{"id":2400,"date":"2026-04-24T06:21:19","date_gmt":"2026-04-24T06:21:19","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2400"},"modified":"2026-04-24T06:21:22","modified_gmt":"2026-04-24T06:21:22","slug":"precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/cs\/product\/precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching\/","title":{"rendered":"P\u0159esn\u00fd k\u0159em\u00edkov\u00fd krou\u017eek (monokrystalick\u00fd \/ polykrystalick\u00fd) pro plazmov\u00e9 lept\u00e1n\u00ed polovodi\u010d\u016f"},"content":{"rendered":"<p data-start=\"228\" data-end=\"558\">\u00a0\u00a0<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2404 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"P\u0159esn\u00fd k\u0159em\u00edkov\u00fd krou\u017eek (monokrystalick\u00fd \/ polykrystalick\u00fd) pro plazmov\u00e9 lept\u00e1n\u00ed polovodi\u010d\u016f\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>K\u0159em\u00edkov\u00fd krou\u017eek (Si krou\u017eek) je \u0161iroce pou\u017e\u00edvanou sou\u010d\u00e1st\u00ed za\u0159\u00edzen\u00ed pro plazmov\u00e9 zpracov\u00e1n\u00ed polovodi\u010d\u016f, kter\u00e1 slou\u017e\u00ed jako ohniskov\u00fd krou\u017eek, okrajov\u00fd krou\u017eek nebo vlo\u017eka komory. Hraje kl\u00ed\u010dovou roli p\u0159i \u0159\u00edzen\u00ed distribuce plazmatu, zlep\u0161uje rovnom\u011brnost lept\u00e1n\u00ed a chr\u00e1n\u00ed kritick\u00e9 sou\u010d\u00e1sti komory p\u0159ed p\u0159\u00edm\u00fdm p\u016fsoben\u00edm vysokoenergetick\u00e9ho plazmatu.<\/p>\n<p data-start=\"560\" data-end=\"882\">Si krou\u017eky, vyroben\u00e9 z vysoce \u010dist\u00e9ho monokrystalick\u00e9ho nebo polykrystalick\u00e9ho k\u0159em\u00edku, jsou v\u00fdborn\u011b kompatibiln\u00ed s procesy v\u00fdroby k\u0159em\u00edkov\u00fdch desti\u010dek. Tato vnit\u0159n\u00ed kompatibilita materi\u00e1lu v\u00fdznamn\u011b sni\u017euje rizika kontaminace a \u010din\u00ed z k\u0159em\u00edkov\u00fdch krou\u017ek\u016f preferovanou volbu v mnoha prost\u0159ed\u00edch v\u00fdroby polovodi\u010d\u016f.<\/p>\n<p data-start=\"884\" data-end=\"1239\">B\u011bhem provozu jsou k\u0159em\u00edkov\u00e9 krou\u017eky vystaveny reaktivn\u00edmu plazmatu generovan\u00e9mu plyny, jako jsou CF\u2084, SF\u2086, NF\u2083 a Cl\u2082. Tyto podm\u00ednky postupn\u011b zp\u016fsobuj\u00ed erozi materi\u00e1lu a degradaci povrchu. V d\u016fsledku toho jsou k\u0159em\u00edkov\u00e9 krou\u017eky klasifikov\u00e1ny jako kritick\u00fd polovodi\u010dov\u00fd spot\u0159ebn\u00ed materi\u00e1l, kter\u00fd vy\u017eaduje pravidelnou v\u00fdm\u011bnu pro zachov\u00e1n\u00ed optim\u00e1ln\u00edho v\u00fdkonu a v\u00fdt\u011b\u017enosti procesu.<\/p>\n<p data-start=\"1241\" data-end=\"1430\">V porovn\u00e1n\u00ed s krou\u017eky SiC jsou k\u0159em\u00edkov\u00e9 krou\u017eky cenov\u011b v\u00fdhodn\u011bj\u0161\u00ed a snadn\u011bji se obr\u00e1b\u011bj\u00ed, tak\u017ee jsou ide\u00e1ln\u00ed pro aplikace, kde jsou p\u0159ijateln\u00e9 cykly v\u00fdm\u011bny a kde je d\u016fle\u017eit\u00e1 kontrola n\u00e1klad\u016f.