{"id":1636,"date":"2026-03-17T07:52:18","date_gmt":"2026-03-17T07:52:18","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=1636"},"modified":"2026-03-20T07:39:36","modified_gmt":"2026-03-20T07:39:36","slug":"6-8-inch-silicon-sic-wafer-quad-polishing-automation-line-with-cleaning-and-re-mounting-loop","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/fi\/product\/6-8-inch-silicon-sic-wafer-quad-polishing-automation-line-with-cleaning-and-re-mounting-loop\/","title":{"rendered":"6-8 tuuman pii- ja SiC-kiekkojen nelinkertainen kiillotusautomaatiolinja, jossa on puhdistus- ja uudelleenasennussilmukka"},"content":{"rendered":"<h2 data-start=\"323\" data-end=\"346\">Tuotteen yleiskatsaus<\/h2>\n<p data-start=\"348\" data-end=\"597\">6-8 tuuman Silicon &amp; SiC Wafer Quad-Polishing Automation Line, jossa on puhdistus- ja uudelleenasennussilmukka, on t\u00e4ysin integroitu kiillotuksen j\u00e4lkeinen prosessialusta, joka on suunniteltu tukemaan pii- ja piikarbidikiekkojen suuren volyymin valmistusta.<\/p>\n<p data-start=\"599\" data-end=\"886\">J\u00e4rjestelm\u00e4 yhdist\u00e4\u00e4 nelip\u00e4isen kiillotuksen, automaattisen kiekon irrotuksen, keraamisen kantoaineen k\u00e4sittelyn, kantoaineen puhdistuksen ja tarkkuuskiekkojen uudelleenasennuksen jatkuvaksi suljetuksi virtaukseksi, mik\u00e4 eliminoi manuaalisen k\u00e4sittelyn ja varmistaa prosessin maksimaalisen vakauden, toistettavuuden ja tuoton.<\/p>\n<p data-start=\"888\" data-end=\"1066\">Se on optimoitu tehopuolijohdekiekkoihin, SiC-substraatteihin ja kehittyneisiin pakkaussovelluksiin, joissa tasaisuus, pinnan eheys ja kontaminaation hallinta ovat kriittisi\u00e4.<\/p>\n<p data-start=\"888\" data-end=\"1066\"><img fetchpriority=\"high\" decoding=\"async\" class=\"aligncenter wp-image-1646 size-full\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100.jpg\" alt=\"\" width=\"800\" height=\"515\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100.jpg 800w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-300x193.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-768x494.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-600x386.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/p>\n<h2 data-start=\"1073\" data-end=\"1107\">Suljetun prosessin k\u00e4site<\/h2>\n<p data-start=\"1109\" data-end=\"1218\">Toisin kuin perinteiset puolimanuaaliset kiillotuslinjat, t\u00e4m\u00e4 j\u00e4rjestelm\u00e4 toimii todellisena suljetun kierron kantokiertona:<\/p>\n<p data-start=\"1220\" data-end=\"1292\">Kiillotus \u2192 irrotus \u2192 kantoaineen puhdistus \u2192 uudelleenasennus \u2192 kiillotus<\/p>\n<p data-start=\"1294\" data-end=\"1508\">Keraamiset kantoaineet kiert\u00e4v\u00e4t automaattisesti j\u00e4rjestelm\u00e4n sis\u00e4ll\u00e4, kun taas kiekot poistetaan ja asennetaan tarkasti tiukasti valvotuissa olosuhteissa.