{"id":2389,"date":"2026-04-24T05:55:23","date_gmt":"2026-04-24T05:55:23","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2389"},"modified":"2026-04-24T05:55:25","modified_gmt":"2026-04-24T05:55:25","slug":"cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/cs\/product\/cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching\/","title":{"rendered":"CVD karbid k\u0159em\u00edku SiC Ring pro lept\u00e1n\u00ed polovodi\u010d\u016f plazmou"},"content":{"rendered":"<p data-start=\"213\" data-end=\"577\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2392 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"CVD karbid k\u0159em\u00edku SiC Ring pro lept\u00e1n\u00ed polovodi\u010d\u016f plazmou\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>SiC krou\u017eek (krou\u017eek z karbidu k\u0159em\u00edku) je vysoce v\u00fdkonn\u00e1 sou\u010d\u00e1stka \u0161iroce pou\u017e\u00edvan\u00e1 v za\u0159\u00edzen\u00edch pro plazmov\u00e9 zpracov\u00e1n\u00ed polovodi\u010d\u016f, zejm\u00e9na v leptac\u00edch a depozi\u010dn\u00edch komor\u00e1ch. Tento v\u00fdrobek, vyroben\u00fd s pou\u017eit\u00edm karbidu k\u0159em\u00edku z chemick\u00e9ho napa\u0159ov\u00e1n\u00ed (CVD), nab\u00edz\u00ed v\u00fdjime\u010dnou odolnost v\u016f\u010di erozi plazmatu, vysok\u00fdm teplot\u00e1m a agresivn\u00edm chemick\u00fdm prost\u0159ed\u00edm.<\/p>\n<p data-start=\"579\" data-end=\"989\">P\u0159i v\u00fdrob\u011b polovodi\u010d\u016f jsou sou\u010d\u00e1stky v komo\u0159e neust\u00e1le vystaveny p\u016fsoben\u00ed reaktivn\u00edch plyn\u016f, jako jsou chemick\u00e9 l\u00e1tky na b\u00e1zi fluoru a chloru (CF\u2084, SF\u2086, Cl\u2082), a tak\u00e9 bombardov\u00e1n\u00ed ionty o vysok\u00e9 energii. Za takov\u00fdch podm\u00ednek maj\u00ed tradi\u010dn\u00ed k\u0159em\u00edkov\u00e9 komponenty tendenci rychleji degradovat. Naproti tomu krou\u017eky SiC poskytuj\u00ed v\u00fdrazn\u011b vy\u0161\u0161\u00ed odolnost, ni\u017e\u0161\u00ed tvorbu \u010d\u00e1stic a lep\u0161\u00ed stabilitu procesu.<\/p>\n<p data-start=\"991\" data-end=\"1355\">D\u00edky sv\u00e9 mimo\u0159\u00e1dn\u00e9 mechanick\u00e9 pevnosti, tepeln\u00e9 vodivosti a chemick\u00e9 inertnosti je CVD SiC pova\u017eov\u00e1n za jeden z nejspolehliv\u011bj\u0161\u00edch materi\u00e1l\u016f pro polovodi\u010dov\u00e1 za\u0159\u00edzen\u00ed nov\u00e9 generace. Krou\u017eky SiC se obvykle instaluj\u00ed jako ohniskov\u00e9 krou\u017eky, okrajov\u00e9 krou\u017eky nebo ochrann\u00e9 krou\u017eky komory, kter\u00e9 pom\u00e1haj\u00ed \u0159\u00eddit distribuci plazmatu a chr\u00e1nit kritick\u00e9 \u010d\u00e1sti komory.<\/p>\n<p data-start=\"1357\" data-end=\"1595\">Tyto krou\u017eky jsou klasifikov\u00e1ny jako kritick\u00fd spot\u0159ebn\u00ed materi\u00e1l pro polovodi\u010de a ve srovn\u00e1n\u00ed s b\u011b\u017en\u00fdmi k\u0159em\u00edkov\u00fdmi krou\u017eky nab\u00edzej\u00ed mnohem del\u0161\u00ed \u017eivotnost, tak\u017ee jsou ide\u00e1ln\u00ed pro pokro\u010dil\u00e9 procesn\u00ed uzly a vysoce v\u00fdkonn\u00e1 v\u00fdrobn\u00ed prost\u0159ed\u00ed.