{"id":2335,"date":"2026-04-21T09:54:15","date_gmt":"2026-04-21T09:54:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2335"},"modified":"2026-05-20T03:41:03","modified_gmt":"2026-05-20T03:41:03","slug":"ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/cs\/product\/ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing\/","title":{"rendered":"Integrovan\u00fd stroj na \u010di\u0161t\u011bn\u00ed a voskov\u00e1n\u00ed keramick\u00fdch kotou\u010d\u016f pro mont\u00e1\u017e a p\u0159edb\u011b\u017en\u00e9 zpracov\u00e1n\u00ed polovodi\u010dov\u00fdch desti\u010dek"},"content":{"rendered":"

\"Integrovan\u00fdIntegrovan\u00fd stroj na \u010di\u0161t\u011bn\u00ed a voskov\u00e1n\u00ed keramick\u00fdch disk\u016f je vysoce \u00fa\u010dinn\u00fd automatizovan\u00fd syst\u00e9m ur\u010den\u00fd pro p\u0159edzpracov\u00e1n\u00ed polovodi\u010dov\u00fdch desti\u010dek, kter\u00fd integruje p\u0159esn\u00e9 \u010di\u0161t\u011bn\u00ed, su\u0161en\u00ed a voskov\u00e1n\u00ed (mont\u00e1\u017e) desti\u010dek do jedin\u00e9 platformy.<\/p>\n

Toto za\u0159\u00edzen\u00ed se \u0161iroce pou\u017e\u00edv\u00e1 p\u0159i zpracov\u00e1n\u00ed SiC, Si, GaN, saf\u00edru a pokro\u010dil\u00e9 keramiky a zaji\u0161\u0165uje stabiln\u00ed spojen\u00ed desti\u010dek s nosn\u00fdmi disky p\u0159ed brou\u0161en\u00edm, zten\u010dov\u00e1n\u00edm nebo le\u0161t\u011bn\u00edm. D\u00edky kombinaci ultrazvukov\u00e9 technologie \u010di\u0161t\u011bn\u00ed s inteligentn\u00edm \u0159\u00edzen\u00edm voskov\u00e1n\u00ed dosahuje syst\u00e9m vysok\u00e9 v\u00fdt\u011b\u017enosti a\u017e 99,9%, tak\u017ee je ide\u00e1ln\u00ed jak pro hromadnou v\u00fdrobu, tak pro \u0161pi\u010dkov\u00e9 polovodi\u010dov\u00e9 aplikace.<\/p>\n

D\u00edky pln\u011b automatizovan\u00e9mu provozu a propojen\u00ed s MES tento stroj v\u00fdrazn\u011b zvy\u0161uje efektivitu v\u00fdroby, konzistenci proces\u016f a sledovatelnost.<\/p>\n

\n

Kl\u00ed\u010dov\u00e9 technick\u00e9 vlastnosti<\/span><\/h2>\n

Integrovan\u00fd syst\u00e9m \u010di\u0161t\u011bn\u00ed a voskov\u00e1n\u00ed<\/span><\/h3>\n
    \n
  • Kombinace \u010di\u0161t\u011bn\u00ed keramick\u00fdm kotou\u010dem + dv\u011b voskovac\u00ed stanice<\/li>\n
  • Jednostup\u0148ov\u00e9 zpracov\u00e1n\u00ed: \u010di\u0161t\u011bn\u00ed \u2192 su\u0161en\u00ed \u2192 voskov\u00e1n\u00ed<\/li>\n
  • Paraleln\u00ed provoz zvy\u0161uje propustnost<\/li>\n<\/ul>\n

    Velmi p\u0159esn\u00e9 zarovn\u00e1n\u00ed<\/span><\/h3>\n
      \n
    • Polohovac\u00ed syst\u00e9m CCD<\/li>\n
    • P\u0159esnost vyrovn\u00e1n\u00ed: \u00b10,02 mm<\/li>\n
    • Zaji\u0161\u0165uje p\u0159esn\u00e9 um\u00edst\u011bn\u00ed desti\u010dek a kvalitu lepen\u00ed.<\/li>\n<\/ul>\n

