\n| \u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0642\u0627\u062a\u0644\u0629<\/td>\n | \u22640.2 \u0633\u0645-\u0645\u00b2 (\u0645\u062d\u0633\u0651\u0646 \u0625\u0644\u0649 0.01 \u0633\u0645-\u0645\u00b2)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n\u0633\u064a\u0646\u0627\u0631\u064a\u0648\u0647\u0627\u062a \u0627\u0644\u062a\u0637\u0628\u064a\u0642<\/h3>\n\u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0645\u0639\u062f\u0627\u062a \u0625\u0628\u064a\u062a\u0627\u0643\u0633 \u0633\u064a \u0633\u064a \u0630\u0627\u062a \u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0626\u064a \u0627\u0644\u0639\u0645\u0648\u062f\u064a \u0627\u0644\u0645\u0646\u0641\u0635\u0644 \u0645\u0646 \u0627\u0644\u0646\u0648\u0639 \u0627\u0644\u0645\u0646\u0641\u0635\u0644 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0623\u062f\u0627\u0621 \u0645\u0646 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0633\u064a\u0644\u064a\u0643\u0648\u0646\u060c \u062e\u0627\u0635\u0629\u064b \u0641\u064a \u0627\u0644\u0635\u0646\u0627\u0639\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u0643\u0641\u0627\u0621\u0629 \u0639\u0627\u0644\u064a\u0629 \u0648\u062c\u0647\u062f\u064b\u0627 \u0639\u0627\u0644\u064a\u064b\u0627 \u0648\u0623\u062f\u0627\u0621\u064b \u062d\u0631\u0627\u0631\u064a\u064b\u0627 \u0639\u0627\u0644\u064a\u064b\u0627:<\/p>\n \u0627\u0644\u0633\u064a\u0627\u0631\u0627\u062a \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 (EVs)<\/strong>
\u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0641\u064a \u0625\u0646\u062a\u0627\u062c \u0648\u062d\u062f\u0627\u062a SiC MOSFET \u0648\u0648\u062d\u062f\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0644\u0644\u0645\u062d\u0648\u0644\u0627\u062a \u0648\u0627\u0644\u0634\u0648\u0627\u062d\u0646 \u0627\u0644\u0645\u062f\u0645\u062c\u0629 \u0648\u0645\u062d\u0648\u0644\u0627\u062a \u0627\u0644\u062a\u064a\u0627\u0631 \u0627\u0644\u0645\u0633\u062a\u0645\u0631-\u0627\u0644\u062a\u0646\u0627\u0648\u0628 (DC-DC)\u060c \u0645\u0645\u0627 \u064a\u062d\u0633\u0646 \u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0646\u0637\u0627\u0642 \u0627\u0644\u0642\u064a\u0627\u062f\u0629.<\/p>\n\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0645\u062a\u062c\u062f\u062f\u0629<\/strong>
\u062a\u0637\u0628\u0642 \u0641\u064a \u0627\u0644\u0645\u062d\u0648\u0644\u0627\u062a \u0627\u0644\u0643\u0647\u0631\u0648\u0636\u0648\u0626\u064a\u0629 \u0648\u0623\u0646\u0638\u0645\u0629 \u062a\u062e\u0632\u064a\u0646 \u0627\u0644\u0637\u0627\u0642\u0629\u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u0643\u0641\u0627\u0621\u0629 \u062a\u062d\u0648\u064a\u0644 \u0623\u0639\u0644\u0649 \u0648\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0623\u0639\u0644\u0649.<\/p>\n\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629<\/strong>
\u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0645\u062d\u0631\u0643\u0627\u062a \u0627\u0644\u0645\u062d\u0631\u0643\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629\u060c \u0648\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0623\u062a\u0645\u062a\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629\u060c \u0648\u0648\u062d\u062f\u0627\u062a \u0627\u0644\u0625\u0645\u062f\u0627\u062f \u0628\u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628 \u062a\u0634\u063a\u064a\u0644\u0627\u064b \u0645\u0633\u062a\u0642\u0631\u064b\u0627 \u0648\u0641\u0639\u0627\u0644\u0627\u064b.<\/p>\n\u0627\u0644\u0646\u0642\u0644 \u0628\u0627\u0644\u0633\u0643\u0643 \u0627\u0644\u062d\u062f\u064a\u062f\u064a\u0629 \u0648\u0634\u0628\u0643\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629<\/strong>
