{"id":2495,"date":"2026-05-26T05:31:18","date_gmt":"2026-05-26T05:31:18","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2495"},"modified":"2026-07-08T09:47:16","modified_gmt":"2026-07-08T09:47:16","slug":"thin-film-lithium-niobate-on-insulator-lnoi-wafers-for-integrated-photonic-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/cs\/product\/thin-film-lithium-niobate-on-insulator-lnoi-wafers-for-integrated-photonic-applications\/","title":{"rendered":"Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) pro aplikace v oblasti integrovan\u00e9 fotoniky"},"content":{"rendered":"<p data-start=\"531\" data-end=\"686\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2500 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-300x300.webp\" alt=\"Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) pro aplikace v oblasti integrovan\u00e9 fotoniky\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm-100x100.webp 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/pl206106451-3inch_4inch_6inch_8inch_lithium_niobate_thin_film_lnoi_wafers_with_optical_loss_0_05_db_cm.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) jsou modern\u00ed fotonick\u00e9 substr\u00e1ty pou\u017e\u00edvan\u00e9 v integrovan\u00fdch optick\u00fdch, mikrovlnn\u00fdch fotonick\u00fdch a kvantov\u00fdch syst\u00e9mech.<\/p>\n<p data-start=\"688\" data-end=\"830\">Struktura se skl\u00e1d\u00e1 z tenk\u00e9 vrstvy monokrystalick\u00e9ho niob\u00e1tu lithn\u00e9ho, kter\u00e1 je nanesena na izola\u010dn\u00ed vrstvu z SiO\u2082 a podlo\u017eena k\u0159em\u00edkov\u00fdm substr\u00e1tem.<\/p>\n<p data-start=\"832\" data-end=\"1001\">Tato konfigurace zaji\u0161\u0165uje siln\u00e9 optick\u00e9 ohrani\u010den\u00ed, mimo\u0159\u00e1dn\u011b n\u00edzk\u00e9 ztr\u00e1ty p\u0159i \u0161\u00ed\u0159en\u00ed a vysokou elektrooptickou \u00fa\u010dinnost, co\u017e z n\u00ed \u010din\u00ed kl\u00ed\u010dovou platformu pro integrovanou fotoniku.<\/p>\n<hr data-start=\"1003\" data-end=\"1006\" \/>\n<h1 data-section-id=\"1kwwibx\" data-start=\"1008\" data-end=\"1050\">Co je to tenkovrstv\u00fd niob\u00e1t lithn\u00fd (TFLN)<\/h1>\n<p data-start=\"1052\" data-end=\"1197\">Term\u00edn \u201etenkovrstv\u00fd niob\u00e1t lithn\u00fd (TFLN)\u201c ozna\u010duje submikrometrovou krystalickou vrstvu LiNbO\u2083 vyvinutou pro pou\u017eit\u00ed v optick\u00fdch vlnovodech a elektrooptick\u00fdch aplikac\u00edch.<\/p>\n<p data-start=\"1199\" data-end=\"1334\">Ve srovn\u00e1n\u00ed s voln\u011b sypan\u00fdm niob\u00e1tem lithn\u00fdm umo\u017e\u0148uje TFLN lep\u0161\u00ed optick\u00e9 omezen\u00ed, men\u0161\u00ed rozm\u011bry za\u0159\u00edzen\u00ed a vy\u0161\u0161\u00ed integra\u010dn\u00ed hustotu.<\/p>\n<p data-start=\"1336\" data-end=\"1429\">Technologie TFLN se obvykle implementuje na desti\u010dk\u00e1ch LNOI, \u010d\u00edm\u017e vznik\u00e1 ucelen\u00e1 integrovan\u00e1 fotonick\u00e1 platforma.