{"id":2400,"date":"2026-04-24T06:21:19","date_gmt":"2026-04-24T06:21:19","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2400"},"modified":"2026-04-24T06:21:22","modified_gmt":"2026-04-24T06:21:22","slug":"precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/fi\/product\/precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching\/","title":{"rendered":"Tarkkuus Silicon Ring (yksikiteinen \/ monikiteinen) puolijohteiden plasmasy\u00f6pint\u00e4\u00e4n"},"content":{"rendered":"<p data-start=\"228\" data-end=\"558\">\u00a0\u00a0<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2404 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"Tarkkuus Silicon Ring (yksikiteinen \/ monikiteinen) puolijohteiden plasmasy\u00f6pint\u00e4\u00e4n\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Piirengas (Si-rengas) on laajalti k\u00e4ytetty komponentti puolijohdeplasman k\u00e4sittelylaitteissa, ja se toimii fokusointirenkaana, reunarenkaana tai kammiovuorausrenkaana. Se on avainasemassa plasman jakautumisen hallinnassa, sy\u00f6vytyksen tasaisuuden parantamisessa ja kriittisten kammiokomponenttien suojaamisessa suoralta altistumiselta korkeaenergiselle plasmalle.<\/p>\n<p data-start=\"560\" data-end=\"882\">Si-renkaat valmistetaan eritt\u00e4in puhtaasta yksikiteisest\u00e4 piist\u00e4 tai monikiteisest\u00e4 piist\u00e4, ja ne sopivat erinomaisesti yhteen piikiekkoprosessien kanssa. T\u00e4m\u00e4 materiaalin luontainen yhteensopivuus v\u00e4hent\u00e4\u00e4 merkitt\u00e4v\u00e4sti kontaminaatioriski\u00e4, mink\u00e4 vuoksi piirenkaat ovat ensisijainen valinta monissa puolijohdevalmistusymp\u00e4rist\u00f6iss\u00e4.<\/p>\n<p data-start=\"884\" data-end=\"1239\">Toiminnan aikana piirenkaat altistuvat reaktiiviselle plasmalle, jota tuottavat kaasut, kuten CF\u2084, SF\u2086, NF\u2083 ja Cl\u2082. N\u00e4m\u00e4 olosuhteet aiheuttavat v\u00e4hitellen materiaalin eroosiota ja pinnan hajoamista. T\u00e4m\u00e4n vuoksi piirenkaat luokitellaan kriittisiksi puolijohdekulutustavaroiksi, jotka on vaihdettava s\u00e4\u00e4nn\u00f6llisesti, jotta prosessin optimaalinen suorituskyky ja tuotto voidaan s\u00e4ilytt\u00e4\u00e4.<\/p>\n<p data-start=\"1241\" data-end=\"1430\">SiC-renkaisiin verrattuna piirenkaat ovat kustannustehokkaampia ja helpommin ty\u00f6stett\u00e4vi\u00e4, joten ne soveltuvat erinomaisesti sovelluksiin, joissa vaihtosyklit ovat hyv\u00e4ksytt\u00e4vi\u00e4 ja kustannusten hallinta on t\u00e4rke\u00e4\u00e4.<\/p>\n<hr data-start=\"1432\" data-end=\"1435\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1437\" data-end=\"1457\">T\u00e4rkeimm\u00e4t ominaisuudet<\/h2>\n<ul data-start=\"1458\" data-end=\"2054\">\n<li data-section-id=\"1wvx41j\" data-start=\"1458\" data-end=\"1549\">Eritt\u00e4in puhdasta piit\u00e4 Materiaali: Pii: Saatavana yksikiteisen\u00e4 ja monikiteisen\u00e4.<\/li>\n<li data-section-id=\"16rlosp\" data-start=\"1550\" data-end=\"1653\">Erinomainen prosessin yhteensopivuus: Ihanteellinen piikiekkojen k\u00e4sittelyyn, jossa kontaminaatioriski on pieni.