<br data-start=\"1440\" data-end=\"1443\" \/>T\u00e4m\u00e4 arkkitehtuuri varmistaa, ett\u00e4 jokainen kiillotussykli alkaa:<\/p>\n<ul data-start=\"1509\" data-end=\"1622\">\n<li data-start=\"1509\" data-end=\"1538\">\n<p data-start=\"1511\" data-end=\"1538\">Puhdas kantopinta<\/p>\n<\/li>\n<li data-start=\"1539\" data-end=\"1573\">\n<p data-start=\"1541\" data-end=\"1573\">Tarkasti sijoitettu kiekko<\/p>\n<\/li>\n<li data-start=\"1574\" data-end=\"1622\">\n<p data-start=\"1576\" data-end=\"1622\">Vakaa ja toistettava asennusliit\u00e4nt\u00e4<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1624\" data-end=\"1733\">Tuloksena on pienempi kiekon rikkoutuminen, parempi paksuuden tasaisuus ja parempi er\u00e4kohtainen johdonmukaisuus.<\/p>\n<p data-start=\"1624\" data-end=\"1733\"><img decoding=\"async\" class=\"aligncenter wp-image-1647 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/6-8-Inch-Silicon-SiC-Wafer-Quad-Polishing-Automation-Line-with-Cleaning-and-Re-Mounting-Loop-1024x1024.jpg\" alt=\"\" width=\"1024\" height=\"1024\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<h2 data-start=\"1740\" data-end=\"1782\">Prosessikriittinen suunnittelu<\/h2>\n<h3 data-start=\"1784\" data-end=\"1817\">Low-Stress-kiekkojen k\u00e4sittely<\/h3>\n<p data-start=\"1818\" data-end=\"1951\">Erityisi\u00e4 liikeprofiileja ja irrotusratoja k\u00e4ytet\u00e4\u00e4n kiihtyvyyden, kosketusvoiman ja irrotuskulman v\u00e4hent\u00e4miseen:<\/p>\n<ul data-start=\"1952\" data-end=\"2019\">\n<li data-start=\"1952\" data-end=\"1969\">\n<p data-start=\"1954\" data-end=\"1969\">Reunan lohkeaminen<\/p>\n<\/li>\n<li data-start=\"1970\" data-end=\"1986\">\n<p data-start=\"1972\" data-end=\"1986\">Mikrohalkeamat<\/p>\n<\/li>\n<li data-start=\"1987\" data-end=\"2019\">\n<p data-start=\"1989\" data-end=\"2019\">J\u00e4nnityksen aiheuttama kiekon v\u00e4\u00e4ntyminen<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2021\" data-end=\"2136\">T\u00e4m\u00e4 on erityisen t\u00e4rke\u00e4\u00e4 SiC-kiekoille, jotka ovat kovia, hauraita ja eritt\u00e4in herkki\u00e4 mekaanisille iskuille.<\/p>\n<h3 data-start=\"2143\" data-end=\"2185\">Eritt\u00e4in puhdas kantoaineen kunnostus<\/h3>\n<p data-start=\"2186\" data-end=\"2365\">Ennen jokaista uudelleenasennussykli\u00e4 keraamiset kantoaineet palautetaan prosessivalmiiseen pintakuntoon poistamalla lietteen j\u00e4\u00e4m\u00e4t, pienhiukkaset ja kemialliset kalvot.<br data-start=\"2348\" data-end=\"2351\" \/>T\u00e4m\u00e4 est\u00e4\u00e4:<\/p>\n<ul data-start=\"2366\" data-end=\"2458\">\n<li data-start=\"2366\" data-end=\"2396\">\n<p data-start=\"2368\" data-end=\"2396\">Hiukkasten aiheuttamat naarmut<\/p>\n<\/li>\n<li data-start=\"2397\" data-end=\"2431\">\n<p data-start=\"2399\" data-end=\"2431\">Paikallinen kiillotuksen ep\u00e4tasaisuus<\/p>\n<\/li>\n<li data-start=\"2432\" data-end=\"2458\">\n<p data-start=\"2434\" data-end=\"2458\">Satunnaiset pintaviat<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2460\" data-end=\"2527\">jotka ovat merkitt\u00e4vi\u00e4 saannon tappajia CMP- ja nelipinnoitusoperaatioissa.