{"id":2555,"date":"2026-06-16T01:21:44","date_gmt":"2026-06-16T01:21:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2555"},"modified":"2026-06-16T01:21:50","modified_gmt":"2026-06-16T01:21:50","slug":"what-are-wafer-ttv-bow-and-warp","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/hu\/what-are-wafer-ttv-bow-and-warp\/","title":{"rendered":"Mit jelent a Wafer TTV, a hajl\u00edt\u00e1s \u00e9s a torzul\u00e1s? Gyakorlati \u00fatmutat\u00f3 a Wafer s\u00edkfel\u00fclet\u00e9hez"},"content":{"rendered":"<p>A <a href=\"https:\/\/www.zmsh-semitech.com\/hu\/products\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#cf2e2e\" class=\"has-inline-color\">f\u00e9lvezet\u0151gy\u00e1rt\u00e1s<\/mark><\/a>, az ostya min\u0151s\u00e9ge azonban sokkal t\u00f6bbr\u0151l sz\u00f3l, mint puszt\u00e1n az anyag tisztas\u00e1g\u00e1r\u00f3l. M\u00e9g egy t\u00f6k\u00e9letesen el\u0151\u00e1ll\u00edtott szil\u00edcium-, zaf\u00edr-, kvarc- vagy szil\u00edcium-karbid-ostya is gy\u00e1rt\u00e1si probl\u00e9m\u00e1kat okozhat, ha geometri\u00e1j\u00e1t nem ellen\u0151rzik megfelel\u0151en.<\/p>\n\n\n\n<p>A szil\u00edciumlapka geometriai param\u00e9terei k\u00f6z\u00fcl a legfontosabbak a TTV (teljes vastags\u00e1gv\u00e1ltoz\u00e1s), a hajl\u00edt\u00e1s \u00e9s a torzul\u00e1s. Ezek a m\u00e9r\u00e9sek seg\u00edtik a m\u00e9rn\u00f6k\u00f6ket a szil\u00edciumlapka vastags\u00e1g\u00e1nak egyenletess\u00e9g\u00e9nek \u00e9s s\u00edkoss\u00e1g\u00e1nak \u00e9rt\u00e9kel\u00e9s\u00e9ben, miel\u0151tt a lapka olyan kritikus folyamatokba ker\u00fclne, mint a litogr\u00e1fia, a k\u00f6t\u00e9s, a v\u00e9kony\u00edt\u00e1s \u00e9s a csomagol\u00e1s.<\/p>\n\n\n\n<p>Ez a cikk elmagyar\u00e1zza, mit jelentenek ezek a param\u00e9terek, mi\u00e9rt fontosak, \u00e9s hogyan m\u00e9rik \u0151ket.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Are-Wafer-TTV-Bow-and-Warp-1024x683.png\" alt=\"\" class=\"wp-image-2556\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Are-Wafer-TTV-Bow-and-Warp-1024x683.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Are-Wafer-TTV-Bow-and-Warp-300x200.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Are-Wafer-TTV-Bow-and-Warp-768x512.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Are-Wafer-TTV-Bow-and-Warp-18x12.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Are-Wafer-TTV-Bow-and-Warp-600x400.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Are-Wafer-TTV-Bow-and-Warp.png 1536w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">Mi\u00e9rt fontos a szelet s\u00edkfel\u00fclete?<\/h2>\n\n\n\n<p>A modern f\u00e9lvezet\u0151 eszk\u00f6z\u00f6ket rendk\u00edv\u00fcl szigor\u00fa t\u0171r\u00e9shat\u00e1rok mellett gy\u00e1rtj\u00e1k. A szil\u00edciumlapka vastags\u00e1g\u00e1ban vagy s\u00edkfel\u00fclet\u00e9ben bek\u00f6vetkez\u0151 csek\u00e9ly elt\u00e9r\u00e9s hat\u00e1ssal lehet a k\u00f6vetkez\u0151kre:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>A fotolitogr\u00e1fia f\u00f3kuszpontoss\u00e1ga<\/li>\n\n\n\n<li>A szil\u00edciumlapok \u00f6sszeragaszt\u00e1s\u00e1nak min\u0151s\u00e9ge<\/li>\n\n\n\n<li>A v\u00e9konyr\u00e9teg-lerak\u00f3d\u00e1s