{"id":2290,"date":"2026-04-20T01:47:37","date_gmt":"2026-04-20T01:47:37","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2290"},"modified":"2026-04-20T01:48:25","modified_gmt":"2026-04-20T01:48:25","slug":"semiconductor-manufacturing-equipment-a-systematic-overview-of-process-steps-and-front-end-core-technologies","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ar\/semiconductor-manufacturing-equipment-a-systematic-overview-of-process-steps-and-front-end-core-technologies\/","title":{"rendered":"\u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a: \u0644\u0645\u062d\u0629 \u0639\u0627\u0645\u0629 \u0645\u0646\u0647\u062c\u064a\u0629 \u0639\u0646 \u062e\u0637\u0648\u0627\u062a \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0648\u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629 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https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Wafer-Fabrication-600x672.jpg 600w\" sizes=\"(max-width: 748px) 100vw, 748px\" \/><\/figure>\n\n\n\n<p>\u062a\u0642\u0648\u0645 \u0647\u0630\u0647 \u0627\u0644\u0645\u0631\u062d\u0644\u0629 \u0628\u062a\u062d\u0648\u064a\u0644 \u0627\u0644\u0628\u0648\u0644\u064a \u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0639\u0627\u0644\u064a \u0627\u0644\u0646\u0642\u0627\u0621 \u0625\u0644\u0649 \u0633\u0628\u0627\u0626\u0643 \u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0623\u062d\u0627\u062f\u064a\u0629 \u0627\u0644\u0628\u0644\u0648\u0631\u0629\u060c \u0648\u0627\u0644\u062a\u064a \u064a\u062a\u0645 \u0628\u0639\u062f \u0630\u0644\u0643 \u062a\u0642\u0637\u064a\u0639\u0647\u0627 \u0648\u0635\u0642\u0644\u0647\u0627 \u0625\u0644\u0649 \u0631\u0642\u0627\u0626\u0642.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 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https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Oxidation.jpg 1064w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>\u0648\u062a\u0634\u0643\u0644 \u0627\u0644\u0623\u0643\u0633\u062f\u0629 \u0637\u0628\u0642\u0629 \u0645\u0648\u062d\u062f\u0629 \u0645\u0646 \u062b\u0627\u0646\u064a \u0623\u0643\u0633\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0639\u0644\u0649 \u0633\u0637\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0629\u060c \u062a\u0639\u0645\u0644 \u0643\u0637\u0628\u0642\u0629 \u0639\u0627\u0632\u0644\u0629 \u0623\u0648 \u062d\u0627\u062c\u0628\u0629.<\/p>\n\n\n\n<p>\u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0641\u0631\u0627\u0646 \u0627\u0644\u0623\u0643\u0633\u062f\u0629\/\u0627\u0644\u0627\u0646\u062a\u0634\u0627\u0631<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u062d\u0631\u0627\u0631\u064a\u0629 \u0627\u0644\u0633\u0631\u064a\u0639\u0629 (RTP)<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u062a\u0646\u0638\u064a\u0641 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629<\/h3>\n\n\n\n<figure class=\"wp-block-image alignfull size-full\"><img decoding=\"async\" width=\"800\" height=\"450\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Photolithography.jpg\" alt=\"\" class=\"wp-image-2293\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Photolithography.jpg 800w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Photolithography-300x169.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Photolithography-768x432.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Photolithography-18x10.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Photolithography-600x338.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<p><\/p>\n\n\n\n<p>\u062a\u0642\u0648\u0645 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u0644\u064a\u062b\u0648\u063a\u0631\u0627\u0641\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629 \u0628\u0646\u0642\u0644 \u0623\u0646\u0645\u0627\u0637 \u0627\u0644\u062f\u0648\u0627\u0626\u0631 \u0627\u0644\u0643\u0647\u0631\u0628\u064a\u0629 \u0645\u0646 \u0627\u0644\u0623\u0642\u0646\u0639\u0629 \u0625\u0644\u0649 \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u062a\u0639\u0631\u064a\u0636 \u0627\u0644\u0636\u0648\u0626\u064a.