<\/p>\n<hr data-start=\"1432\" data-end=\"1435\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1437\" data-end=\"1457\">Kl\u00ed\u010dov\u00e9 vlastnosti<\/h2>\n<ul data-start=\"1458\" data-end=\"2054\">\n<li data-section-id=\"1wvx41j\" data-start=\"1458\" data-end=\"1549\">Vysoce \u010dist\u00fd k\u0159em\u00edk Materi\u00e1l: K dispozici v monokrystalick\u00e9 a polykrystalick\u00e9 form\u011b<\/li>\n<li data-section-id=\"16rlosp\" data-start=\"1550\" data-end=\"1653\">Vynikaj\u00edc\u00ed kompatibilita s procesy: Ide\u00e1ln\u00ed pro zpracov\u00e1n\u00ed k\u0159em\u00edkov\u00fdch desti\u010dek s n\u00edzk\u00fdm rizikem kontaminace.<\/li>\n<li data-section-id=\"h5tu82\" data-start=\"1654\" data-end=\"1727\">Stabiln\u00ed elektrick\u00e9 vlastnosti: Podporuje konzistentn\u00ed chov\u00e1n\u00ed plazmatu<\/li>\n<li data-section-id=\"qwtj7n\" data-start=\"1728\" data-end=\"1814\">P\u0159esn\u00e9 obr\u00e1b\u011bn\u00ed: T\u011bsn\u00e1 tolerance (&lt;10 \u03bcm) pro pokro\u010dil\u00e9 polovodi\u010dov\u00e9 n\u00e1stroje<\/li>\n<li data-section-id=\"cd4ksl\" data-start=\"1815\" data-end=\"1903\">V\u00edce mo\u017enost\u00ed rezistivity: Vhodn\u00e9 pro r\u016fzn\u00e9 po\u017eadavky na \u0159\u00edzen\u00ed plazmy<\/li>\n<li data-section-id=\"vfz8a3\" data-start=\"1904\" data-end=\"1984\">N\u00e1kladov\u011b efektivn\u00ed \u0159e\u0161en\u00ed: Ni\u017e\u0161\u00ed po\u010d\u00e1te\u010dn\u00ed n\u00e1klady ve srovn\u00e1n\u00ed s alternativami SiC<\/li>\n<li data-section-id=\"1q6rj8k\" data-start=\"1985\" data-end=\"2054\">Podpora vlastn\u00edho designu: K dispozici jsou slo\u017eit\u00e9 geometrie a velikosti<\/li>\n<\/ul>\n<hr data-start=\"2056\" data-end=\"2059\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2061\" data-end=\"2093\">Technick\u00e9 specifikace<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2095\" data-end=\"2793\">\n<thead data-start=\"2095\" data-end=\"2124\">\n<tr data-start=\"2095\" data-end=\"2124\">\n<th class=\"\" data-start=\"2095\" data-end=\"2107\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"\" data-start=\"2107\" data-end=\"2124\" data-col-size=\"md\">Specifikace<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2152\" data-end=\"2793\">\n<tr data-start=\"2152\" data-end=\"2215\">\n<td data-start=\"2152\" data-end=\"2163\" data-col-size=\"sm\">Materi\u00e1l<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2215\">Monokrystalick\u00fd k\u0159em\u00edk \/ Polykrystalick\u00fd k\u0159em\u00edk<\/td>\n<\/tr>\n<tr data-start=\"2216\" data-end=\"2263\">\n<td data-start=\"2216\" data-end=\"2225\" data-col-size=\"sm\">Purity<\/td>\n<td data-col-size=\"md\" data-start=\"2225\" data-end=\"2263\">\u2265 99,999% (polovodi\u010dov\u00e1 t\u0159\u00edda 5N)<\/td>\n<\/tr>\n<tr data-start=\"2264\" data-end=\"2297\">\n<td data-start=\"2264\" data-end=\"2281\" data-col-size=\"sm\">Pr\u016fm\u011br (max.)