{"id":2306,"date":"2026-04-21T01:28:17","date_gmt":"2026-04-21T01:28:17","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2306"},"modified":"2026-04-21T01:28:20","modified_gmt":"2026-04-21T01:28:20","slug":"sic-coating-machine-for-precision-adhesive-deposition-in-semiconductor-applications","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/cs\/product\/sic-coating-machine-for-precision-adhesive-deposition-in-semiconductor-applications\/","title":{"rendered":"Stroj na nan\u00e1\u0161en\u00ed povlak\u016f SiC pro p\u0159esn\u00e9 nan\u00e1\u0161en\u00ed lepidla v polovodi\u010dov\u00fdch aplikac\u00edch"},"content":{"rendered":"

SiC Coating Machine je vysoce p\u0159esn\u00fd, pln\u011b automatizovan\u00fd depozi\u010dn\u00ed syst\u00e9m navr\u017een\u00fd pro rovnom\u011brn\u00e9 nan\u00e1\u0161en\u00ed adhezivn\u00edho povlaku na desti\u010dky, SiC semena, grafitov\u00fd pap\u00edr a grafitov\u00e9 desky. Tento syst\u00e9m je navr\u017een tak, aby spl\u0148oval p\u0159\u00edsn\u00e9 po\u017eadavky na zpracov\u00e1n\u00ed polovodi\u010d\u016f a pokro\u010dil\u00fdch materi\u00e1l\u016f, a integruje ultrazvukovou technologii st\u0159\u00edk\u00e1n\u00ed, laserov\u00e9 vyrovn\u00e1v\u00e1n\u00ed a inteligentn\u00ed \u0159\u00edzen\u00ed kapalin pro dosa\u017een\u00ed v\u00fdjime\u010dn\u00e9 konzistence povlaku a stability procesu.<\/p>\n

V pokro\u010dil\u00fdch v\u00fdrobn\u00edch prost\u0159ed\u00edch - zejm\u00e9na p\u0159i r\u016fstu krystal\u016f SiC a lepen\u00ed desti\u010dek - m\u00e1 rovnom\u011brnost povlaku p\u0159\u00edm\u00fd vliv na v\u00fdt\u011b\u017enost produktu, integritu lepen\u00ed a spolehlivost navazuj\u00edc\u00edch proces\u016f. Tento syst\u00e9m \u0159e\u0161\u00ed tyto probl\u00e9my t\u00edm, \u017ee zaji\u0161\u0165uje kontrolovanou tlou\u0161\u0165ku vrstvy, minim\u00e1ln\u00ed pl\u00fdtv\u00e1n\u00ed materi\u00e1lem a opakovatelnou v\u00fdkonnost v r\u016fzn\u00fdch \u0161ar\u017e\u00edch.<\/p>\n

D\u00edky sv\u00e9 modul\u00e1rn\u00ed architektu\u0159e a programovateln\u00e9mu \u0159\u00eddic\u00edmu syst\u00e9mu je SiC Coating Machine vhodn\u00fd pro v\u00fdvoj v pilotn\u00edm m\u011b\u0159\u00edtku, ov\u011b\u0159ov\u00e1n\u00ed proces\u016f a st\u0159edn\u011b velkou a\u017e velkou s\u00e9riovou v\u00fdrobu, co\u017e z n\u011bj \u010din\u00ed univerz\u00e1ln\u00ed \u0159e\u0161en\u00ed pro v\u00fdzkum a v\u00fdvoj i pr\u016fmyslov\u00e9 aplikace.<\/p>\n

\"Stroj<\/p>\n

\n

Hlavn\u00ed technick\u00e9 v\u00fdhody<\/span><\/h2>\n

Velmi rovnom\u011brn\u00fd v\u00fdkon povlaku<\/span><\/h3>\n

Syst\u00e9m podporuje tlou\u0161\u0165ky povlaku od 20 nanometr\u016f a\u017e po des\u00edtky mikrometr\u016f s rovnom\u011brnost\u00ed p\u0159esahuj\u00edc\u00ed 95% na cel\u00e9m povrchu substr\u00e1tu. Tato \u00farove\u0148 p\u0159esnosti eliminuje b\u011b\u017en\u00e9 probl\u00e9my, jako je n\u00e1r\u016fst okraj\u016f, nerovnom\u011brn\u00e9 rozlo\u017een\u00ed a lok\u00e1ln\u00ed zten\u010den\u00ed, kter\u00e9 jsou kritick\u00fdm probl\u00e9mem p\u0159i lepen\u00ed desti\u010dek a vysokoteplotn\u00edch aplikac\u00edch.<\/p>\n