egyenletess\u00e9ge<\/li>\n\n\n\n<li>A CMP (k\u00e9miai-mechanikai pol\u00edroz\u00e1s) teljes\u00edtm\u00e9nye<\/li>\n\n\n\n<li>A kock\u00e1z\u00e1s \u00e9s a csomagol\u00e1s hozama<\/li>\n<\/ul>\n\n\n\n<p>Ahogy a szil\u00edciumlapka \u00e1tm\u00e9r\u0151je n\u00f6vekszik, \u00e9s az eszk\u00f6z\u00f6k fel\u00e9p\u00edt\u00e9se egyre bonyolultabb\u00e1 v\u00e1lik, a szil\u00edciumlapka geometri\u00e1j\u00e1nak szab\u00e1lyoz\u00e1sa egyre nagyobb jelent\u0151s\u00e9gre tesz szert.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Mi az a TTV (teljes vastags\u00e1gv\u00e1ltoz\u00e1s)?<\/h2>\n\n\n\n<p>A TTV (Total Thickness Variation, teljes vastags\u00e1gv\u00e1ltoz\u00e1s) azt m\u00e9ri, hogy mennyire egyenletes egy szil\u00edciumlapka vastags\u00e1ga a teljes fel\u00fclet\u00e9n.<\/p>\n\n\n\n<p>Ezt a szil\u00edciumlapk\u00e1n m\u00e9rt legnagyobb \u00e9s legkisebb vastags\u00e1g k\u00f6z\u00f6tti k\u00fcl\u00f6nbs\u00e9gk\u00e9nt hat\u00e1rozz\u00e1k meg.<\/p>\n\n\n\n<p><strong>K\u00e9plet:<\/strong><\/p>\n\n\n\n<p>TTV = legnagyobb vastags\u00e1g \u2013 legkisebb vastags\u00e1g<\/p>\n\n\n\n<p>P\u00e9ld\u00e1ul, ha egy szil\u00edciumlapka legvastagabb pontja 726 \u03bcm, a legv\u00e9konyabb pontja pedig 721 \u03bcm, akkor a TTV \u00e9rt\u00e9ke 5 \u03bcm.<\/p>\n\n\n\n<p>Az alacsonyabb TTV-\u00e9rt\u00e9k \u00e1ltal\u00e1ban jobb vastags\u00e1gegys\u00e9gess\u00e9get jelez, ami elengedhetetlen a prec\u00edzi\u00f3s f\u00e9lvezet\u0151-gy\u00e1rt\u00e1shoz.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mi\u00e9rt fontos a TTV?<\/h3>\n\n\n\n<p>A t\u00fal magas TTV-\u00e9rt\u00e9k a k\u00f6vetkez\u0151ket okozhatja:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>F\u00f3kuszhib\u00e1k a litogr\u00e1fia sor\u00e1n<\/li>\n\n\n\n<li>Egyenetlen pol\u00edroz\u00e1si eredm\u00e9nyek<\/li>\n\n\n\n<li>Gyenge ostya\u00f6sszekapcsol\u00e1si teljes\u00edtm\u00e9ny<\/li>\n\n\n\n<li>A folyamatv\u00e1ltoz\u00e9konys\u00e1g n\u00f6veked\u00e9se<\/li>\n<\/ul>\n\n\n\n<p>A cs\u00facskateg\u00f3ri\u00e1s f\u00e9lvezet\u0151 szeletek eset\u00e9ben gyakran csup\u00e1n n\u00e9h\u00e1ny mikronos vagy ann\u00e1l kisebb TTV-\u00e9rt\u00e9kekre van sz\u00fcks\u00e9g.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Mi az a wafer-hajl\u00edt\u00e1s?<\/h2>\n\n\n\n<p>A hajl\u00edt\u00e1s a szil\u00edciumlapka egy referenciat\u00e9rhez viszony\u00edtott \u00e1ltal\u00e1nos g\u00f6rb\u00fclet\u00e9t jelenti.<\/p>\n\n\n\n<p>K\u00e9pzelj\u00fck el, hogy egy szeletet helyez\u00fcnk egy s\u00edk fel\u00fcletre. Ha a szelet k\u00f6zepe a referencia-s\u00edk f\u00f6l\u00e9 emelkedik vagy al\u00e1 s\u00fcllyed, akkor a szelet megg\u00f6rb\u00fcl.<\/p>\n\n\n\n<p>A hajl\u00edt\u00e1s \u00e1ltal\u00e1ban a k\u00f6vetkez\u0151 folyamatok sor\u00e1n keletkez\u0151 bels\u0151 fesz\u00fclts\u00e9gek k\u00f6vetkezt\u00e9ben alakul ki:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Epitaxi\u00e1lis n\u00f6veked\u00e9s<\/li>\n\n\n\n<li>V\u00e9konyr\u00e9teg-lerak\u00f3d\u00e1s<\/li>\n\n\n\n<li>H\u0151kezel\u00e9s<\/li>\n\n\n\n<li>A szelet v\u00e9kony\u00edt\u00e1sa<\/li>\n<\/ul>\n\n\n\n<p>A pozit\u00edv domborul\u00e1s azt jelenti, hogy az ostya k\u00f6zepe a referencia-s\u00edk felett helyezkedik el, m\u00edg a negat\u00edv domborul\u00e1s azt jelenti, hogy alatta van.