{"id":2196,"date":"2026-04-14T06:34:45","date_gmt":"2026-04-14T06:34:45","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2196"},"modified":"2026-04-14T06:34:48","modified_gmt":"2026-04-14T06:34:48","slug":"2-inch-6h-n-silicon-carbide-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ar\/product\/2-inch-6h-n-silicon-carbide-wafer\/","title":{"rendered":"\u0631\u0642\u0627\u0642\u0629 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0645\u0642\u0627\u0633 2 \u0628\u0648\u0635\u0629 6H-N"},"content":{"rendered":"

\"\u0631\u0642\u0627\u0642\u0629\u062a\u0639\u062a\u0628\u0631 \u0631\u0642\u0627\u0642\u0629 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 6H-N \u0645\u0642\u0627\u0633 2 \u0628\u0648\u0635\u0629 \u0645\u0646 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0631\u0643\u064a\u0632\u0629 \u0628\u0644\u0648\u0631\u064a\u0629 \u0648\u0627\u062d\u062f\u0629 \u0645\u0635\u0645\u0645\u0629 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0628\u062d\u062b\u064a\u0629 \u0648\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0623\u062c\u0647\u0632\u0629. \u064a\u062a\u0645\u064a\u0632 \u0627\u0644\u0646\u0648\u0639 \u0627\u0644\u0645\u062a\u0639\u062f\u062f 6H \u0628\u0647\u064a\u0643\u0644 \u0628\u0644\u0648\u0631\u064a \u0633\u062f\u0627\u0633\u064a \u0627\u0644\u0634\u0643\u0644 \u064a\u0648\u0641\u0631 \u062a\u0648\u0635\u064a\u0644\u064b\u0627 \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u064b\u0627 \u0645\u0633\u062a\u0642\u0631\u064b\u0627 \u0648\u0623\u062f\u0627\u0621\u064b \u062d\u0631\u0627\u0631\u064a\u064b\u0627 \u062c\u064a\u062f\u064b\u0627 \u0641\u064a \u0638\u0644 \u0627\u0644\u0638\u0631\u0648\u0641 \u0627\u0644\u0635\u0639\u0628\u0629.<\/p>\n

\u0648\u0628\u0641\u0636\u0644 \u0641\u062c\u0648\u0629 \u0646\u0637\u0627\u0642 \u062a\u0628\u0644\u063a 3.02 \u0641\u0648\u0644\u062a \u062a\u0642\u0631\u064a\u0628\u064b\u0627\u060c \u062a\u062a\u064a\u062d 6H-SiC \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u0641\u064a \u0627\u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u0641\u0634\u0644 \u0641\u064a\u0647\u0627 \u0645\u0648\u0627\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629\u060c \u062e\u0627\u0635\u0629 \u0641\u064a \u0638\u0631\u0648\u0641 \u0627\u0644\u062c\u0647\u062f \u0627\u0644\u0639\u0627\u0644\u064a \u0648\u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0648\u0627\u0644\u062a\u0631\u062f\u062f \u0627\u0644\u0639\u0627\u0644\u064a. \u0648\u0647\u0630\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u0646\u0645\u0627\u0630\u062c \u0627\u0644\u0623\u0648\u0644\u064a\u0629 \u0644\u0644\u0623\u062c\u0647\u0632\u0629 \u0641\u064a \u0627\u0644\u0645\u0631\u0627\u062d\u0644 \u0627\u0644\u0645\u0628\u0643\u0631\u0629\u060c \u0648\u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0644\u0645\u0648\u0627\u062f\u060c \u0648\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0645\u062a\u062e\u0635\u0635\u0629.<\/p>\n

