{"id":1968,"date":"2026-03-23T06:01:20","date_gmt":"2026-03-23T06:01:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=1968"},"modified":"2026-03-23T06:03:52","modified_gmt":"2026-03-23T06:03:52","slug":"lpcvd-oxidation-furnace","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ar\/product\/lpcvd-oxidation-furnace\/","title":{"rendered":"6\/8\/12 \u0628\u0648\u0635\u0629 \u0641\u0631\u0646 \u0627\u0644\u0623\u0643\u0633\u062f\u0629 LPCVD 6\/8\/12 \u0628\u0648\u0635\u0629 \u0641\u0631\u0646 \u0627\u0644\u0623\u0643\u0633\u062f\u0629 LPCVD \u0639\u0627\u0644\u064a \u0627\u0644\u0627\u0646\u062a\u0638\u0627\u0645 \u0644\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0631\u0642\u064a\u0642 \u0644\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629"},"content":{"rendered":"

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\"\"<\/p>\n

\n

\u0627\u0644\u0645\u0632\u0627\u064a\u0627 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629<\/strong><\/span><\/h2>\n
    \n
  • \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062a\u0648\u062d\u064a\u062f:<\/strong> \u062a\u0636\u0645\u0646 \u0627\u0644\u0628\u064a\u0626\u0629 \u0645\u0646\u062e\u0641\u0636\u0629 \u0627\u0644\u0636\u063a\u0637 (0.1-10 \u062a\u0648\u0631) \u0627\u062a\u0633\u0627\u0642 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0625\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0648\u062f\u0627\u062e\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0628\u0645\u0642\u062f\u0627\u0631 \u00b1 1.51 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a 3 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a\u060c \u0648\u0647\u0648 \u0623\u0645\u0631 \u0628\u0627\u0644\u063a \u0627\u0644\u0623\u0647\u0645\u064a\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0623\u062f\u0627\u0621.<\/li>\n
  • \u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0645\u0641\u0627\u0639\u0644 \u0627\u0644\u0639\u0645\u0648\u062f\u064a:<\/strong> \u064a\u0639\u0627\u0644\u062c 150-200 \u0631\u0642\u0627\u0642\u0629 \u0641\u064a \u0643\u0644 \u062f\u0641\u0639\u0629\u060c \u0645\u0645\u0627 \u064a\u062d\u0633\u0646 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0648\u0643\u0641\u0627\u0621\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c \u0644\u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0635\u0646\u0627\u0639\u064a.<\/li>\n
  • \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u062d\u0631\u0627\u0631\u064a (500-900 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629):<\/strong> \u064a\u0648\u0641\u0631 \u062a\u0631\u0633\u064a\u0628\u064b\u0627 \u0644\u0637\u064a\u0641\u064b\u0627 \u0648\u062e\u0627\u0644\u064a\u064b\u0627 \u0645\u0646 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0644\u062d\u0645\u0627\u064a\u0629 \u0627\u0644\u0631\u0643\u0627\u0626\u0632 \u0627\u0644\u062d\u0633\u0627\u0633\u0629 \u0648\u0627\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u062c\u0648\u062f\u0629 \u063a\u0634\u0627\u0621 \u0639\u0627\u0644\u064a \u0627\u0644\u062c\u0648\u062f\u0629.<\/li>\n
  • \u062a\u062d\u0643\u0651\u0645 \u0630\u0643\u064a \u0641\u064a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629:<\/strong> \u0645\u0631\u0627\u0642\u0628\u0629 \u0648\u0636\u0628\u0637 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u062d\u0642\u064a\u0642\u064a \u0628\u062f\u0642\u0629 \u00b11 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 \u0644\u0644\u062d\u0635\u0648\u0644 \u0639\u0644\u0649 \u0646\u062a\u0627\u0626\u062c \u0645\u0633\u062a\u0642\u0631\u0629 \u0648\u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u062a\u0643\u0631\u0627\u0631.<\/li>\n
  • \u063a\u0631\u0641\u0629 \u0645\u0639\u0627\u0644\u062c\u0629 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629:<\/strong> \u064a\u0642\u0644\u0644 \u0645\u0646 \u062a\u0644\u0648\u062b \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a\u060c \u0648\u064a\u062f\u0639\u0645 SiC \u0648\u0645\u0648\u0627\u062f \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0627\u0644\u0623\u062e\u0631\u0649.<\/li>\n
  • \u062a\u0647\u064a\u0626\u0629 \u0642\u0627\u0628\u0644\u0629 \u0644\u0644\u062a\u062e\u0635\u064a\u0635:<\/strong> \u062a\u0635\u0645\u064a\u0645 \u0645\u0631\u0646 \u064a\u0633\u062a\u0648\u0639\u0628 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629\u060c \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643 \u0627\u0644\u0623\u0643\u0633\u062f\u0629 \u0627\u0644\u062c\u0627\u0641\u0629 \u0623\u0648 \u0627\u0644\u0631\u0637\u0628\u0629 \u0648\u0623\u062d\u062c\u0627\u0645 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0645\u062e\u062a\u0644\u0641\u0629.<\/li>\n<\/ul>\n