<\/p>\n<hr data-start=\"1597\" data-end=\"1600\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1602\" data-end=\"1622\">Kl\u00ed\u010dov\u00e9 vlastnosti<\/h2>\n<p><img decoding=\"async\" class=\"size-medium wp-image-2390 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul data-start=\"1623\" data-end=\"2189\">\n<li data-section-id=\"185xteb\" data-start=\"1623\" data-end=\"1725\">Vysoce \u010dist\u00fd materi\u00e1l CVD SiC: Zaji\u0161\u0165uje vynikaj\u00edc\u00ed struktur\u00e1ln\u00ed integritu a minim\u00e1ln\u00ed kontaminaci.<\/li>\n<li data-section-id=\"103qh1t\" data-start=\"1726\" data-end=\"1822\">Vynikaj\u00edc\u00ed odolnost proti plazmatu: Vynikaj\u00edc\u00ed odolnost v\u016f\u010di fluorov\u00e9mu a chlorov\u00e9mu plazmatu<\/li>\n<li data-section-id=\"19jl5gi\" data-start=\"1823\" data-end=\"1924\">Stabilita p\u0159i vysok\u00fdch teplot\u00e1ch: Zachov\u00e1v\u00e1 v\u00fdkonnost v prost\u0159ed\u00ed s vysok\u00fdmi teplotami.<\/li>\n<li data-section-id=\"ixqmoc\" data-start=\"1925\" data-end=\"2002\">N\u00edzk\u00e1 tvorba \u010d\u00e1stic: Zlep\u0161uje v\u00fdt\u011b\u017enost desti\u010dek a \u010distotu procesu.<\/li>\n<li data-section-id=\"nx34my\" data-start=\"2003\" data-end=\"2084\">Prodlou\u017een\u00e1 \u017eivotnost: Obvykle n\u011bkolikan\u00e1sobn\u011b del\u0161\u00ed ne\u017e k\u0159em\u00edkov\u00e9 komponenty<\/li>\n<li data-section-id=\"14jsdwf\" data-start=\"2085\" data-end=\"2189\">P\u0159esn\u00e9 obr\u00e1b\u011bn\u00ed: T\u011bsn\u00e9 tolerance (&lt;10 \u03bcm) pro bezprobl\u00e9movou integraci do polovodi\u010dov\u00fdch n\u00e1stroj\u016f.<\/li>\n<\/ul>\n<hr data-start=\"2191\" data-end=\"2194\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2196\" data-end=\"2228\">Technick\u00e9 specifikace<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2230\" data-end=\"2883\">\n<thead data-start=\"2230\" data-end=\"2259\">\n<tr data-start=\"2230\" data-end=\"2259\">\n<th class=\"\" data-start=\"2230\" data-end=\"2242\" data-col-size=\"sm\">Parametr<\/th>\n<th class=\"\" data-start=\"2242\" data-end=\"2259\" data-col-size=\"md\">Specifikace<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2287\" data-end=\"2883\">\n<tr data-start=\"2287\" data-end=\"2327\">\n<td data-start=\"2287\" data-end=\"2298\" data-col-size=\"sm\">Materi\u00e1l<\/td>\n<td data-col-size=\"md\" data-start=\"2298\" data-end=\"2327\">CVD karbid k\u0159em\u00edku (SiC)<\/td>\n<\/tr>\n<tr data-start=\"2328\" data-end=\"2348\">\n<td data-start=\"2328\" data-end=\"2337\" data-col-size=\"sm\">Purity<\/td>\n<td data-col-size=\"md\" data-start=\"2337\" data-end=\"2348\">\u2265 99.9%<\/td>\n<\/tr>\n<tr data-start=\"2349\" data-end=\"2374\">\n<td data-start=\"2349\" data-end=\"2359\" data-col-size=\"sm\">Hustota<\/td>\n<td data-col-size=\"md\" data-start=\"2359\" data-end=\"2374\">\u2265 3,1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"2375\" data-end=\"2408\">\n<td data-start=\"2375\" data-end=\"2392\" data-col-size=\"sm\">Pr\u016fm\u011br (max.)