<\/p>\n<hr data-start=\"1431\" data-end=\"1434\" \/>\n<h1 data-section-id=\"u0ybrq\" data-start=\"1436\" data-end=\"1450\"><img decoding=\"async\" class=\"alignright wp-image-2497 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-300x300.jpg\" alt=\"Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) pro aplikace v oblasti integrovan\u00e9 fotoniky\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-300x300.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-150x150.jpg 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-12x12.jpg 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-600x600.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698-100x100.jpg 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171031_94698.jpg 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Kl\u00ed\u010dov\u00e9 vlastnosti<\/h1>\n<ul data-start=\"1452\" data-end=\"1814\">\n<li data-section-id=\"13l6ndu\" data-start=\"1452\" data-end=\"1501\">Extr\u00e9mn\u011b n\u00edzk\u00e9 optick\u00e9 ztr\u00e1ty &lt; 0,05 dB\/cm p\u0159i 1550 nm<\/li>\n<li data-section-id=\"2xhqbd\" data-start=\"1502\" data-end=\"1556\">Vysok\u00fd elektrooptick\u00fd koeficient (r\u2083\u2083 a\u017e 90 pm\/V)<\/li>\n<li data-section-id=\"1njhf21\" data-start=\"1557\" data-end=\"1603\">Kompatibilita s vlnovody v submikronov\u00e9m rozsahu (&lt;1 \u03bcm)<\/li>\n<li data-section-id=\"dqzxa8\" data-start=\"1604\" data-end=\"1659\">Integrace kompatibiln\u00ed s CMOS s platformami Si \/ SiN<\/li>\n<li data-section-id=\"b770v8\" data-start=\"1660\" data-end=\"1714\">Vysok\u00e1 tepeln\u00e1 stabilita (Curieova teplota ~1140 \u00b0C)<\/li>\n<li data-section-id=\"1fdmwf9\" data-start=\"1715\" data-end=\"1763\">R\u016fzn\u00e9 typy brou\u0161en\u00ed krystal\u016f: X-cut \/ Y-cut \/ Z-cut<\/li>\n<li data-section-id=\"c33det\" data-start=\"1764\" data-end=\"1814\">Velikosti desti\u010dek: 3 palce \/ 4 palce \/ 6 palc\u016f \/ 8 palc\u016f<\/li>\n<\/ul>\n<hr data-start=\"1816\" data-end=\"1819\" \/>\n<h1 data-section-id=\"1ag6bp0\" data-start=\"1821\" data-end=\"1838\">Struktura desti\u010dky<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1840\" data-end=\"2149\">\n<thead data-start=\"1840\" data-end=\"1871\">\n<tr data-start=\"1840\" data-end=\"1871\">\n<th class=\"last:pe-10\" data-start=\"1840\" data-end=\"1848\" data-col-size=\"sm\">Vrstva<\/th>\n<th class=\"last:pe-10\" data-start=\"1848\" data-end=\"1859\" data-col-size=\"sm\">Materi\u00e1l<\/th>\n<th class=\"last:pe-10\" data-start=\"1859\" data-end=\"1871\" data-col-size=\"md\">Funkce<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1903\" data-end=\"2149\">\n<tr data-start=\"1903\" data-end=\"1992\">\n<td data-start=\"1903\" data-end=\"1915\" data-col-size=\"sm\">Horn\u00ed vrstva<\/td>\n<td data-col-size=\"sm\" data-start=\"1915\" data-end=\"1941\">Tenk\u00e1 vrstva LiNbO\u2083 (TFLN)<\/td>\n<td data-col-size=\"md\" data-start=\"1941\" data-end=\"1992\">Elektrooptick\u00e9 a neline\u00e1rn\u00ed optick\u00e9 funkce<\/td>\n<\/tr>\n<tr data-start=\"1993\" data-end=\"2065\">\n<td data-start=\"1993\" data-end=\"2008\" data-col-size=\"sm\">St\u0159edn\u00ed vrstva<\/td>\n<td data-col-size=\"sm\" data-start=\"2008\" data-end=\"2030\">SiO\u2082 (poh\u0159ben\u00fd oxid)<\/td>\n<td data-col-size=\"md\" data-start=\"2030\" data-end=\"2065\">Optick\u00e1 