"4005\">\n<li data-section-id=\"16inq9u\" data-start=\"3812\" data-end=\"3839\">CMOS eszk\u00f6z gy\u00e1rt\u00e1sa<\/li>\n<li data-section-id=\"xjegvm\" data-start=\"3840\" data-end=\"3875\">Fejlett logikai IC gy\u00e1rt\u00e1s<\/li>\n<li data-section-id=\"1xlm3tz\" data-start=\"3876\" data-end=\"3906\">Teljes\u00edtm\u00e9ny f\u00e9lvezet\u0151k adal\u00e9kol\u00e1sa<\/li>\n<li data-section-id=\"1ursyu4\" data-start=\"3907\" data-end=\"3959\">Kutat\u00e1si \u00e9s fejleszt\u00e9si f\u00e9lvezet\u0151 k\u00eds\u00e9rleti vonalak<\/li>\n<li data-section-id=\"1k6v1m6\" data-start=\"3960\" data-end=\"4005\">Szil\u00edcium alap\u00fa integr\u00e1lt \u00e1ramk\u00f6r\u00f6k gy\u00e1rt\u00e1sa<\/li>\n<\/ul>\n<h2 data-section-id=\"1idaiwr\" data-start=\"58\" data-end=\"95\">Gyakran ism\u00e9telt k\u00e9rd\u00e9sek (GYIK)<\/h2>\n<h3 data-section-id=\"squ7m7\" data-start=\"97\" data-end=\"166\">1. Milyen ostyam\u00e9retre tervezt\u00e9k az Ai80HC (High Beam) rendszert?<\/h3>\n<p data-start=\"167\" data-end=\"381\">Az Ai80HC (High Beam) ionimplant\u00e1ci\u00f3s rendszert 12 h\u00fcvelykes szil\u00edciumszelet gy\u00e1rt\u00f3sorokhoz tervezt\u00e9k, \u00edgy alkalmas a fejlett f\u00e9lvezet\u0151gy\u00e1rt\u00e1sra \u00e9s a nagy volumen\u0171 integr\u00e1lt \u00e1ramk\u00f6r\u00f6k gy\u00e1rt\u00e1s\u00e1ra.<\/p>\n<h3 data-section-id=\"foelcb\" data-start=\"388\" data-end=\"458\">2. Mekkora a rendszer energiatartom\u00e1nya \u00e9s feldolgozhat\u00f3s\u00e1ga?<\/h3>\n<p data-start=\"459\" data-end=\"716\">A rendszer 0,5 keV \u00e9s 80 keV k\u00f6z\u00f6tti energiatartom\u00e1nyban m\u0171k\u00f6dik, t\u00e1mogatva a sek\u00e9ly \u00e9s k\u00f6zepes m\u00e9lys\u00e9g\u0171 implant\u00e1ci\u00f3t. A rendszer kompatibilis az LSI-folyamatokkal, bele\u00e9rtve a sek\u00e9ly \u00e1tmenet kialak\u00edt\u00e1s\u00e1t \u00e9s a fejlett eszk\u00f6zszerkezetek source\/drain kialak\u00edt\u00e1s\u00e1t.<\/p>\n<h3 data-section-id=\"jluc3f\" data-start=\"723\" data-end=\"792\">3. Milyen pontoss\u00e1got \u00e9s stabilit\u00e1st biztos\u00edt a rendszer?<\/h3>\n<p data-start=\"793\" data-end=\"850\">Az Ai80HC (High Beam) biztos\u00edtja a magas folyamat\u00e1lland\u00f3s\u00e1got a k\u00f6vetkez\u0151kkel:<\/p>\n<ul data-start=\"851\" data-end=\"965\">\n<li data-section-id=\"8ldlzj\" data-start=\"851\" data-end=\"878\">Sz\u00f6gpontoss\u00e1g \u2264 0,1\u00b0<\/li>\n<li data-section-id=\"nyztaj\" data-start=\"879\" data-end=\"905\">Egyenletess\u00e9g (1\u03c3) \u2264 1%<\/li>\n<li data-section-id=\"ai4v3y\" data-start=\"906\" data-end=\"935\">Ism\u00e9telhet\u0151s\u00e9g (1\u03c3) \u2264 1%<\/li>\n<li data-section-id=\"1hjdqzq\" data-start=\"936\" data-end=\"965\">A gerenda p\u00e1rhuzamoss\u00e1ga \u2264 0,3\u00b0<\/li>\n<\/ul>\n<p data-start=\"967\" data-end=\"1069\">Ezek a specifik\u00e1ci\u00f3k biztos\u00edtj\u00e1k a stabil wafer-to-wafer teljes\u00edtm\u00e9nyt \u00e9s a nagy hozam\u00fa f\u00e9lvezet\u0151gy\u00e1rt\u00e1st.<\/p>","protected":false},"excerpt":{"rendered":"<p>Az Ai80HC (High Beam) sorozat\u00fa ionimplant\u00e1ci\u00f3s rendszer egy nagy\u00e1ram\u00fa ionimplant\u00e1l\u00f3 berendez\u00e9s, amelyet kifejezetten 12 h\u00fcvelykes szil\u00edciumszelet f\u00e9lvezet\u0151 gy\u00e1rt\u00f3sorokhoz terveztek. A modern integr\u00e1lt \u00e1ramk\u00f6r\u00f6k gy\u00e1rt\u00e1s\u00e1ban alkalmazott fejlett prec\u00edzi\u00f3s adal\u00e9kol\u00e1si elj\u00e1r\u00e1sokhoz tervezt\u00e9k, stabil sug\u00e1r teljes\u00edtm\u00e9nyt, nagyfok\u00fa folyamatism\u00e9tl\u00e9st \u00e9s kiv\u00e1l\u00f3 d\u00f3zisszab\u00e1lyoz\u00e1si pontoss\u00e1got biztos\u00edt.<\/p>","protected":false},"featured_media":2343,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1177],"product_tag":[1160,1183,1179,1182,1178,1181,1180,1185,1184,890],"class_list":{"0":"post-2342","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-ion-implantation-equipment","7":"product_tag-12-inch-wafer-equipment","8":"product_tag-cmos-process-equipment","9":"product_tag-high-current-ion-implanter","10":"product_tag-ion-implantation-machine","11":"product_tag-ion-implantation-system","12":"product_tag-lsi-manufacturing-equipment","13":"product_tag-semiconductor-doping-equipment","14":"product_tag-semiconductor-fabrication-equipment","15":"product_tag-shallow-junction-implantation","16":"product_tag-silicon-wafer-processing","17":"desktop-align-left","18":"tablet-align-left","19":"mobile-align-left","20":"ast-product-gallery-layout-horizontal-slider","21":"ast-product-gallery-with-no-image","22":"ast-product-tabs-layout-horizontal","24":"first","25":"instock","26":"shipping-taxable","27":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2342","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/comments?post=2342"}],"version-history":[{"count":4,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2342\/revisions"}],"predecessor-version":[{"id":2376,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2342\/revisions\/2376"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media\/2343"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media?parent=2342"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_brand?post=2342"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_cat?post=2342"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_tag?post=2342"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}