{"id":2077,"date":"2026-04-03T02:07:51","date_gmt":"2026-04-03T02:07:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2077"},"modified":"2026-04-03T02:09:04","modified_gmt":"2026-04-03T02:09:04","slug":"integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/hu\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"Integr\u00e1lt f\u00fcgg\u0151leges l\u00e9g\u00e1ram\u00fa SiC epitaxi\u00e1s berendez\u00e9s 6\u201d\/8\u201d Epi-osty\u00e1khoz"},"content":{"rendered":"<p data-start=\"187\" data-end=\"641\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2079 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Az integr\u00e1lt f\u00fcgg\u0151leges l\u00e9g\u00e1ram\u00fa szil\u00edciumkarbid (SiC) epitaxi\u00e1s berendez\u00e9s egy fejlett epitaxi\u00e1lis n\u00f6veked\u00e9si rendszer, amelyet 6 h\u00fcvelykes \u00e9s 8 h\u00fcvelykes SiC epi-lapk\u00e1k nagy hat\u00e9konys\u00e1g\u00fa gy\u00e1rt\u00e1s\u00e1ra terveztek. A teljes\u00edtm\u00e9ny f\u00e9lvezet\u0151gy\u00e1rt\u00e1s n\u00f6vekv\u0151 ig\u00e9nyeinek kiel\u00e9g\u00edt\u00e9s\u00e9re tervezett rendszer pontos h\u0151szab\u00e1lyoz\u00e1st, optimaliz\u00e1lt g\u00e1z\u00e1raml\u00e1si dinamik\u00e1t \u00e9s intelligens automatiz\u00e1l\u00e1st integr\u00e1l, hogy kiv\u00e9teles teljes\u00edtm\u00e9nyt ny\u00fajtson az egyenletess\u00e9g, az \u00e1tereszt\u0151k\u00e9pess\u00e9g \u00e9s a hib\u00e1k ellen\u0151rz\u00e9se ter\u00e9n.<\/p>\n<p data-start=\"643\" data-end=\"982\">A rendszer k\u00f6z\u00e9ppontj\u00e1ban egy innovat\u00edv, f\u00fcgg\u0151leges l\u00e9g\u00e1ram\u00fa zuhanyfej kialak\u00edt\u00e1sa \u00e1ll, amely lehet\u0151v\u00e9 teszi a technol\u00f3giai g\u00e1zok egyenletes eloszl\u00e1s\u00e1t az ostya fel\u00fclet\u00e9n. A t\u00f6bbz\u00f3n\u00e1s h\u0151m\u00e9rs\u00e9klet-mez\u0151szab\u00e1lyoz\u00e1ssal kombin\u00e1lva kiv\u00e1l\u00f3 vastags\u00e1gi egyenletess\u00e9get \u00e9s stabil adal\u00e9kkoncentr\u00e1ci\u00f3t biztos\u00edt - ami kritikus fontoss\u00e1g\u00fa a nagy teljes\u00edtm\u00e9ny\u0171 SiC teljes\u00edtm\u00e9ny\u0171 eszk\u00f6z\u00f6kh\u00f6z.<\/p>\n<p data-start=\"984\" data-end=\"1310\">A rendszer magasan integr\u00e1lt szerkezet\u0171, EFEM rendszeren kereszt\u00fcl automatiz\u00e1lt ostyakezel\u00e9ssel \u00e9s magas h\u0151m\u00e9rs\u00e9klet\u0171 ostyatov\u00e1bb\u00edt\u00f3 mechanizmussal rendelkezik. Ez lehet\u0151v\u00e9 teszi a modern f\u00e9lvezet\u0151gy\u00e1rt\u00f3 sorokba val\u00f3 z\u00f6kken\u0151mentes integr\u00e1l\u00e1st, cs\u00f6kkenti a k\u00e9zi beavatkoz\u00e1st, \u00e9s jav\u00edtja a folyamat konzisztenci\u00e1j\u00e1t \u00e9s a m\u0171k\u00f6d\u00e9si hat\u00e9konys\u00e1got.