{"id":2021,"date":"2026-03-27T01:46:43","date_gmt":"2026-03-27T01:46:43","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2021"},"modified":"2026-03-27T01:46:45","modified_gmt":"2026-03-27T01:46:45","slug":"high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ar\/product\/high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration\/","title":{"rendered":"\u0645\u0639\u062f\u0627\u062a \u0631\u0628\u0637 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062f\u0642\u0629 \u0644\u0631\u0642\u0627\u0642\u0627\u062a Si-Si \u0648SiC-SiC \u0648\u0627\u0644\u062a\u0643\u0627\u0645\u0644 \u063a\u064a\u0631 \u0627\u0644\u0645\u062a\u062c\u0627\u0646\u0633"},"content":{"rendered":"<p data-start=\"288\" data-end=\"699\">\u0625\u0646 \u0645\u0639\u062f\u0627\u062a \u0631\u0628\u0637 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0639\u0628\u0627\u0631\u0629 \u0639\u0646 \u0646\u0638\u0627\u0645 \u0639\u0627\u0644\u064a \u0627\u0644\u0623\u062f\u0627\u0621 \u0645\u0635\u0645\u0645 \u0644\u062a\u063a\u0644\u064a\u0641 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629\u060c \u0648\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0631\u0642\u0627\u0626\u0642\u060c \u0648\u062a\u0643\u0627\u0645\u0644 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0645\u0646 \u0627\u0644\u062c\u064a\u0644 \u0627\u0644\u062b\u0627\u0644\u062b. \u0648\u0647\u0648 \u064a\u062f\u0639\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0645\u0642\u0627\u0633 2 \u0628\u0648\u0635\u0629 \u0625\u0644\u0649 12 \u0628\u0648\u0635\u0629 \u0648\u064a\u062a\u064a\u062d \u0627\u0644\u0631\u0628\u0637 \u0627\u0644\u0645\u0628\u0627\u0634\u0631 \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 \u0648\u0627\u0644\u0631\u0628\u0637 \u0627\u0644\u0645\u0627\u0626\u064a\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647 \u0645\u0646\u0627\u0633\u0628\u064b\u0627 \u0628\u0634\u0643\u0644 \u062e\u0627\u0635 \u0644\u0631\u0628\u0637 \u0631\u0642\u0627\u0626\u0642 Si-Si \u0648SiC-SiC \u0648\u0627\u0644\u0631\u0628\u0637 \u0628\u0627\u0644\u0645\u0648\u0627\u062f \u063a\u064a\u0631 \u0627\u0644\u0645\u062a\u062c\u0627\u0646\u0633\u0629 (Si-SiC \u0648G GaN \u0648\u0627\u0644\u064a\u0627\u0642\u0648\u062a \u0627\u0644\u0623\u0632\u0631\u0642\u060c \u0625\u0644\u062e.).<\/p>\n<p data-start=\"288\" data-end=\"699\"><img fetchpriority=\"high\" decoding=\"async\" class=\"wp-image-2025 size-full aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration33.png\" alt=\"\" width=\"680\" height=\"310\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration33.png 680w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration33-300x137.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration33-18x8.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration33-600x274.png 600w\" sizes=\"(max-width: 680px) 100vw, 680px\" \/><\/p>\n<p data-start=\"701\" data-end=\"1001\">\u0635\u064f\u0645\u0645 \u0627\u0644\u0646\u0638\u0627\u0645 \u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0628\u062d\u062b \u0648\u0627\u0644\u062a\u0637\u0648\u064a\u0631 \u0648\u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0628\u0643\u0645\u064a\u0627\u062a \u0643\u0628\u064a\u0631\u0629 \u0639\u0644\u0649 \u062d\u062f \u0633\u0648\u0627\u0621\u060c \u0648\u0647\u0648 \u0645\u0635\u0645\u0645 \u0644\u0628\u064a\u0626\u0627\u062a \u0627\u0644\u0628\u062d\u062b \u0648\u0627\u0644\u062a\u0637\u0648\u064a\u0631 \u0648\u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0628\u0643\u0645\u064a\u0627\u062a \u0643\u0628\u064a\u0631\u0629\u060c \u062d\u064a\u062b \u064a\u062f\u0645\u062c \u0627\u0644\u0646\u0638\u0627\u0645 \u0645\u062d\u0627\u0630\u0627\u0629 