<\/li>\n<li data-section-id=\"h5tu82\" data-start=\"1654\" data-end=\"1727\">Vakaat s\u00e4hk\u00f6iset ominaisuudet: Tukee johdonmukaista plasmak\u00e4ytt\u00e4ytymist\u00e4<\/li>\n<li data-section-id=\"qwtj7n\" data-start=\"1728\" data-end=\"1814\">Tarkkuuskoneistus: Tiukat toleranssit (&lt;10 \u03bcm) kehittyneiss\u00e4 puolijohdety\u00f6kaluissa.<\/li>\n<li data-section-id=\"cd4ksl\" data-start=\"1815\" data-end=\"1903\">Useita resistiivisyysvaihtoehtoja: Vastus: Sopii erilaisiin plasmanohjausvaatimuksiin<\/li>\n<li data-section-id=\"vfz8a3\" data-start=\"1904\" data-end=\"1984\">Kustannustehokas ratkaisu: SiC-vaihtoehtoihin verrattuna alhaisemmat aloituskustannukset<\/li>\n<li data-section-id=\"1q6rj8k\" data-start=\"1985\" data-end=\"2054\">Mukautetun suunnittelun tuki: Monimutkaiset geometriat ja koot saatavilla<\/li>\n<\/ul>\n<hr data-start=\"2056\" data-end=\"2059\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2061\" data-end=\"2093\">Tekniset tiedot<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2095\" data-end=\"2793\">\n<thead data-start=\"2095\" data-end=\"2124\">\n<tr data-start=\"2095\" data-end=\"2124\">\n<th class=\"\" data-start=\"2095\" data-end=\"2107\" data-col-size=\"sm\">Parametri<\/th>\n<th class=\"\" data-start=\"2107\" data-end=\"2124\" data-col-size=\"md\">Tekniset tiedot<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2152\" data-end=\"2793\">\n<tr data-start=\"2152\" data-end=\"2215\">\n<td data-start=\"2152\" data-end=\"2163\" data-col-size=\"sm\">Materiaali<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2215\">Yksikiteinen pii \/ monikiteinen pii<\/td>\n<\/tr>\n<tr data-start=\"2216\" data-end=\"2263\">\n<td data-start=\"2216\" data-end=\"2225\" data-col-size=\"sm\">Puhtaus<\/td>\n<td data-col-size=\"md\" data-start=\"2225\" data-end=\"2263\">\u2265 99,999% (5N puolijohdelaatu)<\/td>\n<\/tr>\n<tr data-start=\"2264\" data-end=\"2297\">\n<td data-start=\"2264\" data-end=\"2281\" data-col-size=\"sm\">Halkaisija (Max)<\/td>\n<td data-col-size=\"md\" data-start=\"2281\" data-end=\"2297\">Jopa 480 mm<\/td>\n<\/tr>\n<tr data-start=\"2298\" data-end=\"2340\">\n<td data-start=\"2298\" data-end=\"2310\" data-col-size=\"sm\">Paksuus<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2340\">Mukautettu (tyypillisesti 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2341\" data-end=\"2376\">\n<td data-start=\"2341\" data-end=\"2361\" data-col-size=\"sm\">Resistiivisyys (alhainen)<\/td>\n<td data-col-size=\"md\" data-start=\"2361\" data-end=\"2376\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2377\" data-end=\"2414\">\n<td data-start=\"2377\" data-end=\"2400\" data-col-size=\"sm\">Resistiivisyys (Medium)<\/td>\n<td data-col-size=\"md\" data-start=\"2400\" data-end=\"2414\">1 - 4 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2415\" data-end=\"2452\">\n<td data-start=\"2415\" data-end=\"2436\" data-col-size=\"sm\">Resistiivisyys (korkea)<\/td>\n<td data-col-size=\"md\" data-start=\"2436\" data-end=\"2452\">70 - 90 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2453\" data-end=\"2492\">\n<td data-start=\"2453\" data-end=\"2484\" data-col-size=\"sm\">Vastuksen tasaisuus (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2484\" data-end=\"2492\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2493\" data-end=\"2543\">\n<td