<\/p>\n<p data-start=\"1312\" data-end=\"1615\">Az ipari m\u00e9ret\u0171 gy\u00e1rt\u00e1s t\u00e1mogat\u00e1sa \u00e9rdek\u00e9ben a berendez\u00e9s k\u00e9tkamr\u00e1s konfigur\u00e1ci\u00f3val rendelkezik, amely k\u00e9pes a folyamatos t\u00f6bbkamr\u00e1s m\u0171k\u00f6d\u00e9sre. A havi 1100 osty\u00e1t meghalad\u00f3 - \u00e9s a folyamat optimaliz\u00e1l\u00e1s\u00e1val ak\u00e1r 1200 osty\u00e1t is el\u00e9r\u0151 - teljes\u00edtm\u00e9ny\u00e9vel j\u00f3l alkalmazhat\u00f3 nagy volumen\u0171 gy\u00e1rt\u00e1si k\u00f6rnyezetekben.<\/p>\n<p data-start=\"1617\" data-end=\"1971\">A berendez\u00e9s kompatibilis mind a 6 h\u00fcvelykes, mind a 8 h\u00fcvelykes SiC osty\u00e1kkal, \u00edgy rugalmass\u00e1got biztos\u00edt a nagyobb ostyam\u00e9retekre \u00e1tt\u00e9r\u0151 gy\u00e1rt\u00f3k sz\u00e1m\u00e1ra. Emellett kiv\u00e1l\u00f3 k\u00e9pess\u00e9geket mutat a vastag epitaxiar\u00e9tegek n\u00f6veszt\u00e9se \u00e9s az \u00e1rkok kit\u00f6lt\u00e9s\u00e9vel t\u00f6rt\u00e9n\u0151 epitaxia ter\u00e9n is, \u00edgy k\u00fcl\u00f6n\u00f6sen alkalmas a fejlett nagyfesz\u00fclts\u00e9g\u0171 \u00e9s nagy teljes\u00edtm\u00e9ny\u0171 eszk\u00f6z\u00f6k gy\u00e1rt\u00e1s\u00e1ra.<\/p>\n<p data-start=\"1973\" data-end=\"2214\">Az optimaliz\u00e1lt reaktorkonstrukci\u00f3 emellett alacsony hibas\u0171r\u0171s\u00e9get, jobb hozamot \u00e9s cs\u00f6kkentett \u00fczemeltet\u00e9si k\u00f6lts\u00e9get biztos\u00edt. A robusztus fel\u00e9p\u00edt\u00e9s \u00e9s a karbantart\u00e1sbar\u00e1t kialak\u00edt\u00e1s tov\u00e1bb n\u00f6veli a hossz\u00fa t\u00e1v\u00fa megb\u00edzhat\u00f3s\u00e1got \u00e9s m\u0171k\u00f6d\u00e9si stabilit\u00e1st.<\/p>\n<h2 data-section-id=\"qpn8c9\" data-start=\"2221\" data-end=\"2252\"><span role=\"text\"><img decoding=\"async\" class=\"size-medium wp-image-2078 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Legfontosabb m\u0171szaki el\u0151ny\u00f6k<\/span><\/h2>\n<ul data-start=\"2254\" data-end=\"2704\">\n<li data-section-id=\"1q2t12k\" data-start=\"2254\" data-end=\"2321\">F\u00fcgg\u0151leges l\u00e9g\u00e1ram\u00fa zuhanyfej kialak\u00edt\u00e1sa az egyenletes g\u00e1zeloszt\u00e1s \u00e9rdek\u00e9ben<\/li>\n<li data-section-id=\"1lzu0dd\" data-start=\"2322\" data-end=\"2387\">T\u00f6bbz\u00f3n\u00e1s h\u0151m\u00e9rs\u00e9klet-szab\u00e1lyoz\u00e1s a pontos h\u0151kezel\u00e9s\u00e9rt<\/li>\n<li data-section-id=\"1emeqzr\" data-start=\"2388\" data-end=\"2449\">K\u00e9tkamr\u00e1s konfigur\u00e1ci\u00f3 a nagy \u00e1tereszt\u0151k\u00e9pess\u00e9g\u0171 termel\u00e9shez<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2450\" data-end=\"2499\">Alacsony hibas\u0171r\u0171s\u00e9g \u00e9s magas hozam<\/li>\n<li data-section-id=\"h9m4ox\" data-start=\"2500\" data-end=\"2550\">Automatiz\u00e1lt