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mi\u00e9rt fontos az \u00edj?<\/h3>\n\n\n\n<p>Az \u00edj hat\u00e1ssal lehet:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Oszlopkezel\u00e9s<\/li>\n\n\n\n<li>Be\u00e1ll\u00edt\u00e1si pontoss\u00e1g<\/li>\n\n\n\n<li>K\u00f6t\u00e9si elj\u00e1r\u00e1sok<\/li>\n\n\n\n<li>V\u00e9konyr\u00e9teg\u0171 fesz\u00fclts\u00e9g\u00e9rt\u00e9kel\u00e9s<\/li>\n<\/ul>\n\n\n\n<p>A speci\u00e1lisan kialak\u00edtott szil\u00edciumlemezek \u00e9s a fejlett hordoz\u00f3k eset\u00e9ben a hajl\u00edt\u00e1st gyakran figyelemmel k\u00eds\u00e9rik a gy\u00e1rt\u00e1si folyamat eg\u00e9sz sor\u00e1n.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Mi az a wafer-torzul\u00e1s?<\/h2>\n\n\n\n<p>A Warp a szabadon \u00e1ll\u00f3 szil\u00edciumlapka teljes deform\u00e1ci\u00f3j\u00e1t m\u00e9ri.<\/p>\n\n\n\n<p>Az \u00edvel\u00e9ssel ellent\u00e9tben \u2013 amely els\u0151sorban az egyenletes g\u00f6rb\u00fcletet \u00edrja le \u2013 a torzul\u00e1s mind a glob\u00e1lis hajl\u00edt\u00e1st, mind a helyi fel\u00fcleti torzul\u00e1sokat mag\u00e1ban foglalja.<\/p>\n\n\n\n<p>Ennek k\u00f6vetkezt\u00e9ben a warp \u00e1ltal\u00e1ban re\u00e1lisabb k\u00e9pet ad a szil\u00edciumlapka t\u00e9nyleges alakj\u00e1r\u00f3l.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mi\u00e9rt fontos a Warp?<\/h3>\n\n\n\n<p>A nagy l\u00e1nc\u00e9rt\u00e9kek a k\u00f6vetkez\u0151ket okozhatj\u00e1k:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>A berendez\u00e9sek kezel\u00e9s\u00e9vel kapcsolatos probl\u00e9m\u00e1k<\/li>\n\n\n\n<li>A v\u00e1kuumbefog\u00e1ssal kapcsolatos probl\u00e9m\u00e1k<\/li>\n\n\n\n<li>Cs\u00f6kkent k\u00f6t\u00e9si hozam<\/li>\n\n\n\n<li>A csomagol\u00e1s megb\u00edzhat\u00f3s\u00e1g\u00e1val kapcsolatos agg\u00e1lyok<\/li>\n<\/ul>\n\n\n\n<p>A Warp k\u00fcl\u00f6n\u00f6sen fontos szerepet j\u00e1tszik a fejlett csomagol\u00e1si technol\u00f3gi\u00e1kban, ahol k\u00fcl\u00f6nb\u00f6z\u0151 h\u0151t\u00e1gul\u00e1si egy\u00fctthat\u00f3val rendelkez\u0151 anyagokat kombin\u00e1lnak egym\u00e1ssal.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u00cdj kontra l\u00e1ndzsa: Mi a k\u00fcl\u00f6nbs\u00e9g?<\/h2>\n\n\n\n<p>B\u00e1r ezeket a kifejez\u00e9seket gyakran egy\u00fctt haszn\u00e1lj\u00e1k, a szil\u00edciumlapka geometri\u00e1j\u00e1nak k\u00fcl\u00f6nb\u00f6z\u0151 aspektusait \u00edrj\u00e1k le.<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><th>Param\u00e9ter<\/th><th>\u00cdj<\/th><th>Warp<\/th><\/tr><tr><td>Int\u00e9zked\u00e9sek<\/td><td>Teljes g\u00f6rb\u00fclet<\/td><td>Teljes alakv\u00e1ltoz\u00e1s<\/td><\/tr><tr><td>Helyi torz\u00edt\u00e1st is tartalmaz<\/td><td>Nem<\/td><td>Igen<\/td><\/tr><tr><td>Jellemz\u0151 \u00e9rt\u00e9k<\/td><td>Kisebb<\/td><td>Nagyobb<\/td><\/tr><tr><td>F\u0151 alkalmaz\u00e1s<\/td><td>Fesz\u00fclts\u00e9gelemz\u00e9s<\/td><td>Csomagol\u00e1s \u00e9s ragaszt\u00e1s<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>A k\u00fcl\u00f6nbs\u00e9get a k\u00f6vetkez\u0151 egyszer\u0171 m\u00f3dszerrel lehet megjegyezni:<\/p>\n\n\n\n<p><strong>A \u201ebow\u201d az ostya g\u00f6rb\u00fclet\u00e9t, a \u201ewarp\u201d pedig annak t\u00e9nyleges alakj\u00e1t jel\u00f6li.