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 (EUV\/DUV)<\/li>\n\n\n\n<li>\u0637\u0644\u0627\u0621 \u0645\u0642\u0627\u0648\u0645 \u0644\u0644\u0636\u0648\u0621 \u0648\u062a\u062d\u0645\u064a\u0636 \u0627\u0644\u0645\u0633\u0627\u0631\u0627\u062a<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u0641\u062d\u0635 \u0627\u0644\u0642\u0646\u0627\u0639<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0642\u064a\u0627\u0633 \u0627\u0644\u0623\u0628\u0639\u0627\u062f \u0627\u0644\u062d\u0631\u062c\u0629 (CD)<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u062d\u062f\u062f \u0647\u0630\u0647 \u0627\u0644\u062e\u0637\u0648\u0629 \u0627\u0644\u062d\u062f \u0627\u0644\u0623\u062f\u0646\u0649 \u0644\u062d\u062c\u0645 \u0627\u0644\u0645\u064a\u0632\u0629 \u0648\u0639\u0642\u062f\u0629 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.4 \u0627\u0644\u062d\u0641\u0631 2.4 \u0627\u0644\u062d\u0641\u0631<\/h3>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"632\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Etching-1024x632.jpg\" alt=\"\" class=\"wp-image-2294\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Etching-1024x632.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Etching-300x185.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Etching-768x474.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Etching-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Etching-600x370.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Etching.jpg 1383w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>\u064a\u0632\u064a\u0644 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0645\u0648\u0627\u062f \u063a\u064a\u0631 \u0627\u0644\u0645\u0631\u063a\u0648\u0628 \u0641\u064a\u0647\u0627 \u0644\u0646\u0642\u0644 \u0627\u0644\u0623\u0646\u0645\u0627\u0637 \u0625\u0644\u0649 \u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629.<\/p>\n\n\n\n<p>\u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u062c\u0627\u0641 (\u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0628\u0644\u0627\u0632\u0645\u0627)<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0627\u0644\u0631\u0637\u0628<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0643\u0634\u0641 \u0639\u0646 \u0646\u0642\u0627\u0637 \u0627\u0644\u0646\u0647\u0627\u064a\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u062a\u0639\u062a\u0645\u062f \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629 \u0628\u0634\u0643\u0644 \u0645\u062a\u0632\u0627\u064a\u062f \u0639\u0644\u0649 \u0627\u0644\u062d\u0641\u0631 \u0628\u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0630\u0631\u064a\u0629 \u0644\u0644\u062d\u0635\u0648\u0644 \u0639\u0644\u0649 \u062f\u0642\u0629 \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0630\u0631\u064a.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.5 \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629<\/h3>\n\n\n\n<p>\u064a\u0642\u0648\u0645 \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629 \u0628\u0628\u0646\u0627\u0621 \u0637\u0628\u0642\u0627\u062a \u0648\u0638\u064a\u0641\u064a\u0629 \u0645\u062b\u0644 \u0627\u0644\u0639\u0627\u0632\u0644\u0627\u062a \u0648\u0627\u0644\u0645\u0639\u0627\u062f\u0646 \u0648\u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u0644\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a<\/li>\n\n\n\n<li>\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0630\u0631\u064a\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0646\u0645\u0648 \u0641\u0648\u0642 \u0627\u0644\u0644\u0645\u0639\u0627\u0646<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.6 \u0627\u0644\u062a\u0645\u0639\u062f\u0646 \u0648\u0627\u0644\u0648\u0635\u0644\u0629 \u0627\u0644\u0628\u064a\u0646\u064a\u0629<\/h3>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"950\" height=\"449\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Metallization-and-Interconnect.jpg\" alt=\"\" class=\"wp-image-2295\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Metallization-and-Interconnect.jpg 950w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Metallization-and-Interconnect-300x142.