ostyakezel\u00e9s EFEM integr\u00e1ci\u00f3val<\/li>\n<li data-section-id=\"bze71o\" data-start=\"2551\" data-end=\"2594\">Kompatibilit\u00e1s 6\u201d \u00e9s 8\u201d SiC osty\u00e1kkal<\/li>\n<li data-section-id=\"xhhop\" data-start=\"2595\" data-end=\"2655\">Optimaliz\u00e1lt vastag epitaxi\u00e1s \u00e9s \u00e1rokkit\u00f6lt\u0151 elj\u00e1r\u00e1sokhoz<\/li>\n<li data-section-id=\"1a3549x\" data-start=\"2656\" data-end=\"2704\">Nagy megb\u00edzhat\u00f3s\u00e1g \u00e9s egyszer\u0171s\u00edtett karbantart\u00e1s<\/li>\n<\/ul>\n<h2 data-section-id=\"ca04ra\" data-start=\"2711\" data-end=\"2737\"><span role=\"text\">Folyamat teljes\u00edtm\u00e9nye<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2739\" data-end=\"3287\">\n<thead data-start=\"2739\" data-end=\"2768\">\n<tr data-start=\"2739\" data-end=\"2768\">\n<th class=\"\" data-start=\"2739\" data-end=\"2751\" data-col-size=\"sm\">Param\u00e9ter<\/th>\n<th class=\"\" data-start=\"2751\" data-end=\"2768\" data-col-size=\"md\">Specifik\u00e1ci\u00f3<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2796\" data-end=\"3287\">\n<tr data-start=\"2796\" data-end=\"2884\">\n<td data-start=\"2796\" data-end=\"2809\" data-col-size=\"sm\">\u00c1tviteli teljes\u00edtm\u00e9ny<\/td>\n<td data-start=\"2809\" data-end=\"2884\" data-col-size=\"md\">\u22651100 ostya\/h\u00f3 (k\u00e9t kamra), ak\u00e1r 1200 ostya\/h\u00f3 (optimaliz\u00e1lt)<\/td>\n<\/tr>\n<tr data-start=\"2885\" data-end=\"2938\">\n<td data-start=\"2885\" data-end=\"2912\" data-col-size=\"sm\">Wafer m\u00e9ret kompatibilit\u00e1s<\/td>\n<td data-col-size=\"md\" data-start=\"2912\" data-end=\"2938\">6\u201d \/ 8\u201d SiC epi-lap\u00e1tok<\/td>\n<\/tr>\n<tr data-start=\"2939\" data-end=\"2975\">\n<td data-start=\"2939\" data-end=\"2961\" data-col-size=\"sm\">H\u0151m\u00e9rs\u00e9klet-szab\u00e1lyoz\u00e1s<\/td>\n<td data-start=\"2961\" data-end=\"2975\" data-col-size=\"md\">T\u00f6bbz\u00f3n\u00e1s<\/td>\n<\/tr>\n<tr data-start=\"2976\" data-end=\"3035\">\n<td data-start=\"2976\" data-end=\"2993\" data-col-size=\"sm\">L\u00e9g\u00e1raml\u00e1si rendszer<\/td>\n<td data-start=\"2993\" data-end=\"3035\" data-col-size=\"md\">F\u00fcgg\u0151legesen \u00e1ll\u00edthat\u00f3 t\u00f6bbz\u00f3n\u00e1s l\u00e9g\u00e1raml\u00e1s<\/td>\n<\/tr>\n<tr data-start=\"3036\" data-end=\"3067\">\n<td data-start=\"3036\" data-end=\"3053\" data-col-size=\"sm\">Forg\u00e1si sebess\u00e9g<\/td>\n<td data-start=\"3053\" data-end=\"3067\" data-col-size=\"md\">0-1000 fordulat\/perc<\/td>\n<\/tr>\n<tr data-start=\"3068\" data-end=\"3101\">\n<td data-start=\"3068\" data-end=\"3086\" data-col-size=\"sm\">Maxim\u00e1lis n\u00f6veked\u00e9si