{"id":2112,"date":"2026-04-03T05:44:04","date_gmt":"2026-04-03T05:44:04","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2112"},"modified":"2026-04-03T05:44:13","modified_gmt":"2026-04-03T05:44:13","slug":"silicon-carbide-sic-epitaxy-equipment-and-industry-overview","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ar\/silicon-carbide-sic-epitaxy-equipment-and-industry-overview\/","title":{"rendered":"\u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (SiC) \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u062b\u0642\u064a\u0628 \u0648\u0627\u0644\u0646\u0638\u0631\u0629 \u0627\u0644\u0639\u0627\u0645\u0629 \u0639\u0644\u0649 \u0627\u0644\u0635\u0646\u0627\u0639\u0629"},"content":{"rendered":"<p>\u064a\u0634\u064a\u0631 \u0645\u0635\u0637\u0644\u062d \"\u062a\u0643\u0633\u064a\u0631 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a\" \u0625\u0644\u0649 \u0639\u0645\u0644\u064a\u0629 \u0632\u0631\u0627\u0639\u0629 \u0627\u0644\u0623\u063a\u0634\u064a\u0629 \u0627\u0644\u0631\u0642\u064a\u0642\u0629 \u0623\u062d\u0627\u062f\u064a\u0629 \u0627\u0644\u0628\u0644\u0648\u0631\u0629 \u0639\u0644\u0649 \u0631\u0643\u0627\u0626\u0632 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0623\u0648 \u0643\u0631\u0628\u064a\u062f \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 (SiC). \u062a\u0634\u062a\u0631\u0643 \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0641\u0648\u0642\u064a\u0629 \u0641\u064a \u0646\u0641\u0633 \u0627\u062a\u062c\u0627\u0647 \u0627\u0644\u0628\u0644\u0648\u0631\u0629 \u0645\u062b\u0644 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0648\u064a\u0645\u0643\u0646 \u0632\u0631\u0627\u0639\u062a\u0647\u0627 \u0625\u0645\u0627 \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0646\u0641\u0633 \u0627\u0644\u0645\u0627\u062f\u0629 (\u0627\u0644\u062a\u0645\u0627\u062b\u0644 \u0627\u0644\u0641\u0648\u0642\u064a) \u0623\u0648 \u0645\u0648\u0627\u062f \u0645\u062e\u062a\u0644\u0641\u0629 (\u0627\u0644\u062a\u063a\u0627\u064a\u0631 \u0627\u0644\u0641\u0648\u0642\u064a). \u0628\u0627\u0644\u0646\u0633\u0628\u0629 \u0644\u0644\u0623\u062c\u0647\u0632\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062a\u0631\u062f\u062f \u0648\u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629\u060c \u064a\u0633\u0627\u0639\u062f \u0627\u0644\u0646\u0645\u0648 \u0627\u0644\u0641\u0648\u0642\u064a \u0639\u0644\u0649 \u062a\u062d\u0633\u064a\u0646 \u0623\u062f\u0627\u0621 \u0627\u0644\u062c\u0647\u0627\u0632: \u062a\u0648\u0641\u0631 \u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0641\u0648\u0642\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u062c\u0647\u062f \u0627\u0646\u0647\u064a\u0627\u0631 \u0639\u0627\u0644\u064d\u060c \u0628\u064a\u0646\u0645\u0627 \u062a\u0642\u0644\u0644 \u0627\u0644\u0631\u0643\u0627\u0626\u0632 \u0645\u0646\u062e\u0641\u0636\u0629 \u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u0645\u0646 \u0627\u0644\u0645\u0642\u0627\u0648\u0645\u0629 \u0627\u0644\u0645\u062a\u0633\u0644\u0633\u0644\u0629\u060c \u0645\u0645\u0627 \u064a\u0642\u0644\u0644 \u0645\u0646 \u062c\u0647\u062f \u0627\u0644\u062a\u0634\u0628\u0639. \u064a\u0645\u0643\u0646 \u062a\u062e\u062f\u064a\u0631 \u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0641\u0648\u0642\u064a\u0629 \u0643\u0646\u0648\u0639 P \u0623\u0648 \u0646\u0648\u0639 N\u060c \u0645\u0645\u0627 \u064a\u0634\u0643\u0644 \u062a\u0642\u0627\u0637\u0639\u0627\u062a PN \u0627\u0644\u062a\u064a \u062a\u0633\u0645\u062d \u0628\u062a\u062f\u0641\u0642 \u0627\u0644\u062a\u064a\u0627\u0631 \u0623\u062d\u0627\u062f\u064a \u0627\u0644\u0627\u062a\u062c\u0627\u0647\u060c \u0645\u0645\u0627 \u064a\u062a\u064a\u062d \u0627\u0644\u062a\u0635\u062d\u064a\u062d. \u062a\u064f\u0633\u062a\u062e\u062f\u0645 \u0637\u0628\u0642\u0627\u062a \u0641\u0648\u0642\u064a\u0629 SiC \u0639\u0644\u0649 \u0646\u0637\u0627\u0642 \u0648\u0627\u0633\u0639 \u0641\u064a \u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u062a\u0631\u062f\u062f \u0627\u0644\u0644\u0627\u0633\u0644\u0643\u064a (RF) \u0648\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png\" alt=\"\" class=\"wp-image-2091\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">1. \u0633\u0644\u0633\u0644\u0629 \u0635\u0646\u0627\u0639\u0629 SiC \u0648\u062a\u0648\u0632\u064a\u0639 \u0627\u0644\u0642\u064a\u0645\u0629<\/h3>\n\n\n\n<p>\u062a\u062a\u0643\u0648\u0646 \u0633\u0644\u0633\u0644\u0629 \u0635\u0646\u0627\u0639\u0629 \u0623\u062c\u0647\u0632\u0629 SiC \u0645\u0646 \u062b\u0644\u0627\u062b\u0629 \u0642\u0637\u0627\u0639\u0627\u062a \u0631\u0626\u064a\u0633\u064a\u0629: \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0648\u0627\u0644\u0625\u064a\u0628\u064a\u062a\u0627\u0643\u0633 \u0648\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 (\u0627\u0644\u062a\u0635\u0645\u064a\u0645 \u0648\u0627\u0644\u062a\u0635\u0646\u064a\u0639 \u0648\u0627\u0644\u062a\u063a\u0644\u064a\u0641). \u0648\u062a\u0645\u062b\u0644 \u0645\u0631\u062d\u0644\u062a\u0627 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0648\u0627\u0644\u0625\u064a\u0628\u064a\u062a\u0627\u0643\u0633 \u062d\u0648\u0627\u0644\u064a 701 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a 3 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a \u0645\u0646 \u0633\u0644\u0633\u0644\u0629 \u0627\u0644\u0642\u064a\u0645\u0629\u060c \u0628\u064a\u0646\u0645\u0627 \u062a\u0645\u062b\u0644 \u0627\u0644\u0645\u0639\u0627\u0644\u062c\u0629 \u0627\u0644\u0646\u0647\u0627\u0626\u064a\u0629 \u0644\u0644\u0623\u062c\u0647\u0632\u0629 301 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a 3 \u062a\u064a\u0631\u0627\u0628\u0627\u064a\u062a \u0641\u0642\u0637. \u0648\u0647\u0630\u0627 \u064a\u062a\u0646\u0627\u0642\u0636 \u0645\u0639 \u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629\u060c \u062d\u064a\u062b \u062a\u0645\u062b\u0644 \u0645\u0639\u0627\u0644\u062c\u0629 \u0645\u0627 \u0628\u0639\u062f \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0645\u0639\u0638\u0645 \u062a\u0643\u0627\u0644\u064a\u0641 \u0627\u0644\u0625\u0646\u062a\u0627\u062c. \u0648\u064a\u0633\u0644\u0637 \u062a\u0631\u0643\u064a\u0632 \u0627\u0644\u0642\u064a\u0645\u0629 \u0627\u0644\u0645\u0631\u062a\u0641\u0639\u0629 \u0641\u064a \u0627\u0644\u0645\u0631\u0627\u062d\u0644 \u0627\u0644\u0623\u0648\u0644\u064a\u0629 \u0627\u0644\u0636\u0648\u0621 \u0639\u0644\u0649 \u0627\u0644\u0623\u0647\u0645\u064a\u0629 \u0627\u0644\u0627\u0633\u062a\u0631\u0627\u062a\u064a\u062c\u064a\u0629 \u0644\u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0648\u0627\u0644\u062a\u0628\u062e\u064a\u0631.<\/p>\n\n\n\n<p><strong>\u062c\u0632\u0621 \u0627\u0644\u0631\u0643\u064a\u0632\u0629<\/strong> \u0646\u0645\u0648 \u0627\u0644\u0628\u0644\u0648\u0631\u0627\u062a\u060c \u0648\u062a\u0642\u0637\u064a\u0639 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a\u060c \u0648\u0627\u0644\u0637\u062d\u0646\u060c \u0648\u0627\u0644\u0635\u0642\u0644. \u064a\u0645\u0643\u0646 \u062a\u062d\u0642\u064a\u0642 \u0646\u0645\u0648 \u0627\u0644\u0628\u0644\u0648\u0631\u0627\u062a \u0645\u0646 \u062e\u0644\u0627\u0644 \u0627\u0644\u0646\u0642\u0644 \u0627\u0644\u0641\u064a\u0632\u064a\u0627\u0626\u064a \u0644\u0644\u0628\u062e\u0627\u0631 (PVT) \u0623\u0648 \u0627\u0644\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a \u0644\u0644\u0628\u062e\u0627\u0631 \u0639\u0627\u0644\u064a \u0627\u0644\u062d\u0631\u0627\u0631\u0629 (HTCVD) \u0623\u0648 \u0627\u0644\u0645\u0631\u062d\u0644\u0629 \u0627\u0644\u0633\u0627\u0626\u0644\u0629 \u0644\u0644\u062a\u0628\u062e\u064a\u0631 (LPE). \u064a\u0633\u062a\u062e\u062f\u0645 \u062a\u0634\u0631\u064a\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0645\u0646\u0627\u0634\u064a\u0631 \u0633\u0644\u0643\u064a\u0629 \u0623\u0648 \u0623\u0633\u0644\u0627\u0643 \u0627\u0644\u0645\u0627\u0633 \u0623\u0648 \u0627\u0644\u0644\u064a\u0632\u0631 \u0623\u0648 \u0637\u0631\u0642 \u0627\u0644\u0641\u0635\u0644 \u0627\u0644\u0628\u0627\u0631\u062f\u060c \u0628\u064a\u0646\u0645\u0627 \u064a\u0636\u0645\u0646 \u0627\u0644\u0635\u0642\u0644 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a (CMP) \u0623\u0633\u0637\u062d\u064b\u0627 \u0645\u0633\u0637\u062d\u0629 \u0648\u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u0639\u064a\u0648\u0628 \u0648\u0645\u0646\u0627\u0633\u0628\u0629 \u0644\u0644\u0646\u0645\u0648 \u0627\u0644\u0641\u0648\u0642\u064a.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2. \u0639\u0645\u0644\u064a\u0629 \u0625\u0646\u062a\u0627\u062c \u0631\u0643\u064a\u0632\u0629 SiC<\/h3>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u0646\u0645\u0648 \u0627\u0644\u0643\u0631\u064a\u0633\u062a\u0627\u0644:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>PVT:<\/strong> \u0627\u0644\u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u0633\u0627\u0626\u062f\u0629 \u0644\u0646\u0645\u0648 \u0628\u0644\u0648\u0631\u0627\u062a SiC. \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0628\u0633\u064a\u0637\u0629 \u0646\u0633\u0628\u064a\u064b\u0627\u060c \u0648\u062a\u0643\u0627\u0644\u064a\u0641 \u0627\u0644\u062a\u0634\u063a\u064a\u0644 \u0645\u0646\u062e\u0641\u0636\u0629\u060c \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0639\u0645\u0644\u064a\u0629 \u0628\u0633\u064a\u0637 \u0648\u0645\u0628\u0627\u0634\u0631.