{"id":2536,"date":"2026-06-08T05:27:34","date_gmt":"2026-06-08T05:27:34","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2536"},"modified":"2026-07-08T09:47:29","modified_gmt":"2026-07-08T09:47:29","slug":"12-inch-glass-wafer-for-advanced-semiconductor-mems-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/cs\/product\/12-inch-glass-wafer-for-advanced-semiconductor-mems-applications\/","title":{"rendered":"12-palcov\u00e1 sklen\u011bn\u00e1 desti\u010dka pro pokro\u010dil\u00e9 aplikace v oblasti polovodi\u010d\u016f a MEMS"},"content":{"rendered":"

\"12-palcov\u00e112palcov\u00e1 (300 mm) sklen\u011bn\u00e1 desti\u010dka je \u0161pi\u010dkov\u00fd substr\u00e1t ur\u010den\u00fd pro pokro\u010dilou v\u00fdrobu polovodi\u010d\u016f, MEMS za\u0159\u00edzen\u00ed, optick\u00e9 syst\u00e9my a balen\u00ed na \u00farovni desti\u010dky (WLP \/ FOWLP). Vzhledem k tomu, \u017ee se integrace za\u0159\u00edzen\u00ed neust\u00e1le zvy\u0161uje a struktury balen\u00ed se st\u00e1vaj\u00ed slo\u017eit\u011bj\u0161\u00edmi, st\u00e1vaj\u00ed se sklen\u011bn\u00e9 desti\u010dky s velk\u00fdm pr\u016fm\u011brem kl\u00ed\u010dovou alternativou k tradi\u010dn\u00edm k\u0159em\u00edkov\u00fdm substr\u00e1t\u016fm.<\/p>\n

Ve srovn\u00e1n\u00ed s men\u0161\u00edmi form\u00e1ty desti\u010dek nab\u00edzej\u00ed 12palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky v\u00fdrazn\u011b vy\u0161\u0161\u00ed v\u00fdrobn\u00ed efektivitu, lep\u0161\u00ed \u0161k\u00e1lovatelnost pro hromadnou v\u00fdrobu a kompatibilitu s pokro\u010dil\u00fdmi litografick\u00fdmi a balic\u00edmi procesy. Jsou \u0161iroce vyu\u017e\u00edv\u00e1ny v elektronick\u00fdch syst\u00e9mech nov\u00e9 generace, kter\u00e9 vy\u017eaduj\u00ed vysokou rozm\u011brovou stabilitu, n\u00edzk\u00e9 dielektrick\u00e9 ztr\u00e1ty, vynikaj\u00edc\u00ed optickou pr\u016fhlednost a mimo\u0159\u00e1dn\u011b hladk\u00fd povrch.<\/p>\n

Tyto desti\u010dky se vyr\u00e1b\u011bj\u00ed z vysoce \u010dist\u00fdch materi\u00e1l\u016f, jako je borosilik\u00e1tov\u00e9 sklo, taven\u00e9 k\u0159emenn\u00e9 sklo, k\u0159emen a sklo bez alkalick\u00fdch prvk\u016f, v z\u00e1vislosti na po\u017eadavc\u00edch dan\u00e9 aplikace. Ka\u017ed\u00e1 desti\u010dka proch\u00e1z\u00ed procesy p\u0159esn\u00e9ho \u0159ez\u00e1n\u00ed, brou\u0161en\u00ed, le\u0161t\u011bn\u00ed a \u010di\u0161t\u011bn\u00ed, aby byla zaji\u0161t\u011bna p\u0159\u00edsn\u00e1 kontrola rovinnosti, rovnom\u011brnosti tlou\u0161\u0165ky a drsnosti povrchu.<\/p>\n

\n

Dostupn\u00e9 typy materi\u00e1l\u016f pro 12-palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky<\/strong><\/span><\/h2>\n

Borosilik\u00e1tov\u00e9 sklo (12-palcov\u00e1 desti\u010dka)<\/strong><\/span><\/h3>\n
    \n
  • Vynikaj\u00edc\u00ed shoda tepeln\u00e9 rozta\u017enosti s k\u0159em\u00edkem (~3,2 ppm\/K)<\/li>\n
  • Ide\u00e1ln\u00ed pro aplikace anodick\u00e9ho spojov\u00e1n\u00ed<\/li>\n
  • Vysok\u00e1 chemick\u00e1 odolnost<\/li>\n
  • Stabiln\u00ed mechanick\u00e9 vlastnosti p\u0159i teplotn\u00edch cyklech<\/li>\n
  • \u0160iroce se pou\u017e\u00edv\u00e1 v MEMS a balic\u00edch struktur\u00e1ch<\/li>\n<\/ul>\n
    \n