\u062a\u064f\u0635\u0646\u0639 \u0631\u0642\u0627\u0626\u0642 ZMSH SiC \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u062a\u0642\u0646\u064a\u0627\u062a \u0646\u0645\u0648 \u0628\u0644\u0648\u0631\u064a \u0645\u0636\u0628\u0648\u0637 \u0644\u0636\u0645\u0627\u0646 \u0627\u062a\u0633\u0627\u0642 \u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u0648\u0627\u0646\u062e\u0641\u0627\u0636 \u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0639\u064a\u0648\u0628 \u0648\u062c\u0648\u062f\u0629 \u0627\u0644\u0633\u0637\u062d \u0627\u0644\u0639\u0627\u0644\u064a\u0629. \u0647\u0630\u0647 \u0627\u0644\u0645\u0639\u0644\u0645\u0627\u062a \u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u0636\u0645\u0627\u0646 \u0646\u062a\u0627\u0626\u062c \u062a\u062c\u0631\u064a\u0628\u064a\u0629 \u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u062a\u0643\u0631\u0627\u0631 \u0648\u0623\u062f\u0627\u0621 \u0645\u0633\u062a\u0642\u0631 \u0644\u0644\u062c\u0647\u0627\u0632.<\/p>\n

\u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/h2>\n

\u0628\u0646\u064a\u0629 \u0645\u0648\u0635\u0644\u0629 \u0645\u0646 \u0627\u0644\u0646\u0648\u0639 N<\/h3>\n

\u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0645\u062e\u062f\u0631\u0629 \u0645\u0646 \u0627\u0644\u0646\u0648\u0639 N\u060c \u0645\u0645\u0627 \u064a\u0648\u0641\u0631 \u0645\u0633\u0627\u0631\u0627\u062a \u062a\u0648\u0635\u064a\u0644 \u0625\u0644\u0643\u062a\u0631\u0648\u0646 \u0645\u0633\u062a\u0642\u0631\u0629 \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0623\u062c\u0647\u0632\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0648\u062a\u062c\u0627\u0631\u0628 \u0627\u0644\u062a\u0648\u0635\u064a\u0641 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a.<\/p>\n

\u0645\u0627\u062f\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0630\u0627\u062a \u0641\u062c\u0648\u0629 \u0627\u0644\u0646\u0637\u0627\u0642 \u0627\u0644\u0639\u0631\u064a\u0636<\/h3>\n

\u0648\u0628\u0641\u0636\u0644 \u0641\u062c\u0648\u0629 \u0646\u0637\u0627\u0642 \u062a\u0628\u0644\u063a 3.02 \u0641\u0648\u0644\u062a \u062a\u0642\u0631\u064a\u0628\u064b\u0627\u060c \u062a\u062f\u0639\u0645 SiC \u0642\u0648\u0629 \u0645\u062c\u0627\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0623\u0639\u0644\u0649 \u0628\u0643\u062b\u064a\u0631 \u0645\u0642\u0627\u0631\u0646\u0629\u064b \u0628\u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u062a\u0634\u063a\u064a\u0644 \u0627\u0644\u062c\u0647\u062f \u0627\u0644\u0639\u0627\u0644\u064a \u0648\u062a\u062d\u0633\u064a\u0646 \u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u062c\u0647\u0627\u0632.<\/p>\n

\u0645\u0648\u0635\u0644\u064a\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0639\u0627\u0644\u064a\u0629<\/h3>\n

\u062a\u064f\u0638\u0647\u0631 SiC \u0645\u0648\u0635\u0644\u064a\u0629 \u062d\u0631\u0627\u0631\u064a\u0629 \u0645\u0645\u062a\u0627\u0632\u0629\u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0628\u062a\u0628\u062f\u064a\u062f \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0628\u0643\u0641\u0627\u0621\u0629 \u0645\u0646 \u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u062c\u0647\u0627\u0632 \u0627\u0644\u0646\u0634\u0637\u0629. \u0648\u0647\u0630\u0627 \u064a\u062d\u0633\u0646 \u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0627\u0644\u062c\u0647\u0627\u0632 \u0648\u064a\u0637\u064a\u0644 \u0627\u0644\u0639\u0645\u0631 \u0627\u0644\u062a\u0634\u063a\u064a\u0644\u064a \u0641\u064a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629.<\/p>\n