izolace a ohrani\u010den\u00ed<\/td>\n<\/tr>\n<tr data-start=\"2066\" data-end=\"2149\">\n<td data-start=\"2066\" data-end=\"2081\" data-col-size=\"sm\">Spodn\u00ed vrstva<\/td>\n<td data-col-size=\"sm\" data-start=\"2081\" data-end=\"2106\">K\u0159em\u00edk \/ K\u0159emen \/ Saf\u00edr<\/td>\n<td data-col-size=\"md\" data-start=\"2106\" data-end=\"2149\">Mechanick\u00e1 podpora a kompatibilita s CMOS<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2151\" data-end=\"2154\" \/>\n<h1 data-section-id=\"zjxypn\" data-start=\"2156\" data-end=\"2182\">Technick\u00e9 specifikace<\/h1>\n<h2 data-section-id=\"10p7424\" data-start=\"2184\" data-end=\"2207\">Technick\u00e9 parametry desti\u010dek<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2209\" data-end=\"2388\">\n<thead data-start=\"2209\" data-end=\"2230\">\n<tr data-start=\"2209\" data-end=\"2230\">\n<th class=\"last:pe-10\" data-start=\"2209\" data-end=\"2221\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"last:pe-10\" data-start=\"2221\" data-end=\"2230\" data-col-size=\"sm\">Hodnota<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2251\" data-end=\"2388\">\n<tr data-start=\"2251\" data-end=\"2286\">\n<td data-start=\"2251\" data-end=\"2268\" data-col-size=\"sm\">Pr\u016fm\u011br desti\u010dky<\/td>\n<td data-col-size=\"sm\" data-start=\"2268\" data-end=\"2286\">3\u2033, 4\u2033, 6\u2033, 8\u2033<\/td>\n<\/tr>\n<tr data-start=\"2287\" data-end=\"2320\">\n<td data-start=\"2287\" data-end=\"2305\" data-col-size=\"sm\">Celkov\u00e1 tlou\u0161\u0165ka<\/td>\n<td data-col-size=\"sm\" data-start=\"2305\" data-end=\"2320\">525 \u00b1 25 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2321\" data-end=\"2337\">\n<td data-start=\"2321\" data-end=\"2327\" data-col-size=\"sm\">Luk<\/td>\n<td data-col-size=\"sm\" data-start=\"2327\" data-end=\"2337\">\u00b150 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2338\" data-end=\"2355\">\n<td data-start=\"2338\" data-end=\"2345\" data-col-size=\"sm\">Warp<\/td>\n<td data-col-size=\"sm\" data-start=\"2345\" data-end=\"2355\">&lt;50 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2356\" data-end=\"2388\">\n<td data-start=\"2356\" data-end=\"2362\" data-col-size=\"sm\">LTV<\/td>\n<td data-col-size=\"sm\" data-start=\"2362\" data-end=\"2388\">&lt;1,5 \u03bcm (5\u00d75 mm\u00b2, 95%)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2390\" data-end=\"2393\" \/>\n<h2 data-section-id=\"va7zzg\" data-start=\"2395\" data-end=\"2429\">Tenk\u00e1 vrstva niob\u00e1tu lithn\u00e9ho<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2431\" data-end=\"2648\">\n<thead data-start=\"2431\" data-end=\"2452\">\n<tr data-start=\"2431\" data-end=\"2452\">\n<th class=\"last:pe-10\" data-start=\"2431\" data-end=\"2443\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"last:pe-10\" data-start=\"2443\" data-end=\"2452\" data-col-size=\"sm\">Hodnota<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2473\" data-end=\"2648\">\n<tr data-start=\"2473\" data-end=\"2509\">\n<td data-start=\"2473\" data-end=\"2484\" data-col-size=\"sm\">Materi\u00e1l<\/td>\n<td