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Metallization-and-Interconnect-768x363.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Metallization-and-Interconnect-18x9.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Metallization-and-Interconnect-600x284.jpg 600w\" sizes=\"(max-width: 950px) 100vw, 950px\" \/><\/figure>\n\n\n\n<p>7<\/p>\n\n\n\n<p>\u062a\u0634\u0643\u0644 \u0647\u0630\u0647 \u0627\u0644\u0645\u0631\u062d\u0644\u0629 \u0648\u0635\u0644\u0627\u062a \u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0628\u064a\u0646 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0637\u0628\u0642\u0627\u062a \u0645\u0639\u062f\u0646\u064a\u0629.<\/p>\n\n\n\n<p>\u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0644\u0627\u0621 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a CMP<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0645\u0639\u0627\u062f\u0646<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u0627\u0644\u062d\u0641\u0631 \u0639\u0628\u0631 \u0627\u0644\u0642\u0646\u0648\u0627\u062a \u0648\u0627\u0644\u062e\u0646\u0627\u062f\u0642<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.7 \u0627\u0644\u0627\u062e\u062a\u0628\u0627\u0631<\/h3>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-1024x683.jpg\" alt=\"\" class=\"wp-image-2296\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-1024x683.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-300x200.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-768x512.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-1536x1024.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-2048x1365.jpg 2048w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Testing-600x400.jpg 600w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>6<\/p>\n\n\n\n<p>\u064a\u0636\u0645\u0646 \u0627\u0644\u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0644\u0623\u062f\u0627\u0621 \u0627\u0644\u0648\u0638\u064a\u0641\u064a \u0648\u062a\u0635\u0641\u064a\u0629 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0645\u0639\u064a\u0628\u0629.<\/p>\n\n\n\n<p>\u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0627\u062e\u062a\u0628\u0627\u0631 \u0627\u0644\u0622\u0644\u064a (ATE)<\/li>\n\n\n\n<li>\u0645\u062d\u0637\u0627\u062a \u0627\u0644\u062a\u062d\u0642\u064a\u0642<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0641\u0631\u0632<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u0627\u0644\u0641\u062d\u0635<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.8 \u0627\u0644\u062a\u0639\u0628\u0626\u0629 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641<\/h3>\n\n\n\n<figure data-wp-context=\"{&quot;imageId&quot;:&quot;6a098fbedde16&quot;}\" data-wp-interactive=\"core\/image\" data-wp-key=\"6a098fbedde16\" class=\"wp-block-image size-large wp-lightbox-container\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"681\" data-wp-class--hide=\"state.isContentHidden\" data-wp-class--show=\"state.isContentVisible\" data-wp-init=\"callbacks.setButtonStyles\" data-wp-on--click=\"actions.showLightbox\" data-wp-on--load=\"callbacks.setButtonStyles\" data-wp-on-window--resize=\"callbacks.setButtonStyles\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging-1024x681.jpg\" alt=\"\" class=\"wp-image-2297\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Packaging.