r\u00e1ta<\/td>\n<td data-start=\"3086\" data-end=\"3101\" data-col-size=\"md\">\u226560 \u03bcm\/\u00f3ra<\/td>\n<\/tr>\n<tr data-start=\"3102\" data-end=\"3163\">\n<td data-start=\"3102\" data-end=\"3125\" data-col-size=\"sm\">Vastags\u00e1g egyenletess\u00e9ge<\/td>\n<td data-col-size=\"md\" data-start=\"3125\" data-end=\"3163\">\u22642% (optimaliz\u00e1lt \u22641%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3164\" data-end=\"3224\">\n<td data-start=\"3164\" data-end=\"3184\" data-col-size=\"sm\">Dopping egyenletess\u00e9g<\/td>\n<td data-col-size=\"md\" data-start=\"3184\" data-end=\"3224\">\u22643% (optimaliz\u00e1lt \u22641,5%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3225\" data-end=\"3287\">\n<td data-start=\"3225\" data-end=\"3249\" data-col-size=\"sm\">Gyilkos hiba s\u0171r\u0171s\u00e9ge<\/td>\n<td data-col-size=\"md\" data-start=\"3249\" data-end=\"3287\">\u22640,2 cm-\u00b2 (0,01 cm-\u00b2-re optimaliz\u00e1lva)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"1w46w82\" data-start=\"3294\" data-end=\"3322\"><span role=\"text\">Alkalmaz\u00e1si forgat\u00f3k\u00f6nyvek<\/span><\/h2>\n<p data-start=\"3324\" data-end=\"3514\">Ezt a berendez\u00e9st sz\u00e9les k\u00f6rben haszn\u00e1lj\u00e1k a fejlett SiC-alap\u00fa f\u00e9lvezet\u0151 eszk\u00f6z\u00f6k gy\u00e1rt\u00e1s\u00e1ban, k\u00fcl\u00f6n\u00f6sen a nagy hat\u00e9konys\u00e1got, nagy fesz\u00fclts\u00e9get \u00e9s nagy h\u0151teljes\u00edtm\u00e9nyt ig\u00e9nyl\u0151 ipar\u00e1gakban:<\/p>\n<ul data-start=\"3516\" data-end=\"4364\">\n<li data-section-id=\"qrtaas\" data-start=\"3516\" data-end=\"3707\">Elektromos j\u00e1rm\u0171vek (EV-k)<br data-start=\"3545\" data-end=\"3548\" \/>SiC MOSFET-ek \u00e9s teljes\u00edtm\u00e9nymodulok gy\u00e1rt\u00e1s\u00e1n\u00e1l haszn\u00e1lj\u00e1k inverterekhez, fed\u00e9lzeti t\u00f6lt\u0151kh\u00f6z \u00e9s DC-DC \u00e1talak\u00edt\u00f3khoz, jav\u00edtva az energiahat\u00e9konys\u00e1got \u00e9s a hat\u00f3t\u00e1vols\u00e1got.<\/li>\n<li data-section-id=\"1j97evh\" data-start=\"3709\" data-end=\"3867\">Meg\u00fajul\u00f3 energiarendszerek<br data-start=\"3739\" data-end=\"3742\" \/>Fotovoltaikus inverterekben \u00e9s energiat\u00e1rol\u00f3 rendszerekben alkalmazz\u00e1k, lehet\u0151v\u00e9 t\u00e9ve a nagyobb \u00e1talak\u00edt\u00e1si hat\u00e9konys\u00e1got \u00e9s a rendszer megb\u00edzhat\u00f3s\u00e1g\u00e1t.<\/li>\n<li data-section-id=\"8pfhmh\" data-start=\"3869\" data-end=\"4041\">Ipari teljes\u00edtm\u00e9nyelektronika<br data-start=\"3903\" data-end=\"3906\" \/>Alkalmas nagy teljes\u00edtm\u00e9ny\u0171 motorhajt\u00e1sokhoz, ipari automatiz\u00e1l\u00e1si rendszerekhez \u00e9s stabil \u00e9s hat\u00e9kony m\u0171k\u00f6d\u00e9st ig\u00e9nyl\u0151 t\u00e1pegys\u00e9gekhez.