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u062f\u0642\u0629 \u0648\u062a\u062d\u0643\u0645\u064b\u0627 \u0641\u064a \u0627\u0644\u0636\u063a\u0637 \u0648\u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0641\u064a \u062d\u0644\u0642\u0629 \u0645\u063a\u0644\u0642\u0629 \u0648\u0638\u0631\u0648\u0641 \u0631\u0628\u0637 \u0628\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0647\u0648\u0627\u0621 \u0641\u0627\u0626\u0642 \u0627\u0644\u062f\u0642\u0629\u060c \u0645\u0645\u0627 \u064a\u0636\u0645\u0646 \u0642\u0648\u0629 \u0631\u0628\u0637 \u0639\u0627\u0644\u064a\u0629 \u0648\u062a\u0648\u062d\u064a\u062f\u064b\u0627 \u0645\u0645\u062a\u0627\u0632\u064b\u0627 \u0644\u0644\u0648\u0627\u062c\u0647\u0627\u062a \u0648\u0643\u062b\u0627\u0641\u0629 \u0645\u0646\u062e\u0641\u0636\u0629 \u0644\u0644\u0639\u064a\u0648\u0628.<\/p>\n<h1 data-section-id=\"5wwv7v\" data-start=\"1008\" data-end=\"1032\"><span role=\"text\">\u0627\u0644\u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/span><\/h1>\n<h3 data-section-id=\"1moc4qg\" data-start=\"1034\" data-end=\"1089\"><span role=\"text\"><img decoding=\"async\" class=\"size-medium wp-image-2027 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration11-300x205.png\" alt=\"\" width=\"300\" height=\"205\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration11-300x205.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration11-18x12.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration11-600x409.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration11.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>1. \u062a\u0642\u0646\u064a\u0629 \u0627\u0644\u0631\u0628\u0637 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629<\/span><\/h3>\n<ul data-start=\"1090\" data-end=\"1275\">\n<li data-section-id=\"1mm29lt\" data-start=\"1090\" data-end=\"1137\">\u0627\u0644\u062a\u062e\u0644\u0635 \u0645\u0646 \u0627\u0644\u0625\u062c\u0647\u0627\u062f \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0648\u0627\u0644\u062a\u0648\u0627\u0621 \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/li>\n<li data-section-id=\"ln8v6d\" data-start=\"1138\" data-end=\"1211\">\u062a\u0645\u0643\u064a\u0646 \u0627\u0644\u0631\u0628\u0637 \u0628\u064a\u0646 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0644\u0644\u062d\u0631\u0627\u0631\u0629 \u0648\u0627\u0644\u0645\u0648\u0627\u062f \u063a\u064a\u0631 \u0627\u0644\u0645\u062a\u0634\u0627\u0628\u0647\u0629<\/li>\n<li data-section-id=\"1bb2rki\" data-start=\"1212\" data-end=\"1275\">\u064a\u062f\u0639\u0645 \u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0627\u0644\u0645\u0627\u0626\u064a \u0648\u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0627\u0644\u0645\u0646\u0634\u0637 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n<\/ul>\n<h3 data-section-id=\"mvg0ku\" data-start=\"1277\" data-end=\"1318\"><span role=\"text\">2. \u0645\u062d\u0627\u0630\u0627\u0629 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u062f\u0642\u0629<\/span><\/h3>\n<ul data-start=\"1319\" data-end=\"1452\">\n<li data-section-id=\"nib7cj\" data-start=\"1319\" data-end=\"1359\">\u062f\u0642\u0629 \u0645\u062d\u0627\u0630\u0627\u0629 \u0627\u0644\u0639\u0644\u0627\u0645\u0629: \u2264 \u00b1 2 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631<\/li>\n<li data-section-id=\"3dmnqq\" data-start=\"1360\" data-end=\"1401\">\u062f\u0642\u0629 \u0645\u062d\u0627\u0630\u0627\u0629 \u0627\u0644\u062d\u0648\u0627\u0641: \u2264 \u00b1 50 \u0645\u064a\u0643\u0631\u0648\u0646<\/li>\n<li data-section-id=\"skx64n\" data-start=\"1402\" data-end=\"1452\">\u062a\u0631\u0642\u064a\u0629 \u0627\u062e\u062a\u064a\u0627\u0631\u064a\u0629 \u0625\u0644\u0649 \u0646\u0638\u0627\u0645 \u0645\u062d\u0627\u0630\u0627\u0629 \u062f\u0648\u0646 \u0627\u0644\u0645\u064a\u0643\u0631\u0648\u0646<\/li>\n<\/ul>\n<h3 data-section-id=\"zhuyd5\" data-start=\"1454\" data-end=\"1506\"><span role=\"text\">3. \u0642\u0648\u0629 \u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0648\u062c\u0648\u062f\u0629 \u0627\u0644\u0648\u0627\u062c\u0647\u0629<\/span><\/h3>\n<ul data-start=\"1507\" data-end=\"1678\">\n<li data-section-id=\"1g876j\" data-start=\"1507\" data-end=\"1568\">\u2265 2.0 \u062c\u0648\u0644\/\u0645\u00b2 (\u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0627\u0644\u0645\u0628\u0627\u0634\u0631 \u0628\u064a\u0646 Si-Si \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629)<\/li>\n<li data-section-id=\"11zitz1\" data-start=\"1569\" data-end=\"1621\">\u0645\u0627 \u064a\u0635\u0644 \u0625\u0644\u0649 \u22655 \u062c\u0648\u0644\/\u0645\u00b2 \u0645\u0639 \u062a\u0646\u0634\u064a\u0637 \u0633\u0637\u062d \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n<li data-section-id=\"4r7u1t\" data-start=\"1622\" data-end=\"1678\">\u0646\u0638\u0627\u0641\u0629 \u0645\u0645\u062a\u0627\u0632\u0629 \u0644\u0644\u0648\u0635\u0644\u0629 \u0627\u0644\u0628\u064a\u0646\u064a\u0629 \u062a\u062d\u062a \u0638\u0631\u0648\u0641 \u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u062c\u062f\u0627\u064b<\/li>\n<\/ul>\n<h3 data-section-id=\"1p6le9y\" data-start=\"1680\" data-end=\"1718\"><span role=\"text\">4. \u062a\u0648\u0627\u0641\u0642 \u0648\u0627\u0633\u0639 \u0644\u0644\u0645\u0648\u0627\u062f<\/span><\/h3>\n<p data-start=\"1719\" data-end=\"1739\">\u064a\u062f\u0639\u0645 \u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0628\u064a\u0646:<\/p>\n<ul data-start=\"1740\" data-end=\"1864\">\n<li data-section-id=\"aojy5e\" data-start=\"1740\" data-end=\"1783\">\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a: Si\u060c SiC\u060c SiC\u060c GaN\u060c GaAs\u060c InP<\/li>\n<li data-section-id=\"f2gy5g\" data-start=\"1784\" data-end=\"1822\">\u0645\u0648\u0627\u062f \u0628\u0635\u0631\u064a\u0629: \u064a\u0627\u0642\u0648\u062a\u060c \u0632\u062c\u0627\u062c<\/li>\n<li data-section-id=\"v9y58o\" data-start=\"1823\" data-end=\"1864\">\u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0648\u0638\u064a\u0641\u064a\u0629: LiNbO\u2083\u060c \u0627\u0644\u0645\u0627\u0633<\/li>\n<\/ul>\n<h3 data-section-id=\"zfgn77\" data-start=\"1866\" data-end=\"1904\"><span role=\"text\">5. \u0627\u0644\u0642\u062f\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0645\u0631\u0646\u0629<\/span><\/h3>\n<ul data-start=\"1905\" data-end=\"2043\">\n<li data-section-id=\"1y6punm\" data-start=\"1905\" data-end=\"1933\">\u062d\u062c\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0629: 2 \u0628\u0648\u0635\u0629 - 12 \u0628\u0648\u0635\u0629<\/li>\n<li data-section-id=\"qz7nz2\" data-start=\"1934\" data-end=\"1982\">\u0645\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u0627\u0644\u0639\u064a\u0646\u0627\u062a \u063a\u064a\u0631 \u0627\u0644\u0645\u0646\u062a\u0638\u0645\u0629 \u0627\u0644\u0634\u0643\u0644<\/li>\n<li data-section-id=\"v2ier\" data-start=\"1983\" data-end=\"2043\">\u0627\u0644\u0648\u062d\u062f\u0627\u062a \u0627\u0644\u0627\u062e\u062a\u064a\u0627\u0631\u064a\u0629: \u0627\u0644\u062a\u0633\u062e\u064a\u0646 \u0627\u0644\u0645\u0633\u0628\u0642\/\u0627\u0644\u062a\u0644\u062f\u064a\u0646 \u0627\u0644\u0645\u0633\u0628\u0642 (RT-500 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629)<\/li>\n<\/ul>\n<h1 data-section-id=\"m12c1z\" data-start=\"2050\" data-end=\"2086\"><span role=\"text\">\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0641\u0646\u064a\u0629<\/span><\/h1>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2088\" data-end=\"2479\">\n<thead