{"id":2389,"date":"2026-04-24T05:55:23","date_gmt":"2026-04-24T05:55:23","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2389"},"modified":"2026-04-24T05:55:25","modified_gmt":"2026-04-24T05:55:25","slug":"cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/fi\/product\/cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching\/","title":{"rendered":"CVD piikarbidi SiC rengas puolijohteiden plasma sy\u00f6vytt\u00e4miseen"},"content":{"rendered":"<p data-start=\"213\" data-end=\"577\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2392 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"CVD piikarbidi SiC rengas puolijohteiden plasma sy\u00f6vytt\u00e4miseen\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>SiC-rengas (piikarbidirengas) on korkean suorituskyvyn komponentti, jota k\u00e4ytet\u00e4\u00e4n laajalti puolijohdeplasman k\u00e4sittelylaitteissa, erityisesti sy\u00f6vytys- ja depositiokammioissa. T\u00e4m\u00e4 tuote on valmistettu CVD-piikarbidista (Chemical Vapor Deposition), ja se kest\u00e4\u00e4 poikkeuksellisen hyvin plasmaeroosiota, korkeita l\u00e4mp\u00f6tiloja ja aggressiivisia kemiallisia ymp\u00e4rist\u00f6j\u00e4.<\/p>\n<p data-start=\"579\" data-end=\"989\">Puolijohteiden valmistuksessa kammiokomponentit altistuvat jatkuvasti reaktiivisille kaasuille, kuten fluoriin ja klooriin perustuville kemiallisille aineille (CF\u2084, SF\u2086, Cl\u2082), sek\u00e4 suurienergiselle ionipommitukselle. T\u00e4llaisissa olosuhteissa perinteiset piikomponentit hajoavat yleens\u00e4 nopeammin. Sit\u00e4 vastoin SiC-renkaat tarjoavat huomattavasti paremman kest\u00e4vyyden, pienemm\u00e4n hiukkasten muodostumisen ja paremman prosessin vakauden.<\/p>\n<p data-start=\"991\" data-end=\"1355\">Erinomaisen mekaanisen lujuutensa, l\u00e4mm\u00f6njohtavuutensa ja kemiallisen kest\u00e4vyytens\u00e4 ansiosta CVD-SiC:t\u00e4 pidet\u00e4\u00e4n yhten\u00e4 seuraavan sukupolven puolijohdelaitteiden luotettavimmista materiaaleista. SiC-renkaat asennetaan tyypillisesti fokusrenkaiksi, reunarenkaiksi tai kammion suojarenkaiksi, jotka auttavat hallitsemaan plasman jakautumista ja suojaamaan kriittisi\u00e4 kammion osia.<\/p>\n<p data-start=\"1357\" data-end=\"1595\">N\u00e4m\u00e4 renkaat on luokiteltu kriittisiksi puolijohdekulutustavaroiksi, ja niiden k\u00e4ytt\u00f6ik\u00e4 on paljon pidempi kuin perinteisten piirenkaiden, joten ne soveltuvat erinomaisesti kehittyneisiin prosessisolmukohtiin ja korkean l\u00e4pimenon tuotantoymp\u00e4rist\u00f6ihin.<\/p>\n<hr data-start=\"1597\" data-end=\"1600\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1602\" data-end=\"1622\">T\u00e4rkeimm\u00e4t ominaisuudet<\/h2>\n<p><img decoding=\"async\" class=\"size-medium wp-image-2390 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul data-start=\"1623\" data-end=\"2189\">\n<li data-section-id=\"185xteb\" data-start=\"1623\" data-end=\"1725\">Eritt\u00e4in puhdas CVD SiC Materiaali: Varmistaa erinomaisen rakenteellisen eheyden ja minimaalisen kontaminaation<\/li>\n<li data-section-id=\"103qh1t\" data-start=\"1726\" data-end=\"1822\">Erinomainen plasmakest\u00e4vyys: Erinomainen kest\u00e4vyys fluori- ja klooripohjaista plasmaa vastaan.<\/li>\n<li data-section-id=\"19jl5gi\" data-start=\"1823\" data-end=\"1924\">Korkean l\u00e4mp\u00f6tilan stabiilisuus: S\u00e4ilytt\u00e4\u00e4 suorituskyvyn korkean l\u00e4mp\u00f6tilan k\u00e4sittely-ymp\u00e4rist\u00f6iss\u00e4.