    \u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a \u0627\u0644\u0641\u0646\u064a\u0629<\/strong><\/span><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n
    \u0627\u0644\u0645\u064a\u0632\u0629<\/th>\n\u0627\u0644\u0645\u0648\u0627\u0635\u0641\u0627\u062a<\/th>\n<\/tr>\n<\/thead>\n
    \u062d\u062c\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0629<\/td>\n6\/8\/12 \u0628\u0648\u0635\u0629<\/td>\n<\/tr>\n
    \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062a\u0648\u0627\u0641\u0642\u0629<\/td>\n\u0628\u0648\u0644\u064a \u0633\u064a\u0644\u064a\u0643\u0648\u0646\u060c \u0646\u064a\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\u060c \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646<\/td>\n<\/tr>\n
    \u0646\u0648\u0639 \u0627\u0644\u0623\u0643\u0633\u062f\u0629<\/td>\n\u0627\u0644\u0623\u0643\u0633\u062c\u064a\u0646 \u0627\u0644\u062c\u0627\u0641\/\u0627\u0644\u0623\u0643\u0633\u062c\u064a\u0646 \u0627\u0644\u0631\u0637\u0628 (DCE\u060c HCL)<\/td>\n<\/tr>\n
    \u0646\u0637\u0627\u0642 \u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u0639\u0645\u0644\u064a\u0629<\/td>\n500 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629 - 900 \u062f\u0631\u062c\u0629 \u0645\u0626\u0648\u064a\u0629<\/td>\n<\/tr>\n
    \u0645\u0646\u0637\u0642\u0629 \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0627\u0644\u062b\u0627\u0628\u062a\u0629<\/td>\n\u2265800 \u0645\u0645<\/td>\n<\/tr>\n
    \u062f\u0642\u0629 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629<\/td>\n\u00b11\u00b0C<\/td>\n<\/tr>\n
    \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a<\/td>\n0.32 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631)\u060c 0.32 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631)\u060c 0.226 \u0645\u064a\u0643\u0631\u0648\u0645\u062a\u0631)<\/td>\n<\/tr>\n
    \u0633\u064f\u0645\u0643 \u0627\u0644\u0641\u064a\u0644\u0645<\/td>\nNIT1500 \u00b1 50 \u00c5<\/td>\n<\/tr>\n
    \u0627\u0644\u062a\u0648\u062d\u064a\u062f<\/td>\n\u062f\u0627\u062e\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 <2.5%\u060c \u0648\u0645\u0646 \u0631\u0642\u0627\u0642\u0629 \u0625\u0644\u0649 \u0631\u0642\u0627\u0642\u0629 <2.5%\u060c \u0648\u0645\u0646 \u062f\u0641\u0639\u0629 \u0625\u0644\u0649 \u062f\u0641\u0639\u0629 <2%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    \u0645\u064a\u0632\u0627\u062a \u0627\u0644\u0645\u0646\u062a\u062c<\/strong><\/span><\/h2>\n
