{"id":2457,"date":"2026-05-11T05:12:17","date_gmt":"2026-05-11T05:12:17","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2457"},"modified":"2026-05-11T05:12:34","modified_gmt":"2026-05-11T05:12:34","slug":"semiconductor-manufacturing-equipment-ecosystem-and-advanced-fab-layout-architecture","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ar\/semiconductor-manufacturing-equipment-ecosystem-and-advanced-fab-layout-architecture\/","title":{"rendered":"\u0627\u0644\u0646\u0638\u0627\u0645 \u0627\u0644\u0625\u064a\u0643\u0648\u0644\u0648\u062c\u064a \u0644\u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0648\u0628\u0646\u064a\u0629 \u062a\u062e\u0637\u064a\u0637 \u0627\u0644\u0645\u0635\u0646\u0639 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629"},"content":{"rendered":"<p><a href=\"https:\/\/www.zmsh-semitech.com\/ar\/products\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">\u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/mark><\/a> \u064a\u064f\u0646\u0638\u0631 \u0625\u0644\u064a\u0647\u0627 \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0639\u0644\u0649 \u0623\u0646\u0647\u0627 \u201c\u0627\u0644\u0622\u0644\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629 \u0627\u0644\u0623\u0645\u201d \u0644\u0635\u0646\u0627\u0639\u0629 \u0627\u0644\u062f\u0648\u0627\u0626\u0631 \u0627\u0644\u0645\u062a\u0643\u0627\u0645\u0644\u0629 (IC)\u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u0627\u0644\u062a\u062d\u0648\u064a\u0644 \u0627\u0644\u0643\u0627\u0645\u0644 \u0645\u0646 \u0645\u0648\u0627\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u062e\u0627\u0645 \u0625\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 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class=\"wp-block-list\">\n<li>\u0628\u0646\u064a\u0629 \u0642\u0627\u0626\u0645\u0629 \u0639\u0644\u0649 \u062a\u062f\u0641\u0642 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a<\/li>\n\n\n\n<li>\u062a\u0642\u0633\u064a\u0645 \u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u062a\u064a \u062a\u062a\u062d\u0643\u0645 \u0641\u064a \u0646\u0638\u0627\u0641\u062a\u0647\u0627<\/li>\n\n\n\n<li>\u0627\u0644\u0639\u0645\u0648\u062f \u0627\u0644\u0641\u0642\u0631\u064a \u0644\u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0622\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u062a\u062e\u0637\u064a\u0637 \u064a\u0631\u0643\u0632 \u0639\u0644\u0649 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0630\u0627\u062a \u0639\u0646\u0642 \u0627\u0644\u0632\u062c\u0627\u062c\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0623\u0647\u062f\u0627\u0641 \u0627\u0644\u0646\u0647\u0627\u0626\u064a\u0629 \u0644\u062a\u0635\u0645\u064a\u0645 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\u0643\u0628\u064a\u0631\u0629.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0646\u0645\u0648\u0630\u062c\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0646\u0635\u0627\u062a \u0627\u062e\u062a\u0628\u0627\u0631 \u0633\u0644\u0627\u0645\u0629 \u0627\u0644\u0625\u0634\u0627\u0631\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0633\u0631\u0639\u0629<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0648\u0635\u064a\u0641 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a \u0644\u0644\u0623\u062c\u0647\u0632\u0629<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u062a\u0648\u0642\u064a\u062a \u0648\u0627\u0644\u0637\u0627\u0642\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u0636\u0645\u0646 \u0647\u0630\u0647 \u0627\u0644\u0623\u062f\u0648\u0627\u062a \u062c\u062f\u0648\u0649 \u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0648\u0642\u0627\u0628\u0644\u064a\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.3 \u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 (\u0627\u0644\u062c\u0632\u0621 \u0627\u0644\u0623\u0633\u0627\u0633\u064a)<\/h3>\n\n\n\n<p>\u0647\u0630\u0627 \u0647\u0648 \u0627\u0644\u0642\u0637\u0627\u0639 \u0627\u0644\u0623\u0643\u062b\u0631 \u0623\u0647\u0645\u064a\u0629 \u0648\u0643\u062b\u0627\u0641\u0629 \u0645\u0646 \u062d\u064a\u062b \u0631\u0623\u0633 \u0627\u0644\u0645\u0627\u0644\u060c \u0648\u064a\u062d\u062f\u062f \u0628\u0634\u0643\u0644 \u0645\u0628\u0627\u0634\u0631 \u0639\u0642\u062f \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0641\u0626\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062d\u0641\u0631<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0648\u0627\u0644\u062a\u0644\u062f\u064a\u0646 \u0628\u0627\u0644\u0623\u064a\u0648\u0646\u0627\u062a<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0648\u0627\u0644\u0642\u064a\u0627\u0633<\/li>\n<\/ul>\n\n\n\n<p>\u064a\u062d\u062f\u062f \u0647\u0630\u0627 \u0627\u0644\u062c\u0632\u0621 \u0642\u062f\u0631\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0644\u0644\u0639\u0642\u062f \u0645\u062b\u0644 28 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 \u06487 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 \u06483 \u0646\u0627\u0646\u0648\u0645\u062a\u0631.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.4 \u0645\u0639\u062f\u0627\u062a \u062a\u0639\u0628\u0626\u0629 \u0648\u062a\u063a\u0644\u064a\u0641 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h3>\n\n\n\n<p>\u064a\u0639\u0645\u0644 \u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0639\u0644\u0649 \u062a\u062d\u0648\u064a\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0651\u0639\u0629 \u0625\u0644\u0649 \u0631\u0642\u0627\u0626\u0642 \u0648\u0638\u064a\u0641\u064a\u0629 \u0648\u0625\u0646\u0634\u0627\u0621 \u0627\u062a\u0635\u0627\u0644 \u0643\u0647\u0631\u0628\u0627\u0626\u064a.<\/p>\n\n\n\n<p>\u0627\u0644\u0641\u0626\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629 (\u0631\u0628\u0637 \u0627\u0644\u0623\u0633\u0644\u0627\u0643\u060c \u0625\u0644\u062e)<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 (\u0631\u0642\u0627\u0642\u0629 \u0627\u0644\u0648\u062c\u0647\u060c \u0627\u0644\u062a\u0643\u0627\u0645\u0644 2.5D\/3D)<\/li>\n<\/ul>\n\n\n\n<p>\u0623\u0635\u0628\u062d \u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0627\u0645\u062a\u062f\u0627\u062f\u0627\u064b \u0631\u0626\u064a\u0633\u064a\u0627\u064b \u0644\u0642\u0627\u0646\u0648\u0646 \u0645\u0648\u0631.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.5 \u0645\u0639\u062f\u0627\u062a \u0627\u062e\u062a\u0628\u0627\u0631 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a<\/h3>\n\n\n\n<p>\u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0644\u0644\u062a\u062d\u0642\u0642 \u0627\u0644\u0646\u0647\u0627\u0626\u064a \u0645\u0646 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0648\u0636\u0645\u0627\u0646 \u0627\u0644\u062c\u0648\u062f\u0629\u060c \u0628\u0645\u0627 \u0641\u064a \u0630\u0644\u0643:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0644\u0622\u0644\u064a (ATE)<\/li>\n\n\n\n<li>\u0645\u062d\u0637\u0627\u062a \u0627\u0644\u062a\u062d\u0642\u064a\u0642<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0641\u0631\u0632 \u0648\u0627\u0644\u062a\u062c\u0645\u064a\u0639<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u0636\u0645\u0646 \u0647\u0630\u0647 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0648\u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629 \u0642\u0628\u0644 \u0627\u0644\u0634\u062d\u0646.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.6 \u0645\u0639\u062f\u0627\u062a \u0641\u062d\u0635 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0648\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u062d\u0644\u064a\u0644<\/h3>\n\n\n\n<p>\u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0644\u0645\u0631\u0627\u0642\u0628\u0629 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0648\u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u0623\u0639\u0637\u0627\u0644:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0641\u062d\u0635 \u0627\u0644\u0639\u064a\u0648\u0628<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0631\u0643\u064a\u0628 \u0627\u0644\u0645\u0627\u062f\u064a \u0648\u0623\u062f\u0648\u0627\u062a \u0627\u0644\u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u0647\u064a\u0643\u0644\u064a<\/li>\n\n\n\n<li>\u0645\u0646\u0635\u0627\u062a \u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0644\u0645\u0648\u062b\u0648\u0642\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u0641\u0647\u064a \u062a\u0642\u062f\u0645 \u0645\u0644\u0627\u062d\u0638\u0627\u062a \u0644\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0648\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. \u0647\u0646\u062f\u0633\u0629 \u062a\u062e\u0637\u064a\u0637 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u062d\u062f\u064a\u062b<\/h2>\n\n\n\n<p>\u0625\u0646 \u0645\u0639\u0627\u0645\u0644 \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u062d\u062f\u064a\u062b\u0629 \u0639\u0628\u0627\u0631\u0629 \u0639\u0646 \u0628\u064a\u0626\u0627\u062a \u0645\u0635\u0645\u0645\u0629 \u0647\u0646\u062f\u0633\u064a\u064b\u0627 \u0628\u0634\u0643\u0644 \u0647\u0646\u062f\u0633\u064a \u0635\u0627\u0631\u0645.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 \u062a\u062e\u0637\u064a\u0637 \u0645\u062f\u0641\u0648\u0639 \u0628\u062a\u062f\u0641\u0642 \u0627\u0644\u0639\u0645\u0644\u064a\u0629<\/h3>\n\n\n\n<p>\u062a\u062a\u0628\u0639 \u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u062a\u062f\u0641\u0642\u064b\u0627 \u062a\u0633\u0644\u0633\u0644\u064a\u064b\u0627 \u0635\u0627\u0631\u0645\u064b\u0627:<\/p>\n\n\n\n<p>\u062a\u062d\u0636\u064a\u0631 \u0627\u0644\u0645\u0648\u0627\u062f \u2190 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u2190 \u0627\u0644\u0646\u0642\u0634 \u2190 \u0627\u0644\u062d\u0641\u0631 \u2190 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u2190 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u2190 \u0627\u0644\u062a\u0637\u0639\u064a\u0645 \u2190 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u2190 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u2190 \u0639\u0644\u0645 \u0627\u0644\u0642\u064a\u0627\u0633 \u0627\u0644\u0645\u062a\u0631\u0648\u0644\u064a<\/p>\n\n\n\n<p>\u064a\u062a\u0628\u0639 \u0648\u0636\u0639 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0647\u0630\u0627 \u0627\u0644\u062a\u062f\u0641\u0642 \u0628\u062f\u0642\u0629 \u0644\u0645\u0646\u0639 \u0627\u0644\u062a\u0631\u0627\u062c\u0639 \u0648\u0627\u0644\u062a\u0644\u0648\u062b.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 \u0627\u0633\u062a\u0631\u0627\u062a\u064a\u062c\u064a\u0629 \u062a\u0642\u0633\u064a\u0645 \u0627\u0644\u063a\u0631\u0641 \u0627\u0644\u0646\u0638\u064a\u0641\u0629<\/h3>\n\n\n\n<p>\u062a\u0646\u0642\u0633\u0645 \u0627\u0644\u0641\u0627\u0628\u0633 \u0625\u0644\u0649 \u0645\u0633\u062a\u0648\u064a\u0627\u062a \u0646\u0638\u0627\u0641\u0629 \u0645\u062a\u0639\u062f\u062f\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0646\u0627\u0637\u0642 \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 (\u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0648\u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0645\u062a\u0642\u062f\u0645)<\/li>\n\n\n\n<li>\u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0646\u0638\u0627\u0641\u0629 (\u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0648\u0627\u0644\u0632\u0631\u0639)<\/li>\n\n\n\n<li>\u0627\u0644\u0645\u0646\u0627\u0637\u0642 \u0627\u0644\u0646\u0638\u064a\u0641\u0629 \u0627\u0644\u0642\u064a\u0627\u0633\u064a\u0629 (\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u062f\u0639\u0645)<\/li>\n<\/ul>\n\n\n\n<p>\u064a\u062a\u0645 \u0627\u0644\u062a\u062d\u0643\u0645 \u0628\u062f\u0642\u0629 \u0641\u064a \u062a\u062f\u0641\u0642 \u0627\u0644\u0647\u0648\u0627\u0621 \u0648\u062d\u0631\u0643\u0629 \u0627\u0644\u0623\u0641\u0631\u0627\u062f \u0628\u0637\u0631\u064a\u0642\u0629 \u0623\u062d\u0627\u062f\u064a\u0629 \u0627\u0644\u0627\u062a\u062c\u0627\u0647.