    K\u0159emenn\u00e9 sklo (12-palcov\u00e1 desti\u010dka)<\/strong><\/span><\/h3>\n
      \n
    • Mimo\u0159\u00e1dn\u011b vysok\u00e1 optick\u00e1 propustnost (rozsah od UV po IR)<\/li>\n
    • Velmi n\u00edzk\u00fd obsah ne\u010distot a OH<\/li>\n
    • Odolnost v\u016f\u010di vysok\u00fdm teplot\u00e1m<\/li>\n
    • Drsnost povrchu a\u017e do hodnoty Ra \u2264 0,5 nm<\/li>\n
    • Vhodn\u00e9 pro optick\u00e9 MEMS a fotoniku<\/li>\n<\/ul>\n
      \n

      Taven\u00e9 k\u0159emenn\u00e9 sklo (12-palcov\u00e1 desti\u010dka)<\/strong><\/span><\/h3>\n
        \n
      • Extr\u00e9mn\u011b n\u00edzk\u00e1 tepeln\u00e1 rozta\u017enost (~0,5 ppm\/K)<\/li>\n
      • Syntetick\u00fd materi\u00e1l vysok\u00e9 \u010distoty<\/li>\n
      • Vynikaj\u00edc\u00ed odolnost proti tepeln\u00fdm \u0161ok\u016fm<\/li>\n
      • Optick\u00e1 propustnost >90% (rozsah 200\u20132000 nm)<\/li>\n
      • Ide\u00e1ln\u00ed pro \u0161pi\u010dkov\u00e9 optick\u00e9 a polovodi\u010dov\u00e9 aplikace<\/li>\n<\/ul>\n
        \n

        Sklo bez obsahu alk\u00e1li\u00ed (12-palcov\u00e1 desti\u010dka)<\/strong><\/span><\/h3>\n
          \n
        • Neobsahuje \u017e\u00e1dn\u00e9 stopy t\u011b\u017ek\u00fdch kov\u016f (As, Sb, Ba, halogenidy)<\/li>\n
        • N\u00edzk\u00e9 fluorescen\u010dn\u00ed pozad\u00ed<\/li>\n
        • Vysok\u00e1 dielektrick\u00e1 stabilita<\/li>\n
        • Kompatibiln\u00ed s pokro\u010dil\u00fdmi polovodi\u010dov\u00fdmi technologiemi<\/li>\n
        • Vynikaj\u00edc\u00ed chemick\u00e1 odolnost<\/li>\n<\/ul>\n
          \n

          Hlavn\u00ed technick\u00e9 parametry (12-palcov\u00e1 sklen\u011bn\u00e1 desti\u010dka)<\/strong><\/span><\/h2>\n

          Rozm\u011brov\u00e9 parametry<\/strong><\/span><\/h3>\n
            \n
          • Pr\u016fm\u011br desti\u010dky: 300 mm (12 palc\u016f)<\/li>\n
          • Rozsah tlou\u0161\u0165ky: 500 \u03bcm \u2013 2000 \u03bcm (lze p\u0159izp\u016fsobit)<\/li>\n
          • Tolerance tlou\u0161\u0165ky: \u00b15 \u03bcm a\u017e \u00b120 \u03bcm<\/li>\n
          • Celkov\u00e1 odchylka tlou\u0161\u0165ky (TTV): \u2264 10\u201315 \u03bcm (vysoce p\u0159esn\u00e1 t\u0159\u00edda)<\/li>\n<\/ul>\n
            \n

            Kvalita povrchu<\/strong><\/span><\/h3>\n
              \n
            • Drsnost povrchu (Ra): \u2264 1,0 nm (standard)<\/li>\n
            • Varianta s ultrale\u0161t\u011bn\u00fdm povrchem: Ra \u2264 0,5 nm<\/li>\n
            • Rovinnost povrchu: \u2264 \u03bb\/10 (voliteln\u00e1 specifikace pro vysokou kvalitu)<\/li>\n
            • Zpracov\u00e1n\u00ed hran: zkosen\u00e9 \/ zaoblen\u00e9 \/ profil podle p\u0159\u00e1n\u00ed<\/li>\n
            • K dispozici v proveden\u00ed s oboustrann\u00fdm le\u0161t\u011bn\u00edm (DSP) nebo jednostrann\u00fdm le\u0161t\u011bn\u00edm (SSP)<\/li>\n<\/ul>\n