data-start=\"2088\" data-end=\"2117\">\n<tr data-start=\"2088\" data-end=\"2117\">\n<th class=\"\" data-start=\"2088\" data-end=\"2100\" data-col-size=\"sm\">\u0627\u0644\u0645\u0639\u0644\u0645\u0629<\/th>\n<th class=\"\" data-start=\"2100\" data-end=\"2117\" data-col-size=\"md\">\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2145\" data-end=\"2479\">\n<tr data-start=\"2145\" data-end=\"2208\">\n<td data-start=\"2145\" data-end=\"2163\" data-col-size=\"sm\">\u0637\u0631\u0642 \u0627\u0644\u062a\u0631\u0627\u0628\u0637<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2208\">\u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0627\u0644\u0645\u0628\u0627\u0634\u0631\/\u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0627\u0644\u0645\u0646\u0634\u0637 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/td>\n<\/tr>\n<tr data-start=\"2209\" data-end=\"2234\">\n<td data-start=\"2209\" data-end=\"2222\" data-col-size=\"sm\">\u062d\u062c\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/td>\n<td data-col-size=\"md\" data-start=\"2222\" data-end=\"2234\">2\u2033 - 12\u2033<\/td>\n<\/tr>\n<tr data-start=\"2235\" data-end=\"2266\">\n<td data-start=\"2235\" data-end=\"2252\" data-col-size=\"sm\">\u0646\u0637\u0627\u0642 \u0627\u0644\u0636\u063a\u0637<\/td>\n<td data-col-size=\"md\" data-start=\"2252\" data-end=\"2266\">0 - 10 \u0645\u064a\u062c\u0627 \u0628\u0627\u0633\u0643\u0627\u0644<\/td>\n<\/tr>\n<tr data-start=\"2267\" data-end=\"2289\">\n<td data-start=\"2267\" data-end=\"2279\" data-col-size=\"sm\">\u0627\u0644\u0642\u0648\u0629 \u0627\u0644\u0642\u0635\u0648\u0649<\/td>\n<td data-col-size=\"md\" data-start=\"2279\" data-end=\"2289\">100 \u0643\u064a\u0644\u0648 \u0646\u064a\u0648\u062a\u0646<\/td>\n<\/tr>\n<tr data-start=\"2290\" data-end=\"2342\">\n<td data-start=\"2290\" data-end=\"2310\" data-col-size=\"sm\">\u0646\u0637\u0627\u0642 \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2342\">\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 - 500 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 (\u0627\u062e\u062a\u064a\u0627\u0631\u064a)<\/td>\n<\/tr>\n<tr data-start=\"2343\" data-end=\"2377\">\n<td data-start=\"2343\" data-end=\"2358\" data-col-size=\"sm\">\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u062a\u0641\u0631\u064a\u063a<\/td>\n<td data-col-size=\"md\" data-start=\"2358\" data-end=\"2377\">\u2264 5 \u00d7 10 \u00d7 10 \u2076 \u062a\u0648\u0631<\/td>\n<\/tr>\n<tr data-start=\"2378\" data-end=\"2434\">\n<td data-start=\"2378\" data-end=\"2399\" data-col-size=\"sm\">\u062f\u0642\u0629 \u0627\u0644\u0645\u062d\u0627\u0630\u0627\u0629<\/td>\n<td data-col-size=\"md\" data-start=\"2399\" data-end=\"2434\">\u2264 \u00b1 2 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 (\u0639\u0644\u0627\u0645\u0629)\u060c \u2264 \u00b1 50 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631 (\u062d\u0627\u0641\u0629)<\/td>\n<\/tr>\n<tr data-start=\"2435\" data-end=\"2479\">\n<td data-start=\"2435\" data-end=\"2454\" data-col-size=\"sm\">\u0642\u0648\u0629 \u0627\u0644\u062a\u0631\u0627\u0628\u0637<\/td>\n<td data-col-size=\"md\" data-start=\"2454\" data-end=\"2479\">\u2265 2.0 \u062c\u0648\u0644\/\u0645\u00b2 (RT Si-Si)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h1 data-section-id=\"zfv5ao\" data-start=\"2486\" data-end=\"2526\"><span role=\"text\"><img decoding=\"async\" class=\"size-medium wp-image-2026 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration22-300x300.jpg\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration22-300x300.