\u0642\u0648\u0629 \u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0639\u0627\u0644\u064a\u0629<\/h3>\n

\u062a\u0648\u0641\u0631 \u0631\u0642\u0627\u0626\u0642 SiC \u0645\u0642\u0627\u0648\u0645\u0629 \u0642\u0648\u064a\u0629 \u0644\u0644\u062a\u0644\u0641 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0648\u062a\u0622\u0643\u0644 \u0627\u0644\u0633\u0637\u062d \u0648\u0625\u062c\u0647\u0627\u062f \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0623\u062b\u0646\u0627\u0621 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0628\u0641\u0636\u0644 \u0635\u0644\u0627\u0628\u0629 \u0645\u0648\u0633 \u0627\u0644\u062a\u064a \u062a\u0628\u0644\u063a 9.2 \u062a\u0642\u0631\u064a\u0628\u064b\u0627.<\/p>\n

\u0645\u062c\u0627\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0639\u0627\u0644\u064a \u0627\u0644\u0627\u0646\u0647\u064a\u0627\u0631<\/h3>\n

\u0648\u062a\u062a\u064a\u062d \u0642\u0648\u0629 \u0645\u062c\u0627\u0644 \u0627\u0644\u0627\u0646\u0647\u064a\u0627\u0631 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0625\u0645\u0643\u0627\u0646\u064a\u0629 \u0625\u0646\u0634\u0627\u0621 \u0647\u064a\u0627\u0643\u0644 \u0645\u062f\u0645\u062c\u0629 \u0644\u0644\u0623\u062c\u0647\u0632\u0629 \u0645\u0639 \u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u062a\u062d\u0645\u0644 \u0627\u0644\u062c\u0647\u062f \u0627\u0644\u0639\u0627\u0644\u064a\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644 SiC \u0645\u062b\u0627\u0644\u064a\u064b\u0627 \u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/p>\n