<\/p>\n<h3 data-start=\"2534\" data-end=\"2585\">Tarkka uudelleenasennus tasaista kiillotusta varten<\/h3>\n<p data-start=\"2586\" data-end=\"2616\">Uudelleenasennusyksik\u00f6n ohjaimet:<\/p>\n<ul data-start=\"2617\" data-end=\"2697\">\n<li data-start=\"2617\" data-end=\"2638\">\n<p data-start=\"2619\" data-end=\"2638\">Asennuspaine<\/p>\n<\/li>\n<li data-start=\"2639\" data-end=\"2658\">\n<p data-start=\"2641\" data-end=\"2658\">Kiekon kohdistaminen<\/p>\n<\/li>\n<li data-start=\"2659\" data-end=\"2697\">\n<p data-start=\"2661\" data-end=\"2697\">Tasaisuus koko kantoaineen pituudelta<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2699\" data-end=\"2822\">N\u00e4in varmistetaan, ett\u00e4 kaikki kiekot saavat tasaisen kiillotuspaineen seuraavan nelipolysointisyklin aikana, mik\u00e4 johtaa:<\/p>\n<ul data-start=\"2823\" data-end=\"2926\">\n<li data-start=\"2823\" data-end=\"2867\">\n<p data-start=\"2825\" data-end=\"2867\">Parannettu TTV (kokonaispaksuuden vaihtelu)<\/p>\n<\/li>\n<li data-start=\"2868\" data-end=\"2896\">\n<p data-start=\"2870\" data-end=\"2896\">Parempi pinnankarheus<\/p>\n<\/li>\n<li data-start=\"2897\" data-end=\"2926\">\n<p data-start=\"2899\" data-end=\"2926\">Suurempi k\u00e4ytt\u00f6kelpoisten kiekkojen saanto<\/p>\n<\/li>\n<\/ul>\n<h2 data-start=\"2933\" data-end=\"2962\">Tuotannon joustavuus<\/h2>\n<p data-start=\"2964\" data-end=\"3062\">J\u00e4rjestelm\u00e4 tukee useita kiekko- ja kantokokoonpanoja, joten tehtaat voivat viritt\u00e4\u00e4 linjan:<\/p>\n<ul data-start=\"3063\" data-end=\"3163\">\n<li data-start=\"3063\" data-end=\"3089\">\n<p data-start=\"3065\" data-end=\"3089\">Suurin l\u00e4pimeno<\/p>\n<\/li>\n<li data-start=\"3090\" data-end=\"3122\">\n<p data-start=\"3092\" data-end=\"3122\">Maksimaalinen tasaisuuden s\u00e4\u00e4t\u00f6<\/p>\n<\/li>\n<li data-start=\"3123\" data-end=\"3163\">\n<p data-start=\"3125\" data-end=\"3163\">6 ja 8 tuuman sekatuotanto<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"3165\" data-end=\"3203\">T\u00e4m\u00e4n ansiosta linja soveltuu molempiin:<\/p>\n<ul data-start=\"3204\" data-end=\"3283\">\n<li data-start=\"3204\" data-end=\"3243\">\n<p data-start=\"3206\" data-end=\"3243\">Suuren volyymin teholaitteiden tuotanto<\/p>\n<\/li>\n<li data-start=\"3244\" data-end=\"3283\">\n<p data-start=\"3246\" data-end=\"3283\">Korkean arvon SiC-alustan k\u00e4sittely<\/p>\n<\/li>\n<\/ul>\n<h2 data-start=\"3290\" data-end=\"3317\">Tyypilliset sovellukset<\/h2>\n<ul data-start=\"3319\" data-end=\"3498\">\n<li data-start=\"3319\" data-end=\"3385\">\n<p data-start=\"3321\" data-end=\"3385\">Si- ja SiC-tehopuolijohdekiekot (MOSFETit, IGBT:t, diodit).<\/p>\n<\/li>\n<li data-start=\"3386\" data-end=\"3425\">\n<p data-start=\"3388\" data-end=\"3425\">SiC-substraatit ja epitaksikiekot<\/p>\n<\/li>\n<li data-start=\"3426\" data-end=\"3455\">\n<p data-start=\"3428\" data-end=\"3455\">Kehittyneet pakkauskiekot<\/p>\n<\/li>\n<li data-start=\"3456\" data-end=\"3498\">\n<p data-start=\"3458\" data-end=\"3498\">Korkean tarkkuuden kiillotetut piikiekot<\/p>\n<\/li>\n<\/ul>\n<h3 data-start=\"58\" data-end=\"102\"><strong data-start=\"62\" data-end=\"102\">FAQ - Teknisi\u00e4 lis\u00e4kysymyksi\u00e4<\/strong><\/h3>\n<p data-start=\"104\" data-end=\"461\"><strong>Kysymys 1: Miten j\u00e4rjestelm\u00e4 minimoi kiekon rikkoutumisen hauraiden SiC-kiekkojen osalta?<\/strong><br data-start=\"179\" data-end=\"182\" \/>Linjassa k\u00e4ytet\u00e4\u00e4n matalaa rasitusta aiheuttavia irrotusalgoritmeja ja hallittuja liikeprofiileja, joissa kiihtyvyytt\u00e4, irrotuskulmaa ja kosketusvoimaa hallitaan huolellisesti. N\u00e4in estet\u00e4\u00e4n reunojen lohkeilua, mikrohalkeamia ja j\u00e4nnityksen aiheuttamaa kiekon v\u00e4\u00e4ntymist\u00e4, jotka ovat yleisi\u00e4 ongelmia SiC-substraattien kanssa.