<\/li>\n\n\n\n<li><strong>HTCVD<\/strong> \u062a\u0646\u062a\u062c \u0628\u0644\u0648\u0631\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0646\u0642\u0627\u0621 \u0648\u0644\u0643\u0646 \u0645\u0639\u062f\u0644\u0627\u062a \u0646\u0645\u0648\u0647\u0627 \u0623\u0628\u0637\u0623\u060c \u0648\u0639\u0627\u0626\u062f\u0627\u062a\u0647\u0627 \u0623\u0642\u0644\u060c \u0648\u062a\u0643\u0627\u0644\u064a\u0641\u0647\u0627 \u0623\u0639\u0644\u0649.<\/li>\n\n\n\n<li><strong>LPE:<\/strong> \u062a\u0646\u062a\u062c \u0628\u0644\u0648\u0631\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062c\u0648\u062f\u0629 \u0648\u0645\u0646\u062e\u0641\u0636\u0629 \u0627\u0644\u0639\u064a\u0648\u0628 \u0648\u0644\u0643\u0646 \u0645\u0639\u062f\u0644 \u0627\u0644\u0646\u0645\u0648 \u0648\u0627\u0644\u062d\u062c\u0645 \u0645\u062d\u062f\u0648\u062f.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u062a\u0642\u0637\u064a\u0639 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u0645\u0646\u0627\u0634\u064a\u0631 \u0627\u0644\u0623\u0633\u0644\u0627\u0643:<\/strong> \u0637\u0631\u064a\u0642\u0629 \u0642\u064a\u0627\u0633\u064a\u0629 \u0630\u0627\u062a \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0639\u0627\u0644\u064a\u0629 \u0648\u062a\u0643\u0644\u0641\u0629 \u0645\u0646\u062e\u0641\u0636\u0629.<\/li>\n\n\n\n<li><strong>\u0633\u0644\u0643 \u0627\u0644\u0645\u0627\u0633 \u0648\u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0628\u0627\u0644\u0644\u064a\u0632\u0631<\/strong> \u062a\u0648\u0641\u0631 \u0643\u0641\u0627\u0621\u0629 \u0623\u0639\u0644\u0649\u060c \u0648\u062a\u0642\u0644\u064a\u0644 \u0641\u0642\u062f \u0627\u0644\u0645\u0648\u0627\u062f\u060c \u0648\u0641\u0648\u0627\u0626\u062f \u0628\u064a\u0626\u064a\u0629.<\/li>\n\n\n\n<li><strong>\u0627\u0644\u0641\u0635\u0644 \u0627\u0644\u0628\u0627\u0631\u062f:<\/strong> \u064a\u0633\u062a\u062e\u062f\u0645 \u0625\u062c\u0647\u0627\u062f \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062f\u0627\u062e\u0644\u064a\u0629 \u0644\u0641\u0635\u0644 \u0627\u0644\u0631\u0642\u0627\u0626\u0642 \u0628\u0623\u0642\u0644 \u0642\u062f\u0631 \u0645\u0646 \u0627\u0644\u0641\u0642\u062f.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u0627\u0644\u0637\u062d\u0646 \u0648\u0627\u0644\u062a\u0644\u0645\u064a\u0639:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CMP:<\/strong> \u0627\u0644\u0637\u0631\u064a\u0642\u0629 \u0627\u0644\u0631\u0626\u064a\u0633\u064a\u0629 \u0644\u0644\u062d\u0635\u0648\u0644 \u0639\u0644\u0649 \u0623\u0633\u0637\u062d \u0631\u0642\u0627\u0642\u0629 \u0645\u0633\u0637\u062d\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0648\u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u0639\u064a\u0648\u0628\u060c \u0648\u0647\u064a \u0637\u0631\u064a\u0642\u0629 \u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u062a\u062d\u0642\u064a\u0642 \u062a\u0633\u0637\u064a\u062d \u0627\u0644\u0631\u0642\u0627\u0642\u0629 \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631 \u0648\u062e\u0627\u0644\u064a\u0629 \u0645\u0646 \u0627\u0644\u0639\u064a\u0648\u0628\u060c \u0648\u0647\u064a \u0636\u0631\u0648\u0631\u064a\u0629 \u0644\u0644\u062a\u0628\u062e\u064a\u0631 \u0639\u0627\u0644\u064a \u0627\u0644\u062c\u0648\u062f\u0629.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">3. \u0639\u0645\u0644\u064a\u0627\u062a \u0648\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u0628\u062e\u064a\u0631 \u0627\u0644\u0634\u0645\u0639\u064a<\/h3>\n\n\n\n<p>\u064a\u064f\u0639\u062f \u0627\u0644\u0646\u0645\u0648 \u0627\u0644\u0641\u0648\u0642\u064a \u062e\u0637\u0648\u0629 \u062d\u0627\u0633\u0645\u0629 \u0641\u064a \u062a\u0635\u0646\u064a\u0639 \u0623\u062c\u0647\u0632\u0629 SiC. \u0639\u0644\u0649 \u0639\u0643\u0633 \u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0633\u064a\u0644\u064a\u0643\u0648\u0646 \u0627\u0644\u062a\u0642\u0644\u064a\u062f\u064a\u0629\u060c \u0644\u0627 \u064a\u0645\u0643\u0646 \u0645\u0639\u0627\u0644\u062c\u0629 \u0623\u062c\u0647\u0632\u0629 SiC \u0645\u0628\u0627\u0634\u0631\u0629 \u0639\u0644\u0649 \u0627\u0644\u0631\u0643\u064a\u0632\u0629. \u064a\u062c\u0628 \u0632\u0631\u0627\u0639\u0629 \u0637\u0628\u0642\u0629 \u0641\u0648\u0642\u064a\u0629 \u0623\u062d\u0627\u062f\u064a\u0629 \u0627\u0644\u0628\u0644\u0648\u0631\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062c\u0648\u062f\u0629 \u0639\u0644\u0649 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0642\u0628\u0644 \u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u062c\u0647\u0627\u0632.<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\u0623\u0646\u0648\u0627\u0639 \u0627\u0644\u0634\u0645\u0639:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u0647\u0648\u0645\u0648\u0628\u064a\u062a\u0627\u0643\u0633\u064a<\/strong> \u0632\u0631\u0627\u0639\u0629 SiC \u0639\u0644\u0649 \u0631\u0643\u0627\u0626\u0632 SiC \u0627\u0644\u0645\u0648\u0635\u0644\u0629 \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0641\u064a \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0645\u0646\u062e\u0641\u0636\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0627\u0644\u062a\u0631\u062f\u062f\u0627\u062a \u0627\u0644\u0644\u0627\u0633\u0644\u0643\u064a\u0629 \u0648\u0627\u0644\u062a\u0637\u0628\u064a\u0642\u0627\u062a \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629.