data-col-size=\"sm\" data-start=\"2484\" data-end=\"2509\">Monokrystal LiNbO\u2083<\/td>\n<\/tr>\n<tr data-start=\"2510\" data-end=\"2542\">\n<td data-start=\"2510\" data-end=\"2522\" data-col-size=\"sm\">Tlou\u0161\u0165ka<\/td>\n<td data-col-size=\"sm\" data-start=\"2522\" data-end=\"2542\">300 nm \u2013 1000 nm<\/td>\n<\/tr>\n<tr data-start=\"2543\" data-end=\"2575\">\n<td data-start=\"2543\" data-end=\"2566\" data-col-size=\"sm\">P\u0159esnost orientace<\/td>\n<td data-col-size=\"sm\" data-start=\"2566\" data-end=\"2575\">\u00b10,5\u00b0<\/td>\n<\/tr>\n<tr data-start=\"2576\" data-end=\"2609\">\n<td data-start=\"2576\" data-end=\"2596\" data-col-size=\"sm\">Drsnost povrchu<\/td>\n<td data-start=\"2596\" data-end=\"2609\" data-col-size=\"sm\">Ra &lt; 1 nm<\/td>\n<\/tr>\n<tr data-start=\"2610\" data-end=\"2648\">\n<td data-start=\"2610\" data-end=\"2628\" data-col-size=\"sm\">Vady spoj\u016f<\/td>\n<td data-start=\"2628\" data-end=\"2648\" data-col-size=\"sm\">\u017d\u00e1dn\u00e9 vady v\u011bt\u0161\u00ed ne\u017e 1 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2650\" data-end=\"2653\" \/>\n<h2 data-section-id=\"1ats5mq\" data-start=\"2655\" data-end=\"2683\">Poh\u0159ben\u00e1 vrstva oxidu (SiO\u2082)<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2685\" data-end=\"2812\">\n<thead data-start=\"2685\" data-end=\"2706\">\n<tr data-start=\"2685\" data-end=\"2706\">\n<th class=\"last:pe-10\" data-start=\"2685\" data-end=\"2697\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"last:pe-10\" data-start=\"2697\" data-end=\"2706\" data-col-size=\"sm\">Hodnota<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2727\" data-end=\"2812\">\n<tr data-start=\"2727\" data-end=\"2746\">\n<td data-start=\"2727\" data-end=\"2738\" data-col-size=\"sm\">Materi\u00e1l<\/td>\n<td data-start=\"2738\" data-end=\"2746\" data-col-size=\"sm\">SiO\u2082<\/td>\n<\/tr>\n<tr data-start=\"2747\" data-end=\"2791\">\n<td data-start=\"2747\" data-end=\"2759\" data-col-size=\"sm\">Tlou\u0161\u0165ka<\/td>\n<td data-start=\"2759\" data-end=\"2791\" data-col-size=\"sm\">100 nm \u2013 2 \u03bcm (na p\u0159\u00e1n\u00ed)<\/td>\n<\/tr>\n<tr data-start=\"2792\" data-end=\"2812\">\n<td data-start=\"2792\" data-end=\"2805\" data-col-size=\"sm\">Jednotnost<\/td>\n<td data-col-size=\"sm\" data-start=\"2805\" data-end=\"2812\">\u00b15%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2814\" data-end=\"2817\" \/>\n<h1 data-section-id=\"67t699\" data-start=\"2819\" data-end=\"2840\"><img decoding=\"async\" class=\"alignright wp-image-2498 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-300x300.jpg\" alt=\"Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) pro aplikace v oblasti integrovan\u00e9 fotoniky\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-300x300.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-150x150.jpg 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-12x12.jpg 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-600x600.