{"id":2306,"date":"2026-04-21T01:28:17","date_gmt":"2026-04-21T01:28:17","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2306"},"modified":"2026-04-21T01:28:20","modified_gmt":"2026-04-21T01:28:20","slug":"sic-coating-machine-for-precision-adhesive-deposition-in-semiconductor-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/hu\/product\/sic-coating-machine-for-precision-adhesive-deposition-in-semiconductor-applications\/","title":{"rendered":"SiC bevon\u00f3g\u00e9p prec\u00edzi\u00f3s ragaszt\u00f3anyag-lev\u00e1laszt\u00e1shoz f\u00e9lvezet\u0151 alkalmaz\u00e1sokhoz"},"content":{"rendered":"

A SiC bevon\u00f3g\u00e9p egy nagy pontoss\u00e1g\u00fa, teljesen automatiz\u00e1lt lerak\u00f3rendszer, amelyet a waferek, SiC magok, grafitpap\u00edr \u00e9s grafitlemezek egyenletes ragaszt\u00e1sos bevon\u00e1s\u00e1ra terveztek. A f\u00e9lvezet\u0151k \u00e9s fejlett anyagok feldolgoz\u00e1s\u00e1nak szigor\u00fa k\u00f6vetelm\u00e9nyeihez tervezett rendszer ultrahangos sz\u00f3r\u00e1si technol\u00f3gi\u00e1t, l\u00e9zeres igaz\u00edt\u00e1st \u00e9s intelligens folyad\u00e9kvez\u00e9rl\u00e9st integr\u00e1l a kiv\u00e9teles bevonatkonzisztencia \u00e9s folyamatstabilit\u00e1s el\u00e9r\u00e9se \u00e9rdek\u00e9ben.<\/p>\n

A fejlett gy\u00e1rt\u00e1si k\u00f6rnyezetekben - k\u00fcl\u00f6n\u00f6sen a SiC-krist\u00e1lyok n\u00f6veszt\u00e9se \u00e9s az osty\u00e1k k\u00f6t\u00e9se sor\u00e1n - a bevonat egyenletess\u00e9ge k\u00f6zvetlen\u00fcl befoly\u00e1solja a term\u00e9khozamot, a k\u00f6t\u00e9s integrit\u00e1s\u00e1t \u00e9s a folyamatok megb\u00edzhat\u00f3s\u00e1g\u00e1t. Ez a rendszer ezekre a kih\u00edv\u00e1sokra ad v\u00e1laszt az\u00e1ltal, hogy ellen\u0151rz\u00f6tt filmvastags\u00e1got, minim\u00e1lis anyagpazarl\u00e1st \u00e9s sorozatonk\u00e9nt megism\u00e9telhet\u0151 teljes\u00edtm\u00e9nyt biztos\u00edt.<\/p>\n

Modul\u00e1ris fel\u00e9p\u00edt\u00e9s\u00e9vel \u00e9s programozhat\u00f3 vez\u00e9rl\u0151rendszer\u00e9vel a SiC bevon\u00f3g\u00e9p alkalmas k\u00eds\u00e9rleti l\u00e9pt\u00e9k\u0171 fejleszt\u00e9sre, a folyamat valid\u00e1l\u00e1s\u00e1ra \u00e9s k\u00f6zepes-nagy t\u00e9teles gy\u00e1rt\u00e1sra, \u00edgy sokoldal\u00fa megold\u00e1st jelent mind a K+F, mind az ipari alkalmaz\u00e1sok sz\u00e1m\u00e1ra.<\/p>\n