\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0641\u0646\u064a\u0629<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u0627\u0644\u0645\u0639\u0644\u0645\u0629<\/th>\n\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a<\/th>\n<\/tr>\n<\/thead>\n
\u0627\u0644\u0645\u0648\u0627\u062f<\/td>\n\u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0628\u0644\u0648\u0631\u0629<\/td>\n<\/tr>\n
\u0627\u0644\u0639\u0644\u0627\u0645\u0629 \u0627\u0644\u062a\u062c\u0627\u0631\u064a\u0629<\/td>\nZMSH<\/td>\n<\/tr>\n
\u0645\u062a\u0639\u062f\u062f \u0627\u0644\u0623\u0646\u0648\u0627\u0639<\/td>\n6\u0647\u0640 - \u0646<\/td>\n<\/tr>\n
\u0627\u0644\u0642\u0637\u0631<\/td>\n2 \u0628\u0648\u0635\u0629 (50.8 \u0645\u0645)<\/td>\n<\/tr>\n
\u0627\u0644\u0633\u064f\u0645\u0643<\/td>\n350 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 \/ 650 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631<\/td>\n<\/tr>\n
\u0646\u0648\u0639 \u0627\u0644\u0645\u0648\u0635\u0644\u064a\u0629<\/td>\n\u0627\u0644\u0646\u0648\u0639 N<\/td>\n<\/tr>\n
\u062a\u0634\u0637\u064a\u0628 \u0627\u0644\u0633\u0637\u062d<\/td>\n\u0648\u062c\u0647 CMP \u0645\u0635\u0642\u0648\u0644 \u0633\u064a-\u0641\u064a\u0633 \u0627\u0644\u0645\u0635\u0642\u0648\u0644<\/td>\n<\/tr>\n
\u0627\u0644\u0639\u0644\u0627\u062c \u0628\u0627\u0644\u0648\u062c\u0647 \u062c - \u0627\u0644\u0639\u0644\u0627\u062c \u0628\u0627\u0644\u0648\u062c\u0647 \u062c<\/td>\n\u0645\u0635\u0642\u0648\u0644 \u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0627\u064b<\/td>\n<\/tr>\n
\u062e\u0634\u0648\u0646\u0629 \u0627\u0644\u0633\u0637\u062d<\/td>\nRa < 0.2 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 (\u0648\u062c\u0647 \u0633\u064a\u0644\u064a\u0643\u0648\u0646)<\/td>\n<\/tr>\n
\u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629<\/td>\n0.015 - 0.028 \u03a9-\u0633\u0645<\/td>\n<\/tr>\n
\u0627\u0644\u0644\u0648\u0646<\/td>\n\u0634\u0641\u0627\u0641\/\u0623\u062e\u0636\u0631 \u0641\u0627\u062a\u062d<\/td>\n<\/tr>\n
\u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641<\/td>\n\u062d\u0627\u0648\u064a\u0629 \u0631\u0642\u0627\u0642\u0629 \u0648\u0627\u062d\u062f\u0629<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u0627\u0644\u062e\u0648\u0627\u0635 \u0627\u0644\u0645\u0627\u062f\u064a\u0629 \u0644 6H-SiC<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u0627\u0644\u0645\u0645\u062a\u0644\u0643\u0627\u062a<\/th>\n\u0627\u0644\u0642\u064a\u0645\u0629<\/th>\n<\/tr>\n<\/thead>\n
\u0645\u0639\u0644\u0645\u0627\u062a \u0627\u0644\u0634\u0628\u0643\u0629<\/td>\n\u0623 = 3.073 \u00c5\u060c \u062c = 15.117 \u00c5<\/td>\n<\/tr>\n
\u0635\u0644\u0627\u0628\u0629 \u0645\u0648\u0633<\/td>\n\u2248 9.2<\/td>\n<\/tr>\n
\u0627\u0644\u0643\u062b\u0627\u0641\u0629<\/td>\n3.21 \u062c\u0645\/\u0633\u0645 \u0645\u0643\u0639\u0628<\/td>\n<\/tr>\n
\u0645\u0639\u0627\u0645\u0644 \u0627\u0644\u062a\u0645\u062f\u062f \u0627\u0644\u062d\u0631\u0627\u0631\u064a<\/td>\n4-5 \u00d710-\u2076 \/K<\/td>\n<\/tr>\n
\u0645\u0639\u0627\u0645\u0644 \u0627\u0644\u0627\u0646\u0643\u0633\u0627\u0631 (750 \u0646\u0627\u0646\u0648\u0645\u062a\u0631)<\/td>\n\u0646 \u2080 = 2.60\u060c \u0646 \u2091 = 2.65<\/td>\n<\/tr>\n
\u062b\u0627\u0628\u062a \u0627\u0644\u0639\u0632\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a<\/td>\n\u2248 9.66<\/td>\n<\/tr>\n
\u0627\u0644\u062a\u0648\u0635\u064a\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u064a<\/td>\n~\u062d\u0648\u0627\u0644\u064a 3.7 - 3.9 \u0648\u0627\u0637\/\u0633\u0645-\u0643<\/td>\n<\/tr>\n
\u0641\u062c\u0648\u0629 \u0627\u0644\u0646\u0637\u0627\u0642<\/td>\n3.02 \u0641\u0648\u0644\u062a<\/td>\n<\/tr>\n
\u0627\u0646\u0647\u064a\u0627\u0631 \u0627\u0644\u0645\u062c\u0627\u0644 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a<\/td>\n3-5 \u00d7 10 \u2076 \u0641\u0648\u0644\u062a\/\u0633\u0645<\/td>\n<\/tr>\n
\u0633\u0631\u0639\u0629 \u0627\u0646\u062c\u0631\u0627\u0641 \u0627\u0644\u062a\u0634\u0628\u0639<\/td>\n2.0 \u00d7 10 \u2075 \u0645\/\u062b\u0627\u0646\u064a\u0629<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u0647\u0630\u0647 \u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a\u0629 \u0627\u0644\u062c\u0648\u0647\u0631\u064a\u0629 \u062a\u062c\u0639\u0644 6H-SiC \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u0623\u062f\u0627\u0621\u064b \u0645\u0633\u062a\u0642\u0631\u064b\u0627 \u0641\u064a \u0627\u0644\u0638\u0631\u0648\u0641 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0627\u0644\u0642\u0627\u0633\u064a\u0629.<\/p>\n

