{"id":2030,"date":"2026-03-27T01:57:48","date_gmt":"2026-03-27T01:57:48","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2030"},"modified":"2026-03-27T02:00:00","modified_gmt":"2026-03-27T02:00:00","slug":"semi-automatic-room-temperature-wafer-bonding-machine-for-2-to-12-inch-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/hu\/product\/semi-automatic-room-temperature-wafer-bonding-machine-for-2-to-12-inch-wafer-processing\/","title":{"rendered":"F\u00e9lautomata szobah\u0151m\u00e9rs\u00e9klet\u0171 Wafer Bonding Machine 2-12 h\u00fcvelykes Wafer feldolgoz\u00e1shoz"},"content":{"rendered":"

\"\"A f\u00e9lautomata, szobah\u0151m\u00e9rs\u00e9klet\u0171 Wafer Bonding Machine egy nagy pontoss\u00e1g\u00fa rendszer a wafer- \u00e9s chipszint\u0171 k\u00f6t\u00e9shez. A mechanikus nyom\u00e1s \u00e9s az in situ fel\u00fcletaktiv\u00e1l\u00e1si technol\u00f3gia kombin\u00e1l\u00e1s\u00e1val lehet\u0151v\u00e9 teszi a tart\u00f3s k\u00f6t\u00e9st szobah\u0151m\u00e9rs\u00e9kleten (20-30\u00b0C), ragaszt\u00f3anyag vagy magas h\u0151m\u00e9rs\u00e9klet\u0171 feldolgoz\u00e1s n\u00e9lk\u00fcl. Ez minimaliz\u00e1lja a h\u0151fesz\u00fclts\u00e9get \u00e9s az anyag deform\u00e1ci\u00f3j\u00e1t, \u00edgy ide\u00e1lis a h\u0151\u00e9rz\u00e9keny \u00e9s heterog\u00e9n anyagokhoz. A g\u00e9p 2 h\u00fcvelyk \u00e9s 12 h\u00fcvelyk k\u00f6z\u00f6tti ostyam\u00e9reteket t\u00e1mogat, \u00e9s alkalmas kutat\u00e1sra, k\u00eds\u00e9rleti gy\u00e1rt\u00e1sra, valamint kis- \u00e9s k\u00f6zepes m\u00e9ret\u0171 gy\u00e1rt\u00e1sra.<\/p>\n

\"\"F\u0151 jellemz\u0151k<\/strong><\/h2>\n
    \n
  1. Szobah\u0151m\u00e9rs\u00e9klet\u0171 k\u00f6t\u00e9s<\/strong> - 25 \u00b1 5\u00b0C-on m\u0171k\u00f6dik a termikus elt\u00e9r\u00e9sek \u00e9s a szil\u00e1nkok torzul\u00e1s\u00e1nak megel\u0151z\u00e9se \u00e9rdek\u00e9ben.<\/li>\n
  2. Felsz\u00edni aktiv\u00e1l\u00e1s<\/strong> - A plazma vagy k\u00e9miai aktiv\u00e1l\u00e1s jav\u00edtja a k\u00f6t\u00e9s szil\u00e1rds\u00e1g\u00e1t; az opcion\u00e1lis porlaszt\u00e1s jav\u00edtja az interf\u00e9sz min\u0151s\u00e9g\u00e9t.<\/li>\n
  3. Nagy pontoss\u00e1g\u00fa igaz\u00edt\u00e1s<\/strong> - Vizu\u00e1lis igaz\u00edt\u00f3rendszer \u00e9s prec\u00edzi\u00f3s mozg\u00e1splatform \u00b10,5 \u03bcm pontoss\u00e1ggal.<\/li>\n
  4. Sz\u00e9lesk\u00f6r\u0171 anyagkompatibilit\u00e1s<\/strong> - T\u00e1mogatja Si, SiC, GaAs, GaN, InP, zaf\u00edr, \u00fcveg, LiNbO\u2083, LiTaO\u2083, gy\u00e9m\u00e1nt \u00e9s kiv\u00e1lasztott polimerek haszn\u00e1lat\u00e1t.<\/li>\n
  5. F\u00e9lautomata m\u0171k\u00f6d\u00e9s<\/strong> - K\u00e9zi ostyat\u00f6lt\u00e9s automatiz\u00e1lt k\u00f6t\u00e9si folyamattal; programozhat\u00f3 receptek az ism\u00e9telhet\u0151 eredm\u00e9nyek \u00e9rdek\u00e9ben.<\/li>\n
  6. Tiszta \u00e9s stabil k\u00f6rnyezet<\/strong> - A be\u00e9p\u00edtett 100-as tisztas\u00e1gi oszt\u00e1ly\u00fa rendszer alacsony szennyez\u0151d\u00e9st \u00e9s <0,1% interf\u00e9sz \u00fcresj\u00e1ratot biztos\u00edt.<\/li>\n<\/ol>\n