<\/li>\n<li data-section-id=\"frfj8s\" data-start=\"4043\" data-end=\"4206\">Vas\u00fati tranzit \u00e9s elektromos h\u00e1l\u00f3zatok<br data-start=\"4075\" data-end=\"4078\" \/>T\u00e1mogatja az intelligens h\u00e1l\u00f3zatokban, vontat\u00e1si rendszerekben \u00e9s az energia\u00e1tviteli infrastrukt\u00far\u00e1ban haszn\u00e1lt nagyfesz\u00fclts\u00e9g\u0171 \u00e9s nagyfrekvenci\u00e1s eszk\u00f6z\u00f6ket.<\/li>\n<li data-section-id=\"1k6eb43\" data-start=\"4208\" data-end=\"4364\">High-End t\u00e1pegys\u00e9gek<br data-start=\"4236\" data-end=\"4239\" \/>Ide\u00e1lis fejlett SiC-eszk\u00f6z\u00f6k, p\u00e9ld\u00e1ul Schottky-di\u00f3d\u00e1k, MOSFET-ek \u00e9s \u00faj gener\u00e1ci\u00f3s nagyfesz\u00fclts\u00e9g\u0171 alkatr\u00e9szek gy\u00e1rt\u00e1s\u00e1hoz.<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"wp-image-2080 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\" alt=\"\" width=\"1024\" height=\"578\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-300x169.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-768x433.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-600x339.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application.png 1285w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"elc90z\" data-start=\"4371\" data-end=\"4381\"><span role=\"text\">GYIK<\/span><\/h2>\n<h3 data-section-id=\"1f731tm\" data-start=\"4383\" data-end=\"4453\"><span role=\"text\">1. Milyen ostyam\u00e9reteket t\u00e1mogat ez az epitaxi\u00e1s berendez\u00e9s?<\/span><\/h3>\n<p data-start=\"4454\" data-end=\"4606\">A rendszer t\u00e1mogatja mind a 6 h\u00fcvelykes, mind a 8 h\u00fcvelykes SiC osty\u00e1kat, lehet\u0151v\u00e9 t\u00e9ve a gy\u00e1rt\u00f3k sz\u00e1m\u00e1ra, hogy megfeleljenek a jelenlegi termel\u00e9si ig\u00e9nyeknek, mik\u00f6zben felk\u00e9sz\u00fclnek a j\u00f6v\u0151beli m\u00e9retez\u00e9shez.<\/p>\n<h3 data-section-id=\"8a4v60\" data-start=\"4613\" data-end=\"4683\"><span role=\"text\">2. Milyen el\u0151ny\u00f6kkel j\u00e1r a f\u00fcgg\u0151leges l\u00e9g\u00e1raml\u00e1s\u00fa kialak\u00edt\u00e1s?<\/span><\/h3>\n<p data-start=\"4684\" data-end=\"4858\">A f\u00fcgg\u0151leges l\u00e9g\u00e1raml\u00e1si rendszer biztos\u00edtja a g\u00e1z egyenletes eloszl\u00e1s\u00e1t az osty\u00e1n, jav\u00edtva a vastags\u00e1g konzisztenci\u00e1j\u00e1t, cs\u00f6kkentve a hib\u00e1kat \u00e9s jav\u00edtva az epitaxi\u00e1lis min\u0151s\u00e9get.<\/p>\n<h3 data-section-id=\"1rbmoqb\" data-start=\"4865\" data-end=\"4935\"><span role=\"text\">3. Alkalmas-e ez a berendez\u00e9s nagy volumen\u0171 gy\u00e1rt\u00e1sra?