{"id":2400,"date":"2026-04-24T06:21:19","date_gmt":"2026-04-24T06:21:19","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2400"},"modified":"2026-04-24T06:21:22","modified_gmt":"2026-04-24T06:21:22","slug":"precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/fr\/product\/precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching\/","title":{"rendered":"Anneau de pr\u00e9cision en silicium (monocristallin \/ polycristallin) pour la gravure par plasma de semi-conducteurs"},"content":{"rendered":"<p data-start=\"228\" data-end=\"558\">\u00a0\u00a0<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2404 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"Anneau de pr\u00e9cision en silicium (monocristallin \/ polycristallin) pour la gravure par plasma de semi-conducteurs\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>L'anneau de silicium (Si Ring) est un composant largement utilis\u00e9 dans les \u00e9quipements de traitement plasma des semi-conducteurs, servant d'anneau de focalisation, d'anneau de bord ou de rev\u00eatement de chambre. Il joue un r\u00f4le cl\u00e9 dans le contr\u00f4le de la distribution du plasma, l'am\u00e9lioration de l'uniformit\u00e9 de la gravure et la protection des composants critiques de la chambre contre l'exposition directe au plasma \u00e0 haute \u00e9nergie.<\/p>\n<p data-start=\"560\" data-end=\"882\">Fabriqu\u00e9s \u00e0 partir de silicium monocristallin ou polycristallin de haute puret\u00e9, les anneaux en silicium offrent une excellente compatibilit\u00e9 avec les proc\u00e9d\u00e9s de fabrication des plaquettes de silicium. Cette compatibilit\u00e9 intrins\u00e8que des mat\u00e9riaux r\u00e9duit consid\u00e9rablement les risques de contamination, ce qui fait des anneaux en silicium un choix privil\u00e9gi\u00e9 dans de nombreux environnements de fabrication de semi-conducteurs.<\/p>\n<p data-start=\"884\" data-end=\"1239\">Pendant leur fonctionnement, les anneaux de silicium sont expos\u00e9s \u00e0 un plasma r\u00e9actif g\u00e9n\u00e9r\u00e9 par des gaz tels que CF\u2084, SF\u2086, NF\u2083 et Cl\u2082. Ces conditions provoquent progressivement l'\u00e9rosion du mat\u00e9riau et la d\u00e9gradation de la surface. Par cons\u00e9quent, les anneaux de silicium sont consid\u00e9r\u00e9s comme des consommables critiques pour les semi-conducteurs, n\u00e9cessitant un remplacement p\u00e9riodique pour maintenir une performance et un rendement optimaux du processus.<\/p>\n<p data-start=\"1241\" data-end=\"1430\">Compar\u00e9s aux anneaux en SiC, les anneaux en silicium sont plus \u00e9conomiques et plus faciles \u00e0 usiner, ce qui les rend id\u00e9aux pour les applications o\u00f9 les cycles de remplacement sont acceptables et o\u00f9 le contr\u00f4le des co\u00fbts est important.<\/p>\n<hr data-start=\"1432\" data-end=\"1435\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1437\" data-end=\"1457\">Caract\u00e9ristiques principales<\/h2>\n<ul data-start=\"1458\" data-end=\"2054\">\n<li data-section-id=\"1wvx41j\" data-start=\"1458\" data-end=\"1549\">Mat\u00e9riau en silicium de haute puret\u00e9 : Disponible sous forme monocristalline et polycristalline<\/li>\n<li data-section-id=\"16rlosp\" data-start=\"1550\" data-end=\"1653\">Excellente compatibilit\u00e9 avec les processus : Id\u00e9al pour le traitement des plaquettes de silicium avec un faible risque de contamination<\/li>\n<li data-section-id=\"h5tu82\" data-start=\"1654\" data-end=\"1727\">Propri\u00e9t\u00e9s \u00e9lectriques stables : Favorise un comportement coh\u00e9rent du plasma<\/li>\n<li data-section-id=\"qwtj7n\" data-start=\"1728\" data-end=\"1814\">Usinage de pr\u00e9cision : Tol\u00e9rance serr\u00e9e (&lt;10 \u03bcm) pour les outils avanc\u00e9s pour semi-conducteurs.