Pokro\u010dil\u00e1 manipulace s lepidly na b\u00e1zi \u010d\u00e1stic<\/span><\/h3>\n

Na rozd\u00edl od b\u011b\u017en\u00fdch n\u00e1t\u011brov\u00fdch syst\u00e9m\u016f je tento stroj speci\u00e1ln\u011b navr\u017een pro zpracov\u00e1n\u00ed lepidel obsahuj\u00edc\u00edch pevn\u00e9 \u010d\u00e1stice nebo funk\u010dn\u00ed plniva. Integrovan\u00fd syst\u00e9m dod\u00e1v\u00e1n\u00ed kapaliny s konstantn\u00edm pr\u016ftokem v kombinaci s disperzn\u00ed technologi\u00ed v re\u00e1ln\u00e9m \u010dase zaji\u0161\u0165uje, \u017ee \u010d\u00e1stice z\u016fst\u00e1vaj\u00ed rovnom\u011brn\u011b rozlo\u017eeny v pr\u016fb\u011bhu cel\u00e9ho procesu nan\u00e1\u0161en\u00ed n\u00e1t\u011bru, co\u017e zabra\u0148uje usazov\u00e1n\u00ed a ucp\u00e1v\u00e1n\u00ed trysek.<\/p>\n

P\u0159esn\u00e9 \u0159\u00edzen\u00ed pohybu a proces\u016f<\/span><\/h3>\n

Syst\u00e9m je vybaven pln\u011b programovatelnou platformou koordinovan\u00e9ho pohybu XYZ, kter\u00e1 umo\u017e\u0148uje p\u0159esn\u00e9 \u0159\u00edzen\u00ed dr\u00e1hy nan\u00e1\u0161en\u00ed, rychlosti a vzor\u016f nan\u00e1\u0161en\u00ed. Konfigurace s v\u00edce tryskami umo\u017e\u0148uj\u00ed paraleln\u00ed zpracov\u00e1n\u00ed, co\u017e v\u00fdrazn\u011b zvy\u0161uje v\u00fdkonnost p\u0159i zachov\u00e1n\u00ed konzistentn\u00ed kvality povlakov\u00e1n\u00ed.<\/p>\n

Optimalizov\u00e1no pro navazuj\u00edc\u00ed tepeln\u00e9 procesy<\/span><\/h3>\n

Povlak vytvo\u0159en\u00fd t\u00edmto syst\u00e9mem poskytuje stabiln\u00ed a jednotn\u00e9 rozhran\u00ed pro n\u00e1sledn\u00e9 procesy, jako jsou:<\/p>\n

    \n
  • Vakuov\u00e9 odply\u0148ov\u00e1n\u00ed<\/li>\n
  • Vysokoteplotn\u00ed slinov\u00e1n\u00ed<\/li>\n
  • Tvorba tenk\u00fdch vrstev p\u0159i pyrol\u00fdze rozpra\u0161ov\u00e1n\u00edm<\/li>\n<\/ul>\n

    Zaji\u0161t\u011bn\u00edm integrity povlaku ve f\u00e1zi p\u0159ed\u00fapravy p\u0159isp\u00edv\u00e1 syst\u00e9m ke zlep\u0161en\u00ed pevnosti spoje, tepeln\u00e9 stability a celkov\u00e9ho v\u00fdkonu za\u0159\u00edzen\u00ed.<\/p>\n

    Inteligentn\u00ed \u00fadr\u017eba a spolehlivost<\/span><\/h3>\n

    Pro podporu dlouhodob\u00e9ho pr\u016fmyslov\u00e9ho provozu je syst\u00e9m vybaven:<\/p>\n

      \n
    • Automatick\u00e9 \u010di\u0161t\u011bn\u00ed ultrazvukov\u00fdch trysek<\/li>\n
    • Syst\u00e9m recyklace odpadn\u00edch kapalin<\/li>\n
    • Integrovan\u00e1 konstrukce v\u00fdfuku a filtrace<\/li>\n<\/ul>\n

      Tyto funkce sni\u017euj\u00ed \u010detnost \u00fadr\u017eby, minimalizuj\u00ed prostoje a zaji\u0161\u0165uj\u00ed \u010dist\u00e9 a stabiln\u00ed provozn\u00ed prost\u0159ed\u00ed.<\/p>\n