\u064a\u062f\u0639\u0645 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0630\u0627\u062a \u0627\u0644\u062c\u0647\u062f \u0627\u0644\u0639\u0627\u0644\u064a \u0648\u0627\u0644\u062a\u0631\u062f\u062f \u0627\u0644\u0639\u0627\u0644\u064a \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0641\u064a \u0627\u0644\u0634\u0628\u0643\u0627\u062a \u0627\u0644\u0630\u0643\u064a\u0629 \u0648\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062c\u0631 \u0648\u0627\u0644\u0628\u0646\u064a\u0629 \u0627\u0644\u062a\u062d\u062a\u064a\u0629 \u0644\u0646\u0642\u0644 \u0627\u0644\u0637\u0627\u0642\u0629.<\/p>\n\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0645\u062a\u0637\u0648\u0631\u0629<\/strong>
\u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0623\u062c\u0647\u0632\u0629 SiC \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0645\u062b\u0644 \u0635\u0645\u0627\u0645\u0627\u062a Schottky \u0627\u0644\u062b\u0646\u0627\u0626\u064a\u0629 \u0648MOSFETs \u0648\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u062c\u064a\u0644 \u0627\u0644\u062a\u0627\u0644\u064a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062c\u0647\u062f.<\/p>\n![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\") <\/p>\n
\u0627\u0644\u0623\u0633\u0626\u0644\u0629 \u0627\u0644\u0634\u0627\u0626\u0639\u0629<\/h3>\n1. \u0645\u0627 \u0647\u064a \u0623\u062d\u062c\u0627\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u062a\u064a \u062a\u062f\u0639\u0645\u0647\u0627 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0628\u064a\u062a\u0627\u0643\u0633 \u0627\u0644\u0645\u0646\u0642\u0633\u0645\u0629 \u0647\u0630\u0647\u061f<\/strong>
\u064a\u062f\u0639\u0645 \u0627\u0644\u0646\u0638\u0627\u0645 \u0631\u0642\u0627\u0642\u0627\u062a SiC \u0645\u0642\u0627\u0633 6 \u0628\u0648\u0635\u0629 \u06488 \u0628\u0648\u0635\u0629 \u0639\u0644\u0649 \u062d\u062f \u0633\u0648\u0627\u0621\u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0644\u0644\u0645\u0635\u0646\u0639\u064a\u0646 \u0628\u062a\u0644\u0628\u064a\u0629 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u062d\u0627\u0644\u064a\u0629 \u0645\u0639 \u0627\u0644\u0627\u0633\u062a\u0639\u062f\u0627\u062f \u0644\u0644\u062a\u0648\u0633\u0639 \u0627\u0644\u0645\u0633\u062a\u0642\u0628\u0644\u064a.<\/p>\n2. \u0645\u0627 \u0647\u064a \u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0645\u0646\u0641\u0635\u0644\u061f<\/strong>
\u064a\u0633\u0645\u062d \u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0645\u0642\u0633\u0645 \u0627\u0644\u0645\u0639\u064a\u0627\u0631\u064a \u0628\u062a\u0631\u0643\u064a\u0628 \u0645\u0633\u062a\u0642\u0644 \u0644\u0648\u062d\u062f\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0627\u0644\u0639\u0627\u062f\u0645 \u0648\u0648\u062d\u062f\u0627\u062a EFEM\u060c \u0645\u0645\u0627 \u064a\u062d\u0633\u0646 \u0645\u0631\u0648\u0646\u0629 \u062a\u062e\u0637\u064a\u0637 \u0627\u0644\u0645\u0635\u0646\u0639 \u0648\u064a\u0639\u0632\u0632 \u0631\u0627\u062d\u0629 \u0627\u0644\u0635\u064a\u0627\u0646\u0629.<\/p>\n3. \u0643\u064a\u0641 \u064a\u0639\u0645\u0644 \u062a\u0635\u0645\u064a\u0645 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u0627\u0644\u0639\u0645\u0648\u062f\u064a \u0639\u0644\u0649 \u062a\u062d\u0633\u064a\u0646 \u062c\u0648\u062f\u0629 \u0627\u0644\u0625\u0628\u064a\u062a\u0627\u0643\u0633\u061f<\/strong>
\u0648\u064a\u0636\u0645\u0646 \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u0627\u0644\u0639\u0645\u0648\u062f\u064a \u062a\u0648\u0632\u064a\u0639\u064b\u0627 \u0645\u0648\u062d\u062f\u064b\u0627 \u0644\u0644\u063a\u0627\u0632 \u0639\u0628\u0631 \u0627\u0644\u0631\u0642\u0627\u0642\u0629\u060c \u0645\u0645\u0627 \u064a\u0624\u062f\u064a \u0625\u0644\u0649 \u0633\u064f\u0645\u0643 \u0645\u062a\u0646\u0627\u0633\u0642 \u0648\u0645\u0646\u0634\u0637\u0627\u062a \u0645\u0633\u062a\u0642\u0631\u0629 \u0648\u0643\u062b\u0627\u0641\u0629 \u0639\u064a\u0648\u0628 \u0645\u0646\u062e\u0641\u0636\u0629.