<\/li>\n<li data-section-id=\"cd4ksl\" data-start=\"1815\" data-end=\"1903\">Options de r\u00e9sistivit\u00e9 multiples : Adapt\u00e9 aux diff\u00e9rentes exigences en mati\u00e8re de contr\u00f4le du plasma<\/li>\n<li data-section-id=\"vfz8a3\" data-start=\"1904\" data-end=\"1984\">Solution rentable : Co\u00fbt initial inf\u00e9rieur \u00e0 celui des solutions SiC<\/li>\n<li data-section-id=\"1q6rj8k\" data-start=\"1985\" data-end=\"2054\">Soutien \u00e0 la conception sur mesure : G\u00e9om\u00e9tries et tailles complexes disponibles<\/li>\n<\/ul>\n<hr data-start=\"2056\" data-end=\"2059\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2061\" data-end=\"2093\">Sp\u00e9cifications techniques<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2095\" data-end=\"2793\">\n<thead data-start=\"2095\" data-end=\"2124\">\n<tr data-start=\"2095\" data-end=\"2124\">\n<th class=\"\" data-start=\"2095\" data-end=\"2107\" data-col-size=\"sm\">Param\u00e8tres<\/th>\n<th class=\"\" data-start=\"2107\" data-end=\"2124\" data-col-size=\"md\">Sp\u00e9cifications<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2152\" data-end=\"2793\">\n<tr data-start=\"2152\" data-end=\"2215\">\n<td data-start=\"2152\" data-end=\"2163\" data-col-size=\"sm\">Mat\u00e9riau<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2215\">Silicium monocristallin \/ Silicium polycristallin<\/td>\n<\/tr>\n<tr data-start=\"2216\" data-end=\"2263\">\n<td data-start=\"2216\" data-end=\"2225\" data-col-size=\"sm\">La puret\u00e9<\/td>\n<td data-col-size=\"md\" data-start=\"2225\" data-end=\"2263\">\u2265 99.999% (qualit\u00e9 semi-conducteur 5N)<\/td>\n<\/tr>\n<tr data-start=\"2264\" data-end=\"2297\">\n<td data-start=\"2264\" data-end=\"2281\" data-col-size=\"sm\">Diam\u00e8tre (Max)<\/td>\n<td data-col-size=\"md\" data-start=\"2281\" data-end=\"2297\">Jusqu'\u00e0 480 mm<\/td>\n<\/tr>\n<tr data-start=\"2298\" data-end=\"2340\">\n<td data-start=\"2298\" data-end=\"2310\" data-col-size=\"sm\">\u00c9paisseur<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2340\">Sur mesure (typiquement 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2341\" data-end=\"2376\">\n<td data-start=\"2341\" data-end=\"2361\" data-col-size=\"sm\">R\u00e9sistivit\u00e9 (faible)<\/td>\n<td data-col-size=\"md\" data-start=\"2361\" data-end=\"2376\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2377\" data-end=\"2414\">\n<td data-start=\"2377\" data-end=\"2400\" data-col-size=\"sm\">R\u00e9sistivit\u00e9 (moyenne)<\/td>\n<td data-col-size=\"md\" data-start=\"2400\" data-end=\"2414\">1 - 4 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2415\" data-end=\"2452\">\n<td data-start=\"2415\" data-end=\"2436\" data-col-size=\"sm\">R\u00e9sistivit\u00e9 (\u00e9lev\u00e9e)<\/td>\n<td data-col-size=\"md\" data-start=\"2436\" data-end=\"2452\">70 - 90 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2453\" data-end=\"2492\">\n<td data-start=\"2453\" data-end=\"2484\" data-col-size=\"sm\">Uniformit\u00e9 de la r\u00e9sistivit\u00e9 (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2484\" data-end=\"2492\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2493\" data-end=\"2543\">\n<td data-start=\"2493\" data-end=\"2513\" data-col-size=\"sm\">\u00c9tat