      \n

      Technick\u00e9 specifikace<\/span><\/h2>\n
      \n
      \n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
      Parametr<\/th>\nSpecifikace<\/th>\n<\/tr>\n<\/thead>\n
      Rozm\u011bry stroje<\/td>\n920 \u00d7 1060 \u00d7 1620 mm<\/td>\n<\/tr>\n
      Efektivn\u00ed plocha povlaku<\/td>\n500 \u00d7 500 mm (lze p\u0159izp\u016fsobit)<\/td>\n<\/tr>\n
      Nap\u00e1jen\u00ed<\/td>\n120V \/ 220V \u00b110%, 50-60Hz<\/td>\n<\/tr>\n
      Typ trysky<\/td>\nUltrazvuk, k dispozici je v\u00edce konfigurac\u00ed<\/td>\n<\/tr>\n
      Tlou\u0161\u0165ka povlaku<\/td>\n20 nm - des\u00edtky \u00b5m<\/td>\n<\/tr>\n
      Pr\u016ftok kapaliny<\/td>\n0,006 - 3 ml\/s<\/td>\n<\/tr>\n
      Polohovac\u00ed syst\u00e9m<\/td>\nLaserov\u00e9 se\u0159\u00edzen\u00ed<\/td>\n<\/tr>\n
      \u0158\u00edzen\u00ed pohybu<\/td>\nProgramovateln\u00e9 osy XYZ<\/td>\n<\/tr>\n
      Dod\u00e1vka tekutin<\/td>\nKonstantn\u00ed pr\u016ftok s online rozptylem<\/td>\n<\/tr>\n
      Nakl\u00e1d\u00e1n\u00ed s odpady<\/td>\nAutomatick\u00e9 \u010di\u0161t\u011bn\u00ed, recyklace, v\u00fdfukov\u00fd syst\u00e9m<\/td>\n<\/tr>\n
      Mo\u017enost vyt\u00e1p\u011bn\u00ed<\/td>\nVakuov\u00e1 adsorp\u010dn\u00ed deska<\/td>\n<\/tr>\n
      Mo\u017enost vysok\u00e9 teploty<\/td>\nHork\u00e1 deska do 750 \u00b0C<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
      \n

      Typick\u00e9 aplikace<\/span><\/h2>\n

      \"StrojR\u016fst polovodi\u010d\u016f a krystal\u016f SiC<\/span><\/h3>\n
        \n
      • P\u0159\u00edprava lepen\u00ed desti\u010dek<\/li>\n
      • P\u0159ilnavost osiva SiC<\/li>\n
      • N\u00e1t\u011br vrstvy rozhran\u00ed p\u0159ed sp\u00e9k\u00e1n\u00edm<\/li>\n<\/ul>\n

        Funk\u010dn\u00ed a ochrann\u00e9 n\u00e1t\u011bry<\/span><\/h3>\n
          \n
        • Povlaky karbidu k\u0159em\u00edku (SiC)<\/li>\n
        • Fluxn\u00ed a ka\u0161ovit\u00e9 n\u00e1t\u011bry<\/li>\n
        • Fotorezist a nan\u00e1\u0161en\u00ed tenk\u00fdch vrstev<\/li>\n<\/ul>\n

          Skladov\u00e1n\u00ed energie a flexibiln\u00ed materi\u00e1ly<\/span><\/h3>\n
            \n
          • Povlak separ\u00e1toru baterie<\/li>\n
          • Flexibiln\u00ed zpracov\u00e1n\u00ed substr\u00e1tu pomoc\u00ed vakuov\u00e9ho oh\u0159evu<\/li>\n<\/ul>\n

            Sklo a fotovoltaick\u00e9 materi\u00e1ly<\/span><\/h3>\n
              \n
            • Rovnom\u011brn\u00fd povlak mezi grafitov\u00fdmi sou\u010d\u00e1stmi<\/li>\n
            • Nan\u00e1\u0161en\u00ed tenk\u00fdch vrstev pro sol\u00e1rn\u00ed a optick\u00e9 aplikace<\/li>\n<\/ul>\n

               <\/p>\n

              \n

              Pro\u010d si vybrat ZMSH<\/span><\/h2>\n

              \"StrojSpole\u010dnost ZMSH se specializuje na v\u00fdvoj p\u0159esn\u00fdch polovodi\u010dov\u00fdch za\u0159\u00edzen\u00ed a pokro\u010dil\u00fdch \u0159e\u0161en\u00ed pro zpracov\u00e1n\u00ed materi\u00e1l\u016f se siln\u00fdm zam\u011b\u0159en\u00edm na polovodi\u010de a vysokoteplotn\u00ed aplikace. Ka\u017ed\u00fd syst\u00e9m je navr\u017een tak, aby poskytoval vysokou opakovatelnost, stabilitu procesu a dlouhodobou provozn\u00ed spolehlivost.<\/p>\n