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 \u0627\u0644\u0646\u0638\u0627\u0645 \u0627\u0644\u0622\u0644\u064a \u0644\u0645\u0646\u0627\u0648\u0644\u0629 \u0627\u0644\u0645\u0648\u0627\u062f (AMHS)<\/h3>\n\n\n\n<p>\u064a\u062a\u0645 \u0646\u0642\u0644 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0622\u0644\u064a\u064b\u0627 \u0628\u0627\u0644\u0643\u0627\u0645\u0644 \u0644\u062a\u0642\u0644\u064a\u0644 \u0627\u0644\u0627\u062a\u0635\u0627\u0644 \u0627\u0644\u0628\u0634\u0631\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0646\u0642\u0644 \u0628\u0627\u0644\u0631\u0627\u0641\u0639\u0629 \u0627\u0644\u0639\u0644\u0648\u064a\u0629 (OHT)<\/li>\n\n\n\n<li>\u0627\u0644\u0645\u0631\u0643\u0628\u0627\u062a \u0627\u0644\u0645\u0648\u062c\u0647\u0629 \u0627\u0644\u0622\u0644\u064a\u0629 (AGV)<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u062e\u0632\u064a\u0646 \u0648\u0627\u0644\u0627\u0633\u062a\u0631\u062c\u0627\u0639 \u0627\u0644\u0622\u0644\u064a (AS\/RS)<\/li>\n<\/ul>\n\n\n\n<p>\u0627\u0644\u0647\u062f\u0641 \u0645\u0646 \u0630\u0644\u0643 \u0647\u0648 \u0636\u0645\u0627\u0646 \u0639\u062f\u0645 \u0648\u062c\u0648\u062f \u0645\u062e\u0627\u0637\u0631 \u062a\u0644\u0648\u062b \u0648\u0643\u0641\u0627\u0621\u0629 \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0639\u0627\u0644\u064a\u0629.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.4 \u062a\u0635\u0645\u064a\u0645 \u062a\u062e\u0637\u064a\u0637 \u064a\u062a\u0645\u062d\u0648\u0631 \u062d\u0648\u0644 \u0639\u0646\u0642 \u0627\u0644\u0632\u062c\u0627\u062c\u0629<\/h3>\n\n\n\n<p>\u0639\u0627\u062f\u0629\u064b \u0645\u0627 \u062a\u062d\u062f\u062f \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062d\u0631\u062c\u0629 (\u0645\u062b\u0644 \u0623\u062f\u0648\u0627\u062a \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629) \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0627\u0644\u0645\u0635\u0646\u0639.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0645\u0628\u0627\u062f\u0626 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u062e\u0637\u064a\u0637 \u064a\u062a\u0645\u062d\u0648\u0631 \u062d\u0648\u0644 \u0623\u062f\u0648\u0627\u062a \u0639\u0646\u0642 \u0627\u0644\u0632\u062c\u0627\u062c\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0645\u062a\u0645\u0627\u062b\u0644 \u0641\u064a \u0627\u0644\u0645\u0646\u0628\u0639\/\u0627\u0644\u0645\u0635\u0628<\/li>\n\n\n\n<li>\u062a\u0639\u0638\u064a\u0645 \u0645\u0639\u062f\u0644 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u0623\u062f\u0648\u0627\u062a<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.5 \u062a\u0635\u0645\u064a\u0645 \u0645\u0639\u064a\u0627\u0631\u064a \u0648\u0642\u0627\u0628\u0644 \u0644\u0644\u062a\u0637\u0648\u064a\u0631 \u0641\u064a \u0627\u0644\u0645\u0635\u0646\u0639<\/h3>\n\n\n\n<p>\u064a\u062a\u0645 \u0625\u0646\u0634\u0627\u0621 \u0627\u0644\u0645\u0635\u0627\u0646\u0639 \u0641\u064a \u0643\u062a\u0644 \u0645\u0639\u064a\u0627\u0631\u064a\u0629 \u0644\u063a\u0631\u0641 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0644\u062a\u0645\u0643\u064a\u0646:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0648\u0633\u064a\u0639 \u0627\u0644\u0633\u0639\u0629 \u0627\u0644\u0627\u0633\u062a\u064a\u0639\u0627\u0628\u064a\u0629<\/li>\n\n\n\n<li>\u062a\u0631\u0642\u064a\u0627\u062a \u0639\u0642\u062f\u0629 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0639\u0627\u064a\u0634 \u0645\u062a\u0639\u062f\u062f \u0627\u0644\u0639\u0642\u062f<\/li>\n<\/ul>\n\n\n\n<p>\u0648\u0647\u0630\u0627 \u064a\u0636\u0645\u0646 \u0627\u0644\u0645\u0631\u0648\u0646\u0629 \u0648\u0627\u0644\u0641\u0639\u0627\u0644\u064a\u0629 \u0645\u0646 \u062d\u064a\u062b \u0627\u0644\u062a\u0643\u0644\u0641\u0629 \u0639\u0644\u0649 \u0627\u0644\u0645\u062f\u0649 \u0627\u0644\u0637\u0648\u064a\u0644.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. \u062a\u0642\u0646\u064a\u0627\u062a \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">3.1 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629<\/h2>\n\n\n\n<p>\u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0647\u064a \u0627\u0644\u062e\u0637\u0648\u0629 \u0627\u0644\u0623\u0643\u062b\u0631 \u0623\u0647\u0645\u064a\u0629 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\u060c \u0648\u0647\u064a \u0645\u0633\u0624\u0648\u0644\u0629 \u0639\u0646 \u0646\u0642\u0644 \u0623\u0646\u0645\u0627\u0637 \u0627\u0644\u062f\u0648\u0627\u0626\u0631 \u0627\u0644\u0643\u0647\u0631\u0628\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0626\u0642.