<\/p>\n4. \u0647\u0644 \u0647\u0630\u0647 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u062a\u0635\u0646\u064a\u0639 \u0628\u0643\u0645\u064a\u0627\u062a \u0643\u0628\u064a\u0631\u0629\u061f<\/strong><\/p>\n\u0646\u0639\u0645\u060c \u064a\u062f\u0639\u0645 \u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u063a\u0631\u0641\u0629 \u0627\u0644\u0645\u0632\u062f\u0648\u062c\u0629 \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u0627\u0644\u0645\u0633\u062a\u0645\u0631 \u0645\u062a\u0639\u062f\u062f \u0627\u0644\u0623\u0641\u0631\u0627\u0646\u060c \u0645\u0639 \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u062a\u062a\u062c\u0627\u0648\u0632 1100 \u0631\u0642\u0627\u0642\u0629 \u0634\u0647\u0631\u064a\u064b\u0627\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647\u0627 \u0645\u062b\u0627\u0644\u064a\u0629 \u0644\u0644\u0625\u0646\u062a\u0627\u062c \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0648\u0636\u0645\u0627\u0646 \u0625\u0646\u062a\u0627\u062c \u0631\u0642\u0627\u0626\u0642 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062c\u0648\u062f\u0629 \u0645\u062a\u0633\u0642\u0629 \u0645\u0639 \u062a\u0642\u0644\u064a\u0644 \u0648\u0642\u062a \u0627\u0644\u062a\u0648\u0642\u0641 \u0627\u0644\u062a\u0634\u063a\u064a\u0644\u064a.<\/p>","protected":false},"excerpt":{"rendered":" \u062a\u064f\u0639\u062f \u0645\u0639\u062f\u0627\u062a \u062a\u0628\u064a\u064a\u062a \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (SiC) \u0630\u0627\u062a \u0627\u0644\u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0626\u064a \u0627\u0644\u0631\u0623\u0633\u064a \u0645\u0646 \u0627\u0644\u0646\u0648\u0639 \u0627\u0644\u0645\u0646\u0641\u0635\u0644 \u0646\u0638\u0627\u0645 \u0646\u0645\u0648 \u0641\u0648\u0642\u064a \u0645\u062a\u0637\u0648\u0631 \u0645\u0635\u0645\u0645 \u0644\u0625\u0646\u062a\u0627\u062c \u0631\u0642\u0627\u0626\u0642 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0641\u0648\u0642 \u0627\u0644\u0628\u0648\u0644\u064a \u0625\u064a\u062b\u064a\u0644\u064a\u0646 \u0639\u0627\u0644\u064a \u0627\u0644\u0643\u0641\u0627\u0621\u0629 \u0645\u0646 \u0631\u0642\u0627\u0626\u0642 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\u0627\u0644\u0645\u064a\u0632\u0627\u0646\u064a\u0646.<\/p>","protected":false},"featured_media":2087,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[730],"product_tag":[615,616,485,751,752,756,749,759,744,750,753,755,758,757,748,746,754,741,747],"class_list":{"0":"post-2084","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-epitaxy-equipment","7":"product_tag-6-inch-wafer","8":"product_tag-8-inch-wafer","9":"product_tag-automated-wafer-handling","10":"product_tag-dual-chamber","11":"product_tag-efem-integration","12":"product_tag-electric-vehicle","13":"product_tag-high-throughput","14":"product_tag-high-end-sic-devices","15":"product_tag-industrial-power-electronics","16":"product_tag-low-defect","17":"product_tag-multi-zone-temperature-control","18":"product_tag-power-semiconductor","19":"product_tag-rail-transit","20":"product_tag-renewable-energy","21":"product_tag-sic-epitaxy","22":"product_tag-split-type-sic-epitaxy-equipment","23":"product_tag-thick-film-epitaxy","24":"product_tag-trench-filling-epitaxy","25":"product_tag-vertical-airflow","26":"desktop-align-left","27":"tablet-align-left","28":"mobile-align-left","29":"ast-product-gallery-layout-horizontal-slider","30":"ast-product-tabs-layout-horizontal","32":"first","33":"instock","34":"shipping-taxable","35":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product\/2084","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/comments?post=2084"}],"version-history":[{"count":3,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product\/2084\/revisions"}],"predecessor-version":[{"id":2093,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product\/2084\/revisions\/2093"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/media\/2087"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/media?parent=2084"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product_brand?post=2084"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product_cat?post=2084"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product_tag?post=2084"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}} |
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