\"\u0631\u0642\u0627\u0642\u0629\u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639<\/h2>\n

\u0639\u0627\u062f\u0629 \u0645\u0627 \u064a\u062a\u0645 \u0625\u0646\u062a\u0627\u062c \u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0643\u0631\u064a\u0633\u062a\u0627\u0644 \u0627\u0644\u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0643\u0631\u064a\u0633\u062a\u0627\u0644 \u0645\u0646 SiC \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0644 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u0644\u0644\u0628\u062e\u0627\u0631 (PVT)<\/strong>, \u0648\u0647\u064a \u0639\u0645\u0644\u064a\u0629 \u0635\u0646\u0627\u0639\u064a\u0629 \u0646\u0627\u0636\u062c\u0629 \u0644\u0646\u0645\u0648 \u0628\u0644\u0648\u0631\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0630\u0627\u062a \u0641\u062c\u0648\u0629 \u0627\u0644\u0646\u0637\u0627\u0642 \u0627\u0644\u0639\u0631\u064a\u0636.<\/p>\n

\u0641\u064a \u0647\u0630\u0647 \u0627\u0644\u0639\u0645\u0644\u064a\u0629\u060c \u064a\u062a\u0645 \u062a\u0633\u062e\u064a\u0646 \u0645\u0627\u062f\u0629 \u0645\u0635\u062f\u0631 SiC \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0646\u0642\u0627\u0621 \u0639\u0646\u062f \u062f\u0631\u062c\u0627\u062a \u062d\u0631\u0627\u0631\u0629 \u0623\u0639\u0644\u0649 \u0645\u0646 2000 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629. \u064a\u062a\u0645 \u0646\u0642\u0644 \u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u0628\u062e\u0627\u0631 \u0645\u0646 \u062e\u0644\u0627\u0644 \u062a\u062f\u0631\u062c \u062d\u0631\u0627\u0631\u064a \u064a\u062a\u0645 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a\u0647 \u0628\u0639\u0646\u0627\u064a\u0629 \u0648\u0625\u0639\u0627\u062f\u0629 \u0628\u0644\u0648\u0631\u062a\u0647 \u0639\u0644\u0649 \u0628\u0644\u0648\u0631\u0629 \u0627\u0644\u0628\u0630\u0648\u0631\u060c \u0645\u0645\u0627 \u064a\u0634\u0643\u0644 \u0633\u0628\u064a\u0643\u0629 \u0628\u0644\u0648\u0631\u064a\u0629 \u0648\u0627\u062d\u062f\u0629 (\u0628\u0648\u0648\u0644). \u0648\u0628\u0639\u062f \u0627\u0644\u0646\u0645\u0648\u060c \u062a\u062a\u0645 \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0643\u0628\u0633\u0648\u0644\u0629 \u0625\u0644\u0649 \u0631\u0642\u0627\u0626\u0642 \u0645\u0646 \u062e\u0644\u0627\u0644 \u062e\u0637\u0648\u0627\u062a \u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0648\u0627\u0644\u062a\u0635\u0641\u064a\u0629 \u0648\u0627\u0644\u062a\u0644\u0645\u064a\u0639 \u0648\u0627\u0644\u062a\u0646\u0638\u064a\u0641.<\/p>\n