<\/li>\n\n\n\n<li><strong>\u0627\u0644\u062a\u063a\u0627\u064a\u0631:<\/strong> \u0632\u0631\u0627\u0639\u0629 GaN \u0639\u0644\u0649 \u0631\u0643\u0627\u0626\u0632 SiC \u0634\u0628\u0647 \u0627\u0644\u0639\u0627\u0632\u0644\u0629 \u0627\u0644\u0645\u0633\u062a\u062e\u062f\u0645\u0629 \u0641\u064a \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0625\u0628\u064a\u062a\u0627\u062a\u0643\u0633:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CVD (\u062a\u0631\u0633\u064a\u0628 \u0627\u0644\u0628\u062e\u0627\u0631 \u0627\u0644\u0643\u064a\u0645\u064a\u0627\u0626\u064a):<\/strong> \u062a\u062a\u0641\u0627\u0639\u0644 \u0627\u0644\u0633\u0644\u0627\u0626\u0641 \u0627\u0644\u063a\u0627\u0632\u064a\u0629 \u0639\u0644\u0649 \u0631\u0643\u0627\u0626\u0632 SiC \u0627\u0644\u0645\u0633\u062e\u0646\u0629 \u0644\u062a\u0631\u0633\u064a\u0628 \u0637\u0628\u0642\u0627\u062a \u0641\u0648\u0642\u064a\u0629.<\/li>\n\n\n\n<li><strong>MOCVD (MOCVD) (\u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0627\u0644\u0645\u0642\u0637\u0639\u064a \u0627\u0644\u0645\u0628\u0631\u0645\u062c \u0628\u0627\u0644\u0628\u0637\u0627\u0631\u064a\u0627\u062a \u0627\u0644\u0645\u0639\u062f\u0646\u064a\u0629 \u0627\u0644\u0639\u0636\u0648\u064a\u0629):<\/strong> \u064a\u0633\u062a\u062e\u062f\u0645 \u0633\u0644\u0627\u0626\u0641 \u0645\u0639\u062f\u0646\u064a\u0629 \u0639\u0636\u0648\u064a\u0629\u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0628\u062a\u0631\u0633\u064a\u0628 \u0628\u062f\u0631\u062c\u0629 \u062d\u0631\u0627\u0631\u0629 \u0645\u0646\u062e\u0641\u0636\u0629 \u0648\u0637\u0628\u0642\u0627\u062a \u0631\u0642\u064a\u0642\u0629 \u0644\u0644\u063a\u0627\u064a\u0629 \u0644\u0644\u0647\u064a\u0627\u0643\u0644 \u0627\u0644\u0645\u0639\u0642\u062f\u0629.<\/li>\n\n\n\n<li><strong>LPE:<\/strong> \u0625\u0630\u0627\u0628\u0629 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u0635\u062f\u0631\u064a\u0629 \u0641\u064a \u0645\u0630\u064a\u0628 \u0645\u0639\u062f\u0646\u064a \u0645\u0646\u0635\u0647\u0631 \u0648\u062a\u0631\u0633\u064a\u0628\u0647\u0627 \u0639\u0644\u0649 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0639\u0646\u062f \u0627\u0644\u062a\u0628\u0631\u064a\u062f.<\/li>\n\n\n\n<li><strong>MBE (\u0645\u062c\u0631\u0629 \u0627\u0644\u0634\u0639\u0627\u0639 \u0627\u0644\u062c\u0632\u064a\u0626\u064a):<\/strong> \u062a\u0631\u0633\u0628 \u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0630\u0631\u064a\u0629 \u062a\u062d\u062a \u062a\u0641\u0631\u064a\u063a \u0641\u0627\u0626\u0642 \u0627\u0644\u062a\u0641\u0631\u064a\u063a \u0644\u0644\u062a\u062d\u0643\u0645 \u0627\u0644\u062f\u0642\u064a\u0642 \u0641\u064a \u0633\u064f\u0645\u0643 \u0627\u0644\u0637\u0628\u0642\u0629 \u0648\u062a\u0643\u0648\u064a\u0646\u0647\u0627.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u062a\u0642\u0637\u064a\u0639 \u0627\u0644\u0631\u0642\u0627\u0642\u0627\u062a \u0628\u0639\u062f \u0627\u0644\u0645\u062c\u0631\u0629:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a<\/strong> \u0648 <strong>\u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0628\u0627\u0644\u0644\u064a\u0632\u0631<\/strong> \u0634\u0627\u0626\u0639\u0629.