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002-100x100.jpg 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/20250609171006_76002.jpg 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>V\u00fdrobn\u00ed proces<\/h1>\n<p data-start=\"2842\" data-end=\"2907\">Pl\u00e1tky LNOI se vyr\u00e1b\u011bj\u00ed pomoc\u00ed proces\u016f pou\u017e\u00edvan\u00fdch v polovodi\u010dov\u00e9m pr\u016fmyslu:<\/p>\n<ul data-start=\"2909\" data-end=\"3181\">\n<li data-section-id=\"1wtbcec\" data-start=\"2909\" data-end=\"2961\">Iontov\u00e1 implantace pro \u0159\u00edzen\u00e9 odd\u011blov\u00e1n\u00ed vrstev<\/li>\n<li data-section-id=\"1usb3eg\" data-start=\"2962\" data-end=\"3006\">Lepen\u00ed desti\u010dek na izola\u010dn\u00ed podklady<\/li>\n<li data-section-id=\"tp2lg8\" data-start=\"3007\" data-end=\"3063\">Vysokoteplotn\u00ed \u017e\u00edh\u00e1n\u00ed za \u00fa\u010delem stabilizace krystal\u016f<\/li>\n<li data-section-id=\"1erbdy1\" data-start=\"3064\" data-end=\"3129\">Chemicko-mechanick\u00e9 le\u0161t\u011bn\u00ed (CMP) pro vyrovn\u00e1n\u00ed povrchu<\/li>\n<li data-section-id=\"1ff9571\" data-start=\"3130\" data-end=\"3181\">Z\u00e1v\u011bre\u010dn\u00e1 kontrola optick\u00e9 a konstruk\u010dn\u00ed kvality<\/li>\n<\/ul>\n<hr data-start=\"3183\" data-end=\"3186\" \/>\n<h1 data-section-id=\"8fe6go\" data-start=\"3188\" data-end=\"3206\">Hlavn\u00ed oblasti pou\u017eit\u00ed<\/h1>\n<ul data-start=\"3208\" data-end=\"3522\">\n<li data-section-id=\"1ewpgzj\" data-start=\"3208\" data-end=\"3267\">Vysokorychlostn\u00ed optick\u00e1 komunikace (modul\u00e1tory 100G\u2013800G)<\/li>\n<li data-section-id=\"16e2of\" data-start=\"3268\" data-end=\"3332\">Kvantov\u00e1 fotonika (generov\u00e1n\u00ed prov\u00e1zan\u00fdch foton\u016f, syst\u00e9my QKD)<\/li>\n<li data-section-id=\"1tlx3mb\" data-start=\"3333\" data-end=\"3395\">Mikrovlnn\u00e1 fotonika (zpracov\u00e1n\u00ed vysokofrekven\u010dn\u00edch sign\u00e1l\u016f, syst\u00e9my v milimetrov\u00e9m p\u00e1smu)<\/li>\n<li data-section-id=\"14eg7t1\" data-start=\"3396\" data-end=\"3454\">Neline\u00e1rn\u00ed optika (konverze frekvence, optick\u00e9 h\u0159ebeny)<\/li>\n<li data-section-id=\"1ps9unu\" data-start=\"3455\" data-end=\"3522\">Integrovan\u00e9 senzorov\u00e9 syst\u00e9my (biochemick\u00e9 a optick\u00e9 rezon\u00e1tory)<\/li>\n<\/ul>\n<hr data-start=\"3524\" data-end=\"3527\" \/>\n<h1 data-section-id=\"ujnxut\" data-start=\"3529\" data-end=\"3567\">V\u00fdkonnostn\u00ed v\u00fdhody oproti hromadn\u011b dod\u00e1van\u00e9mu LiNbO\u2083<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3569\" data-end=\"3884\">\n<thead data-start=\"3569\" data-end=\"3612\">\n<tr data-start=\"3569\" data-end=\"3612\">\n<th class=\"last:pe-10\" data-start=\"3569\" data-end=\"3580\" data-col-size=\"sm\">Majetek<\/th>\n<th class=\"last:pe-10\" data-start=\"3580\" data-end=\"3594\" data-col-size=\"sm\">LiNbO\u2083 ve velk\u00e9m mno\u017estv\u00ed<\/th>\n<th class=\"last:pe-10\" data-start=\"3594\" data-end=\"3612\" data-col-size=\"sm\">LNOI tenk\u00e1 vrstva<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3657\" data-end=\"3884\">\n<tr data-start=\"3657\" data-end=\"3696\">\n<td data-start=\"3657\" data-end=\"3672\" data-col-size=\"sm\">Optick\u00e9 