<\/td>\n<td data-col-size=\"md\" data-start=\"2281\" data-end=\"2297\">Do 480 mm<\/td>\n<\/tr>\n<tr data-start=\"2298\" data-end=\"2340\">\n<td data-start=\"2298\" data-end=\"2310\" data-col-size=\"sm\">Tlou\u0161\u0165ka<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2340\">Vlastn\u00ed (obvykle 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2341\" data-end=\"2376\">\n<td data-start=\"2341\" data-end=\"2361\" data-col-size=\"sm\">Odpor (n\u00edzk\u00fd)<\/td>\n<td data-col-size=\"md\" data-start=\"2361\" data-end=\"2376\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2377\" data-end=\"2414\">\n<td data-start=\"2377\" data-end=\"2400\" data-col-size=\"sm\">Odolnost (st\u0159edn\u00ed)<\/td>\n<td data-col-size=\"md\" data-start=\"2400\" data-end=\"2414\">1 - 4 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2415\" data-end=\"2452\">\n<td data-start=\"2415\" data-end=\"2436\" data-col-size=\"sm\">Odolnost (vysok\u00e1)<\/td>\n<td data-col-size=\"md\" data-start=\"2436\" data-end=\"2452\">70 - 90 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2453\" data-end=\"2492\">\n<td data-start=\"2453\" data-end=\"2484\" data-col-size=\"sm\">Rovnom\u011brnost odporu (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2484\" data-end=\"2492\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2493\" data-end=\"2543\">\n<td data-start=\"2493\" data-end=\"2513\" data-col-size=\"sm\">Stav povrchu<\/td>\n<td data-col-size=\"md\" data-start=\"2513\" data-end=\"2543\">Le\u0161t\u011bn\u00e9 \/ le\u0161t\u011bn\u00e9 \/ brou\u0161en\u00e9<\/td>\n<\/tr>\n<tr data-start=\"2544\" data-end=\"2605\">\n<td data-start=\"2544\" data-end=\"2569\" data-col-size=\"sm\">Drsnost povrchu (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2569\" data-end=\"2605\">\u2264 0,8 \u03bcm (le\u0161t\u011bn\u00e1 m\u016f\u017ee b\u00fdt ni\u017e\u0161\u00ed)<\/td>\n<\/tr>\n<tr data-start=\"2606\" data-end=\"2639\">\n<td data-start=\"2606\" data-end=\"2628\" data-col-size=\"sm\">P\u0159esnost obr\u00e1b\u011bn\u00ed<\/td>\n<td data-col-size=\"md\" data-start=\"2628\" data-end=\"2639\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2640\" data-end=\"2682\">\n<td data-start=\"2640\" data-end=\"2651\" data-col-size=\"sm\">Plochost<\/td>\n<td data-col-size=\"md\" data-start=\"2651\" data-end=\"2682\">\u2264 30 \u03bcm (v z\u00e1vislosti na velikosti)<\/td>\n<\/tr>\n<tr data-start=\"2683\" data-end=\"2728\">\n<td data-start=\"2683\" data-end=\"2695\" data-col-size=\"sm\">Typ hrany<\/td>\n<td data-col-size=\"md\" data-start=\"2695\" data-end=\"2728\">Mo\u017enost nastaven\u00ed zkosen\u00ed \/ polom\u011bru<\/td>\n<\/tr>\n<tr data-start=\"2729\" data-end=\"2793\">\n<td data-start=\"2729\" data-end=\"2747\" data-col-size=\"sm\">Kontrola kvality<\/td>\n<td data-col-size=\"md\" data-start=\"2747\" data-end=\"2793\">\u017d\u00e1dn\u00e9 praskliny, t\u0159\u00edsky, \u0161kr\u00e1bance, zne\u010di\u0161t\u011bn\u00ed<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2795\" data-end=\"2798\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2800\" data-end=\"2820\">Aplikace<\/h2>\n<p