              \"\"<\/p>\n

              \n

              Vlastnosti materi\u00e1lu (referen\u010dn\u00ed hodnoty)<\/strong><\/span><\/h3>\n
              \n
              \n\n\n\n\n\n\n\n\n
              Typ materi\u00e1lu<\/th>\nCTE (ppm\/K)<\/th>\nP\u0159evodovka<\/th>\nHlavn\u00ed vlastnost<\/th>\n<\/tr>\n<\/thead>\n
              Borosilik\u00e1t<\/td>\n~3.2<\/td>\nSt\u0159edn\u00ed<\/td>\nKompatibilita p\u0159i lepen\u00ed k\u0159em\u00edku<\/td>\n<\/tr>\n
              Quartz<\/td>\n~0.55<\/td>\nVysok\u00e1 (UV\u2013IR)<\/td>\nV\u00fdkon na \u00farovni optick\u00fdch komponent\u016f<\/td>\n<\/tr>\n
              Taven\u00e9 k\u0159emenn\u00e9 sklo<\/td>\n~0.5<\/td>\n>90%<\/td>\nVysoce \u010dist\u00fd a stabiln\u00ed<\/td>\n<\/tr>\n
              Sklo bez obsahu alk\u00e1li\u00ed<\/td>\n~3\u20134<\/td>\nN\/A<\/td>\nN\u00edzk\u00e1 \u00farove\u0148 zne\u010di\u0161t\u011bn\u00ed<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
              \n

              V\u00fdrobn\u00ed kapacity<\/strong><\/span><\/h2>\n

              Na\u0161e 12-palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky se vyr\u00e1b\u011bj\u00ed za podm\u00ednek pokro\u010dil\u00e9 p\u0159esn\u00e9 v\u00fdroby:<\/p>\n

                \n
              • Vysoce p\u0159esn\u00e9 CNC fr\u00e9zov\u00e1n\u00ed a \u0159ez\u00e1n\u00ed<\/li>\n
              • Chemicko-mechanick\u00e9 le\u0161t\u011bn\u00ed (CMP)<\/li>\n
              • Technologie povrchov\u00e9 \u00fapravy v subnanometrov\u00e9m m\u011b\u0159\u00edtku<\/li>\n
              • \u010ci\u0161t\u011bn\u00ed a kontrola v \u010distot\u011b odpov\u00eddaj\u00edc\u00ed standard\u016fm \u010dist\u00fdch prostor<\/li>\n
              • Kontrola tlou\u0161\u0165ky a rovinnosti<\/li>\n
              • Kompatibilita s normami SEMI \/ JEIDA (v p\u0159\u00edslu\u0161n\u00fdch p\u0159\u00edpadech)<\/li>\n<\/ul>\n

                Zaji\u0161\u0165ujeme jak v\u00fdvoj prototyp\u016f, tak i velkos\u00e9riovou v\u00fdrobu.<\/p>\n

                \"\"<\/p>\n

                \n

                Vyu\u017eit\u00ed 12-palcov\u00fdch sklen\u011bn\u00fdch desti\u010dek<\/strong><\/span><\/h2>\n

                12-palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky se hojn\u011b vyu\u017e\u00edvaj\u00ed v pokro\u010dil\u00fdch pr\u016fmyslov\u00fdch odv\u011btv\u00edch nov\u00e9 generace:<\/p>\n