<\/li>\n<li data-section-id=\"ixqmoc\" data-start=\"1925\" data-end=\"2002\">V\u00e4h\u00e4inen hiukkastuotanto: Parantaa kiekkojen saantoa ja prosessin puhtautta.<\/li>\n<li data-section-id=\"nx34my\" data-start=\"2003\" data-end=\"2084\">Pidennetty k\u00e4ytt\u00f6ik\u00e4: Tyypillisesti useita kertoja pidempi kuin piikomponentit<\/li>\n<li data-section-id=\"14jsdwf\" data-start=\"2085\" data-end=\"2189\">Tarkkuuskoneistus: Tiukat toleranssit (&lt;10 \u03bcm) saumatonta integrointia varten puolijohdety\u00f6kaluihin.<\/li>\n<\/ul>\n<hr data-start=\"2191\" data-end=\"2194\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2196\" data-end=\"2228\">Tekniset tiedot<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2230\" data-end=\"2883\">\n<thead data-start=\"2230\" data-end=\"2259\">\n<tr data-start=\"2230\" data-end=\"2259\">\n<th class=\"\" data-start=\"2230\" data-end=\"2242\" data-col-size=\"sm\">Parametri<\/th>\n<th class=\"\" data-start=\"2242\" data-end=\"2259\" data-col-size=\"md\">Tekniset tiedot<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2287\" data-end=\"2883\">\n<tr data-start=\"2287\" data-end=\"2327\">\n<td data-start=\"2287\" data-end=\"2298\" data-col-size=\"sm\">Materiaali<\/td>\n<td data-col-size=\"md\" data-start=\"2298\" data-end=\"2327\">CVD piikarbidi (SiC)<\/td>\n<\/tr>\n<tr data-start=\"2328\" data-end=\"2348\">\n<td data-start=\"2328\" data-end=\"2337\" data-col-size=\"sm\">Puhtaus<\/td>\n<td data-col-size=\"md\" data-start=\"2337\" data-end=\"2348\">\u2265 99,9%<\/td>\n<\/tr>\n<tr data-start=\"2349\" data-end=\"2374\">\n<td data-start=\"2349\" data-end=\"2359\" data-col-size=\"sm\">Tiheys<\/td>\n<td data-col-size=\"md\" data-start=\"2359\" data-end=\"2374\">\u2265 3,1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"2375\" data-end=\"2408\">\n<td data-start=\"2375\" data-end=\"2392\" data-col-size=\"sm\">Halkaisija (Max)<\/td>\n<td data-col-size=\"md\" data-start=\"2392\" data-end=\"2408\">Jopa 370 mm<\/td>\n<\/tr>\n<tr data-start=\"2409\" data-end=\"2451\">\n<td data-start=\"2409\" data-end=\"2421\" data-col-size=\"sm\">Paksuus<\/td>\n<td data-col-size=\"md\" data-start=\"2421\" data-end=\"2451\">Mukautettu (tyypillisesti 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2452\" data-end=\"2487\">\n<td data-start=\"2452\" data-end=\"2472\" data-col-size=\"sm\">Resistiivisyys (alhainen)<\/td>\n<td data-col-size=\"md\" data-start=\"2472\" data-end=\"2487\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2488\" data-end=\"2528\">\n<td data-start=\"2488\" data-end=\"2511\" data-col-size=\"sm\">Resistiivisyys (Medium)<\/td>\n<td data-col-size=\"md\" data-start=\"2511\" data-end=\"2528\">0,2 - 25 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2529\" data-end=\"2564\">\n<td data-start=\"2529\" data-end=\"2550\" data-col-size=\"sm\">Resistiivisyys (korkea)<\/td>\n<td data-col-size=\"md\" data-start=\"2550\" data-end=\"2564\">&gt; 100 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2565\" data-end=\"2604\">\n<td data-start=\"2565\" data-end=\"2596\" data-col-size=\"sm\">Vastuksen tasaisuus (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2596\" data-end=\"2604\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2605\" data-end=\"2670\">\n<td data-start=\"2605\" data-end=\"2625\" data-col-size=\"sm\">Pinnan