<\/p>\n<p data-start=\"468\" data-end=\"792\"><strong>Kysymys 2: Voiko puhdistus- ja uudelleenasennussilmukalla k\u00e4sitell\u00e4 useita kantolaitteiden spesifikaatioita?<\/strong><br data-start=\"553\" data-end=\"556\" \/>Kyll\u00e4. Kantoaineen puskuri- ja puhdistusmoduulit tukevat useita keraamisia kantoaineen halkaisijoita (esim. 485 mm ja 576 mm) ja kiekkolukuja kantoa kohti. T\u00e4m\u00e4 mahdollistaa 6 tuuman ja 8 tuuman kiekkojen valmistuksen eri kokoluokissa ilman linjan keskeytyst\u00e4.<\/p>\n<p data-start=\"799\" data-end=\"1201\"><strong>Kysymys 3: Miten j\u00e4rjestelm\u00e4 varmistaa toistettavan kiillotuslaadun kaikissa eriss\u00e4?<\/strong><br data-start=\"878\" data-end=\"881\" \/>Yhdist\u00e4m\u00e4ll\u00e4 eritt\u00e4in puhtaat kantopinnat, tarkan kiekon kohdistuksen ja tasaisuuden valvonnan jokainen kiekko asennetaan samanlaisissa olosuhteissa. T\u00e4m\u00e4 takaa tasaisen kiillotuspaineen, tasaisen materiaalinpoiston ja minimaalisen TTV:n, mik\u00e4 takaa vakaan tuoton ja pinnanlaadun kaikissa tuotantoeriss\u00e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>6-8 tuuman Silicon &amp; SiC Wafer Quad-Polishing Automation Line, jossa on puhdistus- ja uudelleenasennussilmukka, on t\u00e4ysin integroitu kiillotuksen j\u00e4lkeinen prosessialusta, joka on suunniteltu tukemaan pii- ja piikarbidikiekkojen suuren volyymin valmistusta.<\/p>","protected":false},"featured_media":1642,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[15],"product_tag":[100,105,104,107,106,109,103,108,110,102,101],"class_list":{"0":"post-1636","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-crystal-growth-furnace","7":"product_tag-6-8-inch","8":"product_tag-automatic-de-mounting","9":"product_tag-automation-line","10":"product_tag-carrier-cleaning","11":"product_tag-ceramic-carrier","12":"product_tag-closed-loop-system","13":"product_tag-quad-polishing","14":"product_tag-re-mounting","15":"product_tag-semiconductor-equipment","16":"product_tag-sic-wafer","17":"product_tag-silicon-wafer","18":"desktop-align-left","19":"tablet-align-left","20":"mobile-align-left","21":"ast-product-gallery-layout-horizontal-slider","22":"ast-product-tabs-layout-horizontal","24":"first","25":"instock","26":"shipping-taxable","27":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/product\/1636","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/comments?post=1636"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/product\/1636\/revisions"}],"predecessor-version":[{"id":1967,"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/product\/1636\/revisions\/1967"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/media\/1642"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/media?parent=1636"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/product_brand?post=1636"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/product_cat?post=1636"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/fi\/wp-json\/wp\/v2\/product_tag?post=1636"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}