ztr\u00e1ty<\/td>\n<td data-col-size=\"sm\" data-start=\"3672\" data-end=\"3681\">Vy\u0161\u0161\u00ed<\/td>\n<td data-col-size=\"sm\" data-start=\"3681\" data-end=\"3696\">&lt;0,05 dB\/cm<\/td>\n<\/tr>\n<tr data-start=\"3697\" data-end=\"3743\">\n<td data-start=\"3697\" data-end=\"3711\" data-col-size=\"sm\">Integrace<\/td>\n<td data-start=\"3711\" data-end=\"3717\" data-col-size=\"sm\">N\u00edzk\u00e1<\/td>\n<td data-start=\"3717\" data-end=\"3743\" data-col-size=\"sm\">Fotonika s vysokou hustotou<\/td>\n<\/tr>\n<tr data-start=\"3744\" data-end=\"3786\">\n<td data-start=\"3744\" data-end=\"3758\" data-col-size=\"sm\">Velikost za\u0159\u00edzen\u00ed<\/td>\n<td data-start=\"3758\" data-end=\"3766\" data-col-size=\"sm\">Velk\u00fd<\/td>\n<td data-start=\"3766\" data-end=\"3786\" data-col-size=\"sm\">V \u0159\u00e1du submikron\u016f<\/td>\n<\/tr>\n<tr data-start=\"3787\" data-end=\"3820\">\n<td data-start=\"3787\" data-end=\"3808\" data-col-size=\"sm\">Kompatibilita s CMOS<\/td>\n<td data-col-size=\"sm\" data-start=\"3808\" data-end=\"3813\">Ne<\/td>\n<td data-col-size=\"sm\" data-start=\"3813\" data-end=\"3820\">Ano<\/td>\n<\/tr>\n<tr data-start=\"3821\" data-end=\"3884\">\n<td data-start=\"3821\" data-end=\"3845\" data-col-size=\"sm\">\u00da\u010dinnost modulace<\/td>\n<td data-col-size=\"sm\" data-start=\"3845\" data-end=\"3856\">M\u00edrn\u00e1<\/td>\n<td data-col-size=\"sm\" data-start=\"3856\" data-end=\"3884\">Vysok\u00e1 (lze dos\u00e1hnout V\u03c0 ~1 V)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3886\" data-end=\"3889\" \/>\n<h1 data-section-id=\"1pspex7\" data-start=\"3891\" data-end=\"3914\">Mo\u017enosti p\u0159izp\u016fsoben\u00ed<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"3916\" data-end=\"4162\">\n<thead data-start=\"3916\" data-end=\"3940\">\n<tr data-start=\"3916\" data-end=\"3940\">\n<th class=\"last:pe-10\" data-start=\"3916\" data-end=\"3925\" data-col-size=\"sm\">Mo\u017enost<\/th>\n<th class=\"last:pe-10\" data-start=\"3925\" data-end=\"3940\" data-col-size=\"sm\">Popis<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"3965\" data-end=\"4162\">\n<tr data-start=\"3965\" data-end=\"4004\">\n<td data-start=\"3965\" data-end=\"3979\" data-col-size=\"sm\">K\u0159i\u0161\u0165\u00e1lov\u00fd \u0159ez<\/td>\n<td data-col-size=\"sm\" data-start=\"3979\" data-end=\"4004\">\u0158ez X \/ \u0158ez Y \/ \u0158ez Z<\/td>\n<\/tr>\n<tr data-start=\"4005\" data-end=\"4042\">\n<td data-start=\"4005\" data-end=\"4022\" data-col-size=\"sm\">Tlou\u0161\u0165ka filmu<\/td>\n<td data-start=\"4022\" data-end=\"4042\" data-col-size=\"sm\">300 nm \u2013 1000 nm<\/td>\n<\/tr>\n<tr data-start=\"4043\" data-end=\"4081\">\n<td data-start=\"4043\" data-end=\"4055\" data-col-size=\"sm\">Podklad<\/td>\n<td data-start=\"4055\" data-end=\"4081\" data-col-size=\"sm\">K\u0159em\u00edk \/ K\u0159emen \/ Saf\u00edr<\/td>\n<\/tr>\n<tr data-start=\"4082\" data-end=\"4122\">\n<td data-start=\"4082\" data-end=\"4096\" data-col-size=\"sm\">Oxidov\u00e1 vrstva<\/td>\n<td data-start=\"4096\" data-end=\"4122\" data-col-size=\"sm\">100 