<\/li>\n\n\n\n<li><strong>\u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0628\u0627\u0644\u0644\u064a\u0632\u0631<\/strong> \u064a\u0631\u0643\u0632 \u0627\u0644\u0646\u0628\u0636\u0627\u062a \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0639\u0644\u0649 \u0645\u0646\u0627\u0637\u0642 \u0635\u063a\u064a\u0631\u0629 \u0644\u062a\u0633\u062e\u064a\u0646 \u0627\u0644\u0645\u0648\u0627\u062f \u0623\u0648 \u062a\u0639\u062f\u064a\u0644\u0647\u0627\u060c \u0645\u0645\u0627 \u064a\u0642\u0644\u0644 \u0645\u0646 \u0641\u0642\u062f\u0627\u0646 \u0627\u0644\u0634\u0642 \u0648\u062a\u0643\u0648\u064a\u0646 \u0627\u0644\u0634\u0642\u0648\u0642.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">4. \u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u0633\u0648\u0642 \u0648\u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627<\/h3>\n\n\n\n<p>\u0644\u0627 \u064a\u0632\u0627\u0644 \u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0631\u0643\u0627\u0626\u0632 \u0648\u0625\u0646\u062a\u0627\u062c \u0627\u0644\u0631\u0643\u0627\u0626\u0632 \u0645\u0646 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u064a\u0639\u062a\u0645\u062f \u0639\u0644\u0649 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0627\u0644\u0645\u0643\u062b\u0641\u0629 \u0641\u064a \u0635\u0646\u0627\u0639\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a \u0627\u0644\u0639\u0627\u0644\u0645\u064a\u0629. \u0648\u062a\u0634\u0645\u0644 \u0627\u0644\u0627\u062a\u062c\u0627\u0647\u0627\u062a \u0627\u0644\u0645\u0633\u062a\u0642\u0628\u0644\u064a\u0629 \u0645\u0627 \u064a\u0644\u064a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0632\u064a\u0627\u062f\u0629 \u062d\u062c\u0645 \u0627\u0644\u0631\u0643\u064a\u0632\u0629 \u0645\u0646 6 \u0628\u0648\u0635\u0629 \u0625\u0644\u0649 8 \u0628\u0648\u0635\u0629 \u0623\u0648 \u0623\u0643\u0628\u0631 \u0644\u062a\u0642\u0644\u064a\u0644 \u062a\u0643\u0644\u0641\u0629 \u0627\u0644\u0648\u062d\u062f\u0629.<\/li>\n\n\n\n<li>\u062a\u062d\u0633\u064a\u0646 \u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0623\u0628\u064a\u062a\u0627\u0643\u0633 \u0645\u0646 \u0623\u062c\u0644 \u0627\u0644\u062f\u0642\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0648\u0643\u062b\u0627\u0641\u0629 \u0627\u0644\u0639\u064a\u0648\u0628 \u0627\u0644\u0645\u0646\u062e\u0641\u0636\u0629 \u0648\u0627\u0644\u062a\u062d\u0643\u0645 \u0641\u064a \u0627\u0644\u0637\u0628\u0642\u0629 \u0627\u0644\u0630\u0631\u064a\u0629 \u0644\u062a\u0644\u0628\u064a\u0629 \u0645\u062a\u0637\u0644\u0628\u0627\u062a \u0627\u0644\u0637\u0627\u0642\u0629 \u0627\u0644\u0639\u0627\u0644\u064a\u0629 \u0648\u0627\u0644\u062a\u0631\u062f\u062f \u0627\u0644\u0639\u0627\u0644\u064a.<\/li>\n\n\n\n<li>\u062a\u0637\u0648\u064a\u0631 \u062a\u0642\u0646\u064a\u0627\u062a \u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0646\u062d\u0648 \u0637\u0631\u0642 \u0627\u0644\u0641\u0635\u0644 \u0627\u0644\u0628\u0627\u0631\u062f \u0648\u0627\u0644\u0644\u064a\u0632\u0631 \u0645\u0646\u062e\u0641\u0636\u0629 \u0627\u0644\u0641\u0627\u0642\u062f \u0648\u0627\u0644\u0644\u064a\u0632\u0631 \u063a\u064a\u0631 \u0627\u0644\u0645\u0644\u0627\u0645\u0633.