<\/td>\n<td data-col-size=\"md\" data-start=\"2392\" data-end=\"2408\">A\u017e 370 mm<\/td>\n<\/tr>\n<tr data-start=\"2409\" data-end=\"2451\">\n<td data-start=\"2409\" data-end=\"2421\" data-col-size=\"sm\">Tlou\u0161\u0165ka<\/td>\n<td data-col-size=\"md\" data-start=\"2421\" data-end=\"2451\">Vlastn\u00ed (obvykle 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2452\" data-end=\"2487\">\n<td data-start=\"2452\" data-end=\"2472\" data-col-size=\"sm\">Odpor (n\u00edzk\u00fd)<\/td>\n<td data-col-size=\"md\" data-start=\"2472\" data-end=\"2487\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2488\" data-end=\"2528\">\n<td data-start=\"2488\" data-end=\"2511\" data-col-size=\"sm\">Odolnost (st\u0159edn\u00ed)<\/td>\n<td data-col-size=\"md\" data-start=\"2511\" data-end=\"2528\">0,2 - 25 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2529\" data-end=\"2564\">\n<td data-start=\"2529\" data-end=\"2550\" data-col-size=\"sm\">Odolnost (vysok\u00e1)<\/td>\n<td data-col-size=\"md\" data-start=\"2550\" data-end=\"2564\">&gt; 100 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2565\" data-end=\"2604\">\n<td data-start=\"2565\" data-end=\"2596\" data-col-size=\"sm\">Rovnom\u011brnost odporu (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2596\" data-end=\"2604\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2605\" data-end=\"2670\">\n<td data-start=\"2605\" data-end=\"2625\" data-col-size=\"sm\">Stav povrchu<\/td>\n<td data-col-size=\"md\" data-start=\"2625\" data-end=\"2670\">Brou\u0161en\u00e9 (le\u0161t\u011bn\u00ed na vy\u017e\u00e1d\u00e1n\u00ed)<\/td>\n<\/tr>\n<tr data-start=\"2671\" data-end=\"2723\">\n<td data-start=\"2671\" data-end=\"2696\" data-col-size=\"sm\">Drsnost povrchu (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2696\" data-end=\"2723\">\u2264 1,6 \u03bcm (p\u0159izp\u016fsobiteln\u00e9)<\/td>\n<\/tr>\n<tr data-start=\"2724\" data-end=\"2757\">\n<td data-start=\"2724\" data-end=\"2746\" data-col-size=\"sm\">P\u0159esnost obr\u00e1b\u011bn\u00ed<\/td>\n<td data-col-size=\"md\" data-start=\"2746\" data-end=\"2757\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2758\" data-end=\"2799\">\n<td data-start=\"2758\" data-end=\"2781\" data-col-size=\"sm\">Tepeln\u00e1 vodivost<\/td>\n<td data-col-size=\"md\" data-start=\"2781\" data-end=\"2799\">~120-200 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"2800\" data-end=\"2824\">\n<td data-start=\"2800\" data-end=\"2811\" data-col-size=\"sm\">Tvrdost<\/td>\n<td data-col-size=\"md\" data-start=\"2811\" data-end=\"2824\">~9,2 Mohsovy stupnice<\/td>\n<\/tr>\n<tr data-start=\"2825\" data-end=\"2883\">\n<td data-start=\"2825\" data-end=\"2843\" data-col-size=\"sm\">Kontrola kvality<\/td>\n<td data-col-size=\"md\" data-start=\"2843\" data-end=\"2883\">Bez prasklin, t\u0159\u00edsek a zne\u010di\u0161t\u011bn\u00ed<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2885\" data-end=\"2888\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2890\" data-end=\"2910\">Aplikace<\/h2>\n<p data-start=\"2911\" data-end=\"3025\">Krou\u017eky SiC jsou z\u00e1kladn\u00edmi sou\u010d\u00e1stmi polovodi\u010dov\u00fdch