\"SiC<\/p>\n

\n

Alapvet\u0151 m\u0171szaki el\u0151ny\u00f6k<\/span><\/h2>\n

Ultra-egyenletes bevonati teljes\u00edtm\u00e9ny<\/span><\/h3>\n

A rendszer a 20 nanom\u00e9tert\u0151l a t\u00f6bb t\u00edz mikrom\u00e9teres r\u00e9tegvastags\u00e1gokig terjed\u0151 bevonatvastags\u00e1gokat t\u00e1mogatja, a hordoz\u00f3 fel\u00fclet\u00e9n 95% feletti egyenletess\u00e9ggel. Ez a precizit\u00e1si szint kik\u00fcsz\u00f6b\u00f6li az olyan gyakori probl\u00e9m\u00e1kat, mint a peremfel\u00e9p\u00fcl\u00e9s, az egyenetlen eloszl\u00e1s \u00e9s a helyi v\u00e9konyod\u00e1s, amelyek kritikus probl\u00e9m\u00e1t jelentenek az ostyak\u00f6t\u00e9s \u00e9s a magas h\u0151m\u00e9rs\u00e9klet\u0171 alkalmaz\u00e1sok eset\u00e9ben.<\/p>\n

A r\u00e9szecske alap\u00fa ragaszt\u00f3k korszer\u0171 kezel\u00e9se<\/span><\/h3>\n

A hagyom\u00e1nyos bevon\u00f3rendszerekkel ellent\u00e9tben ezt a g\u00e9pet kifejezetten szil\u00e1rd r\u00e9szecsk\u00e9ket vagy funkcion\u00e1lis t\u00f6lt\u0151anyagokat tartalmaz\u00f3 ragaszt\u00f3k feldolgoz\u00e1s\u00e1ra tervezt\u00e9k. Az integr\u00e1lt, \u00e1lland\u00f3 \u00e1raml\u00e1s\u00fa folyad\u00e9k adagol\u00f3 rendszer a val\u00f3s idej\u0171 diszperzi\u00f3s technol\u00f3gi\u00e1val kombin\u00e1lva biztos\u00edtja, hogy a r\u00e9szecsk\u00e9k egyenletesen eloszlanak a bevon\u00e1si folyamat sor\u00e1n, megel\u0151zve az \u00fcled\u00e9kk\u00e9pz\u0151d\u00e9st \u00e9s a f\u00fav\u00f3ka elt\u00f6m\u0151d\u00e9s\u00e9t.<\/p>\n

Prec\u00edzi\u00f3s mozg\u00e1s- \u00e9s folyamatszab\u00e1lyoz\u00e1s<\/span><\/h3>\n

A rendszer teljesen programozhat\u00f3 XYZ koordin\u00e1lt mozg\u00e1splatformmal rendelkezik, amely lehet\u0151v\u00e9 teszi a bevonat \u00fatvonal\u00e1nak, sebess\u00e9g\u00e9nek \u00e9s a lerak\u00f3d\u00e1si mint\u00e1knak a pontos vez\u00e9rl\u00e9s\u00e9t. A t\u00f6bbf\u00fav\u00f3k\u00e1s konfigur\u00e1ci\u00f3k lehet\u0151v\u00e9 teszik a p\u00e1rhuzamos feldolgoz\u00e1st, jelent\u0151sen jav\u00edtva az \u00e1tereszt\u0151k\u00e9pess\u00e9get az egyenletes bevonatmin\u0151s\u00e9g fenntart\u00e1sa mellett.<\/p>\n

Optimaliz\u00e1lva a downstream h\u0151kezel\u00e9si folyamatokhoz<\/span><\/h3>\n

Az ezzel a rendszerrel el\u0151\u00e1ll\u00edtott bevonat stabil \u00e9s egys\u00e9ges fel\u00fcletet biztos\u00edt a k\u00e9s\u0151bbi folyamatokhoz, mint p\u00e9ld\u00e1ul:<\/p>\n

    \n
  • V\u00e1kuumos g\u00e1zmentes\u00edt\u00e9s<\/li>\n
  • Magas h\u0151m\u00e9rs\u00e9klet\u0171 szinterez\u00e9s<\/li>\n
  • Permetez\u00e9ses pirol\u00edzis v\u00e9konyr\u00e9teg-k\u00e9pz\u00e9s<\/li>\n<\/ul>\n