\u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0623\u062c\u0647\u0632\u0629\u060c \u064a\u0645\u0643\u0646 \u0623\u0646 \u062a\u062e\u0636\u0639 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0625\u0644\u0649 \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a (CVD) \u0627\u0644\u0646\u0645\u0648 \u0627\u0644\u0641\u0648\u0642\u064a<\/strong>, \u0627\u0644\u062a\u064a \u062a\u0633\u0645\u062d \u0628\u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u062f\u0642\u064a\u0642 \u0641\u064a \u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u0645\u0646\u0634\u0637\u0627\u062a \u0648\u0633\u064f\u0645\u0643 \u0627\u0644\u0637\u0628\u0642\u0629. \u062a\u0639\u062f \u0647\u0630\u0647 \u0627\u0644\u062e\u0637\u0648\u0629 \u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0635\u0645\u0627\u0645 \u0627\u0644\u062b\u0646\u0627\u0626\u064a \u0648\u0627\u0644\u0645\u0648\u0633\u0641\u064a\u062a \u0648\u0627\u0644\u0635\u0645\u0627\u0645 \u0627\u0644\u062b\u0646\u0627\u0626\u064a.<\/p>\n

\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a<\/h2>\n

\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629<\/h3>\n

\u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0631\u0642\u0627\u0642\u0627\u062a SiC \u0645\u0642\u0627\u0633 2 \u0628\u0648\u0635\u0629 6H-N \u0630\u0627\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0629 6H-N \u0641\u064a \u062a\u0637\u0648\u064a\u0631 \u0623\u062c\u0647\u0632\u0629 \u0623\u0634\u0628\u0627\u0647 \u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0646\u0645\u0627\u0630\u062c\u0647\u0627 \u0627\u0644\u0623\u0648\u0644\u064a\u0629\u060c \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643 \u0627\u0644\u062b\u0646\u0627\u0626\u064a\u0627\u062a \u0648\u0647\u064a\u0627\u0643\u0644 MOSFET \u0648\u0648\u062d\u062f\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629. \u0647\u0630\u0647 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u0623\u0646\u0638\u0645\u0629 \u062a\u062d\u0648\u064a\u0644 \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u062f\u0648\u0627\u0626\u0631 \u0625\u062f\u0627\u0631\u0629 \u0627\u0644\u0637\u0627\u0642\u0629.<\/p>\n

\u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629<\/h3>\n

\u062a\u062d\u0627\u0641\u0638 \u0645\u0648\u0627\u062f SiC \u0639\u0644\u0649 \u0623\u062f\u0627\u0621 \u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0645\u0633\u062a\u0642\u0631 \u0641\u064a \u062f\u0631\u062c\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0645\u0631\u062a\u0641\u0639\u0629\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0641\u0636\u0627\u0626\u064a\u0629 \u0648\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0645\u0631\u0627\u0642\u0628\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629 \u0648\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0628\u0646\u064a\u0629 \u0627\u0644\u062a\u062d\u062a\u064a\u0629 \u0644\u0644\u0637\u0627\u0642\u0629.<\/p>\n

\u0627\u0644\u0628\u062d\u062b \u0648\u0627\u0644\u062a\u0637\u0648\u064a\u0631 \u0641\u064a \u0645\u062c\u0627\u0644 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h3>\n

\u0646\u0638\u0631\u064b\u0627 \u0644\u062a\u0648\u0627\u0641\u0631\u0647\u0627 \u0648\u0641\u0639\u0627\u0644\u064a\u062a\u0647\u0627 \u0645\u0646 \u062d\u064a\u062b \u0627\u0644\u062a\u0643\u0644\u0641\u0629\u060c \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0645\u0642\u0627\u0633 2 \u0628\u0648\u0635\u0629 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u0627\u0644\u0645\u062e\u062a\u0628\u0631\u0627\u062a \u0627\u0644\u062c\u0627\u0645\u0639\u064a\u0629 \u0648\u0645\u0639\u0627\u0647\u062f \u0627\u0644\u0628\u062d\u0648\u062b \u0648\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u062a\u062c\u0631\u064a\u0628\u064a \u0644\u062f\u0631\u0627\u0633\u0627\u062a \u0627\u0644\u0645\u0648\u0627\u062f \u0648\u062a\u062c\u0627\u0631\u0628 \u0627\u0644\u0623\u062c\u0647\u0632\u0629.<\/p>\n