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u062a\u0635\u0646\u064a\u0641\u0627\u062a \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0641\u0627\u0626\u0642\u0629 (EUV) \u0644\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0642\u0635\u0648\u0649 (EUV) \u0644 7 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 \u0648\u0645\u0627 \u062f\u0648\u0646\u0647\u0627<\/li>\n\n\n\n<li>\u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u063a\u0645\u0631 \u0628\u0627\u0644\u0641\u0644\u0648\u0631 ArF \u0644\u0644\u0639\u0642\u062f 28 \u0646\u0627\u0646\u0648\u0645\u062a\u0631 - 7 \u0646\u0627\u0646\u0648\u0645\u062a\u0631<\/li>\n\n\n\n<li>\u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0627\u0644\u062c\u0627\u0641\u0629 \u0628\u0627\u0644\u062a\u0631\u0634\u064a\u062d \u0627\u0644\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a \u0628\u0627\u0644\u0641\u0644\u0648\u0631 \u0627\u0644\u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0647\u064a\u062f\u0631\u0648\u062c\u064a\u0646\u064a \u0644\u0644\u0639\u0642\u062f \u0627\u0644\u0646\u0627\u0636\u062c\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0628\u0627\u0644\u062e\u0637\u0648\u0637 i \u0644\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0642\u062f\u064a\u0645\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u064f\u0639\u062f \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0627\u0644\u0623\u0648\u0631\u0648\u0628\u064a\u0629 \u0645\u0646 \u0628\u064a\u0646 \u0623\u0643\u062b\u0631 \u0627\u0644\u0622\u0644\u0627\u062a \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629 \u062a\u0639\u0642\u064a\u062f\u0627\u064b \u0639\u0644\u0649 \u0627\u0644\u0625\u0637\u0644\u0627\u0642\u060c \u062d\u064a\u062b \u062a\u062a\u0643\u0627\u0645\u0644:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0635\u0627\u062f\u0631 \u0636\u0648\u0621 \u0627\u0644\u0623\u0634\u0639\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0641\u0648\u0642 \u0627\u0644\u0628\u0646\u0641\u0633\u062c\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 (\u0627\u0644\u0637\u0648\u0644 \u0627\u0644\u0645\u0648\u062c\u064a 13.5 \u0646\u0627\u0646\u0648\u0645\u062a\u0631)<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0628\u0635\u0631\u064a\u0629 \u0639\u0627\u0643\u0633\u0629 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0637\u0628\u0642\u0627\u062a<\/li>\n\n\n\n<li>\u062a\u062d\u062f\u064a\u062f \u0645\u0648\u0636\u0639 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0639\u0644\u0649 \u0645\u0631\u062d\u0644\u062a\u064a\u0646 \u0628\u062f\u0642\u0629 \u0646\u0627\u0646\u0648\u0645\u062a\u0631\u064a\u0629 \u062b\u0646\u0627\u0626\u064a\u0629 \u0627\u0644\u0645\u0631\u062d\u0644\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0628\u064a\u0626\u0627\u062a \u0630\u0627\u062a \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0639\u0627\u0644\u064a<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.2 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062d\u0641\u0631 3.2<\/h2>\n\n\n\n<p>\u062a\u0632\u064a\u0644 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0645\u0648\u0627\u062f \u0628\u0634\u0643\u0644 \u0627\u0646\u062a\u0642\u0627\u0626\u064a \u0644\u062a\u0634\u0643\u064a\u0644 \u0647\u064a\u0627\u0643\u0644 \u0627\u0644\u062a\u0631\u0627\u0646\u0632\u0633\u062a\u0648\u0631.