nm \u2013 2 \u03bcm (na m\u00edru)<\/td>\n<\/tr>\n<tr data-start=\"4123\" data-end=\"4162\">\n<td data-start=\"4123\" data-end=\"4132\" data-col-size=\"sm\">Doping<\/td>\n<td data-start=\"4132\" data-end=\"4162\" data-col-size=\"sm\">K dispozici je LiNbO\u2083 dopovan\u00fd MgO<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4164\" data-end=\"4167\" \/>\n<h1 data-section-id=\"7l53zg\" data-start=\"4169\" data-end=\"4186\">Kontrola kvality<\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4188\" data-end=\"4426\">\n<thead data-start=\"4188\" data-end=\"4210\">\n<tr data-start=\"4188\" data-end=\"4210\">\n<th class=\"last:pe-10\" data-start=\"4188\" data-end=\"4200\" data-col-size=\"sm\">Testovac\u00ed polo\u017eka<\/th>\n<th class=\"last:pe-10\" data-start=\"4200\" data-end=\"4210\" data-col-size=\"sm\">Metoda<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4232\" data-end=\"4426\">\n<tr data-start=\"4232\" data-end=\"4277\">\n<td data-start=\"4232\" data-end=\"4247\" data-col-size=\"sm\">Optick\u00e9 ztr\u00e1ty<\/td>\n<td data-col-size=\"sm\" data-start=\"4247\" data-end=\"4277\">Test \u0161\u00ed\u0159en\u00ed vlny ve vlnovodu<\/td>\n<\/tr>\n<tr data-start=\"4278\" data-end=\"4317\">\n<td data-start=\"4278\" data-end=\"4298\" data-col-size=\"sm\">Drsnost povrchu<\/td>\n<td data-start=\"4298\" data-end=\"4317\" data-col-size=\"sm\">m\u011b\u0159en\u00ed pomoc\u00ed AFM<\/td>\n<\/tr>\n<tr data-start=\"4318\" data-end=\"4359\">\n<td data-start=\"4318\" data-end=\"4341\" data-col-size=\"sm\">Rovnom\u011brnost tlou\u0161\u0165ky<\/td>\n<td data-col-size=\"sm\" data-start=\"4341\" data-end=\"4359\">Mapov\u00fd syst\u00e9m<\/td>\n<\/tr>\n<tr data-start=\"4360\" data-end=\"4395\">\n<td data-start=\"4360\" data-end=\"4378\" data-col-size=\"sm\">Kvalita lepen\u00ed<\/td>\n<td data-col-size=\"sm\" data-start=\"4378\" data-end=\"4395\">Infra\u010derven\u00e1 kontrola<\/td>\n<\/tr>\n<tr data-start=\"4396\" data-end=\"4426\">\n<td data-start=\"4396\" data-end=\"4407\" data-col-size=\"sm\">Plochost<\/td>\n<td data-col-size=\"sm\" data-start=\"4407\" data-end=\"4426\">M\u011b\u0159en\u00ed tenk\u00fdch vrstev<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4428\" data-end=\"4431\" \/>\n<h1 data-section-id=\"vnyh67\" data-start=\"4433\" data-end=\"4457\">Technick\u00e9 kapacity<\/h1>\n<p data-start=\"4459\" data-end=\"4554\"><span class=\"hover:entity-accent entity-underline inline cursor-pointer align-baseline\"><span class=\"whitespace-normal\">ZMSH<\/span><\/span> poskytuje komplexn\u00ed podporu p\u0159i v\u00fdvoji desti\u010dek LNOI:<\/p>\n<ul data-start=\"4556\" data-end=\"4746\">\n<li data-section-id=\"z18qgz\" data-start=\"4556\" data-end=\"4589\">Optimalizace konstrukce tenkovrstv\u00fdch za\u0159\u00edzen\u00ed<\/li>\n<li data-section-id=\"zskefu\" data-start=\"4590\" data-end=\"4627\">Technika proces\u016f lepen\u00ed polovodi\u010dov\u00fdch desti\u010dek<\/li>\n<li data-section-id=\"1c4k4on\" data-start=\"4628\" data-end=\"4667\">Podpora p\u0159i v\u00fdrob\u011b fotonick\u00fdch za\u0159\u00edzen\u00ed<\/li>\n<li data-section-id=\"gug1e5\" data-start=\"4668\" data-end=\"4699\">Nanofabrikace (EBL \/ IBE)<\/li>\n<li data-section-id=\"k6htmy\" data-start=\"4700\" data-end=\"4746\">Testov\u00e1n\u00ed a ov\u011b\u0159ov\u00e1n\u00ed optick\u00fdch parametr\u016f<\/li>\n<\/ul>\n<p data-start=\"4748\" data-end=\"4834\">Podporuje jak prototypov\u00e1n\u00ed v r\u00e1mci v\u00fdzkumu a v\u00fdvoje, tak \u0161k\u00e1lovatelnou malos\u00e9riovou v\u00fdrobu a\u017e pro 8palcov\u00e9 desti\u010dky.