    M\u0171szaki specifik\u00e1ci\u00f3k<\/strong><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n
    Param\u00e9ter<\/th>\nSpecifik\u00e1ci\u00f3<\/th>\n<\/tr>\n<\/thead>\n
    Wafer m\u00e9ret<\/td>\n2\u2033 - 12\u2033, szab\u00e1lytalan mint\u00e1kkal kompatibilis<\/td>\n<\/tr>\n
    K\u00f6t\u00e9si h\u0151m\u00e9rs\u00e9klet<\/td>\n20-30\u00b0C<\/td>\n<\/tr>\n
    Maxim\u00e1lis nyom\u00e1s<\/td>\n80 kN<\/td>\n<\/tr>\n
    Nyom\u00e1sszab\u00e1lyoz\u00e1s<\/td>\n0-5000 N \u00e1ll\u00edthat\u00f3, \u00b11 N felbont\u00e1s<\/td>\n<\/tr>\n
    Igaz\u00edt\u00e1si pontoss\u00e1g<\/td>\n\u00b10,5 \u03bcm<\/td>\n<\/tr>\n
    K\u00f6t\u00e9sszil\u00e1rds\u00e1g<\/td>\n\u22652,0 J\/m\u00b2<\/td>\n<\/tr>\n
    Fel\u00fcletkezel\u00e9s<\/td>\nIn situ aktiv\u00e1l\u00e1s + porlaszt\u00e1sos lev\u00e1laszt\u00e1s<\/td>\n<\/tr>\n
    T\u00e1pl\u00e1l\u00e1si m\u00f3d<\/td>\nK\u00e9zi<\/td>\n<\/tr>\n
    Tisztas\u00e1gi szint<\/td>\n100. oszt\u00e1ly<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    Alapvet\u0151 technol\u00f3gia<\/strong><\/h2>\n
      \n
    1. Szobah\u0151m\u00e9rs\u00e9klet\u0171 k\u00f6zvetlen ragaszt\u00e1s<\/strong> - Az aktiv\u00e1lt fel\u00fcletek ellen\u0151rz\u00f6tt nyom\u00e1s alatt \u00e9rintkeznek, \u00e9s h\u0151kezel\u00e9s n\u00e9lk\u00fcl stabil k\u00f6t\u00e9seket k\u00e9peznek.<\/li>\n
    2. Felsz\u00edni aktiv\u00e1l\u00e1s<\/strong> - N\u00f6veli a fel\u00fcleti energi\u00e1t, elt\u00e1vol\u00edtja a szennyez\u0151d\u00e9seket, \u00e9s jav\u00edtja a k\u00f6t\u00e9s egyenletess\u00e9g\u00e9t az anyagok k\u00f6z\u00f6tt.<\/li>\n<\/ol>\n