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0642\u062a\u0631\u0646\u0629 \u0628\u0627\u0644\u0633\u0639\u0629 (CCP)<\/li>\n\n\n\n<li>\u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0627\u0644\u0645\u0642\u062a\u0631\u0646\u0629 \u0628\u0627\u0644\u062d\u062b (ICP)<\/li>\n\n\n\n<li>\u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0627\u0644\u062a\u0641\u0627\u0639\u0644\u064a \u0627\u0644\u0639\u0645\u064a\u0642 (DRIE)<\/li>\n\n\n\n<li>\u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0630\u0631\u064a\u0629 (ALE)<\/li>\n<\/ul>\n\n\n\n<p>\u0627\u0644\u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u062d\u0643\u0645 \u062f\u0642\u064a\u0642 \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0630\u0631\u064a<\/li>\n\n\n\n<li>\u0642\u062f\u0631\u0629 \u0628\u0646\u064a\u0629 \u0630\u0627\u062a \u0646\u0633\u0628\u0629 \u0623\u0628\u0639\u0627\u062f \u0639\u0627\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u0648\u062d\u064a\u062f<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.3 \u0623\u0646\u0638\u0645\u0629 \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629<\/h2>\n\n\n\n<p>\u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0648\u0638\u064a\u0641\u064a\u0629 \u0639\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0626\u0642:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0627\u0644\u0645\u0639\u0632\u0632 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 (PECVD)<\/li>\n\n\n\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0645\u0646\u062e\u0641\u0636 \u0627\u0644\u0636\u063a\u0637 (LPCVD)<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0641\u062d\u064a\u0645 \u0627\u0644\u0628\u0627\u0644\u0633\u064a\u0648\u0645 \u0627\u0644\u0645\u0645\u063a\u0646\u0637 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0643\u062b\u0627\u0641\u0629 (HDPCVD)<\/li>\n\n\n\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a (PVD)<\/li>\n\n\n\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0630\u0631\u064a\u0629 (ALD)<\/li>\n<\/ul>\n\n\n\n<p>\u064a\u064f\u0645\u0643\u0650\u0651\u0646 \u0627\u0644\u062a\u062d\u0644\u064a\u0644 \u0628\u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0636\u0648\u0626\u064a \u0627\u0644\u0630\u0631\u064a \u0627\u0644\u0645\u0633\u062a\u0642\u0644 \u0645\u0646 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0633\u064f\u0645\u0643 \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0630\u0631\u064a \u0645\u0639 \u0645\u0637\u0627\u0628\u0642\u0629 \u0634\u0628\u0647 \u0643\u0627\u0645\u0644\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.4 \u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0648\u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/h2>\n\n\n\n<p>\u062a\u0639\u0645\u0644 \u0647\u0630\u0647 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0639\u0644\u0649 \u062a\u0639\u062f\u064a\u0644 \u0627\u0644\u062e\u0648\u0627\u0635 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0644\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u064a\u064f\u062f\u062e\u0644 \u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062e\u062f\u0631\u0629 \u0645\u0639 \u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u062f\u0642\u064a\u0642 \u0641\u064a \u0627\u0644\u0637\u0627\u0642\u0629<\/li>\n\n\n\n<li>\u064a\u0639\u0645\u0644 \u0627\u0644\u062a\u0644\u062f\u064a\u0646 \u0627\u0644\u062d\u0631\u0627\u0631\u064a \u0627\u0644\u0633\u0631\u064a\u0639 (RTA) \u0639\u0644\u0649 \u062a\u0646\u0634\u064a\u0637 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062e\u062f\u0631\u0629 \u0648\u0625\u0635\u0644\u0627\u062d \u0627\u0644\u062a\u0644\u0641 \u0627\u0644\u0628\u0644\u0648\u0631\u064a<\/li>\n\n\n\n<li>\u064a\u062a\u064a\u062d \u0627\u0644\u062a\u0644\u062f\u064a\u0646 \u0628\u0627\u0644\u0644\u064a\u0632\u0631 \u0625\u0645\u0643\u0627\u0646\u064a\u0629 \u0627\u0644\u062a\u0633\u062e\u064a\u0646 \u0627\u0644\u0645\u0648\u0636\u0639\u064a \u0641\u0627\u0626\u0642 \u0627\u0644\u0633\u0631\u0639\u0629 \u0644\u0644\u0639\u0642\u062f \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u062d\u0643\u0645 \u062f\u0642\u064a\u0642 \u0641\u064a \u0627\u0644\u062c\u0631\u0639\u0629 \u0648\u0627\u0644\u0637\u0627\u0642\u0629<\/li>\n\n\n\n<li>\u0627\u062a\u0633\u0627\u0642 \u0639\u0627\u0644\u064d<\/li>\n\n\n\n<li>\u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0645\u0646 \u0627\u0644\u062a\u0623\u062b\u064a\u0631 \u0639\u0644\u0649 \u0627\u0644\u0645\u064a\u0632\u0627\u0646\u064a\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.5 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0648\u0627\u0644\u0642\u064a\u0627\u0633<\/h2>\n\n\n\n<p>\u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0646\u0638\u064a\u0641 \u0641\u064a \u062c\u0645\u064a\u0639 \u062e\u0637\u0648\u0627\u062a \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0644\u0625\u0632\u0627\u0644\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0644\u0648\u062b \u0627\u0644\u062c\u0633\u064a\u0645\u0627\u062a<\/li>\n\n\n\n<li>\u0627\u0644\u0645\u062e\u0644\u0641\u0627\u062a \u0627\u0644\u0639\u0636\u0648\u064a\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0634\u0648\u0627\u0626\u0628 \u0627\u0644\u0641\u0644\u0632\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u0648\u0641\u0631 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0642\u064a\u0627\u0633 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u0641\u0639\u0644\u064a \u0639\u0646 \u0637\u0631\u064a\u0642 \u0627\u0644\u0642\u064a\u0627\u0633:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u0628\u064f\u0639\u062f \u0627\u0644\u062d\u0631\u062c (CD)<\/li>\n\n\n\n<li>\u0633\u064f\u0645\u0643 \u0627\u0644\u0641\u064a\u0644\u0645<\/li>\n\n\n\n<li>\u062f\u0642\u0629 \u0627\u0644\u062a\u0631\u0627\u0643\u0628<\/li>\n\n\n\n<li>\u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0639\u064a\u0628<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u0627\u062a\u062c\u0627\u0647\u0627\u062a \u062a\u0637\u0648\u064a\u0631 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">4.1 \u0627\u0644\u0627\u0646\u062a\u0642\u0627\u0644 \u0646\u062d\u0648 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0630\u0631\u064a<\/h3>\n\n\n\n<p>\u064a\u0642\u062a\u0631\u0628 \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0645\u0646 \u062d\u062f\u0648\u062f\u0647 \u0627\u0644\u0645\u0627\u062f\u064a\u0629 \u0627\u0644\u062a\u064a \u062a\u062a\u0637\u0644\u0628<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0639\u0644\u0649 \u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0630\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0643\u062b\u0627\u0641\u0629 \u0639\u064a\u0648\u0628 \u0645\u0646\u062e\u0641\u0636\u0629 \u0644\u0644\u063a\u0627\u064a\u0629<\/li>\n\n\n\n<li>\u062f\u0642\u0629 \u062f\u0648\u0646 \u0627\u0644\u0646\u0627\u0646\u0648\u0645\u062a\u0631<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4.2 \u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0621<\/h3>\n\n\n\n<p>\u062a\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u0633\u062a\u0642\u0628\u0644\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0628\u0635\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0641\u064a\u0632\u064a\u0627\u0621 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627<\/li>\n\n\n\n<li>\u0627\u0644\u062f\u064a\u0646\u0627\u0645\u064a\u0643\u064a\u0627\u062a \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u0643\u0647\u0631\u0648\u0645\u063a\u0646\u0627\u0637\u064a\u0633\u064a<\/li>\n<\/ul>\n\n\n\n<p>\u0644\u062a\u0646\u0641\u064a\u0630 \u0639\u0645\u0644\u064a\u0629 \u0645\u062a\u0632\u0627\u0645\u0646\u0629 \u0644\u0644\u063a\u0627\u064a\u0629.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.3 \u0630\u0643\u0627\u0621 \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0627\u0626\u0645 \u0639\u0644\u0649 \u0627\u0644\u0630\u0643\u0627\u0621 \u0627\u0644\u0627\u0635\u0637\u0646\u0627\u0639\u064a<\/h3>\n\n\n\n<p>\u064a\u062a\u0645 \u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u0630\u0643\u0627\u0621 \u0627\u0644\u0627\u0635\u0637\u0646\u0627\u0639\u064a \u0628\u0634\u0643\u0644 \u0645\u062a\u0632\u0627\u064a\u062f \u0641\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0639\u0645\u0644\u064a\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0635\u064a\u0627\u0646\u0629 \u0627\u0644\u062a\u0646\u0628\u0624\u064a\u0629<\/li>\n\n\n\n<li>\u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0639\u0627\u0626\u062f \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u062d\u0642\u064a\u0642\u064a<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4.4 \u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645 \u0648\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0646\u0638\u0627\u0645<\/h3>\n\n\n\n<p>\u0645\u0639 \u062a\u0628\u0627\u0637\u0624 \u0642\u0627\u0646\u0648\u0646 \u0645\u0648\u0631\u060c \u064a\u062a\u062d\u0648\u0644 \u0627\u0644\u0627\u0628\u062a\u0643\u0627\u0631 \u0646\u062d\u0648:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0643\u0627\u0645\u0644 \u062b\u0644\u0627\u062b\u064a \u0627\u0644\u0623\u0628\u0639\u0627\u062f \u063a\u064a\u0631 \u0645\u062a\u062c\u0627\u0646\u0633<\/li>\n\n\n\n<li>\u0628\u0646\u064a\u0627\u062a \u0627\u0644\u0634\u0631\u0627\u0626\u062d<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0639\u0644\u0649 \u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0646\u0638\u0627\u0645 (SiP\u060c \u062a\u0643\u062f\u064a\u0633 2.5D\/3D)<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">\u0627\u0644\u062e\u0627\u062a\u0645\u0629<\/h2>\n\n\n\n<p>\u062a\u0645\u062b\u0644 \u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0623\u062d\u062f \u0623\u0643\u062b\u0631 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0635\u0646\u0627\u0639\u064a\u0629 \u062a\u0637\u0648\u0631\u0627\u064b \u0648\u062a\u0639\u0642\u064a\u062f\u0627\u064b \u0639\u0644\u0649 \u0627\u0644\u0625\u0637\u0644\u0627\u0642. \u0641\u0647\u064a \u062a\u062f\u0645\u062c \u0627\u0644\u0647\u0646\u062f\u0633\u0629 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0648\u0639\u0644\u0648\u0645 \u0627\u0644\u0645\u0648\u0627\u062f \u0648\u0641\u064a\u0632\u064a\u0627\u0621 \u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627 \u0648\u0627\u0644\u0628\u0635\u0631\u064a\u0627\u062a \u0648\u0627\u0644\u0623\u062a\u0645\u062a\u0629 \u0648\u0630\u0643\u0627\u0621 \u0627\u0644\u0628\u064a\u0627\u0646\u0627\u062a \u0641\u064a \u0646\u0638\u0627\u0645 \u062a\u0635\u0646\u064a\u0639 \u0645\u0648\u062d\u062f.<\/p>\n\n\n\n<p>\u0643\u0644 \u0623\u062f\u0627\u0629 \u062f\u0627\u062e\u0644 \u0645\u0635\u0646\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0644\u064a\u0633\u062a \u0622\u0644\u0629 \u0645\u0639\u0632\u0648\u0644\u0629 \u0628\u0644 \u0647\u064a \u062c\u0632\u0621 \u0645\u0646 \u0634\u0628\u0643\u0629 \u0639\u0645\u0644\u064a\u0627\u062a \u0645\u062a\u0632\u0627\u0645\u0646\u0629 \u0648\u0645\u062a\u0631\u0627\u0628\u0637\u0629 \u0644\u0644\u063a\u0627\u064a\u0629.<\/p>\n\n\n\n<p>\u0645\u0639 \u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u062a\u0648\u0633\u0639 \u0639\u0642\u062f \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0646\u062d\u0648 \u0627\u0644\u062d\u062f\u0648\u062f \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a\u0629\u060c \u0633\u064a\u0633\u062a\u0645\u0631 \u062a\u0639\u0642\u064a\u062f \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0648\u062f\u0642\u062a\u0647\u0627 \u0648\u062a\u0643\u0627\u0645\u0644\u0647\u0627 \u0641\u064a \u0627\u0644\u0632\u064a\u0627\u062f\u0629 - \u0645\u0645\u0627 \u064a\u062c\u0639\u0644 \u0647\u0630\u0647 \u0627\u0644\u0635\u0646\u0627\u0639\u0629 \u062d\u062c\u0631 \u0627\u0644\u0632\u0627\u0648\u064a\u0629 \u0641\u064a \u0627\u0644\u0645\u0646\u0627\u0641\u0633\u0629 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0629 \u0627\u0644\u0639\u0627\u0644\u0645\u064a\u0629.<\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor manufacturing equipment is widely regarded as the \u201cindustrial mother machine\u201d of the integrated circuit (IC) industry, enabling the entire transformation from raw silicon materials to finished chips. Among all segments of the semiconductor value chain, wafer fabrication equipment accounts for approximately 85% of total equipment investment, representing the highest technological barrier and the most 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