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><button\n\t\t\tclass=\"lightbox-trigger\"\n\t\t\ttype=\"button\"\n\t\t\taria-haspopup=\"dialog\"\n\t\t\taria-label=\"Enlarge\"\n\t\t\tdata-wp-init=\"callbacks.initTriggerButton\"\n\t\t\tdata-wp-on--click=\"actions.showLightbox\"\n\t\t\tdata-wp-style--right=\"state.imageButtonRight\"\n\t\t\tdata-wp-style--top=\"state.imageButtonTop\"\n\t\t>\n\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"12\" height=\"12\" fill=\"none\" viewbox=\"0 0 12 12\">\n\t\t\t\t<path fill=\"#fff\" d=\"M2 0a2 2 0 0 0-2 2v2h1.5V2a.5.5 0 0 1 .5-.5h2V0H2Zm2 10.5H2a.5.5 0 0 1-.5-.5V8H0v2a2 2 0 0 0 2 2h2v-1.5ZM8 12v-1.5h2a.5.5 0 0 0 .5-.5V8H12v2a2 2 0 0 1-2 2H8Zm2-12a2 2 0 0 1 2 2v2h-1.5V2a.5.5 0 0 0-.5-.5H8V0h2Z\" \/>\n\t\t\t<\/svg>\n\t\t<\/button><\/figure>\n\n\n\n<p>\u064a\u062d\u0645\u064a \u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0648\u064a\u062a\u064a\u062d \u0627\u0644\u062a\u0648\u0635\u064a\u0644\u0627\u062a \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u062a\u0628\u062f\u064a\u062f \u0627\u0644\u062d\u0631\u0627\u0631\u0629.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0645\u0639\u062f\u0627\u062a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0623\u0646\u0638\u0645\u0629 \u0631\u0628\u0637 \u0627\u0644\u0642\u0648\u0627\u0644\u0628<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u0631\u0628\u0637 \u0627\u0644\u0623\u0633\u0644\u0627\u0643<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0631\u0628\u0637 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0627\u0644\u0645\u0642\u0644\u0648\u0628\u0629<\/li>\n\n\n\n<li>\u0623\u062f\u0648\u0627\u062a \u0627\u0644\u062a\u0634\u0643\u064a\u0644 \u0648\u0627\u0644\u062a\u0634\u0630\u064a\u0628<\/li>\n\n\n\n<li>\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0639\u0628\u0631 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0641\u064a\u0627<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3. \u062e\u0645\u0633 \u0641\u0626\u0627\u062a \u0623\u0633\u0627\u0633\u064a\u0629 \u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0648\u0627\u062c\u0647\u0629 \u0627\u0644\u0623\u0645\u0627\u0645\u064a\u0629<\/h2>\n\n\n\n<p>\u062a\u0633\u062a\u062d\u0648\u0630 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0648\u0627\u062c\u0647\u0629 \u0627\u0644\u0623\u0645\u0627\u0645\u064a\u0629 \u0639\u0644\u0649 \u0623\u0643\u062b\u0631 \u0645\u0646 801 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a \u06483 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a \u0645\u0646 \u0625\u062c\u0645\u0627\u0644\u064a \u0627\u0633\u062a\u062b\u0645\u0627\u0631\u0627\u062a \u0627\u0644\u0645\u0635\u0646\u0639 \u0648\u062a\u0645\u062b\u0644 \u0627\u0644\u0646\u0648\u0627\u0629 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.1 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629<\/h3>\n\n\n\n<p>\u062a\u062d\u062f\u062f \u0627\u0644\u0637\u0628\u0627\u0639\u0629 \u0627\u0644\u062d\u062c\u0631\u064a\u0629 \u0623\u0635\u063a\u0631 \u062d\u062c\u0645 \u0644\u0644\u0645\u064a\u0632\u0627\u062a \u0648\u063a\u0627\u0644\u0628\u0627\u064b \u0645\u0627 \u062a\u064f\u0639\u062a\u0628\u0631 \u0641\u0626\u0629 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0643\u062b\u0631 \u0623\u0647\u0645\u064a\u0629 \u0648\u062a\u0639\u0642\u064a\u062f\u0627\u064b.<\/p>\n\n\n\n<p>\u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0628\u0635\u0631\u064a\u0627\u062a \u0641\u0627\u0626\u0642\u0629 \u0627\u0644\u062f\u0642\u0629 \u0644\u0644\u063a\u0627\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u062d\u0627\u0630\u0627\u0629 \u0628\u0645\u0642\u064a\u0627\u0633 \u0627\u0644\u0646\u0627\u0646\u0648\u0645\u062a\u0631<\/li>\n\n\n\n<li>\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0646\u0638\u0627\u0645 \u0627\u0644\u0642\u0635\u0648\u0649<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">3.2 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062d\u0641\u0631 3.2<\/h3>\n\n\n\n<p>\u062a\u0642\u0648\u0645 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0646\u0642\u0634 \u0628\u0646\u0642\u0644 \u0627\u0644\u0623\u0646\u0645\u0627\u0637 \u0625\u0644\u0649 \u0627\u0644\u0645\u0648\u0627\u062f \u0648\u0647\u064a \u0645\u0646 \u0628\u064a\u0646 \u0623\u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u0627\u0647\u0645\u064a\u0646 \u0641\u064a \u0627\u0644\u062a\u0635\u0646\u064a\u0639.