za\u0159\u00edzen\u00ed, u nich\u017e je rozhoduj\u00edc\u00ed trvanlivost a odolnost v\u016f\u010di plazmatu:<\/p>\n<ul data-start=\"3027\" data-end=\"3241\">\n<li data-section-id=\"qzqq98\" data-start=\"3027\" data-end=\"3065\">Plazmov\u00e9 leptac\u00ed syst\u00e9my (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"3066\" data-end=\"3109\">Chemick\u00e9 napa\u0159ov\u00e1n\u00ed (CVD \/ PECVD)<\/li>\n<li data-section-id=\"yfc3l\" data-start=\"3110\" data-end=\"3149\">Aplikace zaost\u0159ovac\u00edho krou\u017eku \/ okrajov\u00e9ho krou\u017eku<\/li>\n<li data-section-id=\"14j8f1u\" data-start=\"3150\" data-end=\"3193\">Komorov\u00e1 vlo\u017eka a ochrann\u00e9 sou\u010d\u00e1sti<\/li>\n<li data-section-id=\"1l8pbfg\" data-start=\"3194\" data-end=\"3241\">Prost\u0159ed\u00ed pro zpracov\u00e1n\u00ed plazmatu s vysokou hustotou<\/li>\n<\/ul>\n<p data-start=\"3243\" data-end=\"3383\">Jsou vhodn\u00e9 zejm\u00e9na pro pokro\u010dil\u00e9 uzly a n\u00e1ro\u010dn\u00e9 leptac\u00ed procesy, kde k\u0159em\u00edkov\u00e9 komponenty nemohou splnit po\u017eadavky na \u017eivotnost.<\/p>\n<p data-start=\"3243\" data-end=\"3383\"><img decoding=\"async\" class=\"aligncenter wp-image-2393 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg\" alt=\"\" width=\"1024\" height=\"511\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-300x150.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-768x383.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-18x9.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-600x299.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva.jpg 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3385\" data-end=\"3388\" \/>\n<h2 data-section-id=\"j4gip\" data-start=\"3390\" data-end=\"3436\">Pro\u010d si vybrat SiC krou\u017eek m\u00edsto k\u0159em\u00edkov\u00e9ho?<\/h2>\n<p data-start=\"3437\" data-end=\"3702\">Ve srovn\u00e1n\u00ed s tradi\u010dn\u00edmi k\u0159em\u00edkov\u00fdmi krou\u017eky nab\u00edzej\u00ed krou\u017eky SiC v\u00fdrazn\u00e9 zv\u00fd\u0161en\u00ed \u017eivotnosti a stability procesu. K\u0159em\u00edkov\u00e9 krou\u017eky jsou sice zpo\u010d\u00e1tku cenov\u011b v\u00fdhodn\u011bj\u0161\u00ed, ale v agresivn\u00edch plazmov\u00fdch podm\u00ednk\u00e1ch se rychleji opot\u0159ebov\u00e1vaj\u00ed a vy\u017eaduj\u00ed \u010dast\u011bj\u0161\u00ed v\u00fdm\u011bnu.<\/p>\n<p data-start=\"3704\" data-end=\"3742\">SiC krou\u017eky naproti tomu poskytuj\u00ed:<\/p>\n<ul data-start=\"3743\" data-end=\"3903\">\n<li data-section-id=\"17mv8nk\" data-start=\"3743\" data-end=\"3772\">3-10\u00d7 del\u0161\u00ed \u017eivotnost<\/li>\n<li data-section-id=\"16lo0t8\" data-start=\"3773\" data-end=\"3820\">Lep\u0161\u00ed odolnost proti chemick\u00e9 korozi<\/li>\n<li data-section-id=\"19uuz0f\" data-start=\"3821\" data-end=\"3857\">Ni\u017e\u0161\u00ed kontaminace \u010d\u00e1sticemi<\/li>\n<li data-section-id=\"uhpkja\" data-start=\"3858\" data-end=\"3903\">Sn\u00ed\u017een\u00ed prostoj\u016f a n\u00e1klad\u016f na \u00fadr\u017ebu<\/li>\n<\/ul>\n<p data-start=\"3905\" data-end=\"4056\">P\u0159i v\u00fdrob\u011b \u0161pi\u010dkov\u00fdch polovodi\u010d\u016f jsou celkov\u00e9 n\u00e1klady na vlastnictv\u00ed (TCO) \u010dasto ni\u017e\u0161\u00ed p\u0159i pou\u017eit\u00ed SiC sou\u010d\u00e1stek, a to i p\u0159es jejich vy\u0161\u0161\u00ed po\u010d\u00e1te\u010dn\u00ed n\u00e1klady.