data-start=\"2493\" data-end=\"2513\" data-col-size=\"sm\">Pinnan kunto<\/td>\n<td data-col-size=\"md\" data-start=\"2513\" data-end=\"2543\">Kiillotettu \/ hiottu \/ hiottu<\/td>\n<\/tr>\n<tr data-start=\"2544\" data-end=\"2605\">\n<td data-start=\"2544\" data-end=\"2569\" data-col-size=\"sm\">Pinnan karheus (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2569\" data-end=\"2605\">\u2264 0,8 \u03bcm (kiillotettu voi olla pienempi)<\/td>\n<\/tr>\n<tr data-start=\"2606\" data-end=\"2639\">\n<td data-start=\"2606\" data-end=\"2628\" data-col-size=\"sm\">Koneistuksen tarkkuus<\/td>\n<td data-col-size=\"md\" data-start=\"2628\" data-end=\"2639\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2640\" data-end=\"2682\">\n<td data-start=\"2640\" data-end=\"2651\" data-col-size=\"sm\">Tasaisuus<\/td>\n<td data-col-size=\"md\" data-start=\"2651\" data-end=\"2682\">\u2264 30 \u03bcm (koosta riippuen)<\/td>\n<\/tr>\n<tr data-start=\"2683\" data-end=\"2728\">\n<td data-start=\"2683\" data-end=\"2695\" data-col-size=\"sm\">Reunan tyyppi<\/td>\n<td data-col-size=\"md\" data-start=\"2695\" data-end=\"2728\">Viiste \/ s\u00e4de muokattavissa<\/td>\n<\/tr>\n<tr data-start=\"2729\" data-end=\"2793\">\n<td data-start=\"2729\" data-end=\"2747\" data-col-size=\"sm\">Laadunvalvonta<\/td>\n<td data-col-size=\"md\" data-start=\"2747\" data-end=\"2793\">Ei halkeamia, lohkeamia, naarmuja, saastumista.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2795\" data-end=\"2798\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2800\" data-end=\"2820\">Sovellukset<\/h2>\n<p data-start=\"2821\" data-end=\"2903\">Piirenkaat ovat v\u00e4ltt\u00e4m\u00e4tt\u00f6mi\u00e4 erilaisissa puolijohteiden k\u00e4sittely-ymp\u00e4rist\u00f6iss\u00e4:<\/p>\n<ul data-start=\"2905\" data-end=\"3108\">\n<li data-section-id=\"qzqq98\" data-start=\"2905\" data-end=\"2943\">Plasmasy\u00f6vytysj\u00e4rjestelm\u00e4t (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"2944\" data-end=\"2987\">Kemiallinen kaasufaasipinnoitus (CVD \/ PECVD)<\/li>\n<li data-section-id=\"1hekjdg\" data-start=\"2988\" data-end=\"3025\">Tarkennusrenkaan \/ reunarenkaan osat<\/li>\n<li data-section-id=\"y1zl6l\" data-start=\"3026\" data-end=\"3065\">Kammion suoja- ja vuorausosat<\/li>\n<li data-section-id=\"83pt8g\" data-start=\"3066\" data-end=\"3108\">Kiekon reunan plasmanhallintasovellukset<\/li>\n<\/ul>\n<p data-start=\"3110\" data-end=\"3235\">Niit\u00e4 k\u00e4ytet\u00e4\u00e4n laajalti sek\u00e4 kehittyneiss\u00e4 ett\u00e4 v\u00e4livaiheen prosessisolmuissa, joissa vaaditaan kustannustehokkuutta ja vakaata suorituskyky\u00e4.<\/p>\n<p data-start=\"3110\" data-end=\"3235\"><img decoding=\"async\" class=\"aligncenter wp-image-2406 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg\" alt=\"Tarkkuus Silicon Ring (yksikiteinen \/ monikiteinen) puolijohteiden plasmasy\u00f6pint\u00e4\u00e4n\" width=\"1024\" height=\"681\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3237\" data-end=\"3240\" \/>\n<h2 data-section-id=\"1misgzs\" data-start=\"3242\" data-end=\"3274\">Edut ja asemointi<\/h2>\n<p data-start=\"3275\" data-end=\"3371\">Piirenkaat tarjoavat tasapainoisen ratkaisun suorituskyvyn ja kustannusten v\u00e4lill\u00e4. Verrattuna SiC-renkaisiin:<\/p>\n<ul data-start=\"3373\" data-end=\"3681\">\n<li data-section-id=\"qgkkrh\" data-start=\"3373\" data-end=\"3449\">Alhaisemmat kustannukset: ihanteellinen budjettiherkkiin tai paljon korvauksia vaativiin skenaarioihin.