      \n
    • \u062a\u0636\u0645\u0646 \u0627\u0644\u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0622\u0644\u064a\u0629 \u0644\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0633\u0644\u0627\u0645\u0629 \u0639\u0627\u0644\u064a\u0629 \u0648\u0643\u0641\u0627\u0621\u0629 \u062a\u0634\u063a\u064a\u0644\u064a\u0629 \u0639\u0627\u0644\u064a\u0629.<\/li>\n
    • \u062d\u062c\u0631\u0629 \u0645\u0639\u0627\u0644\u062c\u0629 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 \u062a\u0642\u0644\u0644 \u0645\u0646 \u0645\u062e\u0627\u0637\u0631 \u0627\u0644\u062a\u0644\u0648\u062b \u0648\u062a\u062d\u0627\u0641\u0638 \u0639\u0644\u0649 \u062c\u0648\u062f\u0629 \u063a\u0634\u0627\u0621 \u0645\u062a\u0646\u0627\u0633\u0642\u0629.<\/li>\n
    • \u064a\u062f\u0639\u0645 \u0627\u0644\u062a\u0646\u0627\u0633\u0642 \u0627\u0644\u0641\u0627\u0626\u0642 \u0644\u0633\u064f\u0645\u0643 \u0627\u0644\u063a\u0634\u0627\u0621 \u0627\u0644\u063a\u0634\u0627\u0626\u064a \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0639\u0642\u062f\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/li>\n
    • \u064a\u062a\u064a\u062d \u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u0630\u0643\u064a \u0641\u064a \u062f\u0631\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u0629 \u0648\u0627\u0644\u0636\u063a\u0637 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u062d\u0642\u064a\u0642\u064a \u0625\u062c\u0631\u0627\u0621 \u062a\u0639\u062f\u064a\u0644\u0627\u062a \u062f\u0642\u064a\u0642\u0629 \u0639\u0644\u0649 \u0627\u0644\u0639\u0645\u0644\u064a\u0629.<\/li>\n
    • \u064a\u0642\u0644\u0644 \u062f\u0639\u0645 \u0631\u0642\u0627\u0642\u0629 SiC \u0645\u0646 \u0627\u0644\u0627\u062d\u062a\u0643\u0627\u0643 \u0648\u062a\u0648\u0644\u064a\u062f \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a\u060c \u0645\u0645\u0627 \u064a\u0637\u064a\u0644 \u0645\u0646 \u0639\u0645\u0631 \u0627\u0644\u0631\u0642\u0627\u0642\u0629.<\/li>\n
    • \u064a\u062a\u064a\u062d \u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0627\u0644\u0645\u0639\u064a\u0627\u0631\u064a \u0625\u0645\u0643\u0627\u0646\u064a\u0629 \u0627\u0644\u062a\u062e\u0635\u064a\u0635 \u0644\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0645\u062a\u0646\u0648\u0639\u0629 \u0648\u0627\u062d\u062a\u064a\u0627\u062c\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629.<\/li>\n<\/ul>\n