<\/p>\n\n\n\n<p>\u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u062a\u0646\u0645\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u0628\u0627\u064a\u0646 \u0639\u0627\u0644\u064a \u0627\u0644\u062e\u0648\u0627\u0635<\/li>\n\n\n\n<li>\u0627\u0644\u062f\u0642\u0629 \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0630\u0631\u064a<\/li>\n\n\n\n<li>\u062a\u0648\u0627\u0641\u0642 \u0645\u062a\u0639\u062f\u062f \u0627\u0644\u0645\u0648\u0627\u062f<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">3.3 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0631\u0633\u064a\u0628<\/h3>\n\n\n\n<p>\u062a\u0642\u0648\u0645 \u0623\u062f\u0648\u0627\u062a \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0628\u0628\u0646\u0627\u0621 \u0647\u064a\u0627\u0643\u0644 \u0623\u062c\u0647\u0632\u0629 \u0645\u062a\u0639\u062f\u062f\u0629 \u0627\u0644\u0637\u0628\u0642\u0627\u062a.<\/p>\n\n\n\n<p>\u0627\u0644\u062a\u0637\u0648\u0631\u0627\u062a \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0633\u064f\u0645\u0643 \u0639\u0644\u0649 \u0627\u0644\u0645\u0633\u062a\u0648\u0649 \u0627\u0644\u0630\u0631\u064a<\/li>\n\n\n\n<li>\u0627\u062a\u0633\u0627\u0642 \u0639\u0627\u0644\u064d<\/li>\n\n\n\n<li>\u0643\u062b\u0627\u0641\u0629 \u0639\u064a\u0648\u0628 \u0645\u0646\u062e\u0641\u0636\u0629<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">3.4 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a<\/h3>\n\n\n\n<p>\u064a\u064f\u062f\u062e\u0644 \u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0623\u064a\u0648\u0646\u064a \u0645\u062e\u062f\u0631\u064b\u0627 \u0641\u064a \u0634\u0628\u0643\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0644\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u062e\u0648\u0627\u0635 \u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629.<\/p>\n\n\n\n<p>\u0627\u0644\u0642\u062f\u0631\u0627\u062a \u0627\u0644\u0623\u0633\u0627\u0633\u064a\u0629:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u062a\u062d\u0643\u0645 \u062f\u0642\u064a\u0642 \u0641\u064a \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0627\u0644\u062c\u0631\u0639\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u0632\u0631\u0639 \u0627\u0644\u0645\u0648\u062d\u062f<\/li>\n\n\n\n<li>\u062a\u063a\u0637\u064a\u0629 \u0646\u0637\u0627\u0642 \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0648\u0627\u0633\u0639<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">3.5 \u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0642\u064a\u0627\u0633 \u0648\u0627\u0644\u0641\u062d\u0635<\/h3>\n\n\n\n<p>\u062a\u0648\u0641\u0631 \u0623\u062f\u0648\u0627\u062a \u0627\u0644\u0642\u064a\u0627\u0633 \u062a\u063a\u0630\u064a\u0629 \u0631\u0627\u062c\u0639\u0629 \u0644\u0644\u0639\u0645\u0644\u064a\u0629 \u0648\u062a\u0636\u0645\u0646 \u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0625\u0646\u062a\u0627\u062c\u064a\u0629.