      \"\"Alkalmaz\u00e1sok<\/strong><\/h2>\n
        \n
      1. Fejlett f\u00e9lvezet\u0151 csomagol\u00e1s<\/strong> - 3D IC stacking, TSV bonding, logikai \u00e9s mem\u00f3riachipek heterog\u00e9n integr\u00e1ci\u00f3ja.<\/li>\n
      2. MEMS gy\u00e1rt\u00e1s<\/strong> - Wafer-szint\u0171 v\u00e1kuumcsomagol\u00e1s \u00e9rz\u00e9kel\u0151k, p\u00e9ld\u00e1ul gyorsul\u00e1sm\u00e9r\u0151k \u00e9s giroszk\u00f3pok sz\u00e1m\u00e1ra.<\/li>\n
      3. Optoelektronika \u00e9s kijelz\u0151k<\/strong> - LED ragaszt\u00e1s, zaf\u00edr \u00e9s \u00fcveg szubsztr\u00e1t ragaszt\u00e1sa, AR\/VR optikai modulok \u00f6sszeszerel\u00e9se.<\/li>\n
      4. Mikrofluidika \u00e9s biochipek<\/strong> - PDMS \u00e9s \u00fcveg k\u00f6t\u00e9s a biol\u00f3giai aktivit\u00e1s meg\u0151rz\u00e9se mellett.<\/li>\n
      5. Kutat\u00e1s \u00e9s \u00faj eszk\u00f6z\u00f6k<\/strong> - Rugalmas elektronika, kvantumeszk\u00f6z\u00f6k \u00e9s heterog\u00e9n anyagintegr\u00e1ci\u00f3.<\/li>\n<\/ol>\n

        Szerviz \u00e9s t\u00e1mogat\u00e1s<\/strong><\/h2>\n
          \n
        1. Folyamatfejleszt\u00e9s<\/strong> - K\u00f6t\u00e9si param\u00e9terek optimaliz\u00e1l\u00e1sa \u00e9s fel\u00fcletaktiv\u00e1l\u00e1si megold\u00e1sok k\u00fcl\u00f6nb\u00f6z\u0151 anyagokhoz.<\/li>\n
        2. Berendez\u00e9s testreszab\u00e1sa<\/strong> - Nagy pontoss\u00e1g\u00fa igaz\u00edt\u00f3modulok, v\u00e1kuum- vagy szab\u00e1lyozott atmoszf\u00e9r\u00e1j\u00fa kamr\u00e1k.<\/li>\n
        3. M\u0171szaki k\u00e9pz\u00e9s<\/strong> - Helysz\u00edni \u00fczemeltet\u00e9si \u00fatmutat\u00e1s \u00e9s a folyamat hibakeres\u00e9se.<\/li>\n
        4. \u00c9rt\u00e9kes\u00edt\u00e9s ut\u00e1ni t\u00e1mogat\u00e1s<\/strong> - 12 h\u00f3nap garancia, a legfontosabb alkatr\u00e9szek gyors cser\u00e9je, t\u00e1vdiagnosztika \u00e9s szoftverfriss\u00edt\u00e9sek.<\/li>\n<\/ol>\n

          GYIK<\/h2>\n

          K: Mi a f\u0151 el\u0151nye a szobah\u0151m\u00e9rs\u00e9klet\u0171 ragaszt\u00e1snak?
          V: Megsz\u00fcnteti a h\u0151fesz\u00fclts\u00e9get, \u00e9s lehet\u0151v\u00e9 teszi a h\u0151\u00e9rz\u00e9keny \u00e9s heterog\u00e9n anyagok megb\u00edzhat\u00f3 ragaszt\u00e1s\u00e1t.<\/p>\n

          K: Milyen anyagok ragaszthat\u00f3k?
          A: Szil\u00edcium, szil\u00edciumkarbid, gallium-nitrid, gallium-arzenid, indium-foszfid, zaf\u00edr, \u00fcveg, l\u00edtium-niob\u00e1t, gy\u00e9m\u00e1nt \u00e9s kiv\u00e1lasztott polimerek.<\/p>","protected":false},"excerpt":{"rendered":"

          A f\u00e9lautomata, szobah\u0151m\u00e9rs\u00e9klet\u0171 Wafer Bonding Machine egy nagy pontoss\u00e1g\u00fa rendszer a wafer- \u00e9s chipszint\u0171 k\u00f6t\u00e9shez. A mechanikus nyom\u00e1s \u00e9s az in situ fel\u00fcletaktiv\u00e1l\u00e1si technol\u00f3gia kombin\u00e1l\u00e1s\u00e1val lehet\u0151v\u00e9 teszi a tart\u00f3s k\u00f6t\u00e9st szobah\u0151m\u00e9rs\u00e9kleten (20-30\u00b0C), ragaszt\u00f3anyag vagy magas h\u0151m\u00e9rs\u00e9klet\u0171 feldolgoz\u00e1s n\u00e9lk\u00fcl.<\/p>","protected":false},"featured_media":2031,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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