<\/p>\n<hr data-start=\"4836\" data-end=\"4839\" \/>\n<h1 data-section-id=\"1mpc0g\" data-start=\"4841\" data-end=\"4846\">\u010cASTO KLADEN\u00c9 DOTAZY<\/h1>\n<p data-start=\"4848\" data-end=\"4996\">K \u010demu se LNOI pou\u017e\u00edv\u00e1<br data-start=\"4869\" data-end=\"4872\" \/>Pl\u00e1tky LNOI se hojn\u011b vyu\u017e\u00edvaj\u00ed v optick\u00e9 komunikaci, kvantov\u00e9 fotonice, neline\u00e1rn\u00ed optice a integrovan\u00fdch fotonick\u00fdch obvodech.<\/p>\n<p data-start=\"4998\" data-end=\"5114\">Jak\u00e1 je obvykl\u00e1 tlou\u0161\u0165ka tenk\u00e9 vrstvy?<br data-start=\"5037\" data-end=\"5040\" \/>Tlou\u0161\u0165ka tenk\u00e9 vrstvy niob\u00e1tu lithn\u00e9ho se obvykle pohybuje v rozmez\u00ed 300 nm a\u017e 1000 nm.<\/p>\n<p data-start=\"5116\" data-end=\"5264\">Pro\u010d pou\u017e\u00edvat LNOI m\u00edsto niob\u00e1tu lithn\u00e9ho ve velk\u00e9m mno\u017estv\u00ed<br data-start=\"5160\" data-end=\"5163\" \/>Technologie LNOI nab\u00edz\u00ed ni\u017e\u0161\u00ed optick\u00e9 ztr\u00e1ty, vy\u0161\u0161\u00ed integra\u010dn\u00ed hustotu a fotonickou integraci kompatibiln\u00ed s technologi\u00ed CMOS.<\/p>\n<p data-start=\"5266\" data-end=\"5392\">Je mo\u017en\u00e9 integrovat technologii LNOI do k\u0159em\u00edkov\u00e9 fotoniky?<br data-start=\"5307\" data-end=\"5310\" \/>Ano, LNOI je pln\u011b kompatibiln\u00ed s fotonick\u00fdmi platformami na b\u00e1zi k\u0159em\u00edku a nitridu k\u0159em\u00edku.<\/p>","protected":false},"excerpt":{"rendered":"<p data-start=\"531\" data-end=\"686\">Tenkovrstv\u00e9 desti\u010dky z niob\u00e1tu lithn\u00e9ho na izol\u00e1toru (LNOI) jsou modern\u00ed fotonick\u00e9 substr\u00e1ty pou\u017e\u00edvan\u00e9 v integrovan\u00fdch optick\u00fdch, mikrovlnn\u00fdch fotonick\u00fdch a kvantov\u00fdch syst\u00e9mech.<\/p>\n<p data-start=\"688\" data-end=\"830\">Struktura se skl\u00e1d\u00e1 z tenk\u00e9 vrstvy monokrystalick\u00e9ho niob\u00e1tu lithn\u00e9ho, kter\u00e1 je nanesena na izola\u010dn\u00ed vrstvu z SiO\u2082 a podlo\u017eena k\u0159em\u00edkov\u00fdm substr\u00e1tem.<\/p>\n<p data-start=\"688\" data-end=\"830\">Tato konfigurace zaji\u0161\u0165uje siln\u00e9 optick\u00e9 ohrani\u010den\u00ed, mimo\u0159\u00e1dn\u011b n\u00edzk\u00e9 ztr\u00e1ty p\u0159i \u0161\u00ed\u0159en\u00ed a vysokou elektrooptickou \u00fa\u010dinnost, co\u017e z n\u00ed \u010din\u00ed kl\u00ed\u010dovou platformu pro integrovanou fotoniku.<\/p>\n<p data-start=\"688\" data-end=\"830\">\n<p data-start=\"688\" data-end=\"830\">","protected":false},"featured_media":2496,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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