    Az\u00e1ltal, hogy a rendszer m\u00e1r az el\u0151kezel\u00e9si szakaszban biztos\u00edtja a bevonat integrit\u00e1s\u00e1t, hozz\u00e1j\u00e1rul a k\u00f6t\u00e9s szil\u00e1rds\u00e1g\u00e1nak, h\u0151stabilit\u00e1s\u00e1nak \u00e9s az eszk\u00f6z \u00e1ltal\u00e1nos teljes\u00edtm\u00e9ny\u00e9nek jav\u00edt\u00e1s\u00e1hoz.<\/p>\n

    Intelligens karbantart\u00e1s \u00e9s megb\u00edzhat\u00f3s\u00e1g<\/span><\/h3>\n

    A hossz\u00fa t\u00e1v\u00fa ipari m\u0171k\u00f6d\u00e9s t\u00e1mogat\u00e1sa \u00e9rdek\u00e9ben a rendszer a k\u00f6vetkez\u0151kkel van felszerelve:<\/p>\n

      \n
    • Automatikusan tisztul\u00f3 ultrahangos f\u00fav\u00f3k\u00e1k<\/li>\n
    • Foly\u00e9kony hullad\u00e9k \u00fajrahasznos\u00edt\u00f3 rendszer<\/li>\n
    • Integr\u00e1lt kipufog\u00f3 \u00e9s sz\u0171r\u0151 kialak\u00edt\u00e1s<\/li>\n<\/ul>\n

      Ezek a funkci\u00f3k cs\u00f6kkentik a karbantart\u00e1si gyakoris\u00e1got, minimaliz\u00e1lj\u00e1k az \u00e1ll\u00e1sid\u0151t, \u00e9s tiszta, stabil m\u0171k\u00f6d\u00e9si k\u00f6rnyezetet biztos\u00edtanak.<\/p>\n

      \n

      M\u0171szaki specifik\u00e1ci\u00f3k<\/span><\/h2>\n
      \n
      \n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
      Param\u00e9ter<\/th>\nSpecifik\u00e1ci\u00f3<\/th>\n<\/tr>\n<\/thead>\n
      A g\u00e9p m\u00e9retei<\/td>\n920 \u00d7 1060 \u00d7 1620 mm<\/td>\n<\/tr>\n
      Hat\u00e9kony bevonatfel\u00fclet<\/td>\n500 \u00d7 500 mm (testre szabhat\u00f3)<\/td>\n<\/tr>\n
      T\u00e1pegys\u00e9g<\/td>\n120V \/ 220V \u00b110%, 50-60Hz<\/td>\n<\/tr>\n
      F\u00fav\u00f3ka t\u00edpusa<\/td>\nUltrahangos, t\u00f6bbf\u00e9le konfigur\u00e1ci\u00f3ban kaphat\u00f3<\/td>\n<\/tr>\n
      Bevonatvastags\u00e1g<\/td>\n20 nm - t\u00f6bb t\u00edz \u00b5m<\/td>\n<\/tr>\n
      Folyad\u00e9k \u00e1raml\u00e1si sebess\u00e9g<\/td>\n0,006 - 3 ml\/s<\/td>\n<\/tr>\n
      Helymeghat\u00e1roz\u00f3 rendszer<\/td>\nL\u00e9zeres igaz\u00edt\u00e1s<\/td>\n<\/tr>\n
      Mozg\u00e1svez\u00e9rl\u00e9s<\/td>\nXYZ programozhat\u00f3 tengelyek<\/td>\n<\/tr>\n
      Foly\u00e9kony sz\u00e1ll\u00edt\u00e1s<\/td>\n\u00c1lland\u00f3 \u00e1raml\u00e1s online diszperzi\u00f3val<\/td>\n<\/tr>\n
      Hullad\u00e9kgazd\u00e1lkod\u00e1s<\/td>\nAutomatikus tiszt\u00edt\u00e1s, \u00fajrahasznos\u00edt\u00e1s, kipufog\u00f3rendszer<\/td>\n<\/tr>\n
      F\u0171t\u00e9si opci\u00f3<\/td>\nV\u00e1kuum-adszorpci\u00f3s f\u0171t\u0151lemez<\/td>\n<\/tr>\n
      Magas h\u0151m\u00e9rs\u00e9klet\u0171 opci\u00f3<\/td>\nAk\u00e1r 750\u00b0C-os f\u0151z\u0151lap<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
      \n