kunto<\/td>\n<td data-col-size=\"md\" data-start=\"2625\" data-end=\"2670\">Pohja (kiillotus saatavana pyynn\u00f6st\u00e4)<\/td>\n<\/tr>\n<tr data-start=\"2671\" data-end=\"2723\">\n<td data-start=\"2671\" data-end=\"2696\" data-col-size=\"sm\">Pinnan karheus (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2696\" data-end=\"2723\">\u2264 1,6 \u03bcm (mukautettavissa)<\/td>\n<\/tr>\n<tr data-start=\"2724\" data-end=\"2757\">\n<td data-start=\"2724\" data-end=\"2746\" data-col-size=\"sm\">Koneistuksen tarkkuus<\/td>\n<td data-col-size=\"md\" data-start=\"2746\" data-end=\"2757\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2758\" data-end=\"2799\">\n<td data-start=\"2758\" data-end=\"2781\" data-col-size=\"sm\">L\u00e4mm\u00f6njohtavuus<\/td>\n<td data-col-size=\"md\" data-start=\"2781\" data-end=\"2799\">~120-200 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"2800\" data-end=\"2824\">\n<td data-start=\"2800\" data-end=\"2811\" data-col-size=\"sm\">Kovuus<\/td>\n<td data-col-size=\"md\" data-start=\"2811\" data-end=\"2824\">~9,2 Mohs<\/td>\n<\/tr>\n<tr data-start=\"2825\" data-end=\"2883\">\n<td data-start=\"2825\" data-end=\"2843\" data-col-size=\"sm\">Laadunvalvonta<\/td>\n<td data-col-size=\"md\" data-start=\"2843\" data-end=\"2883\">Ei halkeamia, lohkeamia, likaantumista.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2885\" data-end=\"2888\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2890\" data-end=\"2910\">Sovellukset<\/h2>\n<p data-start=\"2911\" data-end=\"3025\">SiC-renkaat ovat olennaisia komponentteja puolijohdelaitteissa, joissa kest\u00e4vyys ja plasmakest\u00e4vyys ovat kriittisi\u00e4:<\/p>\n<ul data-start=\"3027\" data-end=\"3241\">\n<li data-section-id=\"qzqq98\" data-start=\"3027\" data-end=\"3065\">Plasmasy\u00f6vytysj\u00e4rjestelm\u00e4t (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"3066\" data-end=\"3109\">Kemiallinen kaasufaasipinnoitus (CVD \/ PECVD)<\/li>\n<li data-section-id=\"yfc3l\" data-start=\"3110\" data-end=\"3149\">Tarkennusrenkaan \/ reunarenkaan sovellukset<\/li>\n<li data-section-id=\"14j8f1u\" data-start=\"3150\" data-end=\"3193\">Kammiovuoraus ja suojakomponentit<\/li>\n<li data-section-id=\"1l8pbfg\" data-start=\"3194\" data-end=\"3241\">Suuren tiheyden plasmak\u00e4sittely-ymp\u00e4rist\u00f6t<\/li>\n<\/ul>\n<p data-start=\"3243\" data-end=\"3383\">Ne soveltuvat erityisesti kehittyneisiin solmuihin ja koviin etsausprosesseihin, joissa piikomponentit eiv\u00e4t voi t\u00e4ytt\u00e4\u00e4 elinkaarivaatimuksia.<\/p>\n<p data-start=\"3243\" data-end=\"3383\"><img decoding=\"async\" class=\"aligncenter wp-image-2393 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg\" alt=\"\" width=\"1024\" height=\"511\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-300x150.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-768x383.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-18x9.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-600x299.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva.jpg 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3385\" data-end=\"3388\" \/>\n<h2 data-section-id=\"j4gip\" data-start=\"3390\" data-end=\"3436\">Miksi valita SiC Ring Over Silicon Ring?