\u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u062e\u0627\u0635\u0629<\/h3>\n

\u064a\u064f\u0638\u0647\u0631 SiC \u0623\u064a\u0636\u064b\u0627 \u0634\u0641\u0627\u0641\u064a\u0629 \u0628\u0635\u0631\u064a\u0629 \u0641\u064a \u0646\u0637\u0627\u0642\u0627\u062a \u0623\u0637\u0648\u0627\u0644 \u0645\u0648\u062c\u064a\u0629 \u0645\u0639\u064a\u0646\u0629\u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645\u0647 \u0641\u064a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0628\u062d\u062b\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0648\u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0627\u0644\u0645\u062a\u062e\u0635\u0635\u0629.<\/p>\n

\u0627\u0644\u0645\u0632\u0627\u064a\u0627\"\u0631\u0642\u0627\u0642\u0629<\/h2>\n

\u062a\u0648\u0641\u0631 \u0645\u0646\u0635\u0629 \u0631\u0642\u0627\u0642\u0629 SiC \u0645\u0642\u0627\u0633 2 \u0628\u0648\u0635\u0629 \u0627\u0644\u0639\u062f\u064a\u062f \u0645\u0646 \u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0644\u0644\u0628\u062d\u062b \u0648\u0627\u0644\u062a\u0637\u0648\u064a\u0631:<\/p>\n

    \n
  • \u062a\u0643\u0644\u0641\u0629 \u0623\u0642\u0644 \u0645\u0642\u0627\u0631\u0646\u0629 \u0628\u0623\u062d\u062c\u0627\u0645 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0623\u0643\u0628\u0631 \u062d\u062c\u0645\u0627\u064b<\/li>\n
  • \u0645\u0639\u0627\u0644\u062c\u0629 \u0623\u0633\u0647\u0644 \u0644\u0644\u062a\u062c\u0627\u0631\u0628 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0627\u0644\u0645\u062e\u062a\u0628\u0631<\/li>\n
  • \u0645\u0644\u0627\u0626\u0645 \u0644\u0644\u0646\u0645\u0627\u0630\u062c \u0627\u0644\u0623\u0648\u0644\u064a\u0629 \u0627\u0644\u0633\u0631\u064a\u0639\u0629 \u0648\u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a<\/li>\n
  • \u062c\u0648\u062f\u0629 \u0628\u0644\u0648\u0631\u064a\u0629 \u0645\u0633\u062a\u0642\u0631\u0629 \u0644\u0646\u062a\u0627\u0626\u062c \u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u062a\u0643\u0631\u0627\u0631<\/li>\n
  • \u062e\u064a\u0627\u0631\u0627\u062a \u062a\u062e\u0635\u064a\u0635 \u0645\u0631\u0646\u0629 \u0644\u062a\u0644\u0628\u064a\u0629 \u0627\u062d\u062a\u064a\u0627\u062c\u0627\u062a \u0627\u0644\u0628\u062d\u062b<\/li>\n<\/ul>\n

    \u0627\u0644\u0623\u0633\u0626\u0644\u0629 \u0627\u0644\u0634\u0627\u0626\u0639\u0629<\/h2>\n

    \u06331: \u0645\u0627 \u0627\u0644\u0641\u0631\u0642 \u0628\u064a\u0646 6H-SiC \u06484H-SiC\u061f<\/h3>\n