<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Hogyan m\u00e9rik a TTV-t, a hajl\u00edt\u00e1st \u00e9s a vet\u00fcl\u00e9st?<\/h2>\n\n\n\n<p>A modern szil\u00edciumlapka-m\u00e9r\u0151technika els\u0151sorban az \u00e9rint\u00e9smentes optikai m\u00e9r\u00e9si technik\u00e1kra t\u00e1maszkodik.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">L\u00e9zeres szkennel\u0151 rendszerek<\/h3>\n\n\n\n<p>A l\u00e9zeralap\u00fa rendszerek mindk\u00e9t szil\u00edciumlapka fel\u00fclet\u00e9t beolvass\u00e1k, \u00e9s r\u00e9szletes vastags\u00e1gi \u00e9s s\u00edkoss\u00e1gi t\u00e9rk\u00e9peket k\u00e9sz\u00edtenek.<\/p>\n\n\n\n<p>Ezek a rendszerek a k\u00f6vetkez\u0151ket k\u00e9pesek m\u00e9rni:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Vastags\u00e1g<\/li>\n\n\n\n<li>TTV<\/li>\n\n\n\n<li>\u00cdj<\/li>\n\n\n\n<li>Warp<\/li>\n<\/ul>\n\n\n\n<p>Sz\u00e9les k\u00f6rben haszn\u00e1lj\u00e1k \u0151ket szil\u00edcium-, zaf\u00edr-, kvarc- \u00e9s SiC-szeletekhez.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Optikai profilom\u00e9terek<\/h3>\n\n\n\n<p>Az optikai profilom\u00e9terek nagy pontoss\u00e1ggal k\u00e9sz\u00edtenek h\u00e1romdimenzi\u00f3s fel\u00fcleti profilokat.<\/p>\n\n\n\n<p>\u00c1ltal\u00e1ban a k\u00f6vetkez\u0151kre haszn\u00e1lj\u00e1k \u0151ket:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Warp-elemz\u00e9s<\/li>\n\n\n\n<li>A felsz\u00edn domborzat\u00e1nak m\u00e9r\u00e9se<\/li>\n\n\n\n<li>S\u00edkfel\u00fcleti ellen\u0151rz\u00e9s<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Feh\u00e9rf\u00e9nyes interferom\u00e9terek<\/h3>\n\n\n\n<p>Az ultraprec\u00edzi\u00f3s alkalmaz\u00e1sok eset\u00e9ben a feh\u00e9rf\u00e9nyes interferometria mikron alatti, s\u0151t ak\u00e1r nanom\u00e9teres szint\u0171 m\u00e9r\u00e9si felbont\u00e1st is biztos\u00edthat.<\/p>\n\n\n\n<p>Ezeket a rendszereket gyakran alkalmazz\u00e1k a MEMS, a fotonika \u00e9s a kutat\u00e1si ter\u00fcleteken.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Jellemz\u0151 ostya-geometriai specifik\u00e1ci\u00f3k<\/h2>\n\n\n\n<p>A TTV, az \u00edvel\u00e9s \u00e9s a hajl\u00edt\u00e1s megengedett \u00e9rt\u00e9kei az ostya anyag\u00e1t\u00f3l \u00e9s az alkalmaz\u00e1st\u00f3l f\u00fcgg\u0151en v\u00e1ltoznak.<\/p>\n\n\n\n<p>Jellemz\u0151 p\u00e9ld\u00e1k:<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td>Oszlop t\u00edpusa<\/td><td>Jellemz\u0151 TTV<\/td><\/tr><tr><td>Szil\u00edcium ostya<\/td><td>1\u20135 \u03bcm<\/td><\/tr><tr><td>Zaf\u00edr ostya<\/td><td>3\u201310 \u03bcm<\/td><\/tr><tr><td>Kvarcszelet<\/td><td>5\u201320 \u03bcm<\/td><\/tr><tr><td>SiC Wafer<\/td><td>2\u201310 \u03bcm<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>A t\u00e9nyleges m\u0171szaki adatok a szil\u00edciumlapka \u00e1tm\u00e9r\u0151j\u00e9t\u0151l, vastags\u00e1g\u00e1t\u00f3l \u00e9s a v\u00e9gfelhaszn\u00e1l\u00e1si k\u00f6vetelm\u00e9nyekt\u0151l f\u00fcggenek.