<\/h2>\n<p data-start=\"3437\" data-end=\"3702\">Perinteisiin piirenkaisiin verrattuna SiC-renkaat parantavat merkitt\u00e4v\u00e4sti k\u00e4ytt\u00f6ik\u00e4\u00e4 ja prosessin vakautta. Vaikka piirenkaat ovat aluksi kustannustehokkaampia, ne kuluvat nopeammin aggressiivisissa plasmaolosuhteissa ja vaativat tihe\u00e4mp\u00e4\u00e4 vaihtoa.<\/p>\n<p data-start=\"3704\" data-end=\"3742\">Toisaalta SiC-renkaat tarjoavat:<\/p>\n<ul data-start=\"3743\" data-end=\"3903\">\n<li data-section-id=\"17mv8nk\" data-start=\"3743\" data-end=\"3772\">3-10\u00d7 pidempi k\u00e4ytt\u00f6ik\u00e4<\/li>\n<li data-section-id=\"16lo0t8\" data-start=\"3773\" data-end=\"3820\">Parempi kemiallisen korroosion kest\u00e4vyys<\/li>\n<li data-section-id=\"19uuz0f\" data-start=\"3821\" data-end=\"3857\">Pienempi hiukkasten saastuminen<\/li>\n<li data-section-id=\"uhpkja\" data-start=\"3858\" data-end=\"3903\">V\u00e4hent\u00e4\u00e4 seisokkiaikoja ja huoltokustannuksia<\/li>\n<\/ul>\n<p data-start=\"3905\" data-end=\"4056\">Huippuluokan puolijohdevalmistuksessa kokonaiskustannukset ovat usein alhaisemmat, kun k\u00e4ytet\u00e4\u00e4n SiC-komponentteja, vaikka niiden alkukustannukset ovat korkeammat.<\/p>\n<p data-start=\"3905\" data-end=\"4056\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"4058\" data-end=\"4061\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"4063\" data-end=\"4074\">FAQ<\/h2>\n<p data-start=\"4076\" data-end=\"4283\">Kysymys 1: Onko SiC-rengas kulutustuote?<br data-start=\"4121\" data-end=\"4124\" \/>Kyll\u00e4, sit\u00e4 pidet\u00e4\u00e4n kriittisen\u00e4 puolijohteiden kulutustavarana. Vaikka sen k\u00e4ytt\u00f6ik\u00e4 on pidempi kuin piiosien, se kuluu lopulta plasma-altistuksessa.<\/p>\n<p data-start=\"4285\" data-end=\"4492\">Q2: Mik\u00e4 on CVD SiC -materiaalin etu?<br data-start=\"4335\" data-end=\"4338\" \/>CVD SiC tarjoaa eritt\u00e4in korkean puhtauden, tiiviin rakenteen ja erinomaisen plasman ja kemikaalien kest\u00e4vyyden, mik\u00e4 tekee siit\u00e4 ihanteellisen puolijohdesovelluksiin.<\/p>\n<p data-start=\"4494\" data-end=\"4668\">Q3: Voiko SiC-rengasta r\u00e4\u00e4t\u00e4l\u00f6id\u00e4?<br data-start=\"4533\" data-end=\"4536\" \/>Kyll\u00e4. Halkaisija, paksuus, resistiivisyys ja pintak\u00e4sittely voidaan r\u00e4\u00e4t\u00e4l\u00f6id\u00e4 piirustusten tai laitevaatimusten perusteella.<\/p>\n<p data-start=\"4670\" data-end=\"4814\">Q4: Kuinka kauan SiC-rengas kest\u00e4\u00e4 verrattuna piirenkaaseen?<br data-start=\"4735\" data-end=\"4738\" \/>Tyypillisesti SiC-renkaat kest\u00e4v\u00e4t 3-10 kertaa pidemp\u00e4\u00e4n prosessiolosuhteista riippuen.<\/p>\n<p data-start=\"4816\" data-end=\"4928\">Q5: Mik\u00e4 on toimitusaika?<br data-start=\"4846\" data-end=\"4849\" \/>Tuotanto kest\u00e4\u00e4 yleens\u00e4 4-8 viikkoa riippuen mallin monimutkaisuudesta ja m\u00e4\u00e4r\u00e4st\u00e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>SiC-rengas (piikarbidirengas) on korkean suorituskyvyn komponentti, jota k\u00e4ytet\u00e4\u00e4n laajalti puolijohdeplasman k\u00e4sittelylaitteissa, erityisesti sy\u00f6vytys- ja depositiokammioissa. T\u00e4m\u00e4 tuote on valmistettu CVD-piikarbidista (Chemical Vapor Deposition), ja se kest\u00e4\u00e4 poikkeuksellisen hyvin plasmaeroosiota, korkeita l\u00e4mp\u00f6tiloja ja aggressiivisia kemiallisia ymp\u00e4rist\u00f6j\u00e4.<\/p>","protected":false},"featured_media":2392,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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