<\/span><\/h3>\n<p data-start=\"4936\" data-end=\"5110\">Igen, a rendszer k\u00e9tkamr\u00e1s konfigur\u00e1ci\u00f3val \u00e9s folyamatos \u00fczemm\u00f3ddal rendelkezik, havi 1100 osty\u00e1t meghalad\u00f3 \u00e1tmenettel. J\u00f3l alkalmas stabil, nagy\u00fczemi ipari termel\u00e9sre, biztos\u00edtva az egyenletes teljes\u00edtm\u00e9nyt, a nagy hozamstabilit\u00e1st \u00e9s a hossz\u00fa t\u00e1v\u00fa m\u0171k\u00f6d\u00e9si hat\u00e9konys\u00e1got.<\/p>","protected":false},"excerpt":{"rendered":"<p>Az integr\u00e1lt f\u00fcgg\u0151leges l\u00e9g\u00e1ram\u00fa szil\u00edciumkarbid (SiC) epitaxi\u00e1s berendez\u00e9s egy fejlett epitaxi\u00e1lis n\u00f6veked\u00e9si rendszer, amelyet 6 h\u00fcvelykes \u00e9s 8 h\u00fcvelykes SiC epi-lapk\u00e1k nagy hat\u00e9konys\u00e1g\u00fa gy\u00e1rt\u00e1s\u00e1ra terveztek.<\/p>","protected":false},"featured_media":2078,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[730],"product_tag":[734,735,737,738,745,740,744,739,733,731,603,732,742,741,736,743],"class_list":{"0":"post-2077","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-epitaxy-equipment","7":"product_tag-6-inch-sic-wafer","8":"product_tag-8-inch-sic-wafer","9":"product_tag-cvd-epitaxy-system","10":"product_tag-epitaxial-growth-system","11":"product_tag-ev-power-semiconductors","12":"product_tag-high-voltage-sic-devices","13":"product_tag-industrial-power-electronics","14":"product_tag-semiconductor-manufacturing-equipment","15":"product_tag-sic-epi-wafer-production","16":"product_tag-sic-epitaxy-equipment","17":"product_tag-sic-power-devices","18":"product_tag-silicon-carbide-epitaxy-reactor","19":"product_tag-thick-epitaxy-growth","20":"product_tag-trench-filling-epitaxy","21":"product_tag-vertical-airflow-epitaxy","22":"product_tag-wafer-epitaxy-reactor","23":"desktop-align-left","24":"tablet-align-left","25":"mobile-align-left","26":"ast-product-gallery-layout-horizontal-slider","27":"ast-product-tabs-layout-horizontal","29":"first","30":"instock","31":"shipping-taxable","32":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2077","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/comments?post=2077"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2077\/revisions"}],"predecessor-version":[{"id":2082,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product\/2077\/revisions\/2082"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media\/2078"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media?parent=2077"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_brand?post=2077"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_cat?post=2077"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/product_tag?post=2077"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}