<\/li>\n\n\n\n<li>\u062a\u0639\u0632\u064a\u0632 \u0627\u0633\u062a\u0642\u0644\u0627\u0644\u064a\u0629 \u0627\u0644\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u0645\u062d\u0644\u064a\u0629 \u0648\u0627\u0644\u0639\u0627\u0644\u0645\u064a\u0629\u060c \u0644\u0627 \u0633\u064a\u0645\u0627 \u0641\u064a \u0623\u0641\u0631\u0627\u0646 \u0627\u0644\u062a\u062b\u0644\u064a\u062c \u0648\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u062f\u0642\u0629.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">5. \u0627\u0644\u062e\u0627\u062a\u0645\u0629<\/h3>\n\n\n\n<p><a href=\"https:\/\/www.zmsh-semitech.com\/ar\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-1-color\">\u0645\u0639\u062f\u0627\u062a \u0625\u0628\u062b\u062a\u0643\u0633 SiC <\/mark><\/a>\u0636\u0631\u0648\u0631\u064a \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629 \u0648\u0627\u0644\u062a\u0631\u062f\u062f\u0627\u062a \u0627\u0644\u0644\u0627\u0633\u0644\u0643\u064a\u0629 \u0648\u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0636\u0648\u0626\u064a\u0629. \u0648\u062a\u0624\u062b\u0631 \u062c\u0648\u062f\u0629 \u0627\u0644\u0631\u0643\u0627\u0626\u0632 \u0648\u0627\u0644\u0637\u0628\u0642\u0627\u062a \u0627\u0644\u0641\u0648\u0642\u064a\u0629 \u0648\u0645\u0639\u062f\u0627\u062a \u0627\u0644\u062a\u0642\u0637\u064a\u0639 \u0628\u0634\u0643\u0644 \u0645\u0628\u0627\u0634\u0631 \u0639\u0644\u0649 \u0623\u062f\u0627\u0621 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0648\u0627\u0644\u0642\u062f\u0631\u0629 \u0627\u0644\u062a\u0646\u0627\u0641\u0633\u064a\u0629 \u0644\u0644\u0635\u0646\u0627\u0639\u0629. \u0648\u0645\u0639 \u0627\u0644\u0637\u0644\u0628 \u0627\u0644\u0645\u062a\u0632\u0627\u064a\u062f \u0639\u0644\u0649 \u0627\u0644\u0623\u062c\u0647\u0632\u0629 \u0639\u0627\u0644\u064a\u0629 \u0627\u0644\u0637\u0627\u0642\u0629\u060c \u0633\u064a\u0624\u062f\u064a \u0627\u0644\u062a\u0642\u062f\u0645 \u0627\u0644\u0645\u0633\u062a\u0645\u0631 \u0648\u062a\u0648\u0637\u064a\u0646 \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0627\u0644\u062a\u0644\u0628\u064a\u062f \u062f\u0648\u0631\u064b\u0627 \u0645\u062a\u0632\u0627\u064a\u062f \u0627\u0644\u0623\u0647\u0645\u064a\u0629 \u0641\u064a \u0633\u0644\u0633\u0644\u0629 \u0642\u064a\u0645\u0629 \u0623\u0634\u0628\u0627\u0647 \u0627\u0644\u0645\u0648\u0635\u0644\u0627\u062a.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor epitaxy refers to the process of growing single-crystal thin films on silicon or silicon carbide (SiC) substrates. The epitaxial layer shares the same crystal orientation as the substrate and can be grown using either the same material (homoepitaxy) or different materials (heteroepitaxy). For high-frequency and high-power devices, epitaxial growth helps optimize device performance: high-resistivity [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2091,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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