<\/p>\n<p data-start=\"3905\" data-end=\"4056\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"4058\" data-end=\"4061\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"4063\" data-end=\"4074\">\u010cASTO KLADEN\u00c9 DOTAZY<\/h2>\n<p data-start=\"4076\" data-end=\"4283\">Ot\u00e1zka 1: Je krou\u017eek SiC spot\u0159ebn\u00ed materi\u00e1l?<br data-start=\"4121\" data-end=\"4124\" \/>Ano, je pova\u017eov\u00e1n za kritick\u00fd spot\u0159ebn\u00ed materi\u00e1l pro polovodi\u010de. P\u0159esto\u017ee m\u00e1 del\u0161\u00ed \u017eivotnost ne\u017e k\u0159em\u00edkov\u00e9 sou\u010d\u00e1stky, nakonec se pod vlivem plazmatu opot\u0159ebuje.<\/p>\n<p data-start=\"4285\" data-end=\"4492\">Ot\u00e1zka 2: Jak\u00e1 je v\u00fdhoda materi\u00e1lu CVD SiC?<br data-start=\"4335\" data-end=\"4338\" \/>CVD SiC poskytuje extr\u00e9mn\u011b vysokou \u010distotu, hustou strukturu a vynikaj\u00edc\u00ed odolnost v\u016f\u010di plazmatu a chemik\u00e1li\u00edm, tak\u017ee je ide\u00e1ln\u00ed pro polovodi\u010dov\u00e9 aplikace.<\/p>\n<p data-start=\"4494\" data-end=\"4668\">Ot\u00e1zka 3: Lze krou\u017eek SiC p\u0159izp\u016fsobit?<br data-start=\"4533\" data-end=\"4536\" \/>Ano. Pr\u016fm\u011br, tlou\u0161\u0165ku, odpor a povrchovou \u00fapravu lze p\u0159izp\u016fsobit na z\u00e1klad\u011b va\u0161ich v\u00fdkres\u016f nebo po\u017eadavk\u016f na za\u0159\u00edzen\u00ed.<\/p>\n<p data-start=\"4670\" data-end=\"4814\">Ot\u00e1zka 4: Jak dlouho vydr\u017e\u00ed krou\u017eek SiC ve srovn\u00e1n\u00ed s k\u0159em\u00edkov\u00fdm krou\u017ekem?<br data-start=\"4735\" data-end=\"4738\" \/>Obvykle maj\u00ed krou\u017eky SiC v z\u00e1vislosti na procesn\u00edch podm\u00ednk\u00e1ch 3-10kr\u00e1t del\u0161\u00ed \u017eivotnost.<\/p>\n<p data-start=\"4816\" data-end=\"4928\">Ot\u00e1zka 5: Jak\u00e1 je doba dod\u00e1n\u00ed?<br data-start=\"4846\" data-end=\"4849\" \/>V\u00fdroba obvykle trv\u00e1 4-8 t\u00fddn\u016f v z\u00e1vislosti na slo\u017eitosti n\u00e1vrhu a mno\u017estv\u00ed.<\/p>","protected":false},"excerpt":{"rendered":"<p>SiC krou\u017eek (krou\u017eek z karbidu k\u0159em\u00edku) je vysoce v\u00fdkonn\u00e1 sou\u010d\u00e1stka \u0161iroce pou\u017e\u00edvan\u00e1 v za\u0159\u00edzen\u00edch pro plazmov\u00e9 zpracov\u00e1n\u00ed polovodi\u010d\u016f, zejm\u00e9na v leptac\u00edch a depozi\u010dn\u00edch komor\u00e1ch. Tento v\u00fdrobek, vyroben\u00fd s pou\u017eit\u00edm karbidu k\u0159em\u00edku z chemick\u00e9ho napa\u0159ov\u00e1n\u00ed (CVD), nab\u00edz\u00ed v\u00fdjime\u010dnou odolnost v\u016f\u010di erozi plazmatu, vysok\u00fdm teplot\u00e1m a agresivn\u00edm chemick\u00fdm prost\u0159ed\u00edm.<\/p>","protected":false},"featured_media":2392,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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