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration22-150x150.jpg 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration22-12x12.jpg 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration22-600x600.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration22-100x100.jpg 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/High-Precision-Wafer-Bonding-Equipment-for-Si-Si-SiC-SiC-Heterogeneous-Integration22.jpg 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0646\u0638\u0627\u0645 \u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u0630\u0643\u064a<\/span><\/h1>\n<ul data-start=\"2528\" data-end=\"2714\">\n<li data-section-id=\"14izt1u\" data-start=\"2528\" data-end=\"2564\">\u0634\u0627\u0634\u0629 \u0644\u0645\u0633 \u0635\u0646\u0627\u0639\u064a\u0629 \u0645\u0646 \u0627\u0644\u062f\u0631\u062c\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629 HMI<\/li>\n<li data-section-id=\"1uxdjyr\" data-start=\"2565\" data-end=\"2609\">\u064a\u062f\u0639\u0645 \u062a\u062e\u0632\u064a\u0646 \u0623\u0643\u062b\u0631 \u0645\u0646 50 \u0648\u0635\u0641\u0629 \u0639\u0645\u0644\u064a\u0629<\/li>\n<li data-section-id=\"1rxz05m\" data-start=\"2610\" data-end=\"2668\">\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u062d\u0644\u0642\u0629 \u0645\u063a\u0644\u0642\u0629 \u0644\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0636\u063a\u0637 \u0648\u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u062d\u0642\u064a\u0642\u064a<\/li>\n<li data-section-id=\"1ozy6m8\" data-start=\"2669\" data-end=\"2714\">\u0623\u062f\u0627\u0621 \u0639\u0645\u0644\u064a\u0629 \u0645\u0633\u062a\u0642\u0631 \u0648\u0642\u0627\u0628\u0644 \u0644\u0644\u062a\u0643\u0631\u0627\u0631<\/li>\n<\/ul>\n<h1 data-section-id=\"18ww9ca\" data-start=\"2721\" data-end=\"2755\"><span role=\"text\">\u0627\u0644\u0633\u0644\u0627\u0645\u0629 \u0648\u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629<\/span><\/h1>\n<ul data-start=\"2757\" data-end=\"2903\">\n<li data-section-id=\"10d2f0j\" data-start=\"2757\" data-end=\"2822\">\u062d\u0645\u0627\u064a\u0629 \u062b\u0644\u0627\u062b\u064a\u0629 \u0627\u0644\u062a\u0639\u0634\u064a\u0642 (\u0627\u0644\u0636\u063a\u0637 \/ \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \/ \u0627\u0644\u062a\u0641\u0631\u064a\u063a)<\/li>\n<li data-section-id=\"dhf3uk\" data-start=\"2823\" data-end=\"2848\">\u0646\u0638\u0627\u0645 \u0627\u0644\u062a\u0648\u0642\u0641 \u0641\u064a \u062d\u0627\u0644\u0627\u062a \u0627\u0644\u0637\u0648\u0627\u0631\u0626<\/li>\n<li data-section-id=\"whub1n\" data-start=\"2849\" data-end=\"2903\">\u0645\u0635\u0645\u0645\u0629 \u0644\u062a\u0648\u0627\u0641\u0642 \u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0645\u0646 \u0627\u0644\u0641\u0626\u0629 100<\/li>\n<\/ul>\n<h1 data-section-id=\"mn9rfz\" data-start=\"2910\" data-end=\"2945\"><span role=\"text\">\u0627\u0644\u062a\u0643\u0648\u064a\u0646\u0627\u062a \u0627\u0644\u0627\u062e\u062a\u064a\u0627\u0631\u064a\u0629<\/span><\/h1>\n<ul data-start=\"2947\" data-end=\"3105\">\n<li data-section-id=\"12zom6j\" data-start=\"2947\" data-end=\"2980\">\u0646\u0638\u0627\u0645 \u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0631\u0648\u0628\u0648\u062a\u064a\u0629<\/li>\n<li data-section-id=\"1cj0mfu\" data-start=\"2981\" data-end=\"3041\">\u0648\u0627\u062c\u0647\u0629 \u0627\u062a\u0635\u0627\u0644 SECS\/GEM (\u062c\u0627\u0647\u0632 \u0644\u0644\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0635\u0646\u0627\u0639\u064a)<\/li>\n<li data-section-id=\"p5iwlh\" data-start=\"3042\" data-end=\"3070\">\u0648\u062d\u062f\u0629 \u0627\u0644\u0641\u062d\u0635 \u0627\u0644\u0645\u0636\u0645\u0646\u0629<\/li>\n<li data-section-id=\"16mmjf1\" data-start=\"3071\" data-end=\"3105\">\u0648\u062d\u062f\u0629 \u062a\u0646\u0634\u064a\u0637 \u0633\u0637\u062d \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n<\/ul>\n<h1 data-section-id=\"18cso9d\" data-start=\"3112\" data-end=\"3144\"><span role=\"text\">\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629<\/span><\/h1>\n<h3 data-section-id=\"jeqpgw\" data-start=\"3146\" data-end=\"3171\"><span role=\"text\">1. \u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 MEMS<\/span><\/h3>\n<p data-start=\"3172\" data-end=\"3240\">\u062e\u062a\u0645 \u0645\u062d\u0643\u0645 \u0627\u0644\u0625\u063a\u0644\u0627\u0642 \u0644\u0644\u0645\u0633\u062a\u0634\u0639\u0631\u0627\u062a \u0645\u062b\u0644 \u0645\u0642\u0627\u064a\u064a\u0633 \u0627\u0644\u062a\u0633\u0627\u0631\u0639 \u0648\u0627\u0644\u062c\u064a\u0631\u0648\u0633\u0643\u0648\u0628\u0627\u062a<\/p>\n<h3 data-section-id=\"1hvce9l\" data-start=\"3242\" data-end=\"3270\"><span role=\"text\">2. \u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u062f\u0648\u0627\u0626\u0631 \u0627\u0644\u0645\u062a\u0643\u0627\u0645\u0644\u0629 \u062b\u0644\u0627\u062b\u064a\u0629 \u0627\u0644\u0623\u0628\u0639\u0627\u062f<\/span><\/h3>\n<p data-start=\"3271\" data-end=\"3318\">\u062a\u0643\u062f\u064a\u0633 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0645\u0646 \u0623\u062c\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u0641\u062a\u062d\u0627\u062a \u0627\u0644\u062a\u0641\u0627\u0636\u0644\u064a\u0629 \u0627\u0644\u0645\u0624\u0642\u062a\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645<\/p>\n<h3 data-section-id=\"r6vanu\" data-start=\"3320\" data-end=\"3361\"><span role=\"text\">3. \u0623\u062c\u0647\u0632\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u0631\u0643\u0628\u0629<\/span><\/h3>\n<p data-start=\"3362\" data-end=\"3413\">\u0631\u0628\u0637 \u0623\u062c\u0647\u0632\u0629 \u0637\u0627\u0642\u0629 GaN \/ SiC \u0648\u0646\u0642\u0644 \u0627\u0644\u0637\u0628\u0642\u0627\u062a<\/p>\n<h3 data-section-id=\"ssea6s\" data-start=\"3415\" data-end=\"3450\"><span role=\"text\">4. \u0645\u0633\u062a\u0634\u0639\u0631\u0627\u062a \u0627\u0644\u0635\u0648\u0631 CMOS (CIS)<\/span><\/h3>\n<p data-start=\"3451\" data-end=\"3514\">\u0627\u0644\u0631\u0628\u0637 \u0628\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0645\u0646\u062e\u0641\u0636\u0629 \u0644\u0631\u0642\u0627\u0626\u0642 CMOS \u0648\u0627\u0644\u0631\u0643\u0627\u0626\u0632 \u0627\u0644\u0636\u0648\u0626\u064a\u0629<\/p>\n<h3 data-section-id=\"1y9q4j3\" data-start=\"3516\" data-end=\"3551\"><span role=\"text\">5. \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u062d\u064a\u0648\u064a\u0629 \u0648\u0627\u0644\u0645\u0648\u0627\u0626\u0639 \u0627\u0644\u062f\u0642\u064a\u0642\u0629<\/span><\/h3>\n<p data-start=\"3552\" data-end=\"3594\">\u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0627\u0644\u0645\u0648\u062b\u0648\u0642 \u0644\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0645\u0639\u0645\u0644\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/p>\n<h1 data-section-id=\"3cguag\" data-start=\"3601\" data-end=\"3628\"><span role=\"text\">\u0645\u062b\u0627\u0644 \u0639\u0644\u0649 \u0627\u0644\u0639\u0645\u0644\u064a\u0629<\/span><\/h1>\n<p data-start=\"3630\" data-end=\"3681\">\u062a\u0631\u0627\u0628\u0637 \u0631\u0642\u0627\u0642\u0627\u062a LiNbO\u2083 - SiC (\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629)<\/p>\n<ul data-start=\"3682\" data-end=\"3843\">\n<li data-section-id=\"1o8nths\" data-start=\"3682\" data-end=\"3731\">\u064a\u062d\u0642\u0642 \u0648\u0627\u062c\u0647\u0629 \u062a\u0631\u0627\u0628\u0637 \u0642\u0648\u064a\u0629 \u0648\u0645\u0648\u062d\u062f\u0629<\/li>\n<li