de surface<\/td>\n<td data-col-size=\"md\" data-start=\"2513\" data-end=\"2543\">Polis \/ rod\u00e9s \/ rectifi\u00e9s<\/td>\n<\/tr>\n<tr data-start=\"2544\" data-end=\"2605\">\n<td data-start=\"2544\" data-end=\"2569\" data-col-size=\"sm\">Rugosit\u00e9 de la surface (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2569\" data-end=\"2605\">\u2264 0,8 \u03bcm (le polissage peut \u00eatre inf\u00e9rieur)<\/td>\n<\/tr>\n<tr data-start=\"2606\" data-end=\"2639\">\n<td data-start=\"2606\" data-end=\"2628\" data-col-size=\"sm\">Usinage de pr\u00e9cision<\/td>\n<td data-col-size=\"md\" data-start=\"2628\" data-end=\"2639\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2640\" data-end=\"2682\">\n<td data-start=\"2640\" data-end=\"2651\" data-col-size=\"sm\">Plan\u00e9it\u00e9<\/td>\n<td data-col-size=\"md\" data-start=\"2651\" data-end=\"2682\">\u2264 30 \u03bcm (en fonction de la taille)<\/td>\n<\/tr>\n<tr data-start=\"2683\" data-end=\"2728\">\n<td data-start=\"2683\" data-end=\"2695\" data-col-size=\"sm\">Type d'ar\u00eate<\/td>\n<td data-col-size=\"md\" data-start=\"2695\" data-end=\"2728\">Chanfrein \/ Rayon personnalisable<\/td>\n<\/tr>\n<tr data-start=\"2729\" data-end=\"2793\">\n<td data-start=\"2729\" data-end=\"2747\" data-col-size=\"sm\">Contr\u00f4le de la qualit\u00e9<\/td>\n<td data-col-size=\"md\" data-start=\"2747\" data-end=\"2793\">Pas de fissures, d'\u00e9clats, de rayures, de contamination<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2795\" data-end=\"2798\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2800\" data-end=\"2820\">Applications<\/h2>\n<p data-start=\"2821\" data-end=\"2903\">Les anneaux de silicium sont essentiels dans divers environnements de traitement des semi-conducteurs :<\/p>\n<ul data-start=\"2905\" data-end=\"3108\">\n<li data-section-id=\"qzqq98\" data-start=\"2905\" data-end=\"2943\">Syst\u00e8mes de gravure par plasma (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"2944\" data-end=\"2987\">D\u00e9p\u00f4t chimique en phase vapeur (CVD \/ PECVD)<\/li>\n<li data-section-id=\"1hekjdg\" data-start=\"2988\" data-end=\"3025\">Composants de la bague de mise au point \/ de la bague de bordure<\/li>\n<li data-section-id=\"y1zl6l\" data-start=\"3026\" data-end=\"3065\">Pi\u00e8ces de protection et de rev\u00eatement de la chambre<\/li>\n<li data-section-id=\"83pt8g\" data-start=\"3066\" data-end=\"3108\">Applications de contr\u00f4le du plasma sur le bord des plaquettes<\/li>\n<\/ul>\n<p data-start=\"3110\" data-end=\"3235\">Ils sont largement utilis\u00e9s dans les n\u0153uds de processus matures et interm\u00e9diaires o\u00f9 la rentabilit\u00e9 et la stabilit\u00e9 des performances sont requises.<\/p>\n<p data-start=\"3110\" data-end=\"3235\"><img decoding=\"async\" class=\"aligncenter wp-image-2406 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg\" alt=\"Anneau de pr\u00e9cision en silicium (monocristallin \/ polycristallin) pour la gravure par plasma de semi-conducteurs\" width=\"1024\" height=\"681\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3237\" data-end=\"3240\" \/>\n<h2 data-section-id=\"1misgzs\" data-start=\"3242\" data-end=\"3274\">Avantages et positionnement<\/h2>\n<p data-start=\"3275\" data-end=\"3371\">Les anneaux en silicium offrent une solution \u00e9quilibr\u00e9e entre performance et co\u00fbt. Par rapport aux anneaux en SiC :<\/p>\n<ul data-start=\"3373\" data-end=\"3681\">\n<li data-section-id=\"qgkkrh\" data-start=\"3373\" data-end=\"3449\">Co\u00fbt