      \u0645\u0628\u062f\u0623 \u0639\u0645\u0644\u064a\u0629 \u0627\u0644\u0625\u064a\u062f\u0627\u0639\"\"<\/strong><\/span><\/h2>\n
        \n
      1. \u0645\u0642\u062f\u0645\u0629 \u0627\u0644\u063a\u0627\u0632:<\/strong> \u064a\u062a\u0645 \u0625\u062f\u062e\u0627\u0644 \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u0627\u0644\u0645\u062a\u0641\u0627\u0639\u0644\u0629 \u0641\u064a \u0627\u0644\u0623\u0646\u0628\u0648\u0628 \u062a\u062d\u062a \u0638\u0631\u0648\u0641 \u0636\u063a\u0637 \u0645\u0646\u062e\u0641\u0636 (0.25-1 \u062a\u0648\u0631).<\/li>\n
      2. \u0627\u0644\u0627\u0646\u062a\u0634\u0627\u0631 \u0627\u0644\u0633\u0637\u062d\u064a:<\/strong> \u062a\u0646\u062a\u0634\u0631 \u0627\u0644\u062c\u0632\u064a\u0626\u0627\u062a \u0628\u062d\u0631\u064a\u0629 \u0639\u0628\u0631 \u0633\u0637\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0629\u060c \u0645\u0645\u0627 \u064a\u0636\u0645\u0646 \u062a\u063a\u0637\u064a\u0629 \u0645\u0648\u062d\u062f\u0629.<\/li>\n
      3. \u0627\u0644\u0627\u0645\u062a\u0632\u0627\u0632:<\/strong> \u062a\u0644\u062a\u0635\u0642 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062a\u0641\u0627\u0639\u0644\u0629 \u0628\u0633\u0637\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0642\u0628\u0644 \u0627\u0644\u062a\u0641\u0627\u0639\u0644 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a.<\/li>\n
      4. \u0627\u0644\u062a\u0641\u0627\u0639\u0644 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a:<\/strong> \u064a\u0634\u0643\u0644 \u0627\u0644\u062a\u062d\u0644\u0644 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629 \u0627\u0644\u0645\u0631\u063a\u0648\u0628\u0629 \u0645\u0628\u0627\u0634\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u0631\u0643\u064a\u0632\u0629.<\/li>\n
      5. \u0625\u0632\u0627\u0644\u0629 \u0627\u0644\u0645\u0646\u062a\u062c\u0627\u062a \u0627\u0644\u062b\u0627\u0646\u0648\u064a\u0629:<\/strong> \u064a\u062a\u0645 \u062a\u0641\u0631\u064a\u063a \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u063a\u064a\u0631 \u0627\u0644\u0645\u062a\u0641\u0627\u0639\u0644\u0629 \u0644\u0644\u062d\u0641\u0627\u0638 \u0639\u0644\u0649 \u0627\u0644\u0646\u0642\u0627\u0621 \u0648\u0645\u0646\u0639 \u0627\u0644\u062a\u062f\u0627\u062e\u0644.<\/li>\n
      6. \u062a\u0634\u0643\u064a\u0644 \u0627\u0644\u0641\u064a\u0644\u0645:<\/strong> \u062a\u062a\u0631\u0627\u0643\u0645 \u0646\u0648\u0627\u062a\u062c \u0627\u0644\u062a\u0641\u0627\u0639\u0644 \u062a\u062f\u0631\u064a\u062c\u064a\u064b\u0627\u060c \u0645\u0643\u0648\u0646\u0629 \u0637\u0628\u0642\u0629 \u0631\u0642\u064a\u0642\u0629 \u0645\u0648\u062d\u062f\u0629 \u0648\u0645\u0633\u062a\u0642\u0631\u0629 \u0645\u0646 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629.<\/li>\n<\/ol>\n