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">K\u00f6vetkeztet\u00e9s<\/h2>\n\n\n\n<p>A TTV, a domborulat \u00e9s a hajl\u00edt\u00e1s olyan alapvet\u0151 param\u00e9terek, amelyeket a szil\u00edciumlapka geometri\u00e1j\u00e1nak \u00e9s s\u00edkoss\u00e1g\u00e1nak \u00e9rt\u00e9kel\u00e9s\u00e9hez haszn\u00e1lnak.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>TTV<\/strong> m\u00e9ri a vastags\u00e1g egyenletess\u00e9g\u00e9t.<\/li>\n\n\n\n<li><strong>\u00cdj<\/strong> m\u00e9ri a szil\u00edciumlapka teljes g\u00f6rb\u00fclet\u00e9t.<\/li>\n\n\n\n<li><strong>Warp<\/strong> a szil\u00edciumlapka teljes deform\u00e1ci\u00f3j\u00e1t m\u00e9ri.<\/li>\n<\/ul>\n\n\n\n<p>A f\u00e9lvezet\u0151gy\u00e1rt\u00e1s folyamatos fejl\u0151d\u00e9s\u00e9vel e param\u00e9terek szigor\u00fabb szab\u00e1lyoz\u00e1sa elengedhetetlen a magasabb hozam, a jobb eszk\u00f6z teljes\u00edtm\u00e9ny \u00e9s a fokozottabb folyamatstabilit\u00e1s el\u00e9r\u00e9s\u00e9hez.<\/p>\n\n\n\n<p>Ak\u00e1r beszerz\u00e9ssel foglalkozik, <a href=\"https:\/\/www.zmsh-semitech.com\/hu\/termekkategoria\/wafer\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#cf2e2e\" class=\"has-inline-color\">szil\u00edciumlemezek, zaf\u00edrlemezek, kvarclemezek vagy szil\u00edcium-karbid hordoz\u00f3k<\/mark><\/a>, a TTV, a hajl\u00edt\u00e1s \u00e9s a torzul\u00e1s meg\u00e9rt\u00e9se seg\u00edthet az alkalmaz\u00e1shoz legmegfelel\u0151bb szil\u00edciumlapka-specifik\u00e1ci\u00f3k kiv\u00e1laszt\u00e1s\u00e1ban.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>In semiconductor manufacturing, wafer quality is about much more than material purity. Even a perfectly grown silicon, sapphire, quartz, or silicon carbide wafer can cause production issues if its geometry is not properly controlled. Among the most important wafer geometry parameters are TTV (Total Thickness Variation), Bow, and Warp. These measurements help engineers evaluate wafer [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2556,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[25],"tags":[44,1514,639,36,1509,637,1090,1518,372,1515,1516,1517,873,131],"class_list":["post-2555","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-technology-applications","tag-advanced-packaging","tag-quartz-wafer","tag-sapphire-wafer","tag-semiconductor-manufacturing","tag-semiconductor-wafer","tag-sic-wafer","tag-silicon-wafer","tag-wafer-bow","tag-wafer-flatness","tag-wafer-geometry","tag-wafer-measurement","tag-wafer-metrology","tag-wafer-ttv","tag-wafer-warp"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/posts\/2555","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/comments?post=2555"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/posts\/2555\/revisions"}],"predecessor-version":[{"id":2557,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/posts\/2555\/revisions\/2557"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media\/2556"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/media?parent=2555"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/categories?post=2555"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/hu\/wp-json\/wp\/v2\/tags?post=2555"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}