data-start=\"2821\" data-end=\"2903\">K\u0159em\u00edkov\u00e9 krou\u017eky jsou nezbytn\u00e9 v r\u016fzn\u00fdch prost\u0159ed\u00edch zpracov\u00e1n\u00ed polovodi\u010d\u016f:<\/p>\n<ul data-start=\"2905\" data-end=\"3108\">\n<li data-section-id=\"qzqq98\" data-start=\"2905\" data-end=\"2943\">Plazmov\u00e9 leptac\u00ed syst\u00e9my (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"2944\" data-end=\"2987\">Chemick\u00e9 napa\u0159ov\u00e1n\u00ed (CVD \/ PECVD)<\/li>\n<li data-section-id=\"1hekjdg\" data-start=\"2988\" data-end=\"3025\">Sou\u010d\u00e1sti zaost\u0159ovac\u00edho krou\u017eku \/ okrajov\u00e9ho krou\u017eku<\/li>\n<li data-section-id=\"y1zl6l\" data-start=\"3026\" data-end=\"3065\">Ochrann\u00e9 a obkladov\u00e9 d\u00edly komory<\/li>\n<li data-section-id=\"83pt8g\" data-start=\"3066\" data-end=\"3108\">Aplikace \u0159\u00edzen\u00ed plazmou na okraji desti\u010dky<\/li>\n<\/ul>\n<p data-start=\"3110\" data-end=\"3235\">Jsou \u0161iroce pou\u017e\u00edv\u00e1ny jak ve vysp\u011bl\u00fdch, tak v p\u0159echodn\u00fdch procesn\u00edch uzlech, kde je vy\u017eadov\u00e1na n\u00e1kladov\u00e1 efektivita a stabiln\u00ed v\u00fdkon.<\/p>\n<p data-start=\"3110\" data-end=\"3235\"><img decoding=\"async\" class=\"aligncenter wp-image-2406 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg\" alt=\"P\u0159esn\u00fd k\u0159em\u00edkov\u00fd krou\u017eek (monokrystalick\u00fd \/ polykrystalick\u00fd) pro plazmov\u00e9 lept\u00e1n\u00ed polovodi\u010d\u016f\" width=\"1024\" height=\"681\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3237\" data-end=\"3240\" \/>\n<h2 data-section-id=\"1misgzs\" data-start=\"3242\" data-end=\"3274\">V\u00fdhody a um\u00edst\u011bn\u00ed<\/h2>\n<p data-start=\"3275\" data-end=\"3371\">K\u0159em\u00edkov\u00e9 krou\u017eky p\u0159edstavuj\u00ed vyv\u00e1\u017een\u00e9 \u0159e\u0161en\u00ed mezi v\u00fdkonem a cenou. Ve srovn\u00e1n\u00ed s krou\u017eky SiC:<\/p>\n<ul data-start=\"3373\" data-end=\"3681\">\n<li data-section-id=\"qgkkrh\" data-start=\"3373\" data-end=\"3449\">Ni\u017e\u0161\u00ed n\u00e1klady: Ide\u00e1ln\u00ed pro sc\u00e9n\u00e1\u0159e, kter\u00e9 jsou citliv\u00e9 na rozpo\u010det nebo n\u00e1ro\u010dn\u00e9 na v\u00fdm\u011bnu.<\/li>\n<li data-section-id=\"fe5ihf\" data-start=\"3450\" data-end=\"3533\">Dobr\u00e1 kompatibilita proces\u016f: Vhodn\u00e9 zejm\u00e9na pro procesy na b\u00e1zi k\u0159em\u00edku<\/li>\n<li data-section-id=\"1wgvfgt\" data-start=\"3534\" data-end=\"3604\">Flexibiln\u00ed v\u00fdroba: Snadn\u011bj\u0161\u00ed obr\u00e1b\u011bn\u00ed slo\u017eit\u00fdch konstrukc\u00ed<\/li>\n<li data-section-id=\"1855g4l\" data-start=\"3605\" data-end=\"3681\">Spolehliv\u00fd v\u00fdkon: Prov\u011b\u0159eno ve velkov\u00fdrob\u011b polovodi\u010d\u016f<\/li>\n<\/ul>\n<p data-start=\"3683\" data-end=\"3894\">V extr\u00e9mn\u011b n\u00e1ro\u010dn\u00fdch podm\u00ednk\u00e1ch plazmatu se v\u0161ak k\u0159em\u00edkov\u00e9 krou\u017eky mohou opot\u0159ebov\u00e1vat rychleji ne\u017e krou\u017eky SiC. V\u00fdb\u011br materi\u00e1lu by proto m\u011bl vych\u00e1zet z intenzity procesu, o\u010dek\u00e1van\u00e9 \u017eivotnosti a n\u00e1klad\u016f.