      \u0158\u00edzen\u00e9 nan\u00e1\u0161en\u00ed vosku<\/span><\/h3>\n
        \n
      • Mno\u017estv\u00ed vosku: 0,8 g \u00b10,05 g na oplatku<\/li>\n
      • Rovnom\u011brn\u00e9 rozlo\u017een\u00ed zaji\u0161\u0165uje stabiln\u00ed mont\u00e1\u017e b\u011bhem brou\u0161en\u00ed<\/li>\n<\/ul>\n

        Stabiln\u00ed \u0159\u00edzen\u00ed tlaku<\/span><\/h3>\n
          \n
        • Pneumatick\u00fd syst\u00e9m udr\u017euje rovnom\u011brn\u00fd tlak 5-10 N\/cm\u00b2<\/li>\n
        • Zabra\u0148uje deformaci desti\u010dek a vad\u00e1m lepen\u00ed<\/li>\n<\/ul>\n

          Vysok\u00e1 v\u00fdt\u011b\u017enost a stabilita procesu<\/span><\/h3>\n
            \n
          • V\u00fdt\u011b\u017enost a\u017e 99,9%<\/li>\n
          • Monitorov\u00e1n\u00ed v re\u00e1ln\u00e9m \u010dase s automatick\u00fdm nastaven\u00edm parametr\u016f (tolerance \u00b13%)<\/li>\n<\/ul>\n
            \n

            Technick\u00e9 specifikace<\/span><\/h2>\n
            \n
            \n\n\n\n\n\n\n\n\n
            Parametr<\/th>\nHodnota<\/th>\n<\/tr>\n<\/thead>\n
            Rozm\u011bry<\/td>\n7740 \u00d7 3390 \u00d7 2300 mm<\/td>\n<\/tr>\n
            Nap\u00e1jen\u00ed<\/td>\nAC 380V, 50Hz, 90 kW<\/td>\n<\/tr>\n
            Pneumatick\u00e9 z\u00e1sobov\u00e1n\u00ed<\/td>\n2 m\u00b3\/h, 0,4-0,5 MPa (such\u00fd vzduch bez oleje)<\/td>\n<\/tr>\n
            Z\u00e1sobov\u00e1n\u00ed vodou<\/td>\n2 T\/h @ 0,3 MPa, \u226512 M\u03a9-cm vody DI<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
            \n

            Princip fungov\u00e1n\u00ed<\/span><\/h2>\n

            1. F\u00e1ze \u010di\u0161t\u011bn\u00ed keramick\u00fdch kotou\u010d\u016f<\/span><\/h3>\n
              \n
            • Ultrazvukov\u00fd \u010distic\u00ed syst\u00e9m odstra\u0148uje \u010d\u00e1stice a ne\u010distoty na \u00farovni mikron\u016f<\/li>\n
            • Pou\u017e\u00edv\u00e1 vysoce \u010distou vodu DI (\u226512 M\u03a9-cm)<\/li>\n
            • Kombinace vzduchov\u00e9ho no\u017ee a vakuov\u00e9ho su\u0161en\u00ed zaji\u0161\u0165uje nulov\u00fd obsah zbytk\u016f.<\/li>\n<\/ul>\n

              2. Automatizovan\u00fd proces voskov\u00e1n\u00ed<\/span><\/h3>\n
                \n
              • Zrakov\u00fd syst\u00e9m detekuje sou\u0159adnice disku<\/li>\n
              • Programovateln\u00e1 d\u00e1vkovac\u00ed hlava nan\u00e1\u0161\u00ed rovnom\u011brnou vrstvu vosku<\/li>\n
              • Oplatka je namontov\u00e1na za kontrolovan\u00fdch tlakov\u00fdch podm\u00ednek<\/li>\n<\/ul>\n