                  \n
                • Balen\u00ed polovodi\u010d\u016f na \u00farovni desti\u010dky (WLP \/ FOWLP)<\/li>\n
                • MEMS senzory a ak\u010dn\u00ed \u010dleny<\/li>\n
                • Fot\u00f3nov\u00e9 integrovan\u00e9 obvody (PIC)<\/li>\n
                • Moduly pro optickou komunikaci<\/li>\n
                • Pokro\u010dil\u00e9 technologie displej\u016f (OLED \/ MicroLED)<\/li>\n
                • Senzorov\u00e9 syst\u00e9my pro automobilov\u00fd pr\u016fmysl (LiDAR, radar, sn\u00edm\u00e1n\u00ed)<\/li>\n
                • Bio\u010dipy a l\u00e9ka\u0159sk\u00e1 diagnostick\u00e1 za\u0159\u00edzen\u00ed<\/li>\n
                • Vysokofrekven\u010dn\u00ed RF a mikrovlnn\u00e9 sou\u010d\u00e1stky<\/li>\n
                • P\u0159esn\u00e9 optick\u00e9 syst\u00e9my a litografick\u00e9 platformy<\/li>\n<\/ul>\n
                  \n

                  V\u00fdhody 12-palcov\u00e9ho sklen\u011bn\u00e9ho pl\u00e1tku<\/strong><\/span><\/h2>\n
                    \n
                  • Pln\u00e1 kompatibilita s v\u00fdrobn\u00edmi linkami na polovodi\u010de o d\u00e9lce 300 mm<\/li>\n
                  • Vynikaj\u00edc\u00ed rozm\u011brov\u00e1 stabilita p\u0159i zpracov\u00e1n\u00ed velkoplo\u0161n\u00fdch materi\u00e1l\u016f<\/li>\n
                  • Mimo\u0159\u00e1dn\u011b n\u00edzk\u00e1 drsnost povrchu (<1 nm Ra)<\/li>\n
                  • Vysok\u00e1 optick\u00e1 pr\u016fhlednost (v z\u00e1vislosti na typu materi\u00e1lu)<\/li>\n
                  • Vynikaj\u00edc\u00ed izola\u010dn\u00ed vlastnosti<\/li>\n
                  • Vysok\u00e1 chemick\u00e1 a tepeln\u00e1 stabilita<\/li>\n
                  • Vhodn\u00e9 pro v\u00fdrobn\u00ed prost\u0159ed\u00ed s velk\u00fdmi objemy v\u00fdroby<\/li>\n
                  • Mo\u017enost p\u0159izp\u016fsoben\u00ed tlou\u0161\u0165ky, materi\u00e1lu a povrchov\u00e9 \u00fapravy<\/li>\n<\/ul>\n

                    FAQ (\u010casto kladen\u00e9 ot\u00e1zky)<\/strong><\/span><\/h2>\n

                    Ot\u00e1zka 1: Mohou 12-palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky nahradit k\u0159em\u00edkov\u00e9 desti\u010dky v polovodi\u010dov\u00fdch aplikac\u00edch?<\/strong><\/span><\/h3>\n

                    12-palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky sice nemohou pln\u011b nahradit k\u0159em\u00edkov\u00e9 desti\u010dky p\u0159i v\u00fdrob\u011b aktivn\u00edch prvk\u016f, ale jsou \u0161iroce vyu\u017e\u00edv\u00e1ny jako pokro\u010dil\u00e9 substr\u00e1ty nebo nosn\u00e9 materi\u00e1ly<\/strong> v oblasti balen\u00ed polovodi\u010d\u016f, MEMS a fotonick\u00fdch syst\u00e9m\u016f. Sklen\u011bn\u00e9 desti\u010dky se vyzna\u010duj\u00ed vynikaj\u00edc\u00ed elektrickou izolac\u00ed, optickou pr\u016fhlednost\u00ed a ni\u017e\u0161\u00edmi dielektrick\u00fdmi ztr\u00e1tami, d\u00edky \u010demu\u017e jsou ide\u00e1ln\u00ed pro balen\u00ed na \u00farovni desti\u010dky (WLP), fan-out WLP (FOWLP) a aplikace optick\u00e9 integrace, kde nen\u00ed zapot\u0159eb\u00ed k\u0159em\u00edk jako aktivn\u00ed polovodi\u010dov\u00e1 vrstva.<\/p>\n

                    \n

                    Ot\u00e1zka \u010d. 2: Jak\u00e9 \u00farovn\u011b rovinnosti a kvality povrchu m\u016f\u017eete dos\u00e1hnout u 12-palcov\u00fdch sklen\u011bn\u00fdch desti\u010dek?<\/strong><\/span><\/h3>\n

                    U vysoce p\u0159esn\u00fdch 12-palcov\u00fdch sklen\u011bn\u00fdch desti\u010dek dok\u00e1\u017eeme zajistit mimo\u0159\u00e1dn\u011b p\u0159\u00edsnou kontrolu povrchu. Mezi typick\u00e9 specifikace pat\u0159\u00ed:<\/p>\n