        \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a<\/strong><\/span><\/h2>\n
          \n
        • \u0637\u0628\u0642\u0629 \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u062a\u062f\u0631\u064a\u0639:<\/strong> \u064a\u062d\u0645\u064a \u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0645\u0646 \u0627\u0644\u062a\u0644\u0648\u062b \u0648\u064a\u0642\u0644\u0644 \u0645\u0646 \u062a\u0648\u062c\u064a\u0647 \u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a \u0623\u062b\u0646\u0627\u0621 \u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u062a\u0637\u0639\u064a\u0645.<\/li>\n<\/ul>\n

          \"\"<\/p>\n

            \n
          • \u0637\u0628\u0642\u0629 \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0648\u0633\u0627\u062f\u0629:<\/strong> \u064a\u0639\u0645\u0644 \u0643\u0639\u0627\u0632\u0644 \u0644\u0644\u0625\u062c\u0647\u0627\u062f \u0628\u064a\u0646 \u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\u060c \u0645\u0645\u0627 \u064a\u0645\u0646\u0639 \u062a\u0634\u0642\u0642 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0648\u064a\u062d\u0633\u0646 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629.<\/li>\n<\/ul>\n

            \"\"<\/p>\n

              \n
            • \u0637\u0628\u0642\u0629 \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0628\u0648\u0627\u0628\u0629:<\/strong> \u064a\u0648\u0641\u0631 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0639\u0627\u0632\u0644\u0629 \u0641\u064a \u0647\u064a\u0627\u0643\u0644 MOS\u060c \u0645\u0645\u0627 \u064a\u0636\u0645\u0646 \u062f\u0642\u0629 \u062a\u0648\u0635\u064a\u0644 \u0627\u0644\u062a\u064a\u0627\u0631 \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062a\u0623\u062b\u064a\u0631 \u0627\u0644\u0645\u064a\u062f\u0627\u0646\u064a.<\/li>\n<\/ul>\n

              \"\"<\/p>\n

              \u062a\u0643\u0648\u064a\u0646\u0627\u062a \u0627\u0644\u0646\u0638\u0627\u0645<\/strong><\/span><\/h2>\n
                \n
              • \u0627\u0644\u062a\u0641\u062d\u064a\u0645 \u0627\u0644\u0639\u0645\u0648\u062f\u064a LPCVD:<\/strong> \u062a\u062a\u062f\u0641\u0642 \u063a\u0627\u0632\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0645\u0646 \u0627\u0644\u0623\u0639\u0644\u0649 \u0625\u0644\u0649 \u0627\u0644\u0623\u0633\u0641\u0644\u060c \u0645\u0645\u0627 \u064a\u062d\u0642\u0642 \u062a\u0631\u0633\u064a\u0628\u064b\u0627 \u0645\u0648\u062d\u062f\u064b\u0627 \u0639\u0644\u0649 \u062c\u0645\u064a\u0639 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0641\u064a \u0627\u0644\u062f\u0641\u0639\u0629 \u0627\u0644\u0648\u0627\u062d\u062f\u0629.<\/li>\n<\/ul>\n

                \"\"<\/p>\n

                  \n
                • \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0643\u0647\u0631\u0648\u0636\u0648\u0626\u064a \u0627\u0644\u0645\u0646\u062e\u0641\u0636 \u0627\u0644\u0643\u062b\u0627\u0641\u0629 \u0623\u0641\u0642\u064a\u0627\u064b:<\/strong> \u062a\u062a\u062f\u0641\u0642 \u0627\u0644\u063a\u0627\u0632\u0627\u062a \u0639\u0644\u0649 \u0637\u0648\u0644 \u0637\u0648\u0644 \u0627\u0644\u0631\u0643\u0627\u0626\u0632\u060c \u0648\u0647\u064a \u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0645\u0633\u062a\u0645\u0631 \u0648\u0627\u0644\u0643\u0628\u064a\u0631 \u0627\u0644\u062d\u062c\u0645\u060c \u0639\u0644\u0649 \u0627\u0644\u0631\u063a\u0645 \u0645\u0646 \u0623\u0646 \u0633\u0645\u0643 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0642\u062f \u064a\u062e\u062a\u0644\u0641 \u0642\u0644\u064a\u0644\u0627\u064b \u0628\u0627\u0644\u0642\u0631\u0628 \u0645\u0646 \u062c\u0627\u0646\u0628 \u0627\u0644\u0645\u062f\u062e\u0644.<\/li>\n<\/ul>\n

                  \"\"<\/p>\n

                  \u0627\u0644\u0623\u0633\u0626\u0644\u0629 \u0627\u0644\u0634\u0627\u0626\u0639\u0629<\/strong><\/span><\/h2>\n