                3. Inteligentn\u00ed \u0159\u00edzen\u00ed proces\u016f<\/span><\/h3>\n
                  \n
                • Syst\u00e9m PLC synchronizuje \u010distic\u00ed a voskovac\u00ed moduly<\/li>\n
                • Podporuje paraleln\u00ed zpracov\u00e1n\u00ed a\u017e 30 disk\u016f za hodinu<\/li>\n
                • Sn\u00edma\u010de tlou\u0161\u0165ky monitoruj\u00ed rovnom\u011brnost vosku v re\u00e1ln\u00e9m \u010dase<\/li>\n<\/ul>\n
                  \n

                  V\u00fdrobn\u00ed kapacita<\/span><\/h2>\n
                  \n
                  \n\n\n\n\n\n\n\n\n\n\n
                  Velikost oplatky<\/th>\nPr\u016fm\u011br disku<\/th>\nMno\u017estv\u00ed<\/th>\nDoba cyklu<\/th>\n<\/tr>\n<\/thead>\n
                  4 palce<\/td>\n\u03a6485 mm<\/td>\n11 ks<\/td>\n5 min\/disk<\/td>\n<\/tr>\n
                  4 palce<\/td>\n\u03a6576 mm<\/td>\n13 ks<\/td>\n6 min\/disk<\/td>\n<\/tr>\n
                  6 palc\u016f<\/td>\n\u03a6485 mm<\/td>\n6 ks<\/td>\n3 min\/disk<\/td>\n<\/tr>\n
                  6 palc\u016f<\/td>\n\u03a6576 mm<\/td>\n8 ks<\/td>\n4 min\/disk<\/td>\n<\/tr>\n
                  8 palc\u016f<\/td>\n\u03a6485 mm<\/td>\n3 ks<\/td>\n2 min\/disk<\/td>\n<\/tr>\n
                  8 palc\u016f<\/td>\n\u03a6576 mm<\/td>\n5 ks<\/td>\n3 min\/disk<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
                  \n

                  Aplikace<\/span><\/h2>\n

                  \"\"P\u0159edb\u011b\u017en\u00e9 zpracov\u00e1n\u00ed polovodi\u010dov\u00fdch desti\u010dek<\/span><\/h3>\n
                    \n
                  • Mont\u00e1\u017e desti\u010dek p\u0159ed brou\u0161en\u00edm \/ zten\u010dov\u00e1n\u00edm \/ le\u0161t\u011bn\u00edm<\/li>\n
                  • Vhodn\u00e9 pro:\n
                      \n
                    • K\u0159em\u00edk (Si)<\/li>\n
                    • Karbid k\u0159em\u00edku (SiC)<\/li>\n
                    • Nitrid galia (GaN)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n

                      V\u00fdroba slo\u017een\u00fdch polovodi\u010d\u016f<\/span><\/h3>\n
                        \n
                      • V\u00fdkonov\u00e1 za\u0159\u00edzen\u00ed GaN, SiC<\/li>\n
                      • Pokro\u010dil\u00e1 manipulace se substr\u00e1tem<\/li>\n<\/ul>\n

                        Optick\u00e9 a krystalov\u00e9 materi\u00e1ly<\/span><\/h3>\n
                          \n
                        • Saf\u00edrov\u00e9 substr\u00e1ty<\/li>\n
                        • P\u0159esn\u00e1 keramika<\/li>\n
                        • Optick\u00e9 komponenty<\/li>\n<\/ul>\n

                          MEMS a pokro\u010dil\u00e9 materi\u00e1ly<\/span><\/h3>\n
                            \n
                          • P\u0159\u00edprava desti\u010dek pro mikrov\u00fdrobu<\/li>\n
                          • Zpracov\u00e1n\u00ed speci\u00e1ln\u00edch materi\u00e1l\u016f<\/li>\n<\/ul>\n
                            \n