      Tipikus alkalmaz\u00e1sok<\/span><\/h2>\n

      \"SiCF\u00e9lvezet\u0151 \u00e9s SiC krist\u00e1lyn\u00f6veszt\u00e9s<\/span><\/h3>\n
        \n
      • Wafer k\u00f6t\u00e9s el\u0151k\u00e9sz\u00edt\u00e9se<\/li>\n
      • SiC magvak tapad\u00e1sa<\/li>\n
      • Szinterez\u00e9s el\u0151tti hat\u00e1rfel\u00fcleti r\u00e9teg bevonat<\/li>\n<\/ul>\n

        Funkcion\u00e1lis \u00e9s v\u00e9d\u0151bevonatok<\/span><\/h3>\n
          \n
        • Szil\u00edcium-karbid (SiC) bevonatok<\/li>\n
        • Fluxus \u00e9s iszapos bevonatok<\/li>\n
        • Fotoreziszt \u00e9s v\u00e9konyr\u00e9teg-lev\u00e1laszt\u00e1s<\/li>\n<\/ul>\n

          Energiat\u00e1rol\u00e1s \u00e9s rugalmas anyagok<\/span><\/h3>\n
            \n
          • Akkumul\u00e1tor szepar\u00e1tor bevonat<\/li>\n
          • Rugalmas szubsztr\u00e1tfeldolgoz\u00e1s v\u00e1kuummal seg\u00edtett f\u0171t\u00e9ssel<\/li>\n<\/ul>\n

            \u00dcveg \u00e9s fotovoltaikus anyagok<\/span><\/h3>\n
              \n
            • Egys\u00e9ges bevonat a grafitelemek k\u00f6z\u00f6tt<\/li>\n
            • V\u00e9konyr\u00e9teg-lev\u00e1laszt\u00e1s napelemes \u00e9s optikai alkalmaz\u00e1sokhoz<\/li>\n<\/ul>\n

               <\/p>\n

              \n

              Mi\u00e9rt v\u00e1lassza a ZMSH-t<\/span><\/h2>\n

              \"SiCA ZMSH prec\u00edzi\u00f3s f\u00e9lvezet\u0151 berendez\u00e9sek \u00e9s fejlett anyagfeldolgoz\u00e1si megold\u00e1sok fejleszt\u00e9s\u00e9re specializ\u00e1l\u00f3dott, nagy hangs\u00falyt fektetve a f\u00e9lvezet\u0151 \u00e9s a magas h\u0151m\u00e9rs\u00e9klet\u0171 alkalmaz\u00e1sokra. Minden rendszert \u00fagy terveztek, hogy nagyfok\u00fa ism\u00e9telhet\u0151s\u00e9get, folyamatstabilit\u00e1st \u00e9s hossz\u00fa t\u00e1v\u00fa \u00fczembiztons\u00e1got biztos\u00edtson.<\/p>\n

              A legfontosabb el\u0151ny\u00f6k a k\u00f6vetkez\u0151k:<\/p>\n

                \n
              • Bizony\u00edtott tapasztalat az ipari bevonatok alkalmaz\u00e1s\u00e1ban<\/li>\n
              • Testreszabhat\u00f3 rendszerkonfigur\u00e1ci\u00f3k<\/li>\n
              • Dedik\u00e1lt m\u0171szaki t\u00e1mogat\u00e1s a folyamatoptimaliz\u00e1l\u00e1shoz<\/li>\n<\/ul>\n
                \n

                GYIK - Gyakran Ism\u00e9telt K\u00e9rd\u00e9sek<\/span><\/h2>\n

                Tudja a rendszer kezelni a szil\u00e1rd r\u00e9szecsk\u00e9ket tartalmaz\u00f3 ragaszt\u00f3kat?<\/span><\/h3>\n