                  \u06331: \u0641\u064a\u0645\u064e \u064a\u064f\u0633\u062a\u062e\u062f\u0645 LPCVD \u0641\u064a \u0627\u0644\u0645\u0642\u0627\u0645 \u0627\u0644\u0623\u0648\u0644\u061f<\/strong>
                  \u062c: \u0625\u0646 LPCVD \u0639\u0628\u0627\u0631\u0629 \u0639\u0646 \u0639\u0645\u0644\u064a\u0629 \u062a\u0631\u0633\u064a\u0628 \u063a\u0634\u0627\u0621 \u0631\u0642\u064a\u0642 \u0645\u0646\u062e\u0641\u0636 \u0627\u0644\u0636\u063a\u0637 \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u0648\u0644\u064a \u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646\u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u062a\u0631\u0633\u064a\u0628 \u0623\u063a\u0634\u064a\u0629 \u0645\u0648\u062d\u062f\u0629 \u0648\u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062c\u0648\u062f\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/p>\n

                  \u06332: \u0643\u064a\u0641 \u064a\u062e\u062a\u0644\u0641 \u062a\u0642\u0646\u064a\u0629 LPCVD \u0639\u0646 \u062a\u0642\u0646\u064a\u0629 PECVD\u061f<\/strong>
                  \u062c: \u064a\u0639\u062a\u0645\u062f LPCVD \u0639\u0644\u0649 \u0627\u0644\u062a\u0646\u0634\u064a\u0637 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u062a\u062d\u062a \u0636\u063a\u0637 \u0645\u0646\u062e\u0641\u0636 \u0644\u0625\u0646\u062a\u0627\u062c \u0623\u0641\u0644\u0627\u0645 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0646\u0642\u0627\u0621\u060c \u0628\u064a\u0646\u0645\u0627 \u064a\u0633\u062a\u062e\u062f\u0645 PECVD \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0641\u064a \u062f\u0631\u062c\u0627\u062a \u062d\u0631\u0627\u0631\u0629 \u0645\u0646\u062e\u0641\u0636\u0629 \u0644\u062a\u0631\u0633\u064a\u0628 \u0623\u0633\u0631\u0639\u060c \u0648\u063a\u0627\u0644\u0628\u064b\u0627 \u0645\u0627 \u064a\u0643\u0648\u0646 \u0630\u0644\u0643 \u0628\u062c\u0648\u062f\u0629 \u0623\u0641\u0644\u0627\u0645 \u0623\u0642\u0644 \u0642\u0644\u064a\u0644\u0627\u064b.<\/p>\n

                  \u06333: \u0645\u0627 \u0647\u064a \u0623\u062d\u062c\u0627\u0645 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0648\u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062a\u0648\u0627\u0641\u0642\u0629 \u0645\u0639 \u0641\u0631\u0646 \u0627\u0644\u0623\u0643\u0633\u062f\u0629 \u0628\u062a\u0642\u0646\u064a\u0629 LPCVD\u061f<\/strong>
                  \u062c: \u064a\u062f\u0639\u0645 \u0647\u0630\u0627 \u0627\u0644\u0641\u0631\u0646 \u0631\u0642\u0627\u0642\u0627\u062a 6 \u0628\u0648\u0635\u0629 \u06488 \u0628\u0648\u0635\u0629 \u064812 \u0628\u0648\u0635\u0629 \u0648\u0647\u0648 \u0645\u062a\u0648\u0627\u0641\u0642 \u0645\u0639 \u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0628\u0648\u0644\u064a \u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0646\u062a\u0631\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0648\u0631\u0642\u0627\u0642\u0627\u062a SiC\u060c \u0645\u0645\u0627 \u064a\u0648\u0641\u0631 \u0645\u0631\u0648\u0646\u0629 \u0644\u0645\u062e\u062a\u0644\u0641 \u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n

                  \u06334: \u0647\u0644 \u064a\u0645\u0643\u0646 \u062a\u062e\u0635\u064a\u0635 \u0641\u0631\u0646 \u0627\u0644\u0623\u0643\u0633\u062f\u0629 \u0628\u062a\u0642\u0646\u064a\u0629 LPCVD \u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0645\u062d\u062f\u062f\u0629\u061f<\/strong>
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\u0627\u0644\u062f\u0642\u0629.<\/p>","protected":false},"featured_media":1969,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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