              Mezi hlavn\u00ed v\u00fdhody pat\u0159\u00ed:<\/p>\n

                \n
              • Prokazateln\u00e9 zku\u0161enosti s pr\u016fmyslov\u00fdmi n\u00e1t\u011bry<\/li>\n
              • P\u0159izp\u016fsobiteln\u00e9 konfigurace syst\u00e9mu<\/li>\n
              • Specializovan\u00e1 technick\u00e1 podpora pro optimalizaci proces\u016f<\/li>\n<\/ul>\n
                \n

                \u010casto kladen\u00e9 ot\u00e1zky - Frequently Asked Questions<\/span><\/h2>\n

                Zvl\u00e1dne syst\u00e9m lepidla s pevn\u00fdmi \u010d\u00e1sticemi?<\/span><\/h3>\n

                Ano, stroj pou\u017e\u00edv\u00e1 syst\u00e9m s konstantn\u00edm pr\u016ftokem a integrovanou disperz\u00ed, kter\u00fd zaji\u0161\u0165uje rovnom\u011brn\u00e9 nan\u00e1\u0161en\u00ed bez ucp\u00e1v\u00e1n\u00ed a usazov\u00e1n\u00ed \u010d\u00e1stic.<\/p>\n

                Jak p\u0159esn\u00e1 je kontrola tlou\u0161\u0165ky povlaku?<\/span><\/h3>\n

                Syst\u00e9m poskytuje vysoce p\u0159esnou kontrolu v rozsahu od 20 nm do des\u00edtek mikrometr\u016f, co\u017e zaji\u0161\u0165uje vynikaj\u00edc\u00ed opakovatelnost nap\u0159\u00ed\u010d \u0161ar\u017eemi.<\/p>\n

                Jak\u00e9 typy substr\u00e1t\u016f jsou podporov\u00e1ny?<\/span><\/h3>\n

                Podporuje \u0161irokou \u0161k\u00e1lu materi\u00e1l\u016f, v\u010detn\u011b desti\u010dek, semen SiC, grafitov\u00e9ho pap\u00edru, grafitov\u00fdch desek a flexibiln\u00edch substr\u00e1t\u016f.<\/p>\n

                Je vhodn\u00fd pro s\u00e9riovou v\u00fdrobu?<\/span><\/h3>\n

                Ano. Programovateln\u00fd syst\u00e9m XYZ a mo\u017enost pou\u017eit\u00ed v\u00edce trysek jsou ide\u00e1ln\u00ed pro pilotn\u00ed a st\u0159edn\u011b velkoobjemovou v\u00fdrobu.<\/p>\n

                Jak je zaji\u0161t\u011bna rovnom\u011brnost n\u00e1t\u011bru?<\/span><\/h3>\n

                Jednotnosti se dosahuje kombinac\u00ed:<\/p>\n

                  \n
                • Technologie ultrazvukov\u00e9ho post\u0159iku<\/li>\n
                • Polohov\u00e1n\u00ed laserem<\/li>\n
                • \u0158\u00edzen\u00ed konstantn\u00edho pr\u016ftoku kapaliny<\/li>\n
                • Synchronizace v\u00edce trysek<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"

                  Za\u0159\u00edzen\u00ed pro nan\u00e1\u0161en\u00ed povlak\u016f SiC p\u0159edstavuje spolehliv\u00e9 a \u0161k\u00e1lovateln\u00e9 \u0159e\u0161en\u00ed pro p\u0159esn\u00e9 nan\u00e1\u0161en\u00ed lepidla v polovodi\u010dov\u00fdch aplikac\u00edch a aplikac\u00edch pro pokro\u010dil\u00e9 materi\u00e1ly. Kombinac\u00ed ultrazvukov\u00e9 technologie nan\u00e1\u0161en\u00ed povlak\u016f s inteligentn\u00edm \u0159\u00edzen\u00edm procesu zaji\u0161\u0165uje rovnom\u011brnost, stabilitu a \u00fa\u010dinnost, kter\u00e9 jsou vy\u017eadov\u00e1ny v modern\u00edch vysoce v\u00fdkonn\u00fdch v\u00fdrobn\u00edch prost\u0159ed\u00edch.<\/p>","protected":false},"featured_media":2308,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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