data-section-id=\"1xut4n0\" data-start=\"3732\" data-end=\"3779\">\u062a\u0645 \u0627\u0644\u062a\u062d\u0642\u0642 \u0645\u0646 \u0630\u0644\u0643 \u0639\u0646 \u0637\u0631\u064a\u0642 \u0627\u0644\u062a\u0635\u0648\u064a\u0631 \u0627\u0644\u0645\u0642\u0637\u0639\u064a \u0627\u0644\u0645\u0642\u0637\u0639\u064a TEM<\/li>\n<li data-section-id=\"8apvvl\" data-start=\"3780\" data-end=\"3843\">\u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062a\u0631\u062f\u062f \u0648\u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0636\u0648\u0626\u064a\u0629<\/li>\n<\/ul>\n<h1 data-section-id=\"ou04n2\" data-start=\"3850\" data-end=\"3865\"><span role=\"text\">\u0633\u0624\u0627\u0644 \u0648\u062c\u0648\u0627\u0628<\/span><\/h1>\n<h3 data-section-id=\"1fr6ndv\" data-start=\"3867\" data-end=\"3950\"><span role=\"text\">\u06331: \u0644\u0645\u0627\u0630\u0627 \u062a\u062e\u062a\u0627\u0631 \u0631\u0628\u0637 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 \u0628\u062f\u0644\u0627\u064b \u0645\u0646 \u0627\u0644\u0631\u0628\u0637 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u061f<\/span><\/h3>\n<p data-start=\"3951\" data-end=\"4102\">\u064a\u062a\u0641\u0627\u062f\u0649 \u0627\u0644\u0631\u0628\u0637 \u0641\u064a \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u063a\u0631\u0641\u0629 \u0639\u062f\u0645 \u0627\u0644\u062a\u0637\u0627\u0628\u0642 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0648\u0627\u0644\u0625\u062c\u0647\u0627\u062f\u060c \u0645\u0645\u0627 \u064a\u062c\u0639\u0644\u0647 \u0645\u062b\u0627\u0644\u064a\u064b\u0627 \u0644\u0644\u0645\u0648\u0627\u062f \u063a\u064a\u0631 \u0627\u0644\u0645\u062a\u062c\u0627\u0646\u0633\u0629 \u0648\u064a\u062d\u0633\u0646 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0641\u064a \u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645.<\/p>\n<h3 data-section-id=\"xty3bz\" data-start=\"4104\" data-end=\"4147\"><span role=\"text\">\u06332: \u0645\u0627 \u0647\u064a \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062a\u064a \u064a\u0645\u0643\u0646 \u0631\u0628\u0637\u0647\u0627\u061f<\/span><\/h3>\n<p data-start=\"4148\" data-end=\"4206\">\u064a\u062f\u0639\u0645 \u0627\u0644\u0646\u0638\u0627\u0645 \u0645\u062c\u0645\u0648\u0639\u0629 \u0648\u0627\u0633\u0639\u0629 \u0645\u0646 \u0627\u0644\u0645\u0648\u0627\u062f \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643:<\/p>\n<ul data-start=\"4207\" data-end=\"4283\">\n<li data-section-id=\"xp1h29\" data-start=\"4207\" data-end=\"4239\">\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a: Si\u060c SiC\u060c GaN\u060c SiC\u060c GaN<\/li>\n<li data-section-id=\"19cjnz4\" data-start=\"4240\" data-end=\"4264\">\u0627\u0644\u0623\u0643\u0627\u0633\u064a\u062f: SiO\u2082\u060c LiNbO\u2083<\/li>\n<li data-section-id=\"1el5xj2\" data-start=\"4265\" data-end=\"4283\">\u0627\u0644\u0645\u0639\u0627\u062f\u0646: \u0627\u0644\u0646\u062d\u0627\u0633\u060c \u0627\u0644\u0630\u0647\u0628 \u0648\u0627\u0644\u0641\u0644\u0632\u0627\u062a<\/li>\n<\/ul>\n<h1 data-section-id=\"ge900y\" data-start=\"4290\" data-end=\"4330\"><span role=\"text\">\u0644\u0645\u0627\u0630\u0627 \u062a\u062e\u062a\u0627\u0631 \u0647\u0630\u0627 \u0627\u0644\u0646\u0638\u0627\u0645<\/span><\/h1>\n<ul data-start=\"4332\" data-end=\"4607\">\n<li data-section-id=\"kavyah\" data-start=\"4332\" data-end=\"4392\">\u0623\u062f\u0627\u0621 \u0645\u062b\u0628\u062a \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0645\u0646 SiC<\/li>\n<li data-section-id=\"1sbvzor\" data-start=\"4393\" data-end=\"4463\">\u0627\u0644\u062a\u062d\u0642\u0642 \u0645\u0646 \u0642\u0648\u0629 \u0627\u0644\u062a\u0631\u0627\u0628\u0637 \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u0627\u062e\u062a\u0628\u0627\u0631\u0627\u062a \u0627\u0644\u0645\u0639\u0645\u0644\u064a\u0629 \u0648\u062a\u062d\u0644\u064a\u0644 TEM<\/li>\n<li data-section-id=\"1qqgx94\" data-start=\"4464\" data-end=\"4529\">\u0645\u0635\u0645\u0645\u0629 \u0644\u0645\u0639\u0627\u0647\u062f \u0627\u0644\u0623\u0628\u062d\u0627\u062b \u0648\u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0635\u0646\u0627\u0639\u064a \u0639\u0644\u0649 \u062d\u062f \u0633\u0648\u0627\u0621<\/li>\n<li data-section-id=\"13zv0if\" data-start=\"4530\" data-end=\"4607\">\u0628\u0646\u064a\u0629 \u0645\u0639\u064a\u0627\u0631\u064a\u0629 \u062a\u0636\u0645\u0646 \u0642\u0627\u0628\u0644\u064a\u0629 \u0627\u0644\u062a\u0648\u0633\u0639 \u0648\u0627\u0644\u062a\u0631\u0642\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0645\u062f\u0649 \u0627\u0644\u0637\u0648\u064a\u0644<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>\u0625\u0646 \u0645\u0639\u062f\u0627\u062a \u0631\u0628\u0637 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0639\u0628\u0627\u0631\u0629 \u0639\u0646 \u0646\u0638\u0627\u0645 \u0639\u0627\u0644\u064a \u0627\u0644\u0623\u062f\u0627\u0621 \u062a\u0645 \u062a\u0635\u0645\u064a\u0645\u0647 \u0644\u062a\u063a\u0644\u064a\u0641 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629\u060c \u0648\u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0623\u0628\u0639\u0627\u062f\u060c \u0648\u062a\u0643\u0627\u0645\u0644 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0645\u0646 \u0627\u0644\u062c\u064a\u0644 \u0627\u0644\u062b\u0627\u0644\u062b.<\/p>","protected":false},"featured_media":2024,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[23],"product_tag":[599,601,610,604,596,608,593,606,600,597,592,605,598,609,594,603,595,602,607,591],"class_list":{"0":"post-2021","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-bonding-machine","7":"product_tag-2-12-inch-wafer-bonding","8":"product_tag-3d-ic-integration","9":"product_tag-advanced-wafer-bonding-technology","10":"product_tag-gan-wafer-bonding","11":"product_tag-heterogeneous-wafer-bonding","12":"product_tag-high-precision-alignment-wafer-bonding","13":"product_tag-hydrophilic-bonding","14":"product_tag-linbo3-bonding","15":"product_tag-mems-wafer-bonding","16":"product_tag-plasma-activated-bonding","17":"product_tag-room-temperature-wafer-bonding","18":"product_tag-sapphire-wafer-bonding","19":"product_tag-semiconductor-bonding-system","20":"product_tag-semiconductor-packaging-equipment","21":"product_tag-si-si-bonding","22":"product_tag-sic-power-devices","23":"product_tag-sic-sic-bonding","24":"product_tag-tsv-bonding","25":"product_tag-ultra-high-vacuum-bonding","26":"product_tag-wafer-bonding-equipment","27":"desktop-align-left","28":"tablet-align-left","29":"mobile-align-left","30":"ast-product-gallery-layout-horizontal-slider","31":"ast-product-tabs-layout-horizontal","33":"first","34":"instock","35":"shipping-taxable","36":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product\/2021","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/comments?post=2021"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product\/2021\/revisions"}],"predecessor-version":[{"id":2029,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product\/2021\/revisions\/2029"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/media\/2024"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/media?parent=2021"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product_brand?post=2021"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product_cat?post=2021"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ar\/wp-json\/wp\/v2\/product_tag?post=2021"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}