<\/p>\n\n\n\n<p>\u062a\u0634\u0645\u0644 \u0627\u0644\u0648\u0638\u0627\u0626\u0641 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0641\u062d\u0635 \u0627\u0644\u0639\u064a\u0648\u0628<\/li>\n\n\n\n<li>\u0642\u064a\u0627\u0633 \u0627\u0644\u0628\u064f\u0639\u062f \u0627\u0644\u062d\u0631\u062c<\/li>\n\n\n\n<li>\u062a\u0648\u0635\u064a\u0641 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629<\/li>\n<\/ul>\n\n\n\n<p>\u0647\u0630\u0647 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0639\u0642\u062f\u0629 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627<\/h2>\n\n\n\n<p>\u0625\u0646 \u062a\u0637\u0648\u0631 \u0645\u0639\u062f\u0627\u062a \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0645\u062f\u0641\u0648\u0639 \u0628\u0639\u062f\u0629 \u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0631\u0626\u064a\u0633\u064a\u0629:<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li>\u062f\u0642\u0629 \u0645\u062a\u0632\u0627\u064a\u062f\u0629 \u062a\u0642\u062a\u0631\u0628 \u0645\u0646 \u0627\u0644\u062d\u062f\u0648\u062f \u0627\u0644\u0645\u0627\u062f\u064a\u0629<\/li>\n\n\n\n<li>\u0645\u0633\u062a\u0648\u064a\u0627\u062a \u0623\u0639\u0644\u0649 \u0645\u0646 \u0627\u0644\u0623\u062a\u0645\u062a\u0629 \u0648\u062a\u0643\u0627\u0645\u0644 \u0627\u0644\u0646\u0638\u0627\u0645<\/li>\n\n\n\n<li>\u0646\u0645\u0648 \u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u062a\u063a\u0644\u064a\u0641 \u0627\u0644\u0645\u062a\u0642\u062f\u0645\u0629<\/li>\n\n\n\n<li>\u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0642\u0627\u0626\u0645 \u0639\u0644\u0649 \u0627\u0644\u0628\u064a\u0627\u0646\u0627\u062a \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0639\u0645\u0644\u064a\u0627\u062a \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u0641\u0639\u0644\u064a<\/li>\n<\/ol>\n\n\n\n<h2 class=\"wp-block-heading\">5. \u0627\u0644\u062e\u0627\u062a\u0645\u0629<\/h2>\n\n\n\n<p>\u062a\u0634\u0643\u0644 \u0645\u0639\u062f\u0627\u062a \u062a\u0635\u0646\u064a\u0639 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0639\u0645\u0648\u062f \u0627\u0644\u0641\u0642\u0631\u064a \u0644\u0635\u0646\u0627\u0639\u0629 \u0627\u0644\u062f\u0648\u0627\u0626\u0631 \u0627\u0644\u0645\u062a\u0643\u0627\u0645\u0644\u0629. \u0648\u062a\u0639\u062a\u0645\u062f \u0643\u0644 \u062e\u0637\u0648\u0629 \u0645\u0646 \u062e\u0637\u0648\u0627\u062a \u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0639\u0644\u0649 \u0623\u062f\u0648\u0627\u062a \u0645\u062a\u062e\u0635\u0635\u0629 \u062a\u0639\u0645\u0644 \u0641\u064a \u0628\u064a\u0626\u0627\u062a \u0645\u062d\u0643\u0648\u0645\u0629 \u0628\u0625\u062d\u0643\u0627\u0645. \u0648\u0645\u0639 \u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u062a\u0642\u0644\u0635 \u0639\u0642\u062f \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0648\u062a\u0648\u0633\u0639 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a\u060c \u064a\u0638\u0644 \u0627\u0628\u062a\u0643\u0627\u0631 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0647\u0648 \u0627\u0644\u0645\u062d\u0631\u0643 \u0627\u0644\u0631\u0626\u064a\u0633\u064a \u0644\u0644\u062a\u0642\u062f\u0645 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a.<\/p>\n\n\n\n<p>\u0633\u062a\u0631\u0643\u0632 \u0627\u0644\u062a\u0637\u0648\u0631\u0627\u062a \u0627\u0644\u0645\u0633\u062a\u0642\u0628\u0644\u064a\u0629 \u0639\u0644\u0649 \u062a\u062d\u0642\u064a\u0642 \u062f\u0642\u0629 \u0623\u0639\u0644\u0649 \u0648\u0643\u0641\u0627\u0621\u0629 \u0645\u062d\u0633\u0651\u0646\u0629 \u0648\u062a\u0643\u0627\u0645\u0644 \u0623\u0639\u0645\u0642 \u0639\u0628\u0631 \u0645\u0646\u0638\u0648\u0645\u0629 \u0627\u0644\u062a\u0635\u0646\u064a\u0639\u060c \u0645\u0645\u0627 \u064a\u0636\u0645\u0646 \u0627\u0633\u062a\u0645\u0631\u0627\u0631 \u062a\u0637\u0648\u0631 \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor manufacturing is one of the most sophisticated industrial systems, characterized by extreme precision, high capital intensity, and complex process integration. Equipment plays a foundational role across the entire production flow, directly determining process capability, device performance, yield, and cost efficiency. This article presents a structured and academic overview of semiconductor manufacturing equipment, focusing on 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