                      \n
                    • Drsnost povrchu (Ra): \u2264 1,0 nm (standardn\u00ed kvalita), a\u017e \u2264 0,5 nm (ultrale\u0161t\u011bn\u00e1 kvalita)<\/li>\n
                    • Celkov\u00e1 odchylka tlou\u0161\u0165ky (TTV): \u2264 10\u201315 \u03bcm v z\u00e1vislosti na materi\u00e1lu a tlou\u0161\u0165ce<\/li>\n
                    • Rovinnost povrchu: a\u017e do \u03bb\/10 (voliteln\u00e1 \u0161pi\u010dkov\u00e1 specifikace)<\/li>\n<\/ul>\n

                      Tyto parametry zaji\u0161\u0165uj\u00ed vynikaj\u00edc\u00ed kompatibilitu s pokro\u010dil\u00fdmi procesy litografie, lepen\u00ed a nan\u00e1\u0161en\u00ed tenk\u00fdch vrstev.<\/p>\n

                      \n

                      Ot\u00e1zka \u010d. 3: Lze 12-palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky p\u0159izp\u016fsobit konkr\u00e9tn\u00edm aplikac\u00edm nebo technologick\u00fdm po\u017eadavk\u016fm?<\/strong><\/span><\/h3>\n

                      Ano. 12-palcov\u00e9 sklen\u011bn\u00e9 desti\u010dky lze do zna\u010dn\u00e9 m\u00edry p\u0159izp\u016fsobit. M\u016f\u017eeme upravit \u0159adu parametr\u016f podle va\u0161ich technologick\u00fdch po\u017eadavk\u016f, v\u010detn\u011b:<\/p>\n

                        \n
                      • Typ materi\u00e1lu (borosilik\u00e1t, k\u0159emen, taven\u00fd k\u0159emen, sklo bez alkalick\u00fdch prvk\u016f)<\/li>\n
                      • Tlou\u0161\u0165ka (od 500 \u03bcm do 2 mm nebo v\u00edce)<\/li>\n
                      • Povrchov\u00e1 \u00faprava (le\u0161t\u011bn\u00ed metodou SSP nebo DSP)<\/li>\n
                      • Profil hrany (zkosen\u00fd, zaoblen\u00fd nebo vlastn\u00ed proveden\u00ed hrany)<\/li>\n
                      • Rovinnost, TTV a stupn\u011b drsnosti povrchu<\/li>\n
                      • Speci\u00e1ln\u00ed vzory, vyrovn\u00e1vac\u00ed zna\u010dky nebo laserov\u00e9 grav\u00edrov\u00e1n\u00ed<\/li>\n<\/ul>\n

                        P\u0159izp\u016fsoben\u00ed je obzvl\u00e1\u0161t\u011b d\u016fle\u017eit\u00e9 u MEMS, optick\u00fdch syst\u00e9m\u016f a aplikac\u00ed v oblasti pokro\u010dil\u00fdch balic\u00edch technologi\u00ed, kde je kompatibilita proces\u016f z\u00e1sadn\u00ed.<\/p>","protected":false},"excerpt":{"rendered":"

                        12palcov\u00e1 sklen\u011bn\u00e1 desti\u010dka je kl\u00ed\u010dov\u00fdm materi\u00e1lem pro balen\u00ed polovodi\u010d\u016f nov\u00e9 generace, integraci MEMS a v\u00fdvoj optick\u00fdch syst\u00e9m\u016f. D\u00edky kombinaci \u0161k\u00e1lovatelnosti velk\u00fdch pr\u016fm\u011br\u016f, mimo\u0159\u00e1dn\u011b p\u0159esn\u00e9 kvality povrchu a p\u0159izp\u016fsobiteln\u00fdch materi\u00e1lov\u00fdch vlastnost\u00ed se st\u00e1le \u010dast\u011bji vyu\u017e\u00edv\u00e1 v pokro\u010dil\u00fdch v\u00fdrobn\u00edch odv\u011btv\u00edch, kter\u00e1 hledaj\u00ed alternativy k tradi\u010dn\u00edm k\u0159em\u00edkov\u00fdm desti\u010dk\u00e1m.<\/p>","protected":false},"featured_media":2539,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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