<\/p>\n<p data-start=\"3683\" data-end=\"3894\"><img decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"3896\" data-end=\"3899\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"3901\" data-end=\"3912\">\u010cASTO KLADEN\u00c9 DOTAZY<\/h2>\n<p data-start=\"3914\" data-end=\"4070\">Ot\u00e1zka 1: Je k\u0159em\u00edkov\u00fd krou\u017eek spot\u0159ebn\u00ed materi\u00e1l?<br data-start=\"3963\" data-end=\"3966\" \/>Ano, je pova\u017eov\u00e1n za kritick\u00fd polovodi\u010dov\u00fd spot\u0159ebn\u00ed materi\u00e1l kv\u016fli postupn\u00e9 erozi v plazmov\u00e9m prost\u0159ed\u00ed.<\/p>\n<p data-start=\"4072\" data-end=\"4291\">Ot\u00e1zka 2: Jak\u00fd je rozd\u00edl mezi monokrystalick\u00fdmi a polykrystalick\u00fdmi k\u0159em\u00edkov\u00fdmi krou\u017eky?<br data-start=\"4160\" data-end=\"4163\" \/>Monokrystalick\u00fd k\u0159em\u00edk nab\u00edz\u00ed lep\u0161\u00ed rovnom\u011brnost a elektrick\u00e9 vlastnosti, zat\u00edmco polykrystalick\u00fd k\u0159em\u00edk je cenov\u011b v\u00fdhodn\u011bj\u0161\u00ed.<\/p>\n<p data-start=\"4293\" data-end=\"4452\">Q3: Lze silikonov\u00fd krou\u017eek p\u0159izp\u016fsobit?<br data-start=\"4336\" data-end=\"4339\" \/>Ano. Velikost, tlou\u0161\u0165ku, odpor, povrchovou \u00fapravu a geometrii lze p\u0159izp\u016fsobit podle va\u0161ich v\u00fdkres\u016f.<\/p>\n<p data-start=\"4454\" data-end=\"4622\">Ot\u00e1zka 4: Jak \u010dasto je t\u0159eba silikonov\u00fd krou\u017eek vym\u011bnit?<br data-start=\"4509\" data-end=\"4512\" \/>Z\u00e1le\u017e\u00ed na podm\u00ednk\u00e1ch procesu, ale obvykle je to \u010dast\u011bji ne\u017e u krou\u017ek\u016f SiC kv\u016fli ni\u017e\u0161\u00ed odolnosti v\u016f\u010di plazmatu.<\/p>\n<p data-start=\"4624\" data-end=\"4743\">Ot\u00e1zka 5: Jak\u00e1 je obvykl\u00e1 doba dod\u00e1n\u00ed?<br data-start=\"4662\" data-end=\"4665\" \/>V\u00fdroba obvykle trv\u00e1 3-5 t\u00fddn\u016f v z\u00e1vislosti na specifikac\u00edch a mno\u017estv\u00ed.<\/p>","protected":false},"excerpt":{"rendered":"<p>K\u0159em\u00edkov\u00fd krou\u017eek (Si krou\u017eek) je \u0161iroce pou\u017e\u00edvanou sou\u010d\u00e1st\u00ed za\u0159\u00edzen\u00ed pro plazmov\u00e9 zpracov\u00e1n\u00ed polovodi\u010d\u016f, kter\u00e1 slou\u017e\u00ed jako ohniskov\u00fd krou\u017eek, okrajov\u00fd krou\u017eek nebo vlo\u017eka komory. Hraje kl\u00ed\u010dovou roli p\u0159i \u0159\u00edzen\u00ed distribuce plazmatu, zlep\u0161uje rovnom\u011brnost lept\u00e1n\u00ed a chr\u00e1n\u00ed kritick\u00e9 sou\u010d\u00e1sti komory p\u0159ed p\u0159\u00edm\u00fdm p\u016fsoben\u00edm vysokoenergetick\u00e9ho plazmatu.<\/p>","protected":false},"featured_media":2404,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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