                Igen. A g\u00e9p \u00e1lland\u00f3 \u00e1raml\u00e1s\u00fa adagol\u00f3rendszert haszn\u00e1l integr\u00e1lt diszperg\u00e1l\u00e1ssal, amely egyenletes bevonatot biztos\u00edt elt\u00f6m\u0151d\u00e9s vagy r\u00e9szecsk\u00e9k le\u00fcleped\u00e9se n\u00e9lk\u00fcl.<\/p>\n

                Mennyire pontos a bevonatvastags\u00e1g ellen\u0151rz\u00e9se?<\/span><\/h3>\n

                A rendszer 20 nm \u00e9s t\u00f6bb t\u00edz mikrom\u00e9ter k\u00f6z\u00f6tti tartom\u00e1nyban rendk\u00edv\u00fcl pontos ellen\u0151rz\u00e9st biztos\u00edt, ami kiv\u00e1l\u00f3 ism\u00e9telhet\u0151s\u00e9get biztos\u00edt a t\u00e9telek k\u00f6z\u00f6tt.<\/p>\n

                Milyen t\u00edpus\u00fa szubsztr\u00e1tumok t\u00e1mogatottak?<\/span><\/h3>\n

                Anyagok sz\u00e9les sk\u00e1l\u00e1j\u00e1t t\u00e1mogatja, bele\u00e9rtve az osty\u00e1kat, SiC magokat, grafitpap\u00edrt, grafitlemezeket \u00e9s rugalmas szubsztr\u00e1tokat.<\/p>\n

                Alkalmas-e sorozatgy\u00e1rt\u00e1sra?<\/span><\/h3>\n

                Igen. A programozhat\u00f3 XYZ rendszer \u00e9s a t\u00f6bbf\u00fav\u00f3k\u00e1s k\u00e9pess\u00e9g ide\u00e1lis k\u00eds\u00e9rleti \u00e9s k\u00f6zepes volumen\u0171 gy\u00e1rt\u00e1si k\u00f6rnyezetekhez.<\/p>\n

                Hogyan biztos\u00edtj\u00e1k a bevonat egyenletess\u00e9g\u00e9t?<\/span><\/h3>\n

                Az egyenletess\u00e9g a k\u00f6vetkez\u0151k kombin\u00e1ci\u00f3j\u00e1val \u00e9rhet\u0151 el:<\/p>\n

                  \n
                • Ultrahangos permetez\u00e9si technol\u00f3gia<\/li>\n
                • L\u00e9zeres igaz\u00edt\u00e1s pozicion\u00e1l\u00e1s<\/li>\n
                • \u00c1lland\u00f3 \u00e1raml\u00e1s\u00fa folyad\u00e9kszab\u00e1lyoz\u00e1s<\/li>\n
                • T\u00f6bb f\u00fav\u00f3ka szinkroniz\u00e1l\u00e1sa<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"

                  A SiC bevon\u00f3g\u00e9p megb\u00edzhat\u00f3 \u00e9s m\u00e9retezhet\u0151 megold\u00e1st jelent a prec\u00edzi\u00f3s ragaszt\u00f3anyag-lev\u00e1laszt\u00e1shoz a f\u00e9lvezet\u0151 \u00e9s a fejlett anyagokkal kapcsolatos alkalmaz\u00e1sokban. Az ultrahangos bevonatol\u00e1si technol\u00f3gia \u00e9s az intelligens folyamatvez\u00e9rl\u00e9s kombin\u00e1l\u00e1s\u00e1val biztos\u00edtja a modern, nagy teljes\u00edtm\u00e9ny\u0171 gy\u00e1rt\u00e1si k\u00f6rnyezetekhez sz\u00fcks\u00e9ges egyenletess\u00e9get, stabilit\u00e1st \u00e9s hat\u00e9konys\u00e1got.<\/p>","protected":false},"featured_media":2308,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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