    6H-SiC \u06484H-SiC \u0647\u0645\u0627 \u0646\u0648\u0639\u0627\u0646 \u0645\u062e\u062a\u0644\u0641\u0627\u0646 \u0645\u0646 \u0627\u0644\u0643\u0631\u064a\u0633\u062a\u0627\u0644 \u0645\u062a\u0639\u062f\u062f \u0627\u0644\u0643\u0631\u064a\u0633\u062a\u0627\u0644. \u062a\u0648\u0641\u0631 4H-SiC 4H \u0628\u0634\u0643\u0644 \u0639\u0627\u0645 \u062d\u0631\u0643\u064a\u0629 \u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0623\u0639\u0644\u0649 \u0648\u062a\u0633\u062a\u062e\u062f\u0645 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u062a\u062c\u0627\u0631\u064a\u0629\u060c \u0628\u064a\u0646\u0645\u0627 \u062a\u0648\u0641\u0631 6H-SiC \u0633\u0644\u0648\u0643\u064b\u0627 \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u064b\u0627 \u0645\u0633\u062a\u0642\u0631\u064b\u0627 \u0648\u062a\u0633\u062a\u062e\u062f\u0645 \u0639\u0627\u062f\u0629 \u0641\u064a \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0648\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0645\u062d\u062f\u062f\u0629.<\/p>\n

    \u06332: \u0645\u0627 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0633\u0637\u062d\u064a\u0629 \u0627\u0644\u062a\u064a \u064a\u062a\u0645 \u062a\u0637\u0628\u064a\u0642\u0647\u0627 \u0639\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0642\u0629\u061f<\/h3>\n

    \u064a\u062a\u0645 \u0635\u0642\u0644 \u0648\u062c\u0647 Si \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u0635\u0642\u0644 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a (CMP) \u0644\u062a\u062d\u0642\u064a\u0642 \u062c\u0648\u062f\u0629 \u0633\u0637\u062d \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0639\u0648\u0645\u0629 (Ra <0.2 \u0646\u0627\u0646\u0648\u0645\u062a\u0631). \u064a\u062a\u0645 \u0635\u0642\u0644 \u0627\u0644\u0648\u062c\u0647 C \u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u064b\u0627 \u0644\u062f\u0639\u0645 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629.<\/p>\n

    \u06333: \u0647\u0644 \u064a\u0645\u0643\u0646 \u062a\u062e\u0635\u064a\u0635 \u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0629\u061f<\/h3>\n

    \u0646\u0639\u0645. \u062a\u0648\u0641\u0631 ZMSH \u062e\u064a\u0627\u0631\u0627\u062a \u0627\u0644\u062a\u062e\u0635\u064a\u0635 \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643 \u0627\u0644\u0633\u064f\u0645\u0643 \u0648\u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u0645\u0646\u0634\u0637\u0627\u062a \u0648\u0646\u0637\u0627\u0642 \u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u0648\u0625\u0639\u062f\u0627\u062f \u0627\u0644\u0633\u0637\u062d \u0648\u0641\u0642\u064b\u0627 \u0644\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0639\u0645\u064a\u0644.<\/p>","protected":false},"excerpt":{"rendered":"

    \u062a\u0648\u0641\u0631 \u0634\u0631\u0643\u0629 ZMSH \u0631\u0642\u0627\u0626\u0642 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (SiC) \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062c\u0648\u062f\u0629 \u0645\u0642\u0627\u0633 2 \u0628\u0648\u0635\u0629 6H-N \u0627\u0644\u0645\u0635\u0645\u0645\u0629 \u0644\u0623\u0628\u062d\u0627\u062b \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0648\u062a\u0637\u0648\u064a\u0631 \u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0623\u062f\u0627\u0621. \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0639\u0628\u0627\u0631\u0629 \u0639\u0646 \u0645\u0627\u062f\u0629 \u0634\u0628\u0647 \u0645\u0648\u0635\u0644\u0629 \u0630\u0627\u062a \u0641\u062c\u0648\u0629 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639\u0629 \u062a\u0648\u0641\u0631 \u062e\u0635\u0627\u0626\u0635 \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u062d\u0631\u0627\u0631\u064a\u0629 \u0648\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0641\u0627\u0626\u0642\u0629 \u0645\u0642\u0627\u0631\u0646\u0629 \u0628\u0631\u0643\u0627\u0626\u0632 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629.<\/p>","protected":false},"featured_media":2197,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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