r\u00e9duit : id\u00e9al pour les sc\u00e9narios de remplacement important ou sensible au budget<\/li>\n<li data-section-id=\"fe5ihf\" data-start=\"3450\" data-end=\"3533\">Bonne compatibilit\u00e9 avec les proc\u00e9d\u00e9s : Particuli\u00e8rement adapt\u00e9 aux proc\u00e9d\u00e9s \u00e0 base de silicium<\/li>\n<li data-section-id=\"1wgvfgt\" data-start=\"3534\" data-end=\"3604\">Fabrication flexible : Plus facile \u00e0 usiner dans des conceptions complexes<\/li>\n<li data-section-id=\"1855g4l\" data-start=\"3605\" data-end=\"3681\">Des performances fiables : \u00c9prouv\u00e9e dans la production de semi-conducteurs \u00e0 grande \u00e9chelle<\/li>\n<\/ul>\n<p data-start=\"3683\" data-end=\"3894\">Toutefois, dans des conditions de plasma extr\u00eamement difficiles, les anneaux en silicium peuvent s'user plus rapidement que les anneaux en SiC. Par cons\u00e9quent, le choix du mat\u00e9riau doit \u00eatre bas\u00e9 sur l'intensit\u00e9 du processus, les attentes en mati\u00e8re de dur\u00e9e de vie et les consid\u00e9rations de co\u00fbt.<\/p>\n<p data-start=\"3683\" data-end=\"3894\"><img decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"3896\" data-end=\"3899\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"3901\" data-end=\"3912\">FAQ<\/h2>\n<p data-start=\"3914\" data-end=\"4070\">Q1 : L'anneau de silicone est-il un produit consommable ?<br data-start=\"3963\" data-end=\"3966\" \/>Oui. Il est consid\u00e9r\u00e9 comme un consommable critique pour les semi-conducteurs en raison de l'\u00e9rosion progressive dans les environnements plasma.<\/p>\n<p data-start=\"4072\" data-end=\"4291\">Q2 : Quelle est la diff\u00e9rence entre les anneaux de silicium monocristallin et polycristallin ?<br data-start=\"4160\" data-end=\"4163\" \/>Le silicium monocristallin offre une meilleure uniformit\u00e9 et de meilleures propri\u00e9t\u00e9s \u00e9lectriques, tandis que le silicium polycristallin est plus rentable.<\/p>\n<p data-start=\"4293\" data-end=\"4452\">Q3 : La bague en silicone peut-elle \u00eatre personnalis\u00e9e ?<br data-start=\"4336\" data-end=\"4339\" \/>Oui, la taille, l'\u00e9paisseur, la r\u00e9sistivit\u00e9, la finition de surface et la g\u00e9om\u00e9trie peuvent \u00eatre personnalis\u00e9es selon vos dessins.<\/p>\n<p data-start=\"4454\" data-end=\"4622\">Q4 : \u00c0 quelle fr\u00e9quence un anneau en silicone doit-il \u00eatre remplac\u00e9 ?<br data-start=\"4509\" data-end=\"4512\" \/>Cela d\u00e9pend des conditions du processus, mais g\u00e9n\u00e9ralement plus fr\u00e9quemment que les anneaux en SiC en raison d'une plus faible r\u00e9sistance au plasma.<\/p>\n<p data-start=\"4624\" data-end=\"4743\">Q5 : Quel est le d\u00e9lai de livraison habituel ?<br data-start=\"4662\" data-end=\"4665\" \/>La production prend g\u00e9n\u00e9ralement de 3 \u00e0 5 semaines en fonction des sp\u00e9cifications et de la quantit\u00e9.<\/p>","protected":false},"excerpt":{"rendered":"<p>L'anneau de silicium (Si Ring) est un composant largement utilis\u00e9 dans les \u00e9quipements de traitement plasma des semi-conducteurs, servant d'anneau de focalisation, d'anneau de bord ou de rev\u00eatement de chambre. Il joue un r\u00f4le cl\u00e9 dans le contr\u00f4le de la distribution du plasma, l'am\u00e9lioration de l'uniformit\u00e9 de la gravure et la protection des composants critiques de la chambre contre l'exposition directe au plasma \u00e0 haute 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