<\/li>\n<li data-section-id=\"fe5ihf\" data-start=\"3450\" data-end=\"3533\">Hyv\u00e4 prosessin yhteensopivuus: Erityisen sopiva piipohjaisiin prosesseihin<\/li>\n<li data-section-id=\"1wgvfgt\" data-start=\"3534\" data-end=\"3604\">Joustava valmistus: Helpompi ty\u00f6st\u00e4\u00e4 monimutkaisia malleja<\/li>\n<li data-section-id=\"1855g4l\" data-start=\"3605\" data-end=\"3681\">Luotettava suorituskyky: Puolijohdetuotanto: Todistettu laajamittaisessa puolijohdetuotannossa<\/li>\n<\/ul>\n<p data-start=\"3683\" data-end=\"3894\">Eritt\u00e4in ankarissa plasmaolosuhteissa piirenkaat voivat kuitenkin kulua nopeammin kuin SiC-renkaat. Siksi materiaalin valinnassa olisi otettava huomioon prosessin voimakkuus, elinkaariodotukset ja kustannusn\u00e4k\u00f6kohdat.<\/p>\n<p data-start=\"3683\" data-end=\"3894\"><img decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"3896\" data-end=\"3899\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"3901\" data-end=\"3912\">FAQ<\/h2>\n<p data-start=\"3914\" data-end=\"4070\">Kysymys 1: Onko piirengas kulutustuote?<br data-start=\"3963\" data-end=\"3966\" \/>Kyll\u00e4. Sit\u00e4 pidet\u00e4\u00e4n kriittisen\u00e4 puolijohdekulutusaineena, koska se kuluu v\u00e4hitellen plasmaymp\u00e4rist\u00f6ss\u00e4.<\/p>\n<p data-start=\"4072\" data-end=\"4291\">Kysymys 2: Mit\u00e4 eroa on yksikiteisten ja monikiteisten piirenkaiden v\u00e4lill\u00e4?<br data-start=\"4160\" data-end=\"4163\" \/>Yksikiteinen pii tarjoaa paremman tasalaatuisuuden ja paremmat s\u00e4hk\u00f6iset ominaisuudet, kun taas monikiteinen pii on kustannustehokkaampaa.<\/p>\n<p data-start=\"4293\" data-end=\"4452\">Q3: Voiko silikonirengasta r\u00e4\u00e4t\u00e4l\u00f6id\u00e4?<br data-start=\"4336\" data-end=\"4339\" \/>Kyll\u00e4. Koko, paksuus, resistiivisyys, pintak\u00e4sittely ja geometria voidaan r\u00e4\u00e4t\u00e4l\u00f6id\u00e4 piirustusten mukaan.<\/p>\n<p data-start=\"4454\" data-end=\"4622\">Kysymys 4: Kuinka usein silikonirengas on vaihdettava?<br data-start=\"4509\" data-end=\"4512\" \/>Riippuu prosessiolosuhteista, mutta tyypillisesti useammin kuin SiC-renkaat, koska plasmavastus on pienempi.<\/p>\n<p data-start=\"4624\" data-end=\"4743\">Q5: Mik\u00e4 on tyypillinen toimitusaika?<br data-start=\"4662\" data-end=\"4665\" \/>Tuotanto kest\u00e4\u00e4 yleens\u00e4 3-5 viikkoa m\u00e4\u00e4rittelyist\u00e4 ja m\u00e4\u00e4r\u00e4st\u00e4 riippuen.<\/p>","protected":false},"excerpt":{"rendered":"<p>Piirengas (Si-rengas) on laajalti k\u00e4ytetty komponentti puolijohdeplasman k\u00e4sittelylaitteissa, ja se toimii fokusointirenkaana, reunarenkaana tai kammiovuorausrenkaana. Se on avainasemassa plasman jakautumisen hallinnassa, sy\u00f6vytyksen tasaisuuden parantamisessa ja kriittisten kammiokomponenttien suojaamisessa suoralta altistumiselta korkeaenergiselle 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