                            \"\"Hlavn\u00ed v\u00fdhody<\/span><\/h2>\n
                              \n
                            • Vysok\u00e1 integrace: \u010ci\u0161t\u011bn\u00ed + su\u0161en\u00ed + voskov\u00e1n\u00ed v jednom syst\u00e9mu<\/li>\n
                            • Energetick\u00e1 \u00fa\u010dinnost: Rychlost recyklace vody >80%, sn\u00ed\u017een\u00e1 spot\u0159eba<\/li>\n
                            • Vysok\u00fd v\u00fdkon: A\u017e 30 disk\u016f za hodinu<\/li>\n
                            • P\u0159ipravenost k inteligentn\u00ed v\u00fdrob\u011b: Podporov\u00e1na integrace MES\/ERP<\/li>\n
                            • Flexibiln\u00ed p\u0159izp\u016fsoben\u00ed: Podporuje nestandardn\u00ed disky \u03a6300-650 mm.<\/li>\n
                            • Rychl\u00e1 v\u00fdm\u011bna: Doba p\u0159epnut\u00ed n\u00e1stroje <3 minuty<\/li>\n<\/ul>\n
                              \n

                              Nejd\u016fle\u017eit\u011bj\u0161\u00ed informace o v\u00fdkonu<\/span><\/h2>\n
                                \n
                              • Odchylka rovnom\u011brnosti vosku: \u2264\u00b13%<\/li>\n
                              • Spot\u0159eba vody: \u22640,5 l\/disk<\/li>\n
                              • Automatizovan\u00fd provoz s plnou sledovatelnost\u00ed<\/li>\n
                              • Stabiln\u00ed a opakovateln\u00e9 \u0159\u00edzen\u00ed procesu<\/li>\n<\/ul>\n
                                \n

                                \u010cASTO KLADEN\u00c9 DOTAZY<\/span><\/h2>\n

                                Ot\u00e1zka 1: Jak je zaji\u0161t\u011bn vysok\u00fd v\u00fdnos?<\/span><\/h3>\n

                                Speci\u00e1ln\u00ed syst\u00e9m CCD pro zarovn\u00e1v\u00e1n\u00ed s vid\u011bn\u00edm zaji\u0161\u0165uje p\u0159esnost polohov\u00e1n\u00ed \u00b10,02 mm, co\u017e zaru\u010duje konzistentn\u00ed kvalitu mont\u00e1\u017ee desti\u010dek.<\/p>\n

                                Ot\u00e1zka 2: Jak\u00e1 je \u00farove\u0148 spot\u0159eby vody?<\/span><\/h3>\n

                                Syst\u00e9m dosahuje recyklace >80% vody p\u0159i spot\u0159eb\u011b pouh\u00fdch \u22640,5 l na disk.<\/p>\n

                                Ot\u00e1zka 3: Podporuje rychl\u00e9 p\u0159ep\u00edn\u00e1n\u00ed velikosti desti\u010dek?<\/span><\/h3>\n

                                Ano, inteligentn\u00ed knihovna p\u0159\u00edpravk\u016f umo\u017e\u0148uje automatick\u00e9 p\u0159ep\u00edn\u00e1n\u00ed n\u00e1stroj\u016f do 3 minut prost\u0159ednictv\u00edm HMI.<\/p>","protected":false},"excerpt":{"rendered":"

                                Integrovan\u00fd stroj na \u010di\u0161t\u011bn\u00ed a voskov\u00e1n\u00ed keramick\u00fdch disk\u016f je vysoce \u00fa\u010dinn\u00fd automatizovan\u00fd syst\u00e9m ur\u010den\u00fd pro p\u0159edzpracov\u00e1n\u00ed polovodi\u010dov\u00fdch desti\u010dek, kter\u00fd integruje p\u0159esn\u00e9 \u010di\u0161t\u011bn\u00ed, su\u0161en\u00ed a voskov\u00e1n\u00ed (mont\u00e1\u017e) desti\u010dek do jedin\u00e9 platformy.Toto za\u0159\u00edzen\u00ed se \u0161iroce pou\u017e\u00edv\u00e1 p\u0159i zpracov\u00e1n\u00ed SiC, Si, GaN, saf\u00edru a pokro\u010dil\u00e9 keramiky a zaji\u0161\u0165uje stabiln\u00ed spojen\u00ed desti\u010dek s nosn\u00fdmi disky p\u0159ed brou\u0161en\u00edm, zten